Intel Q3GM ES 32 nm CPU (from Core i5 660)
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1 Intel Q3GM ES Structural Analysis For comments, questions, or more information about this report, or for any additional technical needs concerning semiconductor and electronics technology, please call Sales at Chipworks Richmond Road, Suite 500, Ottawa, ON K2H 5B7, Canada Tel: Fax:
2 Structural Analysis Table of Contents 1 Overview 1.1 List of Figures 1.2 List of Tables 1.3 Company Profile 1.4 Introduction 1.5 Device Summary 1.6 Process Summary 1.7 Brief Comparison to Intel 45 nm Process Technology 2 Device Overview 2.1 Package and Die 2.2 CPU (8PWSCA Die Markings) Die Features 3 Layout Feature Analysis 3.1 Overview 3.2 Selected Metallization and Via Layout Features 3.3 Selected Gate and Diffusion Level Layout Features 4 CPU (8PWSCA Die Markings) Die Process Analysis 4.1 General Structure 4.2 Dielectrics 4.3 Metals 4.4 Vias and Contacts 4.5 Transistor Overview 4.6 PMOS Transistors 4.7 NMOS Transistors 4.8 Selected Transistor Gate Metal Features 4.9 Isolation 4.10 Wells and Substrate 5 SRAM Analysis 5.1 Overview and Schematic 5.2 L3 Cache (High Density) SRAM Plan-View Analysis 5.3 L3 Cache (High Density) SRAM Cross-Sectional Analysis 5.4 Plan View L1 and L2 Cache SRAM Analysis
3 Structural Analysis 6 Materials Analysis 6.1 Overview 6.2 Dielectrics 6.3 Metals 6.4 PMOS Transistors 6.5 NMOS Transistors 7 Critical Dimensions 7.1 Die Utilization 7.2 Package, Die and Standard Logic Cell Size 7.3 Dielectrics 7.4 Metals 7.5 Vias and Contacts 7.6 Transistors 7.7 Isolation 7.8 Wells and Substrate 7.9 L3 Cache SRAM 8 References 9 Statement of Measurement Uncertainty and Scope Variation About Chipworks
4 Overview Overview 1.1 List of Figures 2 Device Overview Package Top Package Bottom Package Edge Package and Lid Package X-Ray Package X-Ray CPU Die Solder Bump Array CPU Die Photograph (8PWSCA Die Markings) PWSCA Die Markings PWSCA Die Markings (RDL Removed) PWSCA Die Photograph (RDL Removed) Metal 1 CPU Die Photograph Analysis Sites PIRCV (GPU) Die Photograph PIRCV (GPU) Die Markings CPU Die Corner A CPU Die Corner B CPU Die Corner C CPU Die Corner D SEM of CPU Die Corner (Passivation Removed) High Density Bump Via Windows (on CPU) CPU Die Utilization Analysis CPU Standard Logic Cell Size 3 Layout Feature Analysis Metal 6 and Via 6s Metal 5 and Via 5s Minimum Pitch Via 5s Metal 4 and Via 4s Metal 3 and Via 3s Metal 2 and Via 2s Metal 1 Pitch Metal 1 and Via 1s (A) Metal 1 and Via 1s (B) Metal 1 Routing and Via 1s Metal 1 Line End Uniformity (A) Metal 1 Line End Uniformity (B) Contacted Gate Pitch Multiple Width Gate Metal General Gate and Local Interconnect Layout Gate End Uniformity Diffusion Level Layout (A)
5 Overview Diffusion Level Layout (B) Diffusion Level Layout (C) 4 CPU (8PWSCA Die Markings) Die Process Analysis CPU Die (8PWSCA Die Markings) Thickness General Die Structure Die Edge Detail of Die Edge Passivation TEM of ILD ILD 1 ILD 7 Overview (Die Seal) TEM of ILD TEM of ILD TEM of ILD TEM of ILD TEM of ILD TEM of ILD TEM of ILD TEM of PMD Metal 9 Thickness TEM of Metal 9 Seed Layer TEM of Metal TEM of Metal 8 Liner TEM of Metal TEM of Metal TEM of Metal TEM of Metal TEM of Metal TEM of Metal TEM of Metal TEM of Metal 1 Liner Minimum Pitch Via 8s Via 8 Profile TEM of Via 8 Liner TEM Minimum Pitch Via 7s TEM of Via TEM of Via 6s TEM of Via TEM of Via TEM of Via TEM of Via TEM of Via TEM of Via 0 and Metal 0 Local Interconnect TEM of Metal 0 Local Interconnect Strap TEM Detail of Metal 0 Local Interconnect Strap TEM of Metal 0 Gate Contact
6 Overview TEM of Contact TEM of Contact to N + Diffusion TEM of Contact to P + Diffusion TEM of Contact Over STI TEM Detail of Contact Over STI PMOS Gate Diagram TEM Overview of PMOS Metal Gates TEM of PMOS Gates and SiGe Thickness TEM of PMOS Gates and SiGe Width Dark Field TEM of SiGe TEM of PMOS S/D Region TEM of PMOS Gate Dielectric and Work Function Metal TEM of PMOS Gate Fill TEM of Minimum Gate Length PMOS TEM of PMOS (A) TEM of PMOS (B) TEM of PMOS (C) TEM of Dummy Gate Metal (PMOS) TEM of NMOS Gate Diagram TEM Overview of NMOS Metal Gates TEM of NMOS Gate Dielectric and Work Function Metal TEM of NMOS Gate Fill Dark Field TEM of Wide NMOS Gate TEM of NMOS S/D Region TEM of Wide NMOS Gate TEM of Overview of NMOS Gates TEM of NMOS (A) TEM of NMOS (B) TEM of NMOS (C) TEM of NMOS Gate Wrap TEM of PMOS/NMOS Transition TEM of PMOS/NMOS Transition Detail Gate End-to-End Space TEM of Minimum Width STI TEM of Gate Metal Over STI SRP of Epi and Substrate SIMS of Substrate SCM of Substrate Die Edge SCM of N and P-Wells, Epi, and Substrate Logic Region SCM of N-Well/P-Well Boundary SCM of N-Well
7 Overview SRAM Analysis T SRAM Schematic L3 Cache SRAM at Metal L3 Cache SRAM at Metal L3 Cache SRAM at Metal L3 Cache SRAM at Gate Level L3 Cache SRAM at Gate Metal 0 TEM L3 Cache SRAM at Gate, Metal 0 Levels TEM L3 Cache SRAM at Gate, W/TiN Contact, and Diffusion Levels TEM L3 Cache SRAM at Diffusion Level L3 Cache NMOS Pull-Down and Access Transistors L3 Cache NMOS Pull-Down and Access Transistor L3 Cache PMOS Pull-Up Transistors L3 Cache PMOS Pull-Up Transistor PMOS Pull-Up Transistor Butt Contacts PMOS Pull-Up Transistor Butt Contact NMOS Pull-Down and Access Transistor Offset Contacts NMOS Pull-Down and Access Transistor Offset Contact L3 Cache Parallel to Metal Gate L3 Cache NMOS Pull-Down and PMOS Pull-Up Gate Widths L3 Cache NMOS Access Gate Widths L3 Cache NMOS Access Gate Widths with Bitline Contacts V SS and Bitline Contacts L1 Cache at Gate Level L2 Cache at Gate Level 6 Materials Analysis TEM-EDS Spectrum of Passivation TEM-EDS Spectrum of ILD TEM-EDS Spectrum of ILD TEM-EDS Spectrum of ILD TEM-EDS Spectrum of ILD TEM-EDS Spectrum of ILD TEM-EDS Spectrum of ILD TEM-EDS Spectrum of ILD TEM-EDS Spectrum of ILD TEM-EDS Spectrum of ILD TEM-EDS Spectrum of ILD TEM-EDS Spectrum of ILD TEM-EDS Spectrum of ILD TEM-EDS Spectrum of ILD TEM-EDS Spectrum of ILD TEM-EDS Spectrum of ILD TEM-EDS Spectrum of ILD TEM-EDS Spectrum of PMD TEM-EDS Spectrum of PMD 3
8 Overview TEM-EDS Spectrum of PMD TEM-EDS Spectrum of PMD TEM-EDS Spectrum of STI Fill TEM-EDS Spectrum of Metal 9 Bulk TEM-EDS Spectrum of Metal 9 Seed Layer TEM-EDS Spectrum of Metal 7 Liner Copper Dopant Survey Site A Copper Dopant Survey Site B Copper Dopant Survey Site C Copper Dopant Survey Site D Long Count TEM-EDS Spectrum of Metal 3 Body TEM-EDS Spectrum of Metal 1 Liner PMOS Gate Diagram TEM-EDS Spectrum of Gate Cap TEM-EDS Spectrum of Bulk Gate Fill TEM-EDS Spectrum of Barrier to NMOS Work Function Tuning Metal TEM-EDS Spectrum of NMOS Work Function Tuning Metal TEM-EDS Spectrum of Barrier to PMOS Work Function Metal TEM-EDS Spectrum of Etch Stop Liner (from PMOS) TEM-EDS Spectrum of PMOS Work Function Metal TEM-EDS Spectrum of High-k Gate Dielectric TEM-EELS of Gate Oxide TEM-EELS of PMOS Gate Stack TEM-EDS Spectrum of Channel Region TEM-EDS Spectrum of PMOS S/D esige TEM-EDS Line Scan Through esige TEM-EDS Spectrum of PMOS S/D Silicide NMOS Gate Diagram TEM-EDS Spectrum of Residual Etch Stop Liner in NMOS TEM-EDS of NMOS Gate Sidewall TEM-EELS Profile of NMOS Gate Stack TEM-EDS Spectrum of NMOS S/D Silicide TEM-EELS Profile Through NMOS S/D Region
9 Overview List of Tables 1 Overview Available Companion Reports on Intel 32 nm Device Identification PWSCA Die Summary PWSCA Die Process Summary Comparison of Intel 45 nm Process to 32 nm Process 2 Device Overview CPU Die Utilization CPU Package, Die, and Standard Logic Cell Size 4 CPU (8PWSCA Die Markings) Die Process Analysis Dielectric Thicknesses Metallization Vertical Dimensions Metallization Horizontal Dimensions Via and Contact Dimensions Transistor Horizontal Dimensions Transistor Vertical Dimensions STI Critical Dimensions Die Thickness and Well Depths 5 SRAM Analysis L3 Cache SRAM Transistor Dimensions 7 Critical Dimensions Die Utilization Package, Die, and Standard Logic Cell Size Dielectric Thicknesses Metallization Vertical Dimensions Metallization Horizontal Dimensions Via and Contact Dimensions Transistor Horizontal Dimensions Transistor Vertical Dimensions STI Critical Dimensions Die Thickness and Well Depths L3 Cache SRAM Transistor Dimensions
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