FRAUNHOFER INSTITUTe For

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1 FRAUNHOFER INSTITUTe For surface engineering and thin films MOCCA + PROCESS AUTOMATION & OPTICAL MONITORING

2 MOCCA + Automate your thin film coating process In many thin film coating processes various factors need to be aligned with each other in order to optimize high precision coatings. By using in-situ monitoring to measure various layer parameters, the precision in the production of optical thin films can be significantly increased. The software MOCCA + Modular Optical Coating Control Application allows the use of high speed photometric measurements. It offers the following benefits: Higher precision In-situ error correction by an OptiLayer interface 1 Avoidance of test runs Less rejections and higher performance Virtual coating runs Process automation The modular structure of MOCCA + enables improved production processes for existing PVD and CVD systems. The Fraunhofer Institute for Surface Engineering and Thin Films currently applies the technology and develops it further in close collaboration with the industry. 1 Optilayer is needed to use the in-situ error correction. For further details visit

3 MOCCA + ENHANCE THE THROUGHPUT AND PRECISION OF YOUr OPTICAL COATINGS the Monitoring system The MOCCA+ system allows the employment of our modular sprectrometric hardware system. The basic kit System rack Spectral range nm Accuracy < 0.3 nm Halogen light source Optimized optical fiber and mirror system Optional IR-Upgrade kit Extended spectral range up to 1650 nm Accuracy < 0.6 nm The system allows for measuring times in the range of 1.6 ms and above.

4 TAiLORED SOLUTIONS Depending on the customer demands coating plant specific instruction sets are implemented within the MOCCA + software to allow full remote process control. The entire coating process can be controlled by the system and hence the coating process is fully automatic. Similar to our software, the hardware was selected to match the high quality and flexibility demands of our customers. It is possible to change specific components of the system (spectrometer units or light sources) without further implementations. MOCCA + stands out as a flexible and fully customizable soft- and hardware due to its modular design. On request the system can be extended and developed to match customer needs.

5 our competencies The Fraunhofer Institute for Surface Engineering and Thin Films IST concentrates its skills on the fields of thin film deposition, coating applications, coating characterization, microstructuring and surface analysis as an industry-oriented R&D service center. Our competencies related to optical coatings at a glance: Coatings with high precision and uniformity on glass, metal and plastics Optical monitoring and automation system Cleaning of surfaces (wet, ultrasonic and plasma) Coating and process development Thin film design Optical systems Characterization, e. g. ellipsometry, photometry, particle density analysis, AFM, SEM, EPMA, SIMS, XRR

6 MOCCA + ENHANCE THE THROUGHPUT AND PRECISION OF YOUr OPTICAL COATINGS Our Offer Tailor-made solutions Feasibility studies for the implementation / development of in-situ monitoring Sampling Coating and process development Simulation Analytics Technology transfer Training and education The Fraunhofer IST is a cross-linked research institute and offers europe- and worldwide contacts to partners from the field of optical coating technology. Contact Fraunhofer Institute for Surface Engineering and Thin Films IST Bienroder Weg 54 E, Braunschweig, Germany Dipl.-Ing. Michael Siemers Phone michael.siemers@ist.fraunhofer.de Dr. Michael Vergöhl Phone michael.vergoehl@ist.fraunhofer.de