Optical Disc and Solar Annual Press/Analyst Conference - March 26, 2010

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1 SMART SOLUTIONS TO DRIVE THE FUTURE Optical Disc and Solar Annual Press/Analyst Conference - Dr. - Ing. Stefan Rinck AG

2 Optical Disc & Solar Optical Disc - Blu-ray Excellent starting position for 3rd generation optical disc Market & technology leader Market share > 80 % of free market Excellent growth expectations for the next years High margin business High technology threshold No threat by online HD downloads Solar Good mid-term growth expectations in the solar market STANGL well acknowledged by leading cell manufacturers STANGL well established in wet chemicals New antireflective coater SINGULAR with excellent productivity and best cost of ownership Know how for innovative machine concepts Expanding to systems business

3 Silicon Solar: New Portfolio for Si Solar Cell Production Overall Targets Dedicated equipment for industrial use High degree of integration Inline concept due to comprehensive integration High throughput and high yield Low cost of ownership

4 Silicon Solar: SINGULUS Strategy in Silicon Solar Cell Production OEM Front End Systems Systems Business

5 Silicon Solar: SINGULUS/STANGL Integrated PV Front End System Silicon production Ingots/ wafers Cells/ modules System integration Distribution/ Installation Complete Systems Front End Back End SINGULUS Wafer Handling Etching Texturing Doping* PSG Removal Edge Isolation AR Coating + Passivation Metallizing Edge Isolation Firing Test + Sort LINEA/SILEX LINEA/SILEX Partner* LINEA/SILEX SINGULAR

6 Product Portfolio Si Solar Cell Product Portfolio Crystalline Raw Material Cleaning Wafer Degluing/Cleaning c-si Cell Processing Batch- & Inline System Loading/un-Loading Systems Automatization Systems

7 Product Portfolio Si Solar Cell LINEA Strong modular Inline concept Excellent uniformity due to Chemical Treatment High Chemical Exchange Rate on Surface Single Side Etching No Roller Marks Reduced Wafer Contact Low Breakage Rate Wafer Size (feasible for thin wafers) Easy Integration with Automation

8 Product Portfolio Si Solar Cell SINGULAR Static In-Line Reduced Handling Steps Reproducible Process Results Double Side Deposition High Flexibility in: Process Sequences Wafer Type & Size ICP Plasma Concept Modular Concept Low Coo Prepared for New Cell Concepts Good color uniformity

9 Products Si In-Line Solar Cell Manufacturing Process System Integration

10 Thin Film Solar: Portfolio for Cell Production SINGULUS enables cost-effective CIS/CIGS & CdTe Thin Film Cell Manufacturing Wet Processing Alternative Cd-free Buffer Layer - ILGAR INSE Selenisation Oven TCO etching as wet bench Washing machines TCO PVD

11 Thin Film Technology Overview Types of Thin Film Cells Amorphous (a-si) Thin Silicon Film Tandem (a-si/c-si) Thin Film Thin Film (c-si) Semiconductor Compound Based Thin Film II-VI CIS/CIGS CdTe Singulus Product Placement Singulus Product Placement Core Business

12 Thin Film - CIS/CIGS Manufacturing Process Scribing P1 > Laser Absorber > PECVD > PVD 3 Selenisation/ Sulphurisation > Oven Singulus Product Portfolio 1 VITRUM Clean Mo Back Contact > PVD 4 5 KCN Etching or. NH3 Treatment > Wet process 2 PVD Back Contact 3 PVD Absorber 4 INSE 5 VITRUM KCN Glass Washing > Wet cleaning 1 Automatisation Substrate Inspection 2 CIS/CIGS 6 CdS or. alt. buffer Deposition > Chemical Bath Deposition (CBD) > or ILGAR (In2S3) 6 TENUIS altn. ILGAR or IMPEDIO 7 PVD TCO SINGULUS Cooperation Partner Scribing P2 >Mechanical >Laser Singulus Automatization Interconnect and Encapsulation >Lamination Scribing P3 >Mechanical > Laser 7 Front Contact > PVD Process Support/ Integration

13 SINGULUS Product Portfolio Thin Film Applications Wet Process Applications / Cleaning / Washing / Etching Coating CIS/CIGS/CIGSSe TENUIS Single Side CdS/ZnS Buffer Layer Glass Substrates up to 1600x1200 mm Inline CIS/CIGS/CIGSSe IMPEDIO Single Side CdS/ZnS Buffer Layer Flexible Substrates up to 1000 mm width Inline CIS/CIGS/CdTe/a-Si VITRUM Cleaning/Etching (e.g. TCO/KCN/NH3) Glass Substrates up to 2600x2200 mm Inline

14 SINGULUS Product Portfolio Thin Film Applications Aerosol / Thermal / Vacuum / PVD / CVD / PECVD INSE PVD ILGAR CIS/CIGS INSE * Selenisation Oven Glass Substrates up to 1400x1100 mm Inline CdTe/CIS PVD * Back contact, Mo Layer, TCO Layer Glass Substrates up to 1400x1100 mm Inline CIS/CIGS ILGAR Single Side Glass & Flexible Substrates up to 1400x1100 mm Inline AACVD Aerosol-Assisted Chemical Vapor Deposition * Market introduction 2010

15 Targets for 2010 Thin Film Application - Conclusion Thin film targets 2010 at the SINGULUS Group INSE market introduction PVD market introduction (equipment) Placement Reference line for CIS/CIGS CIS/CIGS and CdTe are the commercially viable technologies. They all could have a higher potential with regard to the lowering of manufacturing costs than the crystalline technologies.

16 AG Portfolio for PV Production Solar Cells Si Solar Cells Thin Film Cells STANGL Wet Processing SINGULUS Automation SINGULUS AR-Coating SINGULUS Backside Coating Front End STANGL Wet Processing STANGL Chemical Deposition SINGULUS ILGAR-Process SINGULUS Selenisation SINGULUS TCO-PVD Systems Business Systems Business

17 The Total Solution for Optical Disc Mastering Systems Molding Systems SKYLINE for CD SPACELINE for DVD BLULINE for Blu-ray

18 Optical Disc: Blu-ray Future beyond 50 GByte Blu-ray the Driver of Future Growth 25 GB 50 GB 50 GB + 9 GB projected 75 GB 100 GB Games HD movies Flip over BD/DVD New marketing projects New 3-D movies in HD quality Future upside for BD Technology Capacity up to 100 GB by triple layer Capacity up to 1,000 GB by multiple layer? New applications New 3-D movies in HD quality "Super Hi-Vision" technology Professional storage

19 High Resolution 3-D Movies Killer application for Blu-ray AVATAR start of the 3 D boom

20 Blu-ray will be the Future Format in Home Entertainment Blu-ray format adopted worldwide Low cost players available below 100 $ More than 1,500 BD titles available Blu-ray shows a 30 % increase in 2009 Full order books in Q4/2009 for replicators 80 % plus for BD Video Packaged media DVD + Blu-ray generate revenues for Hollywood studios of about 50 % of total revenues 3 D-Blu-ray is expected to boost interest in BD Increased availability Enhanced home entertainment Unstoppable momentum BD innovation Source: Blu-Ray Association / SINGULUS/ FutureSource

21 Targets of 2010/ Mid-Term Goals Optical Disc Leading Optical Disc equipment manufacturer worldwide Overcome entrance barriers for deliveries to Sony Follow-up Blu-ray development for 100 Gbyte and more Mid-Term Goals Solar Leading supplier of production equipment for Silicon and Thin Film cells Enabler of mass production of new cell designs and manufacturing processes by lower cost of ownership and capital expenditures Leading position in systems business Financial Targets Return to business growth 2010 Break even on EBIT basis Substantial growth in sales and earnings 2011

22 Company Calendar 2010 April Quarterly Report Q1/2010 June General Annual Shareholder Meeting, Frankfurt August Quarterly Report Q2/2010 November Quarterly Report Q3/2010 Investor Days PHOTON s 6th Photovoltaic Technology Show 2010 Europe Stuttgart, Germany MEDIA-TECH 2010 Global Expo and Summit, Forum, Messe Frankfurt, Germany th European Photovoltaic Solar Energy Conference and Exhibition Valencia, Spain

23 AG Hanauer Landstrasse Kahl/Main Roland Lacher, President and CEO Tel Fax Dr. Ing. Stefan Rinck, Member of the Board Tel Fax Forward-Looking Statements This presentation contains forward-looking statements based on current expectations, assumptions and forecasts of the executive board and on currently available information. Various known and unknown risks, unpredictable developments, changes in the economic and political environment and other presently not yet identifiable effects could result in the fact that the actual future results, financial situation or the outlook for the company differ from the estimates given here. We are not obligated to update the forward-looking statements made in this presentation unless there is a legal obligation. Maren Schuster, Head of Investor Relations Tel Bernhard Krause, Communications Worldwide Tel Fax

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