Excimer Laser Technology
|
|
- Annabelle Simon
- 6 years ago
- Views:
Transcription
1 D. Basting G. Marowsky (Eds.) Excimer Laser Technology With 257 Figures ^y Springer
2 Contents 1 Introduction Introductory Remarks The Unique Microstructuring Capabilities of Excimer Lasers Commercial Impact of Excimer Lasers Could Excimers Have Been the First Media with Optical Gain? Literature 6 References Historical Review of Excimer Laser Development 8 References Trends in Worldwide Excimer Laser Sales The World's Laser Markets at the End of Excimer Laser Markets Excimer Laser Markets: Industrial Excimer Laser Markets: Medical Therapy Excimer Laser Markets: Research 29 References 29 Part I Fundamentals 2 Some Fundamentals of Laser Physics The Wave-Particle Duality of Light Electromagnetic Radiation Spontaneous and Stimulated Emission, Population Inversion Design Principle of a Laser Types of Lasers 38 References 40 3 Principles of Excimer Lasers 41 References 45
3 VIII Contents 4 Design and Technology of Excimer Lasers Excitation Preionization Discharge Electrodes Discharge Circuits Power Supplies Circulation, Laser Gas Cooling, and Cleaning Safety Standards for Industrial Excimer Lasers CE Mark Electromagnetic Compatibility (EMC) Directive 89/366/ECC Design Rules for Electromagnetic Compatibility Low Voltage Directive 73/23/ECC Pressure Equipment Directive 97/23/EC Machinery Directive 89/392/EEC (Amended 98/37/EEC) Laser Radiation Safety SEMI Standards 71 References 73 5 Specially Designed Excimer Lasers High-Repetition-Rate and High-Power Lasers 75 References High-Energy Lasers KrF and ArF Lasers XeCl Lasers 85 References 88 6 Excimer Lasers for Microlithography Motivation Wavelengths Spectral Output Line Narrowing Wavelength Control Laser Power and Energy Energy Dose Control Dual-Chamber Lasers Pulse Length Outlook 102 References Laser Beam Characterization Introduction Recording of Spatial Beam Profiles Evaluation of Beam Parameters 107
4 Contents Beam Width Beam Divergence Beam Positional and Directional Stability Homogenized Beams Wavefront Measurement 114 References Optical Coatings for Excimer Laser Applications Introduction Basics Interaction Mechanisms of UV Photons with Coated Optical Elements Absorption Coatings Metals Dielectrics XUV Coatings Summary 126 References Small Structures with Large Excimer Lasers Introduction Nozzle Plates for Ink Jet Printers Attenuators Homogenizers Projection Lenses Mechanically and Thermally Stable Support System Beam Diagnostics Summary and Outlook 135 References 135 IX Part II Applications 10 Overview 139 References Ablative Micro-Fabrication Ablation 149 References Micro-Machining Processing Techniques Removal of Thin Layers Drilling Fabrication of Micro Parts 174
5 X Contents Indirect Ablation Micro Optics Fabrication MEMS and Nanofabrication 183 References Via Drilling Introduction Basics Applications 192 References Micro-Processing of Borosilicate Glass and Polymers Borosilicate Glass Drilling of Holes in Pyrex Glass Generation of Channels in Borosilicate Glass Summary Polymers Generation of Channels in PMMA Using Scanner Generation of Three Dimensional Structures in PMMA Using Scanner Microstructuring of Polymer Tubes Writing of Mixer Structures in PMMA Acknowledgement 219 References F 2 -Laser Microfabrication for Photonics and Biophotonics Introduction Vacuum-Ultraviolet Optical Tools High-Fluence F 2 -Laser Optical Tool Optical Resolution Micromachining of Silica Glasses Ablation Rates and Surface Morphology Heat-Affected Zone Ablation Debris Micro-Optics Fabrication Microchannels and Holes Fiber and Rib Waveguides Mask Fabrication Gratings Diffractive Optical Elements Controlling Refractive Index F2-Laser Photosensitivity: Silica Glasses F 2 -Laser Photosensitivity: Optical Fiber Trimming Planar Lightwave Circuits Writing Buried Optical Waveguides 264
6 Contents 13.6 Biophotonics on a Chip 268 References Nano-Structuring with Femtosecond Excimer Laser Pulses Introduction The Laser System Mask Projection Interference Techniques 281 References Physical Aspects of Ultra-Fast UV Laser Transfer Introduction to the Laser Transfer Process Visualization of the Laser Materials Transfer Time Resolved Schlieren Imaging Method Dynamics of the sub-ps- and ns-process - A Comparative Study Conclusions 292 References Material Modification Microlithography The Patterning Process Optical Resolution Optical Materials Technology Roadmap 300 References TFT Annealing Electron Mobility Increases with Grain Size Layer Stratification, Near and Complete Melt-Through Excimer-Laser Based Annealing System Outlook 312 References Fiber Bragg Gratings Introduction to Fiber Bragg Gratings (FBGs) Manufacturing of Fiber Bragg Gratings Applications for Fiber Bragg Gratings 318 References Marking 321 References Activation and Metallization of Dielectrics 331 References 333 XI
7 XII Contents 17 Excimer-Laser Assisted Deposition of Carbon and Boron Nitride-Based High-Temperature Superconducting Films Introduction Characteristics of Excimer Laser Ablation Deposition Techniques Deposition and Properties of Tetrahedral Amorphous Carbon (ta-c) Films Deposition and Properties of Cubic Boron Nitride (c-bn) Films Summary and Outlook 349 References Combustion Analysis Scattering Methods Fluorescence Methods 356 References Medical Applications of Excimer Lasers Refractive Laser Surgery Photo Refractive Keratectomy (PRK) Photo Therapeutic Keratectomy (PTK) Laser In-situ Keratomileusis (LASIK) Customized Ablation Glaucoma Surgery Laser Angioplasty XeCl Excimer Laser Treatment of Psoriasis 370 References High-Intensity Applications of Excimer Lasers Introduction Precis of Experimental Findings Anomalous Nonlinear Coupling to Atoms at 193 nm Direct Multiquanturn Inner-Orbital Excitation of N 2 at 248 nm Hollow Atoms and the Cluster Concept Multikilovolt X-ray Amplification with Clusters in Self-Trapped Plasma Channels Conclusions 381 References High-Repetition-Rate Applications of Excimer Lasers Introduction Technological Advances Solid-State Pulsed High-Voltage Switch Performance Characteristics 387
8 Contents XIII 21.3 High-Repetition-Rate Applications Flexible Mask Patterning Long-Term Testing of Optical Material and Coatings Advanced Medical Excimer Laser Systems 396 References New Frontiers: Extreme-Ultraviolet (EUV) Technology at 13.5 nm Prospects of EUV Lithography Drive the Development of High-Power EUV Sources Challenges of EUV Lithography Basic Technology and Requirements for EUV Sources Gas-Discharge-Produced and Laser-Produced Plasma EUV Sources Gas-Discharge-Produced Plasma EUV Sources Laser-Produced Plasma EUV Sources How to Characterize EUV Sources GDPP and LPP EUV Sources - State of the Art GDPP EUV Source XTS for Integration into EUV Microstepper High-Power Gas-Discharge-Produced Plasma EUV Sources at XTREME Technologies Laser-Produced Plasma EUV Sources at XTREME technologies Outlook 419 References 421 List of Abbreviations 423 Index 427
List of Abbreviations
List of Abbreviations a-c AFM AMLCD APD AR ASE BGA BN c-bn CCD CE CEN CFC CMOS CVD DLC DNA DOE DoF DPE DRAM DUV DUV EBDW EDM EEA EELS ELA ELIF EMC EMI amorphous carbon atomic-force microscope/microscopy
Excimer Laser Solutions
Excimer Laser Solutions Ultraviolet Excimer Laser Applications Superior Reliability & Performance Enabling Industrial Applications with Excimer Technology for Over 30 Years FPD Silicon Annealing ELA and
Laser Based Micro and Nanoscale Manufacturing and Materials Processing
Laser Based Micro and Nanoscale Manufacturing and Materials Processing Faculty: Prof. Xianfan Xu Email: xxu@ecn.purdue.edu Phone: (765) 494-5639 http://widget.ecn.purdue.edu/~xxu Research Areas: Development
Pulsed laser deposition of organic materials
Pulsed laser deposition of organic materials PhD theses Gabriella Kecskeméti Department of Optics and Quantum Electronics University of Szeged Supervisor: Dr. Béla Hopp senior research fellow Department
Robert G. Hunsperger. Integrated Optics. Theory and Technology. Fourth Edition. With 195 Figures and 17 Tables. Springer
Robert G. Hunsperger Integrated Optics Theory and Technology Fourth Edition With 195 Figures and 17 Tables Springer Contents 1. Introduction 1 1.1 Advantages of Integrated Optics 2 1.1.1 Comparison of
J.F. Ready, D.F. Farson, T. Feeley (Eds.): LIA Handbook of Laser Materials Processing ISBN 3-540-41770-2 Springer-Verlag Berlin Heidelberg New York
J.F. Ready, D.F. Farson, T. Feeley (Eds.): LIA Handbook of Laser Materials Processing ISBN 3-540-41770-2 Springer-Verlag Berlin Heidelberg New York Contents Chapter 1 Overview of Laser Materials Processing
Cymer s Light Source Development for EUV Lithography. Bob Akins, Chairman & CEO
Cymer s Light Source Development for EUV Lithography Bob Akins, Chairman & CEO Outline Introduction EUVL critical issues EUV sources Cymer Source Development Overview Power scaling Technology Outlook January
Real-world applications of intense light matter interaction beyond the scope of classical micromachining.
Dr. Lukas Krainer lk@onefive.com CEO Real-world applications of intense light matter interaction beyond the scope of classical micromachining. 1 Management & Company Company Based in Zürich, Switzerland
PIPELINE LEAKAGE DETECTION USING FIBER-OPTIC DISTRIBUTED STRAIN AND TEMPERATURE SENSORS WHITE PAPER
PIPELINE LEAKAGE DETECTION USING FIBER-OPTIC DISTRIBUTED STRAIN AND TEMPERATURE SENSORS WHITE PAPER Lufan Zou and Taha Landolsi OZ Optics Limited, 219 Westbrook Road, Ottawa, ON, Canada, K0A 1L0 E-mail:
Solar Photovoltaic (PV) Cells
Solar Photovoltaic (PV) Cells A supplement topic to: Mi ti l S Micro-optical Sensors - A MEMS for electric power generation Science of Silicon PV Cells Scientific base for solar PV electric power generation
Reactive Fusion Cutting When gas used reacts with gas (usually oxygen) burn reaction adds energy to effect Steel typically 60% added energy Titanium
Reactive Fusion Cutting When gas used reacts with gas (usually oxygen) burn reaction adds energy to effect Steel typically 60% added energy Titanium 90% added energy However can reaction can chemically
Near-field scanning optical microscopy (SNOM)
Adviser: dr. Maja Remškar Institut Jožef Stefan January 2010 1 2 3 4 5 6 Fluorescence Raman and surface enhanced Raman 7 Conventional optical microscopy-limited resolution Two broad classes of techniques
2. Deposition process
Properties of optical thin films produced by reactive low voltage ion plating (RLVIP) Antje Hallbauer Thin Film Technology Institute of Ion Physics & Applied Physics University of Innsbruck Investigations
RAY TRACING UNIFIED FIELD TRACING
RAY TRACING Start to investigate the performance of your optical system using 3D ray distributions, dot diagrams of ray positions and directions, and optical path length. GEOMETRIC FIELD TRACING Switch
Laser Material Processing
William M. Steen Jyotirmoy Mazumder Laser Material Processing 4th Edition yq. Springer Contents Prologue 1 References 8 1 Background to Laser Design and General Applications 11 1.1 Basic Principles of
Soft lithography for diffractive microfabrications
Soft lithography for diffractive microfabrications Liliana D Amico PhD Section: Materials Engineering XXVIII Cycle (3 Year) Mauro Casalboni, Fabio De Matteis, Paolo Prosposito, Roberta De Angelis Summary
Femtosecond Laser Micromachining
Femtosecond Laser Micromachining 02/03/2010 Spring 2010 MSE503 Seminar Deepak Rajput Center for Laser Applications University of Tennessee Space Institute Tullahoma, Tennessee 37388-9700 Email: drajput@utsi.edu
Advanced Laser Microfabrication in High Volume Manufacturing
Advanced Laser Microfabrication in High Volume Manufacturing IPG Photonics Microsystems Division 220 Hackett Hill Road, Manchester NH, 03102USA E-mail: jbickley@ipgphotonics.com There is increased interest
Wavelength stabilized high-power diode laser modules
Wavelength stabilized high-power diode laser modules Bernd Köhler *, Thomas Brand, Matthias Haag, Jens Biesenbach DILAS Diodenlaser GmbH, Galileo-Galilei-Str. 10, 55129 Mainz-Hechtsheim, Germany ABSTRACT
1. INTRODUCTION ABSTRACT
MultiWave Hybrid Laser Processing of Micrometer Scale Features for Flexible Electronics Applications J. Hillman, Y. Sukhman, D. Miller, M. Oropeza and C. Risser Universal Laser Systems, 7845 E. Paradise
Femtosecond laser-induced silicon surface morphology in water confinement
Microsyst Technol (2009) 15:1045 1049 DOI 10.1007/s00542-009-0880-8 TECHNICAL PAPER Femtosecond laser-induced silicon surface morphology in water confinement Yukun Han Æ Cheng-Hsiang Lin Æ Hai Xiao Æ Hai-Lung
Short overview of TEUFEL-project
Short overview of TEUFEL-project ELAN-meeting may 2004 Frascati (I) Contents Overview of TEUFEL project at Twente Photo cathode research Recent experience Outlook Overview FEL Drive laser Photo cathode
Lasers Design and Laser Systems
Lasers Design and Laser Systems Tel: 04-8563674 Nir Dahan Tel: 04-8292151 nirdahan@tx.technion.ac.il Thank You 1 Example isn't another way to teach, it is the only way to teach. -- Albert Einstein Course
Excimer Lasers for Super-High NA 193 nm Lithography
Excimer Lasers for Super-High NA 193 nm Lithography Rainer Paetzel, Hans Stephan Albrecht, Peter Lokai, Wolfgang Zschocke, Thomas Schmidt, Igor Bragin, Thomas Schroeder, Christian Reusch, Stefan Spratte
Session 2A2a Femtosecond Photonics: Microfabrication and Optical Data Storage 2
Session 2A2a Femtosecond Photonics: Microfabrication and Optical Data Storage 2 Femtosecond Photonics for Multilayered Optical Memory Yoshimasa Kawata (Shizuoka University, Japan); M. Miyamoto (Shizuoka
Introduction to Optics
Second Edition Introduction to Optics FRANK L. PEDROTTI, S.J. Marquette University Milwaukee, Wisconsin Vatican Radio, Rome LENO S. PEDROTTI Center for Occupational Research and Development Waco, Texas
Experiment 5. Lasers and laser mode structure
Northeastern University, PHYS5318 Spring 2014, 1 1. Introduction Experiment 5. Lasers and laser mode structure The laser is a very important optical tool that has found widespread use in science and industry,
GREEN NANOTECHNOLOGY. Geoffrey. Energy in the Built Environment. Solutions for Sustainability and. B. Smith Claes G. Granqvist.
GREEN NANOTECHNOLOGY Solutions for Sustainability and Energy in the Built Environment Geoffrey B. Smith Claes G. Granqvist CRC Press Taylor & Francis Group Boca Raton London NewYork CRC Press is an imprint
5. Scanning Near-Field Optical Microscopy 5.1. Resolution of conventional optical microscopy
5. Scanning Near-Field Optical Microscopy 5.1. Resolution of conventional optical microscopy Resolution of optical microscope is limited by diffraction. Light going through an aperture makes diffraction
Conductivity of silicon can be changed several orders of magnitude by introducing impurity atoms in silicon crystal lattice.
CMOS Processing Technology Silicon: a semiconductor with resistance between that of conductor and an insulator. Conductivity of silicon can be changed several orders of magnitude by introducing impurity
Spectral Measurement Solutions for Industry and Research
Spectral Measurement Solutions for Industry and Research Hamamatsu Photonics offers a comprehensive range of products for spectroscopic applications, covering the, Visible and Infrared regions for Industrial,
Major LED manufacturing trends and challenges to support the general lighting application
Major LED manufacturing trends and challenges to support the general lighting application Semicon Russia 2011, June 1st! Ralph Zoberbier Director Product Management Aligner Content" 1. SUSS MicroTec Introduction
Laser Drilling of High-Density Through Glass Vias (TGVs) for 2.5D and 3D Packaging
J. Microelectron. Packag. Soc., 21(2), 53-57 (2014). http://dx.doi.org/10.6117/kmeps.2014.21.2.053 Print ISSN 1226-9360 Online ISSN 2287-7525 Laser Drilling of High-Density Through Glass Vias (TGVs) for
EUV Source Technology: Challenges and Status
Chapter 1 EUV Source Technology: Challenges and Status Vivek Bakshi Contents 1.1 Introduction 4 1.2 Conversion Efficiency of EUV Sources 4 1.2.1 DPP versus LPP 4 1.2.2 Xe, Sn, and Li conversion efficiency
Tecnologie convenzionali nell approccio top-down; I: metodi e problematiche per la deposizione di film sottili
LS Scienza dei Materiali - a.a. 2005/06 Fisica delle Nanotecnologie part 8 Version 4, Dec 2005 Francesco Fuso, tel 0502214305, 0502214293 - fuso@df.unipi.it http://www.df.unipi.it/~fuso/dida Tecnologie
Fiber Optics: Fiber Basics
Photonics Technical Note # 21 Fiber Optics Fiber Optics: Fiber Basics Optical fibers are circular dielectric wave-guides that can transport optical energy and information. They have a central core surrounded
Fiber optic communication
Fiber optic communication Fiber optic communication Outline Introduction Properties of single- and multi-mode fiber Optical fiber manufacture Optical network concepts Robert R. McLeod, University of Colorado
Le nanotecnologie: dal Laboratorio al Mercato. Fabrizio Pirri Politecnico di Torino Istituto Italiano di Tecnologia
Le nanotecnologie: dal Laboratorio al Mercato Fabrizio Pirri Politecnico di Torino Istituto Italiano di Tecnologia Materials & Processes for micro nanotechnologies Laboratory http://www.polito.it/micronanotech
Master Degree Program
SAINT PETERSBURG STATE ELECTROTECHNICAL UNIVERSITY LETI Laser Measurement and Navigation Systems department Master Degree Program ETU LETI TRADITIONS AND INNOVATIONS ETU LETI is the oldest Electrotechnical
Our Commitment To You
SYSTEM SUPPORT Quality-crafted, the system boasts dependability with high efficiency and low gas usage. We provide responsive service and maintenance contract options, supported by our nationwide direct
Limiting factors in fiber optic transmissions
Limiting factors in fiber optic transmissions Sergiusz Patela, Dr Sc Room I/48, Th. 13:00-16:20, Fri. 9:20-10:50 sergiusz.patela@pwr.wroc.pl eportal.pwr.wroc.pl Copying and processing permitted for noncommercial
1. Photon Beam Damage and Charging at Solid Surfaces John H. Thomas III
1. Photon Beam Damage and Charging at Solid Surfaces John H. Thomas III 1. Introduction............................. 2. Electrostatic Charging of Samples in Photoemission Experiments............................
Undergraduate Research Academy (URA) Cover Sheet
Winkler 1 STUDENT_Amy Winkler Undergraduate Research Academy (URA) Cover Sheet SEND TO CAMPUS BOX 1300 BY NOON, WEDNESDAY, MARCH 16, 2004 (Please type) MENTOR_Dr. Hamad and Dr. Noble PROJECT TITLE_Design
Nanoscience Course Descriptions
Nanoscience Course Descriptions NANO*1000 Introduction to Nanoscience This course introduces students to the emerging field of nanoscience. Its representation in popular culture and journalism will be
Micro-Power Generation
Micro-Power Generation Elizabeth K. Reilly February 21, 2007 TAC-meeting 1 Energy Scavenging for Wireless Sensors Enabling Wireless Sensor Networks: Ambient energy source Piezoelectric transducer technology
The pole Optique-Rhône. Rhône-Alpes: a booster of innovation in Optics&Photonics
The pole Optique-Rhône Rhône-Alpes: a booster of innovation in Optics&Photonics The scientific and industrial forces of Rhône-Alpes region 1 000 20 000 5 400 8 000 1 000 1 000 2 500 1 500 500 2 500 1 500
Laboratory #3 Guide: Optical and Electrical Properties of Transparent Conductors -- September 23, 2014
Laboratory #3 Guide: Optical and Electrical Properties of Transparent Conductors -- September 23, 2014 Introduction Following our previous lab exercises, you now have the skills and understanding to control
Applied Optics and Optical Materials at the Colorado School of Mines
Applied Optics and Optical Materials at the Colorado School of Mines CPIA Annual Meeting 14 November 2007 Charles Durfee Engineering Physics program Applied Optics and Optical Materials Colorado School
The Phenomenon of Photoelectric Emission:
The Photoelectric Effect. The Wave particle duality of light Light, like any other E.M.R (electromagnetic radiation) has got a dual nature. That is there are experiments that prove that it is made up of
Laser hole drilling and texturing (for joining) of composites
AILU Workshop: Laser processing of polymer, metal and cerramic composites Laser hole drilling and texturing (for joining) of composites Dr Paul French Photonics in Engineering Research Group General Engineering
LASIK Eye Surgery Report
LASIK Eye Surgery Report LASIK eye surgery can be a liberating experience for people hoping to reduce or eliminate their dependence on glasses and contact lenses. Most patients do not realize how evolved
FRAUNHOFER INSTITUTe For
FRAUNHOFER INSTITUTe For surface engineering and thin films MOCCA + PROCESS AUTOMATION & OPTICAL MONITORING MOCCA + Automate your thin film coating process In many thin film coating processes various factors
Refractive Errors & Correction
Super Vision 6 Chapter Lasik is currently the most sophisticated procedure for correction of refractive errors. Lasik is an acronym for Laser Assisted Insitu Keratomileusis. In Lasik, Excimer laser is
Materials for Organic Electronic. Jeremy Burroughes FRS FREng
Materials for Organic Electronic Applications Jeremy Burroughes FRS FREng Introduction Organic Thin Film Transistors Organic Solar Cells and Photodiodes All Printed OLED Summary 4k2k 56 Displays Panasonic
MicroScan. Excimer laser system for all types of vision corrections OPTOSYSTEMS LTD.
MicroScan Excimer laser system for all types of vision corrections OPTOSYSTEMS LTD. МicroScan is a new generation excimer laser system for all types of vision corrections: myopia, hypermetropia, astigmatism.
How To Make A Plasma Control System
XXII. Erfahrungsaustausch Mühlleiten 2015 Plasmaanalyse und Prozessoptimierung mittels spektroskopischem Plasmamonitoring in industriellen Anwendungen Swen Marke,, Lichtenau Thomas Schütte, Plasus GmbH,
PHOTOELECTRIC EFFECT AND DUAL NATURE OF MATTER AND RADIATIONS
PHOTOELECTRIC EFFECT AND DUAL NATURE OF MATTER AND RADIATIONS 1. Photons 2. Photoelectric Effect 3. Experimental Set-up to study Photoelectric Effect 4. Effect of Intensity, Frequency, Potential on P.E.
Novel inkjettable copper ink utilizing processing temperatures under 100 degrees C without the need of inert atmosphere
Novel inkjettable copper ink utilizing processing temperatures under 100 degrees C without the need of inert atmosphere Printed Electronics Europe April 7-8, 2009 Dresden, Germany Dr. Zvi Yaniv Applied
Final Report. New No. Continue with amended wording (expiry date 31 July 2014 except for
1 Executive Summary On the basis of the Directive 2002/95/EC on the restriction of the use of certain hazardous substances in electrical and electronic equipment ( RoHS Directive ) the European Commission
Laser EYE SURGERY. LASIK and Excimer Lasers Michael Hutchins
Laser EYE SURGERY LASIK and Excimer Lasers Michael Hutchins The PROBLEM pia - near sightedness sed by either an elongated or steep cornera. focal point is in front of the a instead of on it. cally corrected
Applied Surface Science 8118 (2002) 1 5
3 Radioactive oxide removal by XeCl laser 4 Ph. Delaporte a,*, M. Gastaud a, W. Marine b, M. Sentis a, O. Uteza a, 5 P. Thouvenot c, J.L. Alcaraz c, J.M. Le Samedy c, D. Blin d 6 a Lasers, Plasmas and
NANOFLAM. Projet ANR Blanc 2011 BS0401001. Aide allouée: 337 000, durée 36+8 mois (fin : Mai 2015) Laboratoire H. Curien
Laboratoire H. Curien Centre de Physique Théorique F. Courvoisier R. Stoian & T. Itina A. Couairon NANOFLAM Projet ANR Blanc 2011 BS0401001 Contrôle de la filamentation et de la génération de plasma avec
THIN FILM MATERIALS TECHNOLOGY
THIN FILM MATERIALS TECHNOLOGY Sputtering of Compound Materials by Kiyotaka Wasa Yokohama City University Yokohama, Japan Makoto Kitabatake Matsushita Electric Industrial Co., Ltd. Kyoto, Japan Hideaki
How Lasers Work by Matthew Weschler
How Lasers Work by Matthew Weschler Browse the article How Lasers Work Introduction to How Lasers Work "Star Wars," "Star Trek," "Battlestar Galactica" -- laser technology plays a pivotal role in science
Nanometer-scale imaging and metrology, nano-fabrication with the Orion Helium Ion Microscope
andras@nist.gov Nanometer-scale imaging and metrology, nano-fabrication with the Orion Helium Ion Microscope Bin Ming, András E. Vladár and Michael T. Postek National Institute of Standards and Technology
T.M.M. TEKNIKER MICROMACHINING
T.M.M. TEKNIKER MICROMACHINING Micro and Nanotechnology Dapartment FUNDACION TEKNIKER Avda. Otaola. 20 Tel. +34 943 206744 Fax. +34 943 202757 20600 Eibar http://www.tekniker.es TMM FACILITIES -Clean Room
Nanoscale Resolution Options for Optical Localization Techniques. C. Boit TU Berlin Chair of Semiconductor Devices
berlin Nanoscale Resolution Options for Optical Localization Techniques C. Boit TU Berlin Chair of Semiconductor Devices EUFANET Workshop on Optical Localization Techniques Toulouse, Jan 26, 2009 Jan 26,
Radiographic Image Production. Radiographic Image Production. Principles of Imaging Science I (RAD 119) Film, Screens, and Cassettes
Principles of Imaging Science I (RAD 119) Film, Screens, and Cassettes Radiographic Image Production X-ray photons emitted from the x-ray tube interact with the body, exit the patient (exit beam) and interact
Development of New Inkjet Head Applying MEMS Technology and Thin Film Actuator
Development of New Inkjet Head Applying MEMS Technology and Thin Film Actuator Kenji MAWATARI, Koich SAMESHIMA, Mitsuyoshi MIYAI, Shinya MATSUDA Abstract We developed a new inkjet head by applying MEMS
How To Understand Light And Color
PRACTICE EXAM IV P202 SPRING 2004 1. In two separate double slit experiments, an interference pattern is observed on a screen. In the first experiment, violet light (λ = 754 nm) is used and a second-order
Graduate Student Presentations
Graduate Student Presentations Dang, Huong Chip packaging March 27 Call, Nathan Thin film transistors/ liquid crystal displays April 4 Feldman, Ari Optical computing April 11 Guerassio, Ian Self-assembly
CREOL, College of Optics & Photonics, University of Central Florida
OSE6650 - Optical Properties of Nanostructured Materials Optical Properties of Nanostructured Materials Fall 2013 Class 3 slide 1 Challenge: excite and detect the near field Thus far: Nanostructured materials
Holographically corrected microscope with a large working distance (as appears in Applied Optics, Vol. 37, No. 10, 1849-1853, 1 April 1998)
Holographically corrected microscope with a large working distance (as appears in Applied Optics, Vol. 37, No. 10, 1849-1853, 1 April 1998) Geoff Andersen and R. J. Knize Laser and Optics Research Center
PHYSICS PAPER 1 (THEORY)
PHYSICS PAPER 1 (THEORY) (Three hours) (Candidates are allowed additional 15 minutes for only reading the paper. They must NOT start writing during this time.) ---------------------------------------------------------------------------------------------------------------------
FAST and CURIOUS A brief introduction to ultrafast lasers and their applications
FAST and CURIOUS A brief introduction to ultrafast lasers and their applications Dr. Maria Ana Cataluna m.a.cataluna@dundee.ac.uk School of Engineering, Physics and Mathematics University of Dundee How
Scanning Near Field Optical Microscopy: Principle, Instrumentation and Applications
Scanning Near Field Optical Microscopy: Principle, Instrumentation and Applications Saulius Marcinkevičius Optics, ICT, KTH 1 Outline Optical near field. Principle of scanning near field optical microscope
High power picosecond lasers enable higher efficiency solar cells.
White Paper High power picosecond lasers enable higher efficiency solar cells. The combination of high peak power and short wavelength of the latest industrial grade Talisker laser enables higher efficiency
PRK Wavefront Guided idesign Photorefractive Keratectomy
PRK Wavefront Guided idesign Photorefractive Keratectomy What is PRK? PRK (photorefractive keratectomy) is the same laser procedure as LASIK. Like LASIK it involves the use of the cool energy of an Excimer
Simple and scalable fabrication approaches of Nanophotonic structures for PV
Simple and scalable fabrication approaches of Nanophotonic structures for PV Fabien Sorin Surface du Verre et Interfaces (SVI), UMR 125 CNRS/Saint-Gobain, 39, Quai Lucien Lefranc, 93303 Aubervilliers,
Multi-layer Micro-structured Films
Multi-layer Micro-structured Films Kent Coulter, John Cernosek, and James Arps Surface Engineering Section Materials & Mechanical Engineering Division Southwest Research Institute San Antonio, Texas 78228-0510
Precision Work on the Human Eye
Precision Work on the Human Eye Piezo-Based Nanopositioning Systems for Ophthalmology Page 1 of 5 Introduction Human beings are visual animals, in other words, they acquire most information visually. It
Alexandria s Guide to LASIK
Alexandria s Guide to LASIK A Community Service Project sponsored by: Wallace Laser Center Your Guide To A Successful LASIK Procedure The word LASIK is actually an acronym for Laser Assisted In-Situ Keratomileusis.
Preface Light Microscopy X-ray Diffraction Methods
Preface xi 1 Light Microscopy 1 1.1 Optical Principles 1 1.1.1 Image Formation 1 1.1.2 Resolution 3 1.1.3 Depth of Field 5 1.1.4 Aberrations 6 1.2 Instrumentation 8 1.2.1 Illumination System 9 1.2.2 Objective
Femto-LASIK. Pulsewidth: Ultrashort-pulse micro- machining can make sub- wavelength holes. micromachining
All-laser laser LASIK (Femto( Femto-LASIK) Femto-LASIK 台 大 眼 科 王 一 中 IntraLase 2/1 Perfect Vision Ziemer (DaVinci) Carl Zeiss Meditec Pulsewidth: Femtosecond laser (Nd:Glass)) 153 nm (near infrared) Each
Over view of the presentation History Processes for creating written data Processes for reading data Media design Drive design Commercial development HISTORY Back to the 1950s, Yehuda Hirsh berg developed
How a laser works. LASER light amplification by stimulated emission of radiation. Contains the excitable atoms MEDIUM
How a laser works LASER light amplification by stimulated emission of radiation Contains the excitable atoms MEDIUM PARTIALLY REFLECTING MIRROR COLLIMATED BEAM MIRROR CAVITY Consists of mirrors that allow
for Communication Systems Protection EMI CD-ROM INCLUDED
Krešimir Malarić EMI Protection for Communication Systems CD-ROM INCLUDED Contents Preface xiii CHAPTER 1 Communications Systems 1 1.1 Components of Communications Systems 1 1.2 Transmitter Systems 2 1.2.1
Meet with innovative French companies & clusters in Optics Photonics to initiate business, industrial and technological partnerships
Meet with innovative French companies & clusters in Optics Photonics to initiate business, industrial and technological partnerships Organized by Ubifrance, the French Agency for International Business
E F G. Overview of the activities. SAPIE ZA Università di Roma - Laboratorio di Fotonica Molecolare
SAPIE ZA Università di Roma Dipartimento di Energetica Laboratorio di Fotonica Molecolare Francesco Michelotti E-Mail: francesco.michelotti@uniroma1.it Tel: +39 06-49.91.65.62 Workshop Future Trends in
The Evolution of the Optical Zone in Corneal Refractive Surgery. Bruce Drum, Ph.D.
The Evolution of the Optical Zone in Corneal Refractive Surgery. Bruce Drum, Ph.D. FDA, Division of Ophthalmic and ENT Devices, Rockville, MD Disclaimer This presentation represents the professional opinion
Sputtered AlN Thin Films on Si and Electrodes for MEMS Resonators: Relationship Between Surface Quality Microstructure and Film Properties
Sputtered AlN Thin Films on and Electrodes for MEMS Resonators: Relationship Between Surface Quality Microstructure and Film Properties S. Mishin, D. R. Marx and B. Sylvia, Advanced Modular Sputtering,
Laser Cutting and Medical Science Applications
Reactive Fusion Cutting Add gas stream (usually oxygen) that reacts with material burn reaction (oxidation) adds energy to laser cutting Steel typically 60% added energy Titanium 90% added energy However
EXTATIC Extreme-ultraviolet & X-ray Technology And Training for Interdisciplinary Cooperation
Erasmus Mundus Joint Doctorate EXTATIC Extreme-ultraviolet & X-ray Technology And Training for Interdisciplinary Cooperation Paul van Kampen School of Physics/NCPST & Faculty of Science and Health, DCU
Experiment #5: Qualitative Absorption Spectroscopy
Experiment #5: Qualitative Absorption Spectroscopy One of the most important areas in the field of analytical chemistry is that of spectroscopy. In general terms, spectroscopy deals with the interactions
X-ray Imaging Systems
Principles of Imaging Science I (RAD 119) X-ray Tube & Equipment X-ray Imaging Systems Medical X-ray Equipment Classified by purpose or energy/current levels kvp, ma Radiographic Non-dynamic procedures
Silicon, the test mass substrate of tomorrow? Jerome Degallaix The Next Detectors for Gravitational Wave Astronomy Beijing - 2015
Silicon, the test mass substrate of tomorrow? Jerome Degallaix The Next Detectors for Gravitational Wave Astronomy Beijing - 2015 Program of the talk... What we have now What we know about silicon What
Light management for photovoltaics using surface nanostructures
Light management for photovoltaics using surface nanostructures Roberta De Angelis Department of Industrial Engineering and INSTM, University of Rome Tor Vergata New Materials For Optoelectronics webnemo.uniroma2.it
Introduction to Add-Drop Multiplexers
3 Introduction to Add-Drop Multiplexers In this chapter different channel routing technologies are reviewed, highlighting the advantages and drawbacks of the different devices and configurations. The parameters
Surface plasmon nanophotonics: optics below the diffraction limit
Surface plasmon nanophotonics: optics below the diffraction limit Albert Polman Center for nanophotonics FOM-Institute AMOLF, Amsterdam Jeroen Kalkman Hans Mertens Joan Penninkhof Rene de Waele Teun van
Development of Optical Wave Microphone Measuring Sound Waves with No Diaphragm
Progress In Electromagnetics Research Symposium Proceedings, Taipei, March 5 8, 3 359 Development of Optical Wave Microphone Measuring Sound Waves with No Diaphragm Yoshito Sonoda, Takashi Samatsu, and