High Voltage Silicon Carbide Power Devices



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High Voltage Silicon Carbide Power Devices ARPA-E Power Technologies Workshop February 9, 2010 John W. Palmour Cree, Inc. 4600 Silicon Drive Durham, NC 27703; USA Tel:: 919-313-5646 Email: john_palmour@cree.com

SiC MOSFETs and Schottky Diodes show Zero Q rr Reduced Losses Using SiC JBS Diode 10 8 6 4 SiC JBS Diode Switching Waveform I Current (A) CSD10060 T J = 25, 50, 100, 150 C 600V, 10A Si FRED T J = 25 C T J = 50 C T J = 100 C T J = 150 C 2 0-2 -4-6 -8 Si PiN Diode Reverse Recovery -10-1.0E-07-5.0E-08 0.0E+00 5.0E-08 1.0E-07 1.5E-07 2.0E-07 Copyright pg.

Commercially Available SiC JBS Rectifiers Cree ZERO RECOVERY TM Rectifier Product Family 600V 2A, 4A, 6A, 8A, 10A & 20A 1200V 5A, 10A, 20A, 50A Major Applications Power Factor Correction (PFC) in Switch Mode Power Supplies (SMPS) Boost Converter and Inverter Section for solar conversion Anti-Parallel rectifier in Motor Control

Extremely Low Field Failure Rate Of Cree SiC JBS Diodes Cree Field Failure Rate Data since Jan. 2004 Product Device Hours FIT (fails/billion hrs) CSDxxx60 75,200,000,000 0.6 CSDxxx60 42,700,000,000 0.1 CSDxxx60 7,060,000,000 0.1 CSDxxx60 2,440,000,000 0.4 Total 127,400,000,000 0.4 2 largest Cree Customers: Your SiC parts are much more reliable than the Silicon parts we were using.

Growth in Commercial Production of SiC JBS Diodes at Cree 80,000 70,000 60,000 50,000 40,000 30,000 20,000 10,000 0 MVA of Cree SiC Sales 2005 2006 2007 2008 2009 2010 Over 2.4x Reduction in Price of SiC JBS Diode 3 Factors Higher Quality SiC Material Larger Production Volumes Increase SiC Wafer Size From 3 inch to 100 mm Diameter In FY2010 Cree will Ship 70 GVA of SiC JBS Diodes 120% Increase Over 2009 68% CAGR since 2005 $/Amp

Current Impact of SiC Power Devices Lighting is cool.. BUT SiC power devices affect the other 80% of all electricity used Cree s Schottky diodes have already saved > $200M in electricity worldwide. At current shipping rates, we have already eliminated the need for 1 coal fired power plant. We could save >240 more.

Total Power Loss Comparison of 1.2kV / 10A SiC DMOSFET vs. Si IGBT (IRG4PH40KD) P Total = On-State Power + Turn-off Power + Turn-on Power P Total = I V Duty Cycle + (W off + W on ) frequency Calculation Parameters T = 150 C I = 10 Amps Duty Cycle = 50% >10x increase in frequency Si IGBT Is Impractical at High Frequencies 80% Power Savings

Dramatic Increase in Efficiency of 3-Phase Solar Inverter Using 1200V SiC DMOSFET C1 C2 S1 S2 S3 S4 S5 S6 L1 L3 2.4% Increase in Efficiency of 3-Phase Solar Inverter Achieved Using Cree 1200V SiC DMOSFET E ffic ienc y /% 99 98 97 96 Replaced 1200V Si IGBTs in Solar Inverter With 1200V SiC DMOSFETs w/o Optimization Significant Cost Savings 81 Euro/yr in Northern Europe 164 Euro/yr in Southern Europe 95 94 S ic MO S F E T C NM1009D IG B T Module B S M15G D 120DN2 0 1000 2000 3000 4000 5000 6000 7000 AC power / W

10kV/10A SiC DMOSFETs for 10kV/120A Half-H-Bridge Modules Capable of 20kHz Operation DARPA G S 10kV/10A SiC DMOSFETs on 3-inch 4HN-SiC Wafers Moving to 100 mm Device S 10kV/10A SiC DMOSFET 8.1 x 8.1 mm Die 20 khz Conduction Breakdown Voltage Switching Loss Loss @ 100 C 2 2 (kv) (W/cm ) (W/cm ) Cree SiC DMOSFET 10 (12) 160 100 2x 6.5kV ABB Si IGBT 12 2900 182 5SMX 12M6500 Comparison of Combined Power Loss for 10kV/10A SiC DMOSFETs & 2x 6.5kV SiC IGBT Operating at 20 khz Switching Frequency DARPA/ONR HPE-III 10kV/120A SiC DMOSFET/JBS Diode Half H-Bridge Module Capable of 20 khz Operation 10kV/10A SiC DMOSFETs Are Essential for 20 khz Switching at 10kV

10 kv, 100 A SiC MOSFET Modules 9% Weight and 12% Volume vs IGBT module IGBT Module 13.5 kv 100amps SiC Module 10 kv 100 amps

Transformer Size Shrinks Dramtically DARPA/ONR Transformer for SiC SSPS 60Hz Transformer 20 khz Transformer 250 kva 20 khz transformer 330 kva 60 Hz transformer 16 high 55 high 75 lbs 2700 lb

What Is Next for High Voltage SiC Power Devices? 10 kv ~ Upper Limit of SiC Unipolar Devices DMOSFETs and Schottky diodes Higher Voltage Bipolar Devices Si IGBT Replace Si DMOSFET at > 1kV For SiC Devices, This Holds True for >10 kv SiC breakdown field 10x that of silicon Over ~ 10kV - We Need SiC IGBTs, GTOs and PiN Diodes

Comparison of SiC n-igbts and Si IGBTs 12kV SiC n-igbt Switching Measurement 150 Vg = 20 V Vg = 15 V SiC N-IGBT VCE 90% VCE (kv) JC (A/cm2) 200W/cm2 Vg = 10 V tfall ~ 100 nsec 50 JC (A/cm2) 100 JC 10% Si IGBT (2X,6.5kV) 0 toff, delay ~ 400 nsec 0 1 2 3 4 5 6 7 8 9 10 VC (V) SiC IGBTs Are Superior to Si IGBTs at Higher Voltages 12kV SiC n-igbts Have >3x Lower Ron,sp Than 6.5kV Si IGBTs SiC n-igbts Have Much Lower Forward Voltage (VF) & Higher Current Than Si IGBTs at Same BV 12kV SiC n-igbts Have 4x Faster Switching Speed and >4x Lower Switching Loss than 6.5kV Si IGBTs

12kV SiC n-igbt Boost Converter 12kV SiC n-igbts Used to Demonstrate 5 kv / 5 khz Boost Converter With 85% Efficiency 12 kv Large n-igbt Input VIN = 516 V IIN = 1.41 A PIN = 728 W L1 45mH V1 D1 DRIVER Z1 SiC JBS INPUT PULSE R GATE 10 Ohms SiC IGBT C1 1uF R LOAD 40k 10 kv 10 A JBS SiC 12 kv n-igbt/jbs Diode 5kV / 5 KHz Boost Converter Efficiency = 85% Output VOUT = 5 kv IOUT = 0.12 A POUT = 617 W Duty Cycle 90% SiC n-igbt/jbs Diode 5kV/5KHz Boost Converter

Grid Scale Storage Today using Silicon IGBTs: Battery Energy Storage System Bi-directional DC/DC Boost Converter 400 V Voltage Source Converter 3ø, 100 kva 750 V Grid 3ø, 480 V 3ø, 13.6 kv 60 HzTransformer Required for Interconnection to 13.6 kv Distribution Grid

Grid Scale Storage w/ SiC Interface Transformer-less Intelligent Power Substation (TIPS) Battery Energy Storage System Bi-directional DC/DC Boost Converter 400 V Voltage Source Converter 3ø, 100 kva Grid 3ø, 13.6 kv 20 kv Silicon Carbide 1.2 kv MOSFET and 10 kv MOSFET or 15-20 kv IGBT No 60 Hz Transformer Required for Interconnection to 13.6 kv Distribution Grid

SiC for High Voltage Devices SiC production and reliability proven at low voltages (600-1200V) and running in high volume SiC MOSFETs nearing production at 1.2 kv, and 10 kv devices are proven and circuit demos show incredible performance For higher voltage (>10 kv), GTOs and IGBTs have been demonstrated SiC can enable high voltage transformerless interfaces for Grid-Scale energy storage