Oerlikon at the Mediatech Showcase Barcelona, March 6 th INDIGO DL For the production of 50GB Blu Ray Disc

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1 Oerlikon at the Mediatech Showcase Barcelona, March 6 th 27 INDIGO DL For the production of 5GB Blu Ray Disc Peter Hillenbrand Sr. Product Manager, Systems

2 Optical Disc - Best in Class Approach Mastering Molding Sputtering Cover Layer Inspection 5pcs installed 1/2 CDs 1/3 DVDs 9/1 RWs Virtually any process Spin coating Best uniformity Compact Low cost Reliable Page 2

3 Indigo - Widest installed base World Wide BD ROM BD R/RE BD ROM BD ROM BD R/RE BD R/RE BD R/RE BD R/RE Page 3

4 BD Dual Layer Disc Structure Single Layer (SL) & Dual Layer (DL) 5Gb Backside coating Substrate 1.1 mm Cover Layer 1 Cover Layer 3 µm 1 ± 2 µm Ag Layer Space Layer AG Layer Cover Layer 75 ± 2 µm Read-out side Read-out side Page 4

5 INDIGO BD ROM DL Disc Structure Process Flow Machine Layout systems Injection Molding (Substrate) Substrate Cooling Metalising / BSC BSC SiN Layer Ag Layer Substrate Molding Cooling Module ROM Cover Layer 75 ± 2 µm Space Layer Application Embossing Metalising Ag Layer. Embossing Module Metalising (Semi-Refl.) Cover Layer Module BCA Module Cover Layer Hard Coat Inspection Page 5

6 INDIGO DL Layout Embossing Space layer First shipments in Q3 27 Total footprint: approx. 7.3 m x 3.2 m x 2. m Page 6

7 Motivation for Embossing Embossing process applied for more than 5% of all DL discs Investment costs reduction Reduced running costs Material Costs (BD-ROM) 1 % Stamper disc IMM Lacquer Ag Ag Stamper 53 % Lacquer Ag Stamper PC 2P Embossing Page 7

8 The Oerlikon Embossing Process Process steps - Dispense and spinning of base layer - Curing - Dispense and spinning of replication layer - Embossing Nickel stamper Disc w lacquer On top - Curing - Sputtering semi reflective layer Page 8

9 The Oerlikon Embossing Process Highlights - Standard stamper, like injection molding - Long stamperlife time - Easy stamper change - Easy maintenance - Fastest cycle time - Low investment costs - Less material costs Page 9

10 OERLIKON SPUTTERING Back side coating SiN Cover Layer 75 ± 2 µm Ag layer Semireflective Ag layer Cube Star flex Page 1

11 Cover Layer Results Environmental Tests 9%humidity 55%humidity Discs with 12nm Si 3 N 4 backside coating are stable in the humidity change test. D rad. deviation ( ) Radial deviation change after humidity change disc without BSC disc with BSC time (hours) Page 11

12 Cube Star Flex Layout (BD-ROM Configuration) Pivot Arm (load/unload) L Reflective ARQ 931 S Backside Coating ARQ931 SiN Flip Turn Unit Page 12

13 Highlights The benchmark cathode for Ag and SiN layers Highest flexibility (Ag, Al and Si) Reduced heat load on SiN layer Highest number of disks per target (> 1 shots Ag) (> 4 shots Si) Page 13

14 OERLIKON COVER LAYER Cover Layer 75 ± 2 µm Page 14

15 Motivation for Spin Coating Technology Spin coating processes are well established in the optical disc industry Traditional supplier scenario Spin coating process is more cost efficient than foil bonding techniques - material cost - hardware - automation Material Costs (BD-ROM) 1 % IR heating and UV-pre curing in separate stations / spin cups Foil Ag PC Foil Bonding 5 % 53 % Spin Ag PC SpinCoating > 95% recycling of lacquer possible Page 15

16 3 Step Cover Layer Process heat dispensing / spinning / viscosity fine tuning (1µm adjustment) pre-curing during spinning (edge bump removal) final curing (hardening) Page 16

17 Cover Layer Process Step 1 Thickness thickness ( (µm) µm) Radius (mm) 4 5 radius (mm) spin coating without heat treatment Spin coating with Oerlikon treatment Page 17

18 Cover Layer Process Step 2 height (mm) finished disc disc with edge bump radius (mm) Page 18

19 Cover Layer Process Step 3 Page 19

20 Production Results Cover Layer Stability +/- +/- Variation Variation (micron) (micron) Variation Variation from from Reference Reference (23mm) (23mm) CL1 CL Disk Disk no. no. +/- +/- Variation Variation (micron) (micron) Variation Variation from from Reference Reference (23mm) (23mm) CL2 CL Disk Disk no. no. + + /- /- V V a a ria ria tio tio n n (m (m ic ic ro ro n n ) ) /- +/- Variation Variation CL1 CL Disk Disk no. no. + + /- /- V V a a ria ria tio tio n n (m (m ic ic ro ro n n ) ) /- +/- Variation Variation CL2 CL Disk Disk no. no. Variation of Cover Layer well within BD ROM spec (±3 µm) and close to R/RE spec Page 2

21 INDIGO -The OERLIKON Blu Ray Family Solutions for all BD Formats INDIGO for BD ROM, SL systems INDIGO DL for BD ROM, Dual Layer Installed base around the globe across all BD formats!!! INDIGO R/RE for BD Recordable/Rewritable, SL INDIGO R/RE DL for BD Recordable/Rewritable, Page 21 DL

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