Nasdaq: ASYS. Amtech Systems, Inc. Solar & Semiconductor Solutions. J.S. Whang Chairman & Chief Executive Officer

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1 Amtech Systems, Inc. Nasdaq: ASYS 25th LISTING ANNIVERSARY ASYS / NASDAQ J.S. Whang Chairman & Chief Executive Officer Brad Anderson Chief Financial Officer January 13-14,

2 Safe Harbor Statement Certain statements in the following presentation relate to future results that are forward looking statements as defined in the Private Securities Litigation Reform Act of Actual results may differ materially from those projected as a result of certain risks and uncertainties, including but not limited to, changes in the technologies used by Amtech s customers, change and volatility in the demand for diffusion, PSG and PECVD equipment, the effect of changing worldwide political and economic conditions on government-funded solar initiatives, capital expenditures, production levels, including those in Europe and Asia, the effect of overall market conditions, market acceptance, risks associated with dependence on suppliers, the impact of competitive products and pricing, technological and product development risks (including the risks inherent in launching new products) and other risk factors noted in our forms 10-K, 10-Q, and other filings with the SEC. This presentation includes historical and forward-looking pro forma information. The Company assumes no responsibility to update the information contained in this presentation. This presentation and the information contained herein is the property of Amtech Systems, Inc. 2

3 Amtech is A Multiple Solar Product Equipment and Technology Turnkey Supplier A Market Leading Supplier of Horizontal Diffusion Furnace Systems used for Solar Cell and Semiconductor Manufacturing New products include Solar PECVD, an anti-reflective deposition system, and new technology Solar PSG removal system Diffusion Furnace PSG Removal In-line PECVD 33 3

4 A long-term player: over 26 years listed on NASDAQ Named to Deloitte s Fastest th Listing Anniversary Named to Fortune s 2009 List of America s fastest-growing small public companies 4

5 Revenue/Order Trend (in millions) REVENUE (FY) ORDERS (FY) ($1M) ($1M) YTD 5

6 Equipment Technology and Market Diffusion Furnace Main players & Market shares OEM have comfortable order backlogs. Their plants are fully booked until at least the end of Diffusion furnace market shares in 2008 Some players produce diffusion furnaces for R&D labs or small fabs and want to keep this product in their portfolio: ATV Technology (Germany), for example. These kind of manufacturers produce very specific and highly customized products. Main players Semco 6% Sierratherm 12% SVCS 5% Others 5% Tempress (Amtech) 39% The main players are Tempress, Centrotherm, Sierratherm, SEMCO, SVCS. Others category integrates players such as Schmid, BTU, Koyo, Sevenstar, Tecnofimes, MRL. Market study by Yole Development Centrotherm 33% Share of the capacity to sell in

7 Investment Highlights Significant SOLAR business opportunity Large emerging solar market Grid parity expected to be reached in 3-5 years A market leader in solar DIFFUSION processing systems New solar DEPOSITION product (anti-reflective coating system PECVD) launched in June 2008 New solar DRY ETCH product (PSG removal) launched in July 2009 $42 million in cash at to support growth initiatives 7

8 Solar Industry Segments COMPANY DOING BUSINESS IN THAT SEGMENT Polycrystalline MEMC, Hemlock, Wacker, REC, Tokuyama, SUMCO Silicon Ingots and Wafers MEMC, Wacker, REC, LDK, SUMCO, Yingli, M.SETEK, ReneSola Solar Cell Prod. Equip. Amtech Systems (Tempress ), CentroTherm, Roth & Rau, BTU International, 48 th Institute Solar Cells Kyocera, DelSolar, Q-Cell, E-ton, CSI, Motech, Yingli, Sharp, Trina, BP Solar, SolarWorld, GE Energy, Evergreen Solar, SunPower Solar Modules Sharp, Q-cell, Kyocera, Suntech, Yingli, Sunpower, SolarWorld, Evergreen, ErSol, CSI 8

9 Amtech History (Diffusion Experts) 1981 Founding of Amtech Systems, Inc., semi quartz consumable business Acquired Intel Corp invention: Diffusion processing tool (ATMOSCAN) Acquired Tempress Systems: Diffusion furnace business Acquired P.R. Hoffman, silicon polishing consumable business Acquired Bruce Technologies from Hitachi Kokusai; Diffusion furnace business Became No. 1 semi horizontal Diffusion company in the world Entered Solar Diffusion market using core semiconductor diffusion competency. Acquired R2D Ingenierie SAS; Solar Diffusion Automation. Introduced Solar PECVD. Introduced Solar Dry Etch (PSG removal) product. 9

10 Solar Market Opportunity & Growth Strategy 10

11 Solar Industry Installation Forecast (In GWs) isuppli Total PV Installations (Nov 09) isuppli Total PV Installations (May 09) Data: Energy Information Administration PV-tech.org, ISuppli Corp, November 14,

12 China s Domestic PV Demand Potential (In MWs) Data Source: GTM Research September

13 Hemlock Semiconductor VP Gary Homan: With 4 billion US$ in announced expansions, projects reaching manufacturing capacities of 63,000 metric tons by 2014 at its plants in Michigan and Tennessee - up from its current capacity of just under 30,000 MT. Global PoliSi Capacity PolySi Metric Tons (thousands) by Homan Conservative All News Data Source: PV Tech September

14 Solar Fundamentals Remain Intact Renewable Energy push by all G-8 and G-20 Energy Security & Independence Issue Economic Stimulus Plan focuses on Solar industry Creating True New Jobs 30% Tax Credit, No Cap; $3 Billion in tax grants Solar Energy Cost achieving Grid Parity within next 5 years Record low interest rate around the world Solar Value Chains largely remain focused on future growth 14

15 Solar Strategy: Expand total available market by becoming the front-end Technology Turnkey Provider Solar Cell Manufacturing Process Flow Chart 1. Inspecting and Splitting Wafers 2. Etching Saw Damage (Texturing) 3. Diffusion 4. Etching Oxide (PSG) 5. Applying Anti- Reflective Coating (PECVD) 6. Printing Rear Side Contacts 8. Printing 7. Drying Aluminum on Back 9. Drying Surface Field 10. Printing Front Side Contacts 11. Drying and Sintering 12. Testing and Sorting Legend: Existing Products Targeted Products 15

16 Our Products 16

17 Amtech Products, Brands & Applications Diffusion Furnace, PSG & PECVD Furnace Automation & Wafer Handling Systems Wafer Carriers S-300 Solar Cells & Semiconductor Chips Silicon Wafers 17

18 Customer Base: Asia-Focused 20% % % % 19% 52% 28% 68% 67% Largest Customer (% of Rev) FY09: 25% FY08: 20% Asia North America Europe FY07: 13% 18

19 Financial Overview 19

20 Summary of Annual Net Revenue ($ in Millions) $80 $80M $70 -$80M* Revenue $60 $40 $40M $46M $53M $20 $ Est * Guidance announced on Fiscal Year (Oct. 1 Sep. 30) 20

21 Annual Earnings Summary GAAP Net Income (Loss) EBITDA (before impairment & restructuring charges) $6.0 $ $4.0 $ In Millions $3.0 $2.0 $ $0.0 ($1.0) -0.3 ($2.0)

22 Balance Sheet (In Millions) September 30, 2009 Cash and cash equivalents Total assets Total debt Shareholders equity Shares outstanding Tangible BV per share $42.3 $92.5 $0.2 $ $

23 Investment Highlights Significant SOLAR business opportunity Large emerging solar market Grid parity expected to be reached in 3-5 years A market leader in solar DIFFUSION processing systems New solar DEPOSITION product (anti-reflective coating system PECVD) launched in June 2008 New solar DRY ETCH product (PSG removal) launched in July 2009 $42 million in cash at to support growth initiatives 23

24 Amtech Systems, Inc. Nasdaq: ASYS 25th LISTING ANNIVERSARY ASYS / NASDAQ J.S. Whang Chairman & Chief Executive Officer Brad Anderson Chief Financial Officer 24

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