Indian Institute of Technology Kharagpur TENDER NOTICE NO. 17/ DATED

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1 Indian Institute of Technology Kharagpur No. IIT/S&P/ ENQ /ECE(BBS)/ /NWP/ MAS/2009 Date : 23 rd July, Sub : Sealed quotation in two bid system ( Technical Bid and Price Bid ) for procurement of MASK ALIGNMENT SYSTEM for IIT Bhubaneswar VLSI Engineering Laboratory. TENDER NOTICE NO. 17/ DATED Indian Institute of Technology, Kharagpur, an Institute of National Importance would like to invite sealed quotation in two bid system for the above mentioned item for IIT Bhubaneswar VLSI Engineering Laboratory. The Details Technical Specification are stated in Annexure-I. The General Terms and conditions are stated in Annexure-II. Annexure-I. SPECIFICATIONS for MASK ALIGNMENT SYSTEM The MASK ALIGNMENT SYSTEM incorporating interchangeable mask and substrate chuck capability, and precise micrometer backlash-free motions for the X, Y, and Theta axes. Theta adjustments be built in both the mask and substrate chuck assemblies. This system should incorporate an optional user-settable electronic clutch for substrate-to-mask pressure control. It should accommodate both the fixed planarization and the wedge compensating (planarizing) substrate chuck systems. The mask assembly be pneumatically controlled to load/unload position. MASK: Mask Size Up to 5 x 5 maximum

2 Mask `Clamp' Vacuum (and Physical Clamp) Mask Assembly Lift Pneumatic Mask Rotation +/- 90 degree SUBSTRATE CHUCK: Chuck Motions X, Y, THETA and Z Standard Micrometers X - Y Range +/- 6.5 mm Incremental Motion 0.5 micron Theta Rotation/Precision +/- 5o/0.001o Chuck Z Range +/- 1,500 micron X - Y Lateral Error < 0.1 micron lateral Chuck Leveling Wedge Error Compensation System Substrate Up to 4 wafers Mask/Substrate Separation User-Settable to 5 micron resolution Mask/Substrate Pressure User-Settable Electronically EXPOSURE: Exposure Mode Soft, Hard, Vacuum Contact and Manual Proximity Near UV Exposure Resolution sub-micron under Vacuum Contact micron under Soft Contact 3-6 micron at 15 micron Exposure Gap WAFER-MASK ALIGNMENT: Pre-alignment Capability Dependent on substrate's form and kind THE EXPOSURE SYSTEM: UV Light source System UV LIGHTSOURCE SYSTEMS provide highly collimated, uniform UV beams up to 4.0" diameter with divergence half-angles of less than 2.3o. The beam's intensity is user-settable over a wide range. An intensity monitoring system is builtin to the light source system for feedback to an intensity-controlling power supply system. Uniform Beam Size (Model 204)...4.0" diameter uniform beam Beam Divergence...Less than 2.3o (half-angle) Beam Spectrum...320nm - 450nm Beam Uniformity...Better than +/-5% within 4" Area at 365 nm Beam Intensity (350W)...About 20 mw/cm2 (UV365nm spectrum)

3 ...About 35 mw/cm2 (UV405nm spectrum)...about 18 mw/cm2 (UV436nm spectrum) Constant Intensity Power Supply System INTENSITY CONTROLLING POWER SUPPLY SYSTEMS provide a wide range intensities with better than +/- 2% precision and long term repeatability. Sensors within the light source system provide real-time optical feedback to the Intensity-controlling Power supply Systems. Output Power (350W Lamp House)..325W idle (Exposure: 300W - 375W) Intensity Control...Dual Channel Optical feedback loop, +/-2% intensity precision with long term repeatability UV Control Sensors...A=UV365nm, B=UV436nm System Alarms...Audible maximum power operation warning SYSTEM CONTROL MODULE The SYSTEM CONTROL MODULE (SCM) provides the system's pneumatic, electrical and mechanical controls. A digital timer, vacuum gauges, a N2 flow gauge, test functions and other necessary controls are included. The Contact vacuum and N2 Purge are operator adjustable. Control Functions...Manual Operation, Power On/Off, Expose, Substrate Vacuum, Mask Vacuum, Load/Unload, Contact. (Vacuum Contact and N2 are user-settable) Timer...1 to sec, in 0.1 sec increments Gauges...System Vacuum, Contact Vacuum and N2 Electrical Requirement...220V/50Hz, Single Phase, 20A Max CDA or N PSI equivalent to 4 Bars (or 4 ATM) Process N PSI equivalent to 1.36 Bars Vacuum...25" Hg equivalent to 836mBars Exhaust...External Exhaust Fan Module or In-House Exhaust (0.1 H2O) NOTE: Free Installation/Demonstration at site. Warranty: Three (3) Years

4 Annexure-II. General Terms & Conditions :- (1) Last Date of Submission of Sealed Bids : by 4:00 P.M. (2) Payment Terms :- Institute payment terms for Foreign purchase will be applicable and payment will be made after successful installation and commissioning, demonstration and free training at site duly certified by the concerned Head of the Department. Successful vendor should submit a Performance Bank Guarantee to the tune of 10% amount of the total purchase value at the time of submitting his bill. This Performance Bank Guarantee should be issued from any Nationalized Bank and validity of the same will be for 40 months from the date of submission of the Bill. (3) Warranty and Guarantee :- Three years On Site ( IIT Bhubaneswar) Comprehensive Warranty from the date of successful installation and commissioning and free training at site. (4) Delivery and Installation : The stores should be delivered at IIT Bhubaneswar within 60 days from the date of the Purchase Order, failing which Liquidate Damage will be imposed as per Institute rules. (5) Tender Fee :- An amount of Rs. 1000/- ( Rupees one thousand only ) as tender fee (non refundable) is to be paid. The payment may be made by Demand Draft in favour of IIT Kharagpur. Without Tender Fee quotation will not be accepted. Tender fee should be enclosed with the Technical Bid documents. (6) E.M.D. :- An amount of Rs. 50,000/- (Rupees fifty thousand only) in the form of Demand Draft is to be enclosed along with the bid. The E.M.D. will be in favour of IIT Kharagpur. The validity of the EMD should be 06 months from the date of issue. Any bid without EMD will not be considered. However, the EMD will be returned to the vendor after successful completion of the work. E.M.D. should be enclosed with the Technical Bid documents. (7) Price :- Price should be quoted in US Dollar. Price Bid should be valid for 120 days. (8) Bid :- Technical Bid and Price Bid should be submitted in two separate sealed envelopes quoting reference number on the top of the envelope. Tender Fee & EMD should be enclosed with the Technical Bid documents. ## Custom Duty Exemption Certificate/Excise Duty Exemption Certificate/Way Bill will be issued only to the Selected Bidder as may be mentioned in Purchase Order. (9) Conditional Offer will not be accepted. (10) Period of Validity :- Bids shall remain valid for acceptance for a period of 90 days from the date of opening of the price bid. (11) OEM will be given preference.

5 (12) Past Performance of the Vendors will be judged at the time of Technical Evaluation. (13) The Institute does not bind itself to offer any explanation to those bidders whose technical bids have not been found acceptable by the Evaluation Committee of the Institute. (14) The person/officer signing the tender/bid documents should be delegated with an appropriate Power of Attorney (duly endorsed by a Notary Public) by the Chief Executive Office of the Company to sign such documents. (15) Opening of Technical Bids : - To be intimated in due course. (16) Opening of Price Bids : - The Price Bid(s) of only those vendor(s) who are found technically qualified will be opened. (17) Tenderer or his authorised representative ( with proper authorisation letter for opening of technical bids and also for opening of price bids ) may choose to be present at the time of opening of Technical Bids/Price Bids. (18) Bid once submitted shall be the property of IIT Kharagpur and shall not be returned to the vendor in future. (19) A bid submitted with false information will not only be rejected but the vendor may also be debarred from participation in future tendering process. (20) Canvassing in any form not only invites disqualification in this tender but also debar the vendor participation in the future tendering processes too. (21) Vendor may contact the Head, Electronics & Electrical Communication Engg. Department (FAX No , Telephone No ) for any technical clarification, if any. (22) All Tenders are to be submitted/handed over to the office of the Deputy Registrar (S&P), IIT Kharagpur and acknowledgement to be obtained. (23) IMPORTANT 1. Director may accept or reject any or all the bids in part or in full without assigning any reason and does not bind himself to accept the lowest bid. The Institute at its discretion may change the quantity/upgrade the criteria/drop any item or part thereof at any time before placing the Purchase Order. 2. In case of any dispute, the decision of the Director of this Institute shall be final and binding on the Bidders. N.B.: Please Note that the Institute remains closed during Saturdays & Sundays.