Generic Photonic Technologies

Transcription

1 Generic Photonic Technologies With contributions from IOP Photonic Devices STW GTIP STW Smart Optical Systems >> Focus on innovation

2 Program Welcome Bart Verbeek IOP PD 14:15 Relevance of Platform Technologies Bart Verbeek - Memphis 14:45 Challenges and Achievements in Generic Meint Smit COBRA/TUe Integration Technologies Chairman STW GTIP 15:15 UV RGB Combiner (IOP) Ger Folkersma UTwente 15:30 16:15 Poster session during break 16:15 IMOS: InP Membranes on Silicon (GTIP) Jos van der Tol COBRA/TUe 16:30 Compact Handheld OCT (IOP) Arne Leinse LioniX bv 16:45 Gas detection in IR using spectroscopy Adonis Reyes Reyes MSc. (GTIP) TUDelft 17:00 Smart Optics Systems in IC lithography Rob Munnig Schmidt, equipment (STW SOS) TUDelft 17:15 Closing and Reception Meint Smit 2

3 Agenda Combined Meeting & Presentations by 1. STW Generic Technologies for Integrated Photonics (GTIP) Smit 2. STW Smart Optical Systems (SOS) 3. IOP Photonic Devices projects 3

4 Smart Optics Systems Program Scope: Optimizing the integration of Active Imaging Systems Program Details Program Leader: Prof. M. Verhaegen (Signals and Control) Committee Members: Prof. C. Keller (Astronomy) Prof. K. Boller (Laser Optics) Prof. R. Munnig Schmidt (Mechatronics ASML) Dr. N. Doelman (TNO) Dr. G. Vdovin (OkoTech) Budget: 5,7 M Temporary Scientific Staff: 17 Number of Projects: 6 Period:

5 1. Photonics in Top Sectors 2. Call for IOP Photonic Devices projects 5

6 Top Sector Policy Agrofood Chemistry Creative Industry Energy Life sciences HTSM Logistics Agriculture Water Focus on Value Chain Innovation = Commercial success And maintain high quality research R&D: Fundamental R to Industrial D Industry and NWO/TNO key players Roadmap of each sector is leading Setting up TKI (Topconsortium Knowledge & Innovation) Innovation Contract Industry: Letter of Intent (in kind & cash) Fiscal programs WBSO, RDA, RDA+ NWO: Program Calls 6

7 TopSector HTSM EU KET 7

8 Public/Private R&D in HTSM Public: 500 M Private: 2200 M Total Private R&D (in-house) Public TKI TKI Private in PPS Science Fundamental Industrial Experimental Competitive Market Research Research Development Development Exploration Concepts Prototype Products 8 > 10 yrs 5-10 yrs 3 5 yrs 1 3 yrs

9 Roadmap for Photonics Societal and economic relevance ( ) Markets, Position Application and technology challenges State of the Art Industry/Science Future Outlook Priorities and Programs Selection, implementation, Collaboration, TKI?, Partners Investments R&D budget public-private partnership Size: 4-5 pages All stakeholders involved 9

10 Team Photonics roadmap team Trekker Hans van de Vlekkert LioniX bv Erik Teunissen Berenschot Bart Verbeek TNO: Kemo Agovic / Peter Harmsma NWO : Frank van den Berg - STW Meint Smit TUE Paul Urbach TUD Klaus Boller UT Jaime Gomez Rivaz TUE/Amolf/Philips Agenschapnl: Eddy Schipper 10

11 Planning 11 Nov Holland Photonics Roadmap v0.0 ready 21, 23, 25 and 28 Nov Workshops Photonics Berenschot input for topics 2 Dec Concept LOI industry ready 14 Dec Signed LOI to TopTeam 19 Dec Innovation Contract TopTeam, TNO and NWO to Cabinet ~ March 2012 Decision 11

12 1. Photonics in Top Sectors 2. Call for IOP Photonic Devices projects 12

13 IOP PD Final Phase IOP Photonic Devices: 2x 4 year ( 2x 12M subsidy ) » Build Photonics National eco-system» Focus Projects on two themes from Photonics Field New Photonic Devices for Health & Medicine New Photonic Devices based on generic technology New CALL OPEN 4,75 M Submission A4 proposals Close: 25 November Information: 13 >> Als het gaat om innovatie

14 IOP PD Final Phase New Photonic Devices for Health & Medicine New & application driven Health: monitoring & prevention Medicine: Diagnostics, Therapy low cost close to patient hospital equipment New Photonic Devices based on generic technology - Focus on device/component for any application - Use available/accessible technology (III-V, SOI, TriPleX,..) - Design-, process-, packaging tools that can be used in other applications - Work towards prototype ( = more than demonstrator) 14 >> Als het gaat om innovatie

15 So far the Opening Questions? 15

16 Platform Technologies in Photonics: Relevant? What has changed in Photonics Breakthroughs in photonic technologies Memphis Platform Examples Conclusion 16 >> Als het gaat om innovatie

17 History 17th century : Instrumentation Antoni van Leeuwenhoek ( ) Galileo Galilei ( ) Musschenbroek 1678: easy-to-use microscope Scientist + Craftsmen 17 >> Als het gaat om innovatie 17

18 History II Scientist+Craftsmen: Magic combination Master Instrumentmaker impressed people for skills (unique) Early Technology: Physicist (calc.)+chemist (cooking) CMOS/CCD/Laser/fluor.lamp/... Smaller dimension: Clean Room: Wafer processing Skills of people to reliable dedicated equipment Result: high yield, high volume, reproducible 18 >> Als het gaat om innovatie 18

19 Photonics Photonics is Science & Technology of the harnessing of light Nature Optics Photonics 200x350 µm Fundamental Handcraft Technology Photonics has shifted from handcraft to technology from unique (publication) to foundries (products) 19 >> Als het gaat om innovatie

20 Value Chain Photonics University Concept/specifications from application Chip design, Circuit layout Mask layout + fabrication Lab cleanroom processing Testing Chip Demonstrator Packaging with control electronics Concept Demonstrator Foundry Processing Testing Packaging using Assembly line Prototype Products Generic Technology: ReUse design elements, Foundries and Assembly lines for different components applications VI Industry SME 20 >> Als het gaat om innovatie

21 Shaping the future for our information society and personal well-being MEMPHIS Merging Electronics and Micro&nano-PHotonics in Integrated Systems 32 M R&D Project of the SMARTMIX Program jan2007-dec partners 21 21

22 MEMPHIS Partners Strong Consortium including top players in all areas Philips ASML FEI Alcatel Oclaro Ltd Multi Nationals LioniX bv PhoeniX bv Genexis bv Tempress Systems bv RiverDiagnostics bv SME R&D COBRA / TUe DIMES / KAVLI / TUD MESA / CTIT / UT EMC VU AMC Institutes AMOLF ASTRON NLR TNO IMEC(B) 22 22

23 MEMPHIS Vision Medical & Healthcare Improved diagnostics Bio (tissue) inspection Communication & Information Terabit capacity Broadband access Smart Antenna s photonics electronics Imaging Security THz imaging Bad weather vision Quality control Displays, Light & Sensing Projection Smart Lighting Laser sensing All 23 applications require a subset of the functionalities: Synergetic etic effects!! 23

24 Memphis Program Program A Novel applications, focus on required technology specifications Program B New Principles, Materials and Technology Program C Program D Technology Platform for Electronic-Photonic devices/systems Production Processes and Equipment Program E Project Management 24

25 Example: Pico-beamer Pico-beamer A B C D Product More functions Smaller Cheap Photonics Electronics MEMPHIS System in Package Technology Re-use of technology Installed industrial base Technology Platform standards 25

26 OCT (Optical-Coherence Tomography) OCT diagnosis Handheld OCT Photonics Electronics System on Chip Product Smaller Affordable Re-use of technology Installed industrial base Technology standards 26

27 Memphis Technology Platforms Electronics; processing, drivers, memory,, I/O, SOI Photonics + Electronics TriPleX InP SiON photonics GaAs RF-Electronics Si base III-V base GaN/Al2O3/. 27 CMOS IMEC, DIMES, Mesa+, LioniX,. Oclaro, COBRA, (IBM) >> Als het gaat om innovatie III-V Universities

28 Hybrid Integration Optical Mouse for high-end gaming Platform technology also re-used in FttH, antenna s GaAs 2 VCSEL s 2 PD s, 1 lens Electronics Philips 28 >> Als het gaat om innovatie

29 TUDelft/TNO 4 DIMES WAFER Integrated phased array radar imaging 94 GHz (THz) f 1, a f 2, a Freq. + delay line scanning Handheld Due to integration Power splitter f 2, b 29 IF output (f<1ghz)

30 Memphis examples Si-based RF frontend IC s via flip chip solder bump technology Electronic IC s Si photonic waveguides 30

31 Memphis examples Integrated OBFN chip using time delay via optical ring structures TriPleX Connecting Si or III-V PIC to optical fiber 31 Fine tuning via thermo optical heaters Combining RGB lasers

32 Fundamental work: hetergeneous integration IMEC + TUE TUDelft GaAs Bonding of III-V layers on Si wafer Oxide Ge Si InP or InGaAsP epi-stack DVS-BCB SiO2 Si 32 Si Direct crystal growth of Ge / GaAs on Silicon

33 Light from silicon UT 33

34 Agro Water Safety ICT Life Energy Applications Sciences 34 Embedded Software Micro-nano Electronics Mechatronics Foundries Systems & Services Systems & Equipment Modules Photonics+Electronics Generic platforms Packaging Photonics NanoTechnology Design software New Materials TNO/IOP/Memphis

35 Platform technology relevant? Past: for a new application dedicated technology was invented/developed for another application new dedicated technology again: expensive SME never access design tools, clean room process control, foundries, mpw runs Improved & available Cost reduction Access for SME s Collaboration SME s & Universities 35 That s where innovation starts

36 36

37 Program Welcome Bart Verbeek IOP PD 14:15 Relevance of Platform Technologies Bart Verbeek - Memphis 14:45 Challenges and Achievements in Generic Meint Smit COBRA/TUe Integration Technologies Chairman STW GTIP 15:15 UV RGB Combiner (IOP) Ger Folkersma UTwente 15:30 16:15 Poster session during break 16:15 IMOS: InP Membranes on Silicon (GTIP) Jos van der Tol COBRA/TUe 16:30 Compact Handheld OCT (IOP) Arne Leinse LioniX bv 16:45 Gas detection in IR using spectroscopy Adonis Reyes Reyes MSc. (GTIP) TUDelft 17:00 Smart Optics Systems in IC lithography Rob Munnig Schmidt, equipment (STW SOS) TUDelft 17:15 Closing and Reception Meint Smit 37