Laser Patterning for Electronic Device Fabrication. Torrance, CA, USA

Transcription

1 Laser Patterning for Electronic Device Fabrication Torrance, CA, USA

2 Who Is Laserod Technologies? Laserod is a laser systems integrator We optimize our system to fit your application Choose best laser, beam delivery and motion Laserod also operates a job shop for contract manufacturing services and R&D studies. Located in Torrance, Ca 20 minutes from LAX Experienced laser engineers Established we operated Florod Lasers

3 Model LPS-300 Cutting, Drilling, Scribing and Patterning System

4 Stage and Work Area Joystick Work space Enclosure Panel Computer Display Laser Safe Viewing Window Junction panel Laser Power Supply Leveling Feet Keyboard Power Controls

5 User friendly software with built in through the lens viewing

6 Optional Cad to motion conversion program

7 Typical Features in Machines we Offer Granite base for vibration-free cutting Magnified video viewing for accurate, error free work Viewing is through-the-lens, improving throughput, alignment, and immediate inspection.

8 Custom Laser Systems

9 Optional Features

10 Typical applications using laser patterning Touch Screens OLED (Organic Light Emitting Diodes) EPD (Electronic Paper Display) Flexible OPV (Organic Photovoltaic) TFT-LCD (Thin Film Transistors Liquid Crystal Display) Solar Cells

11 Typical Laser Patterns Touch Sensor LCD Edge Connector

12 Laser Patterning ITO, silver nanowire, silver paste

13 ITO Laser Patterning

14 Silver Nanowire Patterning by Laser

15 CNT Laser Patterning

16 Silver Paste Laser Patterning

17 Laser Patterning of Silver Nanowire versus ITO Can obtain invisible laser patterned lines using solid state IR fiber laser (compared to UV diode laser for ITO.) 75% lower laser cost Invisible lines, 20-50um laser lines are invisible on silver nanowire, not so on ITO, need 10 um. Ag runs at half the laser energy density of ITO. Significantly higher speed writing rate of up to 14 m/sec compared to 4m/sec for ITO Electrical isolation >1 G ohm for both.

18 Advantages of Silver Nanowire (compared to ITO) Reduced Manufacturing Cost - reduced material, equipment and processing cost High conductivity with high transmission, needed for large touch screens Flexible, non-brittle coating Higher Yield Laser ablated lines are invisible on AgNw.

19 Visibility: IR Laser Patterning of Ag Nanowire Laser Lines are invisible! The above line is invisible to the naked eye and conventional top illumination viewing. The only way to see it was via a dark field microscope..

20 Flexibility

21 Typical Smart Phone Pattern 7 seconds to pattern on Ag Nanowire versus 14 seconds on ITO

22 Other Things We Do

23 Three Main Laser Types Industrial lasers used for machining: 1. CO 2 (gas laser, IR wavelength) 2. Excimer (gas laser, UV wavelength) 3. Solid state laser (compact, versatile with low operating cost and high reliability)

24 What Type of Solid State Laser? There are two common sources: diode pumped and optical fiber. Both offer three common wavelength choices: IR, green and UV : IR wavelength: Green wavelength: UV wavelength: 1064nm 532nm 355nm

25 Common Features of Fiber and Diode Laser Sources Compact, solid-state Low maintenance Long life Stable from laser pulse to pulse High efficiency: low power consumption, low wattage

26 Laser Performance Comparison, for two of the most common lasers IR FIBER LASER UV DIODE LASER Width of Laser Cut um Cutting Speed High High Operating Cost Low High Laser cost Low High Reliability Excellent High Beam Quality Good to Excellent 10-50um Good to Excellent

27 Motion Device (High Speed) Galvanometer A galvanometer (galvo) moves the focused beam over a stationary substrate. High speed for fast patterning/machining Moderate accuracy Fast acceleration and high speed due to low mass moving mirrors Spot size increase with field size Accuracy decreases with field size

28 Galvo

29 Motion Devices (High Accuracy) X/Y Stage Uses a fixed beam with an X/Y stage to move the material under the laser. High Accuracy Low to moderate speed Very large field size capabilites Spot size is independent of field size Accuracy is almost independent of field size

30 XY Stage

31 Motion Devices (High speed and high accuracy) Galvanometer and Stage Combines the speed of a galvo and the travel of a stage High speed High accuracy Large travel Highest cost

32 Characteristics of Laser Patterning Dry etch, single step, direct write process (DXF) Create circuit patterns on coated substrates of glass or flexible plastic Pattern all coatings including indium tin oxide (ITO), silver nanowire, CNT and silver paste Fast, high accuracy patterning Highly suited to simple patterns such as touch sensor screens New advances allow for complex patterns, including bulk removal, such as edge deletion Maskless, saving both time and money High repeatability and high yields

33 Concluding Points 1. Laser ablation promises significantly lower production costs than wet chemical etching. 2. Laser ablation allows for invisible lines. 3. Quick easy pattern change capability.

34 For further information on laser micromachining and patterning contact Terry Pothoven