bulk 5. Surface Analysis Why surface Analysis? Introduction Methods: XPS, AES, RBS
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1 5. Surface Analysis Introduction Methods: XPS, AES, RBS Autumn 2011 Experimental Methods in Physics Marco Cantoni Why surface Analysis? Bulk: structural function Electrical/thermal conduction Volume increases properties Surface: Interface solid-gas: surface chemistry (solid-oxide fuel cells, catalysers, corrosion) Surface mechanics (solid-solid), tribology Functionality: optics, biomaterials, bio-chemistry bulk 1 monolayer = density: atoms /cm 2 Autumn 2011 Experimental Methods in Physics Marco Cantoni 5-2
2 nanotechnology size 0.5nm 1nm 1.5nm 1um # volume atoms # of surface atoms surface fraction x x The smaller the particle the more dominant becomes the surface Autumn 2011 Experimental Methods in Physics Marco Cantoni 5-3 How analyse a surface? methods of surface analysis Scanning probe techniques energy dose angle force, V energy dose Angle mass charge Autumn 2011 Experimental Methods in Physics Marco Cantoni 5-4
3 methods matrix Primary particle Secondary particle hv electron ion atom hv ELL, ESR, FITIR, NMR, Raman, XRD, SNOM XPS UPS, XPD LAMMA MALDI e EM AUGER, EELS, LEED, RHEED, SEM i+/- PIXE, GDOES GDMS SIMS ISS, RBS a FAB He SC Autumn 2011 Experimental Methods in Physics Marco Cantoni 5-5 acronyms ELL: Ellipsometry Abbreviations ESR: Electron Spin Resonance FTIR: Fourier Transform Infrared Spectroscopy NMR: Nuclear Magnetic Resonance Raman Spectroscopy XRD: X-ray Diffraction XPS: X-ray Photoelectron Spectroscopy UPS: Ultraviolet Spectroscopy XPD: X-ray Photoelectron Diffraction LAMMA: Laser Microprobe Mass Analysis MALDI Matrix Assisted Laser Desorption Ionization EL: Electron Microprobe AES: Auger Electron Spectroscopy EELS: Electron Energy Loss Spectroscopy LEED: Low Energy Electron Diffraction RHEED: Reflection High Energy Electron Diffraction SEM: Scanning Electron Microscopy PIXE: Proton Induced X-ray Emission GDOES: Glow discharge Optical Emission Spectroscopy GDMS: Glow Discharge Mass spectroscopy SIMS: Secondary Ion Mass Spectroscopy ISS Ion Scattering Spectroscopy RBS: Rutherford Back Scattering FAB: Fast Atom Bombardment He Sc: Helium Scattering Autumn 2011 Experimental Methods in Physics Marco Cantoni 5-6
4 Surface analysis: under vacuum! Surface has to remain in the same state during the measurement temperature stability contamination (formation of monolayer site/m 2 ) Exception: Photons (optical microscopy) Force measurements: AFM Liquid-solid interfaces Excitation/detection with particles 10-4 mbar or better Common problems and solutions outgassing, leaks,hydrocarbons Heating at 150 C, cold traps UHV systems..! To avoid contaminants: mbar Autumn 2011 Experimental Methods in Physics Marco Cantoni 5-7 photon and electron probes elemental and electronic analysis Autumn 2011 Experimental Methods in Physics Marco Cantoni 5-8
5 photon and electron probes elemental and electronic analysis Range of low energy electrons Electron energy analyser principle Autumn 2011 Experimental Methods in Physics Marco Cantoni 5-9 Photoelectron spectroscopy Autumn 2011 Experimental Methods in Physics Marco Cantoni 5-10
6 Photoelectron spectrum Autumn 2011 Experimental Methods in Physics Marco Cantoni 5-11 Photoelectron spectroscopy Autumn 2011 Experimental Methods in Physics Marco Cantoni 5-12
7 Photoelectron spectroscopy chemical shift Autumn 2011 Experimental Methods in Physics Marco Cantoni 5-13 Photoelectron spectroscopy depth profile Autumn 2011 Experimental Methods in Physics Marco Cantoni 5-14
8 Waves: electrons AES: Auger electron spectroscopy Autumn 2011 Experimental Methods in Physics Marco Cantoni 5-15 Auger Emission Autumn 2011 Experimental Methods in Physics Marco Cantoni 5-16
9 Auger spectrum Autumn 2011 Experimental Methods in Physics Marco Cantoni 5-17 AES examples Autumn 2011 Experimental Methods in Physics Marco Cantoni 5-18
10 XPS and AES Autumn 2011 Experimental Methods in Physics Marco Cantoni 5-19 Particles: Ions Rutherford Backscattering Spectroscopy (RBS) Autumn 2011 Experimental Methods in Physics Marco Cantoni 5-20
11 Particles: Ions RBS Autumn 2011 Experimental Methods in Physics Marco Cantoni 5-21 Particles: Ions RBS Autumn 2011 Experimental Methods in Physics Marco Cantoni 5-22
12 Particles: Ions RBS Autumn 2011 Experimental Methods in Physics Marco Cantoni 5-23
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Preface This book contains the invited and contributed papers presented at the International Workshop on Nanoscale Spectroscopy and Its Applications to Semiconductor Research which was held in Trieste,
Use the following image to answer the next question. 1. Which of the following rows identifies the electrical charge on A and B shown above?
Old Science 30 Physics Practice Test A on Fields and EMR Test Solutions on the Portal Site Use the following image to answer the next question 1. Which of the following rows identifies the electrical charge
2. Deposition process
Properties of optical thin films produced by reactive low voltage ion plating (RLVIP) Antje Hallbauer Thin Film Technology Institute of Ion Physics & Applied Physics University of Innsbruck Investigations