SEMICONDUCTOR TECHNICAL DATA
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1 EIODUTO TEHIAL DATA Order this document by PX2700/D The PX2700 series device is a silicon piezoresistive pressure sensor providing a highly accurate and linear voltage output directly proportional to the applied pressure. The sensor is a single monolithic silicon diaphragm with the strain gauge and a thin film resistor network integrated on chip. The sensor is laser trimmed for precise span and offset calibration and temperature compensation. eatures Unique ilicon hear tress train auge ±0.5% Linearity Easy to Use hip arrier Package asic Element, ingle and Dual Ported Devices Available Available in Absolute, Differential and auge configurations Application Examples Pump/otor ontrollers Pneumatic ontrol Tire Pressure auges obotics edical Diagnostics Pressure witching Hydraulics igure 1 shows a block diagram of the internal circuitry on the stand alone pressure sensor chip. 3 0 to 700 kpa (0 to 100 psi) 40 m ULL ALE PA (TYPIAL) AI HIP AIE ELEET AE , TYLE 1 DIEETIAL POT OPTIO AE , TYLE 1 X ducer EI ELEET THI IL TEPEATUE OPEATIO AD ALIATIO IUITY 2 4 out+ out OTE: Pin 1 is the notched pin. PI UE 1 2 nd +out 3 4 out 1 D igure 1. Temperature ompensated Pressure ensor chematic OLTAE OUTPUT versus APPLIED DIEETIAL PEUE The differential voltage output of the X ducer is directly proportional to the differential pressure applied. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure side relative to the vacuum side (P2). imilarly, output voltage increases as increasing vacuum is applied to the vacuum side (P2) relative to the pressure side. This sensor is designed for applications where P1 is always greater than, or equal to P2. enseon and X ducer are trademarks of otorola, Inc. E 2 otorola ensor Device Data otorola, Inc
2 AXIU ATI ating ymbol alue Unit Overpressure(8) (P2 1 Atmosphere) P1max 2800 kpa urst Pressure(8) (P2 1 Atmosphere) P1burst 5000 kpa torage Temperature Tstg 40 to +125 Operating Temperature TA 40 to +125 OPEATI HAATEITI ( = 10 dc, TA = 25 unless otherwise noted. P1 P2; P2 1 Atmosphere.) haracteristic ymbol in Typ ax Unit Pressure ange(1) POP kpa upply oltage(2) dc upply urrent Io 6.0 madc ull cale pan(3) m Offset(4) off m ensitivity / P m/kpa Linearity(5) % Pressure Hysteresis(5) (0 to 700 kpa) ±0.1 % Temperature Hysteresis(5) ( 40 to +125 ) ±0.5 % Temperature Effect on ull cale pan(5) T % Temperature Effect on Offset(5) Toff m Input Impedance Zin Ω Output Impedance Zout Ω esponse Time(6) (10% to 90%) t 1.0 ms Warm Up(7) 20 ms EHAIAL HAATEITI haracteristic ymbol in Typ ax Unit Weight (asic Element ase ) 2.0 rams OTE: kpa (kilopascal) equals psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self heating. 3. ull cale pan () is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (off) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25. Tcpan: Output deviation at full rated pressure over the temperature range of 0 to 85, relative to 25. TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85, relative to esponse Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Warm up is defined as the time required for the device to meet the specified output voltage after the pressure has been stabilized. 8. asic Element only, ase P2 max : 500 kpa. 2 otorola ensor Device Data
3 LIEAITY Linearity refers to how well a transducer s output follows the equation: out = off + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit or (2) a least squares best line fit (see igure 3). While a least squares fit gives the best case linearity error (lower numerical value), the calculations required are burdensome. onversely, an end point fit will give the worst case error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. otorola s specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure. ELATIE OLTAE OUTPUT LEAT QUAE IT EXAEATED PEOAE UE OET LEAT QUAE DEIATIO ED POIT TAIHT LIE IT TAIHT LIE DEIATIO PEUE (% ULLALE) igure 2. Linearity pecification omparison O HIP TEPEATUE OPEATIO and ALIATIO igure 3 shows the output characteristics of the PX2700 series at 25. The output is directly proportional to the differential pressure and is essentially a straight line. The effects of temperature on ull cale pan and Offset are very small and are shown under Operating haracteristics. 50 OUTPUT (m) PI kpa = 10 TA = 25 P1 > P AX TYP I PA AE (TYP) OET WIE OD LEAD AE ILIOE DIE OAT DIE TAILE TEEL ETAL OE ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ ÉÉÉÉÉÉÉÉÉÉÉ P2 EPOXY AE P1 T DIE OD igure 3. Output versus Pressure Differential igure 4. ross ection of Differential Pressure ensor Die in Its asic Package (ot to cale) igure 4 shows the cross section of the otorola PX pressure sensor die in the chip carrier package. A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. PX2700 series pressure sensor operating characteristics and internal reliability and qualification tests are based on use of dry air as the pressure media. edia other than dry air may have adverse effects on sensor performance and long term reliability. ontact the factory for information regarding media compatibility in your application. otorola ensor Device Data 3
4 PEUE /AUU (P2) IDE IDETIIATIO TALE otorola designates the two sides of the pressure sensor as the Pressure side and the acuum (P2) side. The Pressure side is the side containing silicone gel which isolates the die from the environment. The otorola PX pressure sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure side may be identified by using the table below: Part umber ase Type Pressure ide Identifier PX2700D PX2700A tainless teel ap PX2700DP ide with Part arking PX2700P PX2700AP ide with Port Attached PX2700P 344D 01 tainless teel ap PX2700 PX2700A 344E 01 ide with Port Attached PX A 01 tainless teel ap PX2700X PX2700AX ide with Port Attached PX2700X tainless teel ap ODEI IOATIO PX2700 series pressure sensors are available in differential and gauge configurations. Devices are available in the basic element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose pressure connections. PX eries Device Type Options ase Type Order umber Device arking asic Element Differential ase PX2700D PX2700D Ported Elements Differential ase PX2700DP PX2700DP auge ase PX2700P PX2700P auge acuum ase 344D 01 PX2700P PX2700P auge tove Pipe ase 344E 01 PX2700 PX2700D auge acuum tove Pipe ase 344A 01 PX2700 PX2700D auge Axial ase PX2700X PX2700D auge acuum Axial ase PX2700X PX2700D 4 otorola ensor Device Data
5 PAAE DIEIO POITIE PEUE OTE: 1. DIEIOI AD TOLEAI PE AE Y14.5, OTOLLI DIEIO: IH. 3. DIEIO A I ILUIE O THE OLD TOP I. OLD TOP I OT TO EXEED (0.630). A POITIE PEUE PI 1 EATI PLAE (0.005) T A L IHE ILLIETE DI I AX I AX A L O 30 O TYLE 1: PI 1. OUD 3. + UPPLY AE IUE W POT #2 AUU PEUE (P2) EATI PLAE POITIE PEUE PI 1 A 0.13 (0.005) T OTE: 1. DIEIOI AD TOLEAI PE AI Y14.5, OTOLLI DIEIO: IH. IHE ILLIETE DI I AX I AX A TYLE 1: PI 1. OUD 3. + UPPLY AE 344A 01 IUE otorola ensor Device Data 5
6 PAAE DIEIO OTIUED EATI PLAE P POT #1 POITIE PEUE 0.25 (0.010) T PI 1 Q A U L H 0.13 (0.005) T Q Q OTE: 1. DIEIOI AD TOLEAI PE AI Y14.5, OTOLLI DIEIO: IH. IHE ILLIETE DI I AX I AX A H L P Q U TYLE 1: PI 1. OUD 3. + UPPLY AE IUE POT #2 EATI PLAE POT #1 EATI PLAE POT #2 AUU (P2) PI 1 P 0.25 (0.010) T Q W A U 0.13 (0.005) T Q L H POT #1 POITIE PEUE Q OTE: 1. DIEIOI AD TOLEAI PE AI Y14.5, OTOLLI DIEIO: IH. IHE ILLIETE DI I AX I AX A H L P Q U W AE IUE TYLE 1: PI 1. OUD 3. + UPPLY 6 otorola ensor Device Data
7 PAAE DIEIO OTIUED EATI PLAE POT #2 AUU (P2) PI 1 A U L H POITIE PEUE Q OTE: 1. DIEIOI AD TOLEAI PE AI Y14.5, OTOLLI DIEIO: IH. IHE ILLIETE DI I AX I AX A H L P Q U P 0.25 (0.010) T Q 0.13 (0.005) T Q TYLE 1: PI 1. OUD 3. + UPPLY AE 344D 01 IUE POT #1 POITIE PEUE EATI PLAE A IDE AUU (P2) 4 A PI (0.005) T OTE: 1. DIEIOI AD TOLEAI PE AI Y14.5, OTOLLI DIEIO: IH. IHE ILLIETE DI I AX I AX A TYLE 1: PI 1. OUD 3. + UPPLY AE 344E 01 IUE otorola ensor Device Data 7
8 PAAE DIEIO OTIUED POT #1 POITIE PEUE E P 0.25 (0.010) T Q A U PI 1 Q OTE: 1. DIEIOI AD TOLEAI PE AI Y14.5, OTOLLI DIEIO: IH. IHE ILLIETE DI I AX I AX A E P Q U (0.005) T P Q TYLE 1: PI 1. OUD 2. (+) OUT 3. UPPLY 4. ( ) OUT AE IUE POT #2 AUU (P2) E P POITIE PEUE PI (0.010) T Q A U Q OTE: 1. DIEIOI AD TOLEAI PE AI Y14.5, OTOLLI DIEIO: IH. IHE ILLIETE DI I AX I AX A E P Q U (0.005) T P Q TYLE 1: PI 1. OUD 2. (+) OUT 3. UPPLY 4. ( ) OUT AE IUE 8 otorola ensor Device Data
9 otorola reserves the right to make changes without further notice to any products herein. otorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does otorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. Typical parameters which may be provided in otorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including Typicals must be validated for each customer application by customer s technical experts. otorola does not convey any license under its patent rights nor the rights of others. otorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the otorola product could create a situation where personal injury or death may occur. hould uyer purchase or use otorola products for any such unintended or unauthorized application, uyer shall indemnify and hold otorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that otorola was negligent regarding the design or manufacture of the part. otorola and are registered trademarks of otorola, Inc. otorola, Inc. is an Equal Opportunity/Affirmative Action Employer. otorola ensor Device Data 9
10 fax is a trademark of otorola, Inc. How to reach us: UA / EUOPE / Locations ot Listed: otorola Literature Distribution; APA: ippon otorola Ltd.; Tatsumi PD LD, 6 eibu utsuryu enter, P.O. ox 5405, Denver, olorado or Tatsumi oto u, Tokyo 135, apan fax : AX0@ .sps.mot.com TOUHTOE AIA/PAII: otorola emiconductors H.. Ltd.; 8 Tai Ping Industrial Park, U & anada OLY Ting ok oad, Tai Po,.T., Hong ong ITEET: 10 otorola ensor Device PX2700/D Data
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