APPLIED RESEARCH CENTER

Transcription

1 APPLIED RESEARCH CENTER HIGH-TECH SOLUTIONS NANOTECHNOLOGY THIN FILM DEPOSITION MATERIALS CHARACTERIZATION Applied Research Center Frank Batten College of Engineering & Technology Old Dominion University Newport News, Virginia

2 Mission To be the leader in research, development, and education, concentrating on laser and plasma applications and advanced materials. Working to Innovate What we are doing: Nanotechnology/Quantum Dots Thin Films Materials Characterization Laser Micromachining Advanced Sensors Ultrafast Laser Diagnostics Nanotechnology for Lab-on-a-Chip Applications Electronic Materials High-k Dielectrics Alternative Renewable Energy and Bioapplications Electron Beam Lithography VUV Lithography Solar Cells and Photodetectory Negative Electron Affinity Photocathodes Laser Induced Breakdown Spectroscopy Carbon Nanotubes and Nanoparticles Femtosecond Laser Technology Surface Modification with Plasmas In the Laboratory ARC has established 18 labs with equipment and facilities valued in excess of $6 million. THIN FILM & NANO PARTICLE FABRICATION Atomic Layer Deposition (ALD) Molecular Beam Epitaxy (MBE) Pulsed Laser Deposition (PLD) Multi-Target Sputtering Laser Ablation ECR Plasma Enhanced Chemical Vapor Deposition Electron Beam Evaporation Ultra High Vacuum Deposition Plasma and Ion Beam Deposition Ion Beam Etching System Electron Beam Lithography (EBL) Photolithography MATERIALS ANALYSIS High Resolution Transmission Electron Microscope (HRTEM) Nano-Indentation Scanning Electron Microscope (SEM) Probe Station for Electrical Device Testing & Semiconductor Device Analyzer Optical Microscope Atomic Force Microscope (AFM) Scanning Tunneling Microscope (STM) X-Ray Photoelectron Spectroscope (XPS) Time-Of-Flight Mass Spectrometer Raman & Optical Spectrophotometer Ellipsometer LASERS Amplified Femtosecond Ti:Sapphire High Power Diode High Power UV Q-Switched Nd:YAG CW Nd:YAG CO 2 Excimer Argon Ion

3 FABRICATION AND ANALYSIS Femtosecond Laser Pulsed Laser Deposition (PLD) System Cracker source Target holder Stepper motor RHEED intensity during growth of In-(4 3) film Si(100)-(2 1) In-(4 3) Femtosecond laser system Pulse width = 130 fs λ = 800 nm RHEED screen CCD camera Polarizer Half-wave plate Diffracted e-beam Focused laser beam InP on GaAs (100) by PLD 52.4 nm Species plume e-beam Electron gun RGA Substrate holder nsity (arb. unit) RHEED inten kev Specular peak [010] direction Laser on Time (s) Nano-Indenter XP from MTS A triangular Berkovich diamond tip impression μm Atomic Layer Deposition (ALD) System HfO 2 Thin film on Si by ALD Probe Station and Agilent B1500A Semiconductor Device Analyzer Scanning Probe Microscope (SPM) 10 nm HfO 2 tube-in-tube structure by ALD Carbon Nanotubes JEOL 2100 Field Emission HRTEM Ag Nanoparticles JEOL 6060LV SEM Equipped with Raith EBL System Ag Nanoparticles by EBL

4 Nanotechnology, Thin Film, and Laser Applications Basic Sciences: Environmental: Industrial: Instrumentation: Self-assembled Quantum Dots, Phase Transitions, Interferometry, Atomic Cooling, Spectroscopy, Friction Reduction, Nanostructures, Functionalization Sensors and Detectors Light Emitting Diodes (LED), Precision Cutting, Drilling, Hardening, Marking, Engraving, Melting, Alloying, Cladding, Rapid Proto-typing, Shock Processing, Texturing, Forming, Annealing, Sintering, Adhesion, Stress Measurements, Fabrication of Functionalized Nano-porous Membranes for Electro-osmotic Pumps, Synthesis of Template Replicated ALD Grown Nanotubes for Sensor and Detector Applications Movement, Range Finder, Holography, Surveying, Photo-acoustics, Thin Film Sensors, Lidars Semiconductor: Silicon-On Insulator (SOI) Technology, Strained SOI, III V Compound Semiconductors for Opto-electronic Applications, Electron Beam Lithography, Thin Films, Crystallization, Surface Cleaning, Annealing, Doping, Sensors, Photovoltaics, Adhesion, Micromachining, High-k Dielectric Films by ALD for Advanced Gate Stack Engineering, Si Ge Technology, Magnetic Semiconductors Telecommunications: Optical Storage, Laser Communications, Electro-Optic Devices The ARC is in an excellent strategic position to accomplish its mission. It is only a few hours away from Washington D.C., eight miles from NASA, surrounded by Department of Defense campuses and within walking distance to the Jefferson National Accelerator Facility. Our many industry partners are also within an hour s drive from the facility. What We Do We offer research in laser, plasma, advanced materials research and technology conducted by faculty and graduate students. We provide time and cost-saving technologies to our clients as well as educational opportunities and state-of-the-art research experiences for students. A Carnegie Doctoral / Research-Extensive Institution Dr. Hani E. Elsayed-Ali, Director Applied Research Center, Old Dominion University Jefferson Avenue Newport News, Virginia Phone: (757) Fax: (757) [email protected] Web site:

5 FACULTY Dr. Hani E. Elsayed-Ali, Professor of Electrical Engineering and Eminent Scholar, Director of Applied Research Center Dr. Elsayed-Ali received his Ph.D. in Electrical Engineering from the University of Illinois-Urbana in His current research interests are in ultrafast laser-based measurements, laser processing, thin film and nanocrystal fabrication, pulsed laser deposition, semiconductor surface preparation and characterization, electron emitters and electron gun design, and thin film and laser-based sensors. He has authored and coauthored over 80 referred journal articles and holds two patents. He received the 16th Annual Research Award at ODU in 2000, the Excellence in Innovation in Hampton Roads Award from the Hampton Roads Technology Council in 2006, and the Excellence in Industrial Partnering from the Frank-Batten College of Engineering and Technology at ODU in Dr. Helmut Baumgart, Virginia Microelectronics Consortium Endowed Chair, Department of Electrical and Computer Engineering Professor Baumgart received his MS degree from Purdue University in Indiana, where he attended graduate school as a Fulbright Scholar, and his Ph.D. from the University of Stuttgart, Germany, while performing research at the Max-Planck Institute of Solid State Research in Stuttgart. He held numerous R&D positions in the microelectronics industry, including: AT&T Bell Laboratories in Murray Hill, New Jersey; Royal Philips Electronics Briarcliff Research Laboratories in New York; Royal Philips Electronics Research Headquarters at the Natuurkundig Laboratorium, Eindhoven, the Netherlands; IBM Microelectronics at the Advanced Semiconductor Technology Center (ASTC) in New York; Siemens Semiconductor Components; Infineon Technologies and Motorola Advanced Products Research & Development Laboratories (APRDL) in Austin, Texas. In his research areas he has authored and co-authored 76 papers; he has published and edited nine Electrochemical Society Conference Proceedings, delivered 46 conference presentations, including numerous invited talks, and has five U.S. Patents, four Japanese Patents, four European Patents and 15 Patent Disclosures. Dr. Abdelmageed Elmustafa, Assistant Professor of Mechanical Engineering Dr. Elmustafa received his Ph.D. in Materials Science and Engineering from the University of Wisconsin-Madison in Currently, Dr. Elmustafa is an Assistant Professor in the Department of Mechanical Engineering at Old Dominion University and a Visiting Research Professor in the Department of Mechanical and Aerospace Engineering at Princeton University. He has extensive experience in the nanoscale mechanical behavior of materials and nanotechnology. He has served as a technical reviewer for the National Science Foundation and as a reviewer for 18 referred journals. He holds a U.S. Provisional Patent on "Nanopositioners for Nano and Micro Scratch Test" and has authored more than 13 referred journal publications and over 16 conference proceedings and invited presentations. Dr. Wes Lawrence, Assistant Professor of Engineering Technology Dr. Lawrence received his Ph.D. in Electrical Engineering from North Carolina State University in He spent 25 years as a researcher at NASA s Langley Research Center developing remote-sensing and materials technology. His present interests include the development of advanced material concepts that utilize nano-inclusions and periodic structures of materials to develop materials with novel electromagnetic properties. His research is focused on creating lightweight and flexible EM shielding materials, structurally integrated antenna concepts, and new sensor concepts. In addition, Dr. Lawrence is interested in the development of advanced microwave sensor concepts for Earth remotesensing applications. His research includes the development of new instrument technology, including new antenna concepts and materials, as well as calibration approaches to enhance radiometric measurement capability and improved understanding of the Earth. He has contributed to several aircraft and spacecraft instrument development efforts and is presently interested in the development and characterization of materials for deployable antenna structures and calibration approaches for radiometric applications. Dr. Sylvain Marsillac, Associate Professor of Electrical and Computer Engineering Received his B.S. degree in physics and chemistry, his M.S. and his Ph.D. (1996) in Materials Science and Engineering all from the University of Nantes (France). After receiving his Ph.D., he worked for the University of Nantes until 2000 as an Assistant Professor. He then joined as a Researcher the University of Delaware and the University of Hawaii from 2000 to In 2005, he joined the University of Toledo where he became Associate Professor in He joined Old Dominion University in His current research interests include studying new inorganic materials for renewable energy applications, developing innovative tools for in-situ and real-time analysis, and developing novel architectures and techniques for the fabrication of flexible and high efficiency solar cells. Dr. Gon Namkoong, Assistant Professor of Electrical Engineering Dr. Gon Namkoong received his Ph.D. in the Department of Electrical and Computer Engineering at the Georgia Institute of Technology in Dr. Namkoong joined the Faculty of the Department of Electrical and Computer Engineering at the ODU and ARC in His principal interest is in the development of nitride/zno-based materials and devices on innovative substrate materials as well as applying new growth techniques to facilitate material and device improvements. Dr. Namkoong has been intimately involved in the creation of novel optoelectric/electronic devices and novel integration technologies to overcome current device performance limitations, allowing for new levels of multifunctional devices. He has authored/co-authored over 60 research papers/presentations as well as numerous technical reports and invention disclosures. Dr. Namkoong is currently a Member of IEEE and TMS.