Spectral Measurement Solutions for Industry and Research

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1 Spectral Measurement Solutions for Industry and Research Hamamatsu Photonics offers a comprehensive range of products for spectroscopic applications, covering the, Visible and Infrared regions for Industrial, Analytical, Research and OEMs. Our solutions range from mini-spectrometers and large steady-state spectrometers to gated CCD spectrometers and ultra-fast streak cameras. All products are built in-house and we can offer standard or customized component and system based solutions. Applications include: Fluorescence Spectroscopy Quantum Yield Measurement Gas Analysis Fluorescence Lifetime Measurements Plasma Process Monitoring Time-Resolved Spectroscopy Film Thickness Measurement Time-Resolved Absorption Spectrum Analysis Photoluminescence Measurement

2 Industrial end-users / Industrial OEM / Research Compact CCD-Spectrometers The compact spectrometers of the PMA series are multichannel spectrographs that can deliver up to 50 full spectra per second, each with more than 1000 spectral channels. The devices can be easily operated with any PC, come fully calibrated and require no special know-how from the user. They are also used as OEM devices in industrial environments. Plasma Process Monitoring The Multiband Plasma Monitor (MPM) is a compact device for the real-time monitoring of plasma etch processes in semiconductor fabrication and other industrial plasma applications. It combines sensitive multichannel optical emission spectroscopy (OES) hardware with extremely powerful data analysis software and can be operated via a network. Applications include advanced endpoint control, in-situ detection of abnormal plasma phenomena, optimization of new processes, continuous monitoring of chamber condition, optimization of cleaning cycles, and others. CCD/CMOS Image Sensors for Spectroscopy Hamamatsu offers a wide range of advanced image sensors for spectral measurement applications covering a broad wavelength range from to NIR. In addition to offering different window materials and filter combinations, we also offer custom parts on request. The range of image sensors includes Back-thinned CCDs (for -VIS-NIR), Front-illuminated CCDs (for VIS-NIR), CMOS and InGaAs (NIR), offering the following features: Quantum Efficiency Low noise S/N linearity Wide dynamic range -speed readout Sensitivity NIR Sensitivity Sensitivity -speed Wide dynamic range Good linearity +5 V single power supply Electronic shutter function TE-cooled type available Low cost CMOS Type Type No. Main Features Amp array PPS (passive-pixel sensor) APS (Active-pixel sensor) S10453 series S11637/S12198 series S1011X series, S390X, S8377/S8378 series S11638 S11639 PRELIMINARY PRELIMINARY BURIED TYPE speed WDR resp. 5V GLR speed ES 5V 5V ES Low cost CCD Type Type No. Main Features Binning S7030 series, S series, S10140 series, S11071 series resp. GLR WDR RG (resistive gate) S S resp. speed GLR Interline S resp. WDR GLR GLR TE cooled WDR GLR Low cost ES IR-enhanced S11490 PRELIMINARY FOR OCT IR resp. speed WDR GLR GLR

3 Industrial end-users / Industrial OEM Film Thickness Measurement The Optical NanoGauge is a thickness measurement system based on spectral interferometry. It operates by purely optical, non-contact, non-destructive means. The product excels by its high precision and sensitivity as well as robust use of integrated multiple analysis methods. We can offer configuration for macro as well as micro measurements. These features make the product applicable to a very wide range of materials and applications. Laboratory / Research Compact and low cost mini-spectrometers Hamamatsu offers various types of mini-spectrometers designed for spectral detection in the ultraviolet to the near infrared region 200 nm 2550 nm. These include compact and low-cost models, highsensitivity models (containing a back-thinned CCD image sensor), and cooled models with low noise. Mini-spectrometers can be used in diverse applications including chemical analysis, colour measurement, environmental measurement as well as process control on production lines. Hamamatsu also provides OEM models designed for installation into portable measuring devices. The mini-spectrometers cover a wide spectral response range and provide: -precision measurements throughput Ease of use Flexibility in measurement setups Compact size USB connectivity Bundled software package (DLL, device driver, and sample software) Ultra-compact spectrometers C10988MA-01 and C11708MA for VIS and SW-NIR These are thumb-sized, ultra-compact spectrometer heads developed by our advanced MOEMS technology. A CMOS image sensor integrated with an entrance slit is combined with a grating formed on a convex lens by nano-imprint. They have a package that is easy to be mounted on a circuit board, so it can be used like a sensor. Features include: Thumb size: 27.6mm x 13mm x 16.8mm Weight: 9g Spectral response range: 340 nm to 750 nm (C10988MA-01) 640 nm to 1050 nm (C11708MA) Spectral resolution: 14 nm (C10988MA-01) 20 nm (C11708MA) Installation into mobile measurement equipment

4 Research Quantaurus Series The Quantaurus series are compact instruments for measuring the properties of photoluminescent materials. The new Quantaurus-Tau measures fluorescence lifetimes as short as 100 ps and the new Quantaurus-QY measures quantum yields faster and easier than the traditional relative method. The combination of these two instruments enables a comprehensive characterization of light emitting materials such as fluorescent probes, LED phosphors, organic metal complexes, OLED materials and quantum dots. The Quantaurus series can be used to analyse materials in thin film, powder, solid or liquid form. Liquid samples can be cooled down to -196 C. The new Quantaurus-QY, based on the established technology of our C system, is a compact instrument for measuring the photoluminescence quantum yield of light emitting materials. It performs absolute measurements and does not require known reference standards, as typically needed for the traditional relative method. Operation is simple and intuitive and the system is fully software controlled. A motorized mono-chromator allows for easy choice of excitation wavelengths. The ultrasensitive CCD sensor records the full emission spectrum. The dedicated software offers various analysis functions including absolute quantum yield measurements, excitation wavelength dependence, photo-luminescence spectra, photoluminescence excitation spectra, and calculation of colour co-ordinates. The Quantaurus-QY comes in two versions featuring different wavelength ranges. The standard model (C ) covers wavelengths from 300 nm to 950 nm and the NIR model (C ) covers the region from 400 nm to 1100 nm. The Quantaurus-Tau is a compact system for routine measurements of fluorescence lifetimes from sub-nanoseconds to milliseconds with single-photon-counting sensitivity. Seven pulsed LEDs allow for sample excitation from 280 nm to 630 nm. The two available models cover a spectral range from 300 nm to 800 nm (C ) and from 380 nm to 1030 nm (C ). As the whole system is software controlled, operation is simple and intuitive. The dedicated software includes a variety of measurement and analysis functions and allows fitting of up to 5 exponentials. Furthermore, Quantaurus-Tau features optional add-ons for performing phosphorescence measurements.

5 Research Streak Systems Streak technology has been established for many years as a high-end method for time-resolved spectroscopy. Streak-based systems offer two major benefits: the unsurpassed temporal resolution, reaching into the sub-ps domain, and the "2-dimensionality" of the method, yielding superior detection efficiency. Ultra-Fast Lifetime Spectrofluorometers Several commercial systems are available dedicated for fluorescence emission measurements, allowing measurements from the sub-ps to the ms domains. Just like in conventional photon-counting, the streak method also records single photons, giving excellent measurement statistics and large dynamic range, which is important for good data analysis. Unlike other methods, however, a streak system can count photons even when there are many photons in a single fluorescence pulse and records all wavelengths simultaneously. Recent systems have been even further improved in terms of repetition rates and sensitivity, complying with even the most demanding applications. Many different models cover a wide spectral range from the to the NIR (115 to 1650 nm). Picosecond X-ray Induced Fluorescence System The PicoXspeC system is a streak-based fluorescence spectroscopy system with sample excitation in the X-ray regime, which is made possible by employing a special X-ray source emitting short X-ray pulses of only a few tens of picoseconds duration. This allows the study of materials used for scintillation and similar applications without using radioactive substances for excitation. The system is very compact and fits easily on a table top.

6 Main Products Compact CCD-Spectrometers Plasma Process Monitoring CCD/CMOS Image Sensors for Spectroscopy Film Thickness Measurement Compact and low cost mini-spectrometers Ultra-compact spectrometers C10988MA-01 and C11708MA for VIS and SW-NIR Quantaurus Series Quantaurus-QY / Quantaurus-Tau Streak Systems Ultra-Fast Lifetime Spectrofluorometers Picosecond X-ray Induced Fluorescence System June 2014