Precision X Y Scan Stages

Transcription

1 Precision X Y Scan Stages CS-430 X Y Stage XY Translation Stage MCS X Y Scan Table MS-4 X Y Scan Table MS-8 X Y Microscope Stage MS-bio X Y Scan Table KT-10 XY // [email protected] // East West //

2 4.118 Cross Stage CS-430 FACTS The CS-430 XY stage was developed for Load characteristics Fx(N) Fy(N) Fz(N) Mx(Nm) My(Nm) Mz(Nm) k x(µrad/nm) k y(µrad/nm) Phase industrial test- and inspection systems. The travel ranges in XY are 350 x 300 mm. The CS-430 XY stage is equipped with recirculating ball screws and precision cross-roller bearings. All CS-430 stages are motorized with -phase stepper motors and are equipped with two mechanical limit switches per axis. For higher positioning accuracy the CS-430 XY stage can be optionally equipped with linear scales. Optical or inductive limit switches as well as a certificate of performance can be supplied on request. TECHNICAL DATA Travel range (mm) 350 x 300 Straightness / Flatness (µm) ±6 Pitch (µrad) ± 80 Yaw (µm) ± 80 Orthogonality (µrad) 90 Weight (kg) 3 Motor (Pitch 10 mm) Phase-071 Linear scale Speed max. (mm/sec) KEY FEATURES Resolution calculated (µm) LS (FS) 0.05 Resolution typical (µm) 0.1 Bi-directional Repeatability (µm) ±4 ± 0.1 Uni-directional repeatability down to 0.1 µm Uni-directional Repeatability (µm) 0.1 Maximum speed 100 mm/sec Nominal Current (A) Load capacity up to 30 kg Accuracy Integrated optical limit switches Velocity range (mm/sec) Travel range 350 mm x 300 mm Option: Linear scale Material on request Aluminum, black anodized Note: FS = full step, RE = rotary encoder More info: Detailed information concerning motors and encoders, see appendix. Error and technical modifications are subject to change

3 Cross Stage CS APPLICATIONS CONTROLLERS ROBOTICS LINEAR STAGES ROTATION STAGES PIEZO STAGES MANUAL STAGES ACCESSORIES Order No Phase mm x 300 mm 1 without LS LS-010, Linear steel scale 1 0 4x vn11 x6.4 / n6.5 4x vn11 x6.5 / n7 15x M6x (14") (1") mm 3x n APPENDI UPS-150 UPM-160 HPS-170 LS-70 LMS-30 LMS-180 LS-180 LS-10 LS-110 LMS-80 LMS-60 PLS-85 LS-65 MTS-65 MTS-70 VT-75 VT-80 LS-40 VT-1 S CS-430 MS-8 MS-4 KT-10 MS-bio NPE-00 UPL-10 ES-100 ES-8 ES-70 ES-50 MA-35 MP-0 MP-0 B MP-15 ASS 5E // [email protected] // East West //

4 4.10 Scan Table MS-8 FACTS inspection systems and microscopy. Travel Fx(N) Fy(N) Fz(N) Mx(Nm) My(Nm) Mz(Nm) k x(µrad/nm) k y(µrad/nm) DC-B Phase Load characteristics ranges in XY are 05 x 05 mm (8" x 8"). Due to its low profile, the MS-8 scan stage is suited for tasks using reflected and/or transmitted light microscopy. With the MS-8 scan stage samples with a dimension of 05 x 05 mm can be tested and measured. The MS-8 is equipped with re-circulating ball screw and two limit switches on each axis. Motor drive options are DC or -phase stepper motors. For higher positioning accuracy The MS-8 scan stage with a clear aperture repeatability, the MS-8 scan stage can be of 05 x 05 mm was developed for optionally equipped with linear scales. TECHNICAL DATA Travel range (mm) 05 x 05 Straightness / Flatness (µm) ± 10 Pitch (µrad) ± 500 Yaw (µm) ± 500 Orthogonality (µrad) 150 Weight (kg) 9.5 Motor (Pitch mm) DC-B-03 Phase (RE) 10 (FS) 1 0. ±5 ±5 ± 0.5 Linear scale KEY FEATURES Travel range 05 mm (8") x 05 mm (8") Clear aperture 05 x 05 mm LS-010 Speed max. (mm/sec) Resolution calculated (µm) Resolution typical (µm) Bi-directional Repeatability (µm) Uni-directional repeatability down to 0.5 µm Nominal Current (A).3 1. Maximum speed 60 mm/sec Voltage Range (V) 4 Load capacity up to 4 kg Accuracy on request Integrated mechanical limit switches Velocity range (mm/sec) Option: linear scale and Uni-directional Repeatability (µm) Material Aluminum, black anodized Note: FS = full step, RE = rotary encoder More info: Detailed information concerning motors and encoders, see appendix. Error and technical modifications are subject to change 0.05

5 Scan Table MS APPLICATIONS CONTROLLERS ROBOTICS LINEAR STAGES ROTATION STAGES 106 DC-B Phase-044 PIEZO STAGES MANUAL STAGES Order No DC-B-03 1 Phase mm (8") x 05 mm (8") 1 without LS LS-010, Linear steel scale 1 LS xv n11 x4.7 / Ø o o n90 x n4h7 mm x v n8 x4.6 / Ø ACCESSORIES APPENDIX UPS-150 UPM-160 HPS-170 LS-70 LMS-30 LMS-180 LS-180 LS-10 LS-110 LMS-80 LMS-60 PLS-85 LS-65 MTS-65 MTS-70 VT-75 VT-80 LS-40 VT-1 S CS-430 MS-8 MS-4 KT-10 MS-bio NPE-00 UPL-10 ES-100 ES-8 ES-70 ES-50 MA-35 MP-0 MP-0 B MP-15 ASS 5E // [email protected] // East West //

6 4.1 Scan Table MS-4 FACTS The MS-4 scanning stages with a clear Fx(N) Fy(N) Fz(N) Mx(Nm) My(Nm) Mz(Nm) k x(µrad/nm) k y(µrad/nm) DC-B Phase Load characteristics aperture of 100 mm were developed for inspection and microscopy applications. Travel ranges in XY are 10 x 10 mm (4" x 4"). Due to their low profile, they are suited for tasks using reflected and/or transmitted light microscopy. The MS-4 scan stages are equipped with recirculating ball screw and two limit switches on each axis. Optionally, the MS-4 scan stages can be equipped with linear scales for higher accuracy. TECHNICAL DATA Travel range (mm) 10 x 10 Straightness / Flatness (µm) ±5 Pitch (µrad) ± 00 Yaw (µm) ± 00 Orthogonality (µrad) 150 Weight (kg) 3.8 Motor (Pitch mm) DC-B-03 Phase Linear scale KEY FEATURES Travel range 10 mm (4") x 10 mm (4") Clear aperture 10 x 10 mm LS-050 Speed max. (mm/sec) Resolution calculated (µm) 1 (RE) Resolution typical (µm) Bi-directional Repeatability (µm) 0. ±5 ±5 ± 0.5 Uni-directional repeatability down to 0.5 µm Nominal Current (A).3 1. Maximum speed 90 mm/sec Voltage Range (V) 4 Load capacity up to 3 kg Accuracy on request Integrated mechanical / hall limit switches Velocity range (mm/sec) Option: linear scale Uni-directional Repeatability (µm) Material Aluminum, black anodized Note: FS = full step, RE = rotary encoder More info: Detailed information concerning motors and encoders, see appendix. Error and technical modifications are subject to change

7 Scan Table MS APPLICATIONS CONTROLLERS ROBOTICS LINEAR STAGES ROTATION STAGES DC-B-03 Phase-044 PIEZO STAGES MANUAL STAGES ACCESSORIES APPENDIX Order No DC-B-03 1 Phase mm (4") x 10 mm (4") 0 without LS LS-050, Linear steel scale 1 MLS-00, Mechanical limit switches 1 HLS-010, Hall limit switches LS x v 11 x6.4 / n n LS-050 mm UPS-150 UPM-160 HPS-170 LS-70 LMS-30 LMS-180 LS-180 LS-10 LS-110 LMS-80 LMS-60 PLS-85 LS-65 MTS-65 MTS-70 VT-75 VT-80 LS-40 VT-1 S CS-430 MS-8 MS-4 KT-10 MS-bio NPE-00 UPL-10 ES-100 ES-8 ES-70 ES-50 MA-35 MP-0 MP-0 B MP-15 ASS 5E // [email protected] // East West //

8 4.14 Scan Table KT-10 FACTS The KT-10 XY stage with a clear aperture Fx(N) Fy(N) Fz(N) Mx(Nm) My(Nm) Mz(Nm) k x(µrad/nm) k y(µrad/nm) DC-B Phase Load characteristics of 45 mm was developed for test and inspection systems. Travel ranges in XY are 5 x 5 mm (1" x 1"). Due to its low profile, it is suited for tasks using reflected and/or transmitted light microscopy. The KT-10 scan stages are driven by MP-0 actuators with recirculating ball screws and equipped with limit switches. Geared DC- and -phase stepper motors are available. TECHNICAL DATA Travel range (mm) 6 x 6 Straightness / Flatness (µm) ± 110 Yaw (µm) ± 90 Orthogonality (µrad) 130 Weight (kg) 1. Motor (Pitch 1 mm) Speed max. (mm/sec) Travel range 6 mm (1") x 6 mm (1") DC-B-010 Phase (RE) (FS) Resolution typical (µm) Bi-directional Repeatability (µm) ±5 ±5 Uni-directional Repeatability (µm) Resolution calculated (µm) KEY FEATURES ±4 Pitch (µrad) Clear aperture 45 mm Nominal Current (A) Uni-directional repeatability down to µm Voltage Range (V) Maximum speed 3.5 mm/sec Accuracy on request Load capacity up to 5 kg Velocity range (mm/sec) Integrated hall limit switches Material 1 Aluminum, black anodized Note: FS = full step, RE = rotary encoder More info: Detailed information concerning motors and encoders, see appendix. Error and technical modifications are subject to change

9 Scan Table KT APPLICATIONS 30 CONTROLLERS 14 X 7 n ROBOTICS LINEAR STAGES ROTATION STAGES PIEZO STAGES MANUAL STAGES ACCESSORIES Order No DC-B Phase mm (1") x 6 mm (1") 1 X x n4h7 x6 8x n3h7 x8 x M6x1 x7 10 X R x M6x1 x o118 x M4x0.7 x7 4x M6x1 x7 n45 x n x M6x1 x7 x n4h7 x7 mm APPENDIX UPS-150 UPM-160 HPS-170 LS-70 LMS-30 LMS-180 LS-180 LS-10 LS-110 LMS-80 LMS-60 PLS-85 LS-65 MTS-65 MTS-70 VT-75 VT-80 LS-40 VT-1 S CS-430 MS-8 MS-4 KT-10 MS-bio NPE-00 UPL-10 ES-100 ES-8 ES-70 ES-50 MA-35 MP-0 MP-0 B MP-15 ASS 5E // [email protected] // East West //

10 4.16 Microscope Stage MS-bio New microscope stage MS-bio with integrated controller and linear motor drive. Advantages fast and precise positioning of compounds under the microscope. At any time immediately ready for operation without referencing. Integrated high-performance controller with minimal power consumption. Can run under a 65W table power supply unit. 100Mbit/s ethernet interface for fast communication with the application software. CAN bus to connect joystick or hand wheel. High stiffness by the use of prestressed industrial guidings. Serially with object holder for compounds of 3x1" und 3x" with automatic loading. For reflected and transmitted light applications. TECHNICAL DATA Travel range (mm) 76 x 5 Weight (kg).8 KEY FEATURES Travel range 76 mm x 5 mm Max. speed 1000 mm/s Uni-directional repeatability Motor Linear scale LM-030 Speed max. (mm/sec) 1000 Resolution calculated (µm) LS-08 Resolution typical (µm) Bi-directional Repeatability (µm) ± 1 ± 1 Uni-directional Repeatability (µm) Nominal Current (A) 3 Accuracy on request Velocity range (mm/sec) Material Note: FS = full step, RE = rotary encoder More info: Detailed information concerning motors and encoders, see appendix. Aluminium, Plasmaceramic, black, min. 900 HV Error and technical modifications are subject to change

11 Microscope Stage MS-bio 4.17 APPLICATIONS CONTROLLERS ROBOTICS LINEAR STAGES 0 ROTATION STAGES PIEZO STAGES MANUAL STAGES ACCESSORIES 61 APPENDIX Order No LM mm (3") x 5mm (") 1 LS-08 Linear absolut encoder CAN-bus #76 (3") R mm #5 (") UPS-150 UPM-160 HPS-170 LS-70 LMS-30 LMS-180 LS-180 LS-10 LS-110 LMS-80 LMS-60 PLS-85 LS-65 MTS-65 MTS-70 VT-75 VT-80 LS-40 VT-1 S CS-430 MS-8 MS-4 KT-10 MS-bio NPE-00 UPL-10 ES-100 ES-8 ES-70 ES-50 MA-35 MP-0 MP-0 B MP-15 ASS 5E // [email protected] // East West //

12 XY Translation Stage MCS New Product Linear or Rotation Feedback Vaccum Option KEY FEATURES Travel range 10 mm x 10mm (4 ) Uni-directional repeatability down to 0.1µm Maximum speed 00 mm/sec Load capacity up to 0 kg Integrated optical limit switches Option: Linear scale FACTS Load Fx Fy Fz Mx My Mz kax kay Characteristics (N) (N) (N) (Nm) (Nm) (Nm) (µrad/nm) (µrad/nm) DC-B Phase LM TECHNICAL DATA Travel range (mm) 10 x 10 Straightness / Flatness (µm) ± Pitch (µrad) ± 40 Yaw (µrad) ± 0 Orhogonality (µrad) on request Weight (kg) Motor (Pitch mm) DC-B-040 Phase-048 LM-010 Linear scale LS-07 LS-010 Speed max. (mm/sec) Resolution calculated (µm) 0.1 (RE) 10 (FS) Resolution typical (µm) Bi-directional Repeatability (µm) ± 1 ± 1 Uni-directional Repeatability (µm) Nominal Current (A) Voltage Range (V) 4 Accuracy on request Velocity Range (mm/sec) Material Aluminium, black anodized Note: FS = full step, RE = rotary encoder More info: Detailed info, concerning the motors and encoders, see: Appendix... Travel (mm) 10 A 380 B 80 C 150 D 158, E 48 F 48

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