Length, Finland, MIKES (VTT Technical Research Centre of Finland Ltd, Centre for Metrology / Mittatekniikan keskus)

Transcription

1 absolute mise en pratigue: mise en pratigue: absolute absolute Level or Range nm 0.04 fm 2 95% No THz 24 khz 2 95% No nm 0.08 fm 2 95% No THz 0.08 MHz 2 95% No nm 0.28 fm 2 95% No THz 0.28 MHz 2 95% No nm 1E % Yes nm 1E % Yes nm 5E % Yes 4 fs comb nm 1.5E % Yes 59 fs comb THz 1.5E % Yes November November 2009 The BIPM key database, January /6

2 Level or Range interferometer system, error of indicated displacement L Comparison to master interferometer, calibration of pressure and temperature sensors 0 40 m Q[0.02, 0.5L ], L 2 95% No 5 EDM : error of indicated distance, L 1-D measuring machine: error of indicated size or displacement, L Height measuring : error of indicated vertical size or displacement, L Gauge block comparators: error of indicated size Gauge block: central, variation in Gauge block: central, variation in bar (long gauge block): central L bar (long gauge block): central L Step gauges: face spacing L Comparison to master interferometer interferometer and test pieces, interferometer and test pieces, Gauge blocks, Mechanical Interferometry, exact fractions Interferometry, fringe counting and white light Mechanical interferometer, 0 30 m 0 5 m 0 1 m mm mm mm mm mm gauge block Q[0.5, 0.5L ], L Q[0.2, 0.5L ], L Q[0.2, 0.5L ], L 2 95% No % No % No mm % No 8 Q[50, 0.87L ], L m Q[20, 0.3L ], L m Q[30, 0.11L ], L m Q[100, 0.87L ], L m Q[0.17, 0.28L ], L nm 2 95% No 10 nm 2 95% No 9 nm 2 95% No 11 nm 2 95% No % No October 2012 The BIPM key database, January /6

3 Precision line scale: line spacing L Engineer or surveyor tape, steel, line spacing Engineer or machinist scale, steel Video microscope and interferometer Travelling CCD microscope on linear rail Travelling CCD microscope on linear rail Level or Range mm width < L m L Support Tension 1-D grating: pitch p Calibrated AFM Masurement 1-D grating: pitch p diffractometer m, 60 m and 90 m on rollers 50 N Q[6.2, 0.082L ] L m Q[0.035, 0.002L ], L nm 2 95% No 14 mm 2 95% No m % No 56 Measureme nt area (minimum) 2-D grating: pitch p Calibrated AFM Masurement 90 1 mm 2 90 [3.4, 0.2p ], p in Q[0.052, p, p 2 ], p in [3.4, 0.2p ], p in nm 2 95% No 57 nm 2 95% No 61 nm 2 95% No October April 2010 Diameter Diameter Diameter 2-D grating: orthogonality Calibrated AFM mrad 2 95% No 58 2-D grating: pitch p diffractometer External cylinder: diameter L cylinder: diameter L Sphere (ball): diameter 1-d stylus comparator 1-d stylus comparator 1-d stylus comparator with interferometer m m mm Measureme nt area (minimum) 1 mm 2 Q[0.052, p, p 2 ], p in Q[0.2, 0.87L ], L Q[0.2, 0.87L ], L Q[0.15, L ], L in mm nm 2 95% No % No % No % No April 2010 The BIPM key database, January /6

4 Rotary table and by Optical polygons: face autocollimators, error circle dividers by circle dividers by circle dividers Flatness Indexing table: index Rotary tables, rotary encoder scale: position Autocollimator: error of indicated, axes orthogonality Electronic level: error of indicated inclination Thedolite: error of indicated, axes orthogonality block: included 90 steel or granite squares: squareness 90 cylinder: squareness plate: flatness External cylinders:, R Optical polygons, autocollimator Comparison, rotary table Level or Range " 2 95% No Index multiple of " 2 95% No " 2 95% No interferometer " 2 95% No 23 Vertical rotary table " 2 95% No 24 Rotary tables (horizontal and vertical) Rotary table and autocollimator Reference square, Cylindricity measuring, error interferometer, straightness in three directions Vertical limited by 0.2 " 2 95% No " 2 95% No height height, L 1 m 0.5 " 2 95% No 27 1 m 0.5 " 2 95% No m Diameter 5 mm to 300 mm Height 100 mm Q[0.5, 1.4L ], L Q[0.1, 0.017R ], R in 2 95% No % No 33 The BIPM key database, January /6

5 Straightness Straightness cylinders:, R Spheres (hemispheres):, R Magnification :, R Straight edge: straightness Cylindrical straightness standard: straightness Depth standard (ISO 5436 type A) Thread plug, plain, pitch diameter Thread, ring, plain: pitch diameter Thread ring, plain: pitch Thread ring, plain: flank, error, measuring machine, form measurement machine interferometer, optics Cylindricity measuring, error Interferometric MAFM 3-wire method, measuring machine Three balls, measuring machine Form measuring Three balls, measuring machine, form measuring machine Level or Range Diameter 5 mm to 300 mm Height Diameter Cylinder diameter Height 100 mm 20 mm to 200 mm 5 mm to 300 mm 100 mm 0 200, L < 20 m 0 200, L < 0.5 m Weight Groove depth d 50 kg ISO 5436 Q[0.1, 0.017R ], R in Q[10, 10R ], R in Q[0.1, 0.001R ], R in Q[0.3, 0.5L ], L Q[0.1, 0.3L ], L Q[1.1, 0.21d ], d in 2 95% No 34 nm 2 95% No % No % No % No 38 nm 2 95% No mm % No mm % No 44a mm Flank > % No 44b ' 2 95% No 44c 01 April 2010 The BIPM key database, January /6

6 Level or Range 2-D, 3-D CMM: error of indicated size, location, shape interferometer, 2-d gratings, etc., measuring 21 different error components 0 5 m Q[0.5, 0.5L ], L 2 95% No 48 Pressure Piston /cylinder assembly: 3-D size, shape measuring machine, cylindricity measuring machine mm Q[0.2, 0.001L ], L m 2 95% No 49 CMM Ball (hole) plate: centre coordinates L CMM, reversal with 4 positioon mm Roughness standard Stylus Ra ISO 4287 Roughness standard Stylus Rz ISO 4287 Depth standard (ISO 5436 type A) Depth standard (ISO 5436 type A) Stylus d ISO 5436 Stylus Pt ISO 4287 Q[0.13, 0.70L ], L Q[10, 20Ra ], Ra in Q[25, 20Rz ], Rz in Q[15, 10d ], d in Q[25, 20Pt ], Pt in μm 2 95% No 63 nm 2 95% No 41 nm 2 95% No 42 nm 2 95% No 63 nm 2 95% No October 2012 The BIPM key database, January /6