Precision X Y Scan Stages

Precision X Y Scan Stages CS-430 X Y Stage XY Translation Stage MCS X Y Scan Table MS-4 X Y Scan Table MS-8 X Y Microscope Stage MS-bio www.pimicos.com X Y Scan Table KT-10 XY // info@pi-usa.us // 508.83.3456 East 949.679.9191 West // www.pi-usa.us

4.118 Cross Stage CS-430 FACTS The CS-430 XY stage was developed for Load characteristics Fx(N) Fy(N) Fz(N) Mx(Nm) My(Nm) Mz(Nm) k x(µrad/nm) k y(µrad/nm) Phase-071 110 110 300 80 80 80 10 10 industrial test- and inspection systems. The travel ranges in XY are 350 x 300 mm. The CS-430 XY stage is equipped with recirculating ball screws and precision cross-roller bearings. All CS-430 stages are motorized with -phase stepper motors and are equipped with two mechanical limit switches per axis. For higher positioning accuracy the CS-430 XY stage can be optionally equipped with linear scales. Optical or inductive limit switches as well as a certificate of performance can be supplied on request. TECHNICAL DATA Travel range (mm) 350 x 300 Straightness / Flatness (µm) ±6 Pitch (µrad) ± 80 Yaw (µm) ± 80 Orthogonality (µrad) 90 Weight (kg) 3 Motor (Pitch 10 mm) Phase-071 Linear scale Speed max. (mm/sec) KEY FEATURES Resolution calculated (µm) LS-010 100 5 (FS) 0.05 Resolution typical (µm) 0.1 Bi-directional Repeatability (µm) ±4 ± 0.1 Uni-directional repeatability down to 0.1 µm Uni-directional Repeatability (µm) 0.1 Maximum speed 100 mm/sec Nominal Current (A) Load capacity up to 30 kg Accuracy Integrated optical limit switches Velocity range (mm/sec) Travel range 350 mm x 300 mm Option: Linear scale Material on request 0.001... 100 Aluminum, black anodized Note: FS = full step, RE = rotary encoder More info: Detailed information concerning motors and encoders, see appendix. Error and technical modifications are subject to change

Cross Stage CS-430 4.119 564 158 APPLICATIONS CONTROLLERS ROBOTICS LINEAR STAGES 100 9 64 ROTATION STAGES PIEZO STAGES MANUAL STAGES ACCESSORIES Order No. 6330-9- Phase-071 350 mm x 300 mm 1 without LS-010 0 LS-010, Linear steel scale 1 0 4x vn11 x6.4 / n6.5 4x vn11 x6.5 / n7 15x M6x1 616.5 400 355.6 (14") 40.1 50 35 304.8 (1") 300 50.8 5 50 60.6 311.4 16.5 mm 3x n5.5 6.6 106.5 17 140 165 35 APPENDI UPS-150 UPM-160 HPS-170 LS-70 LMS-30 LMS-180 LS-180 LS-10 LS-110 LMS-80 LMS-60 PLS-85 LS-65 MTS-65 MTS-70 VT-75 VT-80 LS-40 VT-1 S CS-430 MS-8 MS-4 KT-10 MS-bio NPE-00 UPL-10 ES-100 ES-8 ES-70 ES-50 MA-35 MP-0 MP-0 B MP-15 ASS 5E www.pimicos.com // info@pi-usa.us // 508.83.3456 East 949.679.9191 West // www.pi-usa.us

4.10 Scan Table MS-8 FACTS inspection systems and microscopy. Travel Fx(N) Fy(N) Fz(N) Mx(Nm) My(Nm) Mz(Nm) k x(µrad/nm) k y(µrad/nm) DC-B-03 0 0 40 400 400 Phase-044 0 0 40 400 400 Load characteristics ranges in XY are 05 x 05 mm (8" x 8"). Due to its low profile, the MS-8 scan stage is suited for tasks using reflected and/or transmitted light microscopy. With the MS-8 scan stage samples with a dimension of 05 x 05 mm can be tested and measured. The MS-8 is equipped with re-circulating ball screw and two limit switches on each axis. Motor drive options are DC or -phase stepper motors. For higher positioning accuracy The MS-8 scan stage with a clear aperture repeatability, the MS-8 scan stage can be of 05 x 05 mm was developed for optionally equipped with linear scales. TECHNICAL DATA Travel range (mm) 05 x 05 Straightness / Flatness (µm) ± 10 Pitch (µrad) ± 500 Yaw (µm) ± 500 Orthogonality (µrad) 150 Weight (kg) 9.5 Motor (Pitch mm) DC-B-03 Phase-044 60 35 1 (RE) 10 (FS) 1 0. ±5 ±5 ± 0.5 Linear scale KEY FEATURES Travel range 05 mm (8") x 05 mm (8") Clear aperture 05 x 05 mm LS-010 Speed max. (mm/sec) Resolution calculated (µm) Resolution typical (µm) Bi-directional Repeatability (µm) Uni-directional repeatability down to 0.5 µm Nominal Current (A).3 1. Maximum speed 60 mm/sec Voltage Range (V) 4 Load capacity up to 4 kg Accuracy on request Integrated mechanical limit switches Velocity range (mm/sec) 0.001... 60 Option: linear scale and Uni-directional Repeatability (µm) Material Aluminum, black anodized Note: FS = full step, RE = rotary encoder More info: Detailed information concerning motors and encoders, see appendix. Error and technical modifications are subject to change 0.05

Scan Table MS-8 4.11 APPLICATIONS CONTROLLERS 106 81 ROBOTICS LINEAR STAGES ROTATION STAGES 106 DC-B-03 81 Phase-044 PIEZO STAGES MANUAL STAGES Order No. 6316-9- DC-B-03 1 Phase-044 05 mm (8") x 05 mm (8") 1 without LS-010 0 LS-010, Linear steel scale 1 LS-010 9.5 8.5 4xv n11 x4.7 / Ø6.6 8.5 o35 45 3 134 16.5 386 3 349.7 45 o150 90 n90 x n4h7 mm 44.3 0 96 4x v n8 x4.6 / Ø4.5 16.5 356.5 ACCESSORIES APPENDIX UPS-150 UPM-160 HPS-170 LS-70 LMS-30 LMS-180 LS-180 LS-10 LS-110 LMS-80 LMS-60 PLS-85 LS-65 MTS-65 MTS-70 VT-75 VT-80 LS-40 VT-1 S CS-430 MS-8 MS-4 KT-10 MS-bio NPE-00 UPL-10 ES-100 ES-8 ES-70 ES-50 MA-35 MP-0 MP-0 B MP-15 ASS 5E www.pimicos.com // info@pi-usa.us // 508.83.3456 East 949.679.9191 West // www.pi-usa.us

4.1 Scan Table MS-4 FACTS The MS-4 scanning stages with a clear Fx(N) Fy(N) Fz(N) Mx(Nm) My(Nm) Mz(Nm) k x(µrad/nm) k y(µrad/nm) DC-B-03 15 15 30 350 350 Phase-044 15 15 30 350 350 Load characteristics aperture of 100 mm were developed for inspection and microscopy applications. Travel ranges in XY are 10 x 10 mm (4" x 4"). Due to their low profile, they are suited for tasks using reflected and/or transmitted light microscopy. The MS-4 scan stages are equipped with recirculating ball screw and two limit switches on each axis. Optionally, the MS-4 scan stages can be equipped with linear scales for higher accuracy. TECHNICAL DATA Travel range (mm) 10 x 10 Straightness / Flatness (µm) ±5 Pitch (µrad) ± 00 Yaw (µm) ± 00 Orthogonality (µrad) 150 Weight (kg) 3.8 Motor (Pitch mm) DC-B-03 Phase-044 90 35 Linear scale KEY FEATURES Travel range 10 mm (4") x 10 mm (4") Clear aperture 10 x 10 mm LS-050 Speed max. (mm/sec) Resolution calculated (µm) 1 (RE) Resolution typical (µm) Bi-directional Repeatability (µm) 0. ±5 ±5 ± 0.5 Uni-directional repeatability down to 0.5 µm Nominal Current (A).3 1. Maximum speed 90 mm/sec Voltage Range (V) 4 Load capacity up to 3 kg Accuracy on request Integrated mechanical / hall limit switches Velocity range (mm/sec) 0.001... 90 Option: linear scale Uni-directional Repeatability (µm) 0.05 1 Material Aluminum, black anodized Note: FS = full step, RE = rotary encoder More info: Detailed information concerning motors and encoders, see appendix. Error and technical modifications are subject to change

Scan Table MS-4 4.13 APPLICATIONS 106 77.5 CONTROLLERS ROBOTICS LINEAR STAGES 106 77.5 ROTATION STAGES DC-B-03 Phase-044 PIEZO STAGES MANUAL STAGES ACCESSORIES APPENDIX Order No. 6315-9- DC-B-03 1 Phase-044 10 mm (4") x 10 mm (4") 0 without LS-050 0 LS-050, Linear steel scale 1 MLS-00, Mechanical limit switches 1 HLS-010, Hall limit switches LS-050 7.5 9 8x v 11 x6.4 / n6.6 31 1.5 147.8 100.6 18 100 76 n114 111.3 13.6 LS-050 mm 1 4 93 156.1 34.1 UPS-150 UPM-160 HPS-170 LS-70 LMS-30 LMS-180 LS-180 LS-10 LS-110 LMS-80 LMS-60 PLS-85 LS-65 MTS-65 MTS-70 VT-75 VT-80 LS-40 VT-1 S CS-430 MS-8 MS-4 KT-10 MS-bio NPE-00 UPL-10 ES-100 ES-8 ES-70 ES-50 MA-35 MP-0 MP-0 B MP-15 ASS 5E www.pimicos.com // info@pi-usa.us // 508.83.3456 East 949.679.9191 West // www.pi-usa.us

4.14 Scan Table KT-10 FACTS The KT-10 XY stage with a clear aperture Fx(N) Fy(N) Fz(N) Mx(Nm) My(Nm) Mz(Nm) k x(µrad/nm) k y(µrad/nm) DC-B-010 0 30 50 0.4 0.4 00 00 Phase-010 0 30 50 0.4 0.4 00 00 Load characteristics of 45 mm was developed for test and inspection systems. Travel ranges in XY are 5 x 5 mm (1" x 1"). Due to its low profile, it is suited for tasks using reflected and/or transmitted light microscopy. The KT-10 scan stages are driven by MP-0 actuators with recirculating ball screws and equipped with limit switches. Geared DC- and -phase stepper motors are available. TECHNICAL DATA Travel range (mm) 6 x 6 Straightness / Flatness (µm) ± 110 Yaw (µm) ± 90 Orthogonality (µrad) 130 Weight (kg) 1. Motor (Pitch 1 mm) Speed max. (mm/sec) Travel range 6 mm (1") x 6 mm (1") DC-B-010 Phase-010 3.5 0.8 0.01608 (RE) 490171 (FS) Resolution typical (µm) 0. 0. Bi-directional Repeatability (µm) ±5 ±5 Uni-directional Repeatability (µm) 0.3 0.5 Resolution calculated (µm) KEY FEATURES ±4 Pitch (µrad) Clear aperture 45 mm Nominal Current (A) Uni-directional repeatability down to µm Voltage Range (V) Maximum speed 3.5 mm/sec Accuracy on request Load capacity up to 5 kg Velocity range (mm/sec) 0.001... 3.5 Integrated hall limit switches Material 1 Aluminum, black anodized Note: FS = full step, RE = rotary encoder More info: Detailed information concerning motors and encoders, see appendix. Error and technical modifications are subject to change

Scan Table KT-10 4.15 APPLICATIONS 30 CONTROLLERS 14 X 7 n6.6 14 ROBOTICS LINEAR STAGES ROTATION STAGES PIEZO STAGES MANUAL STAGES ACCESSORIES Order No. 631-9- DC-B-010 1 Phase-010 6 mm (1") x 6 mm (1") 1 X x n4h7 x6 8x n3h7 x8 x M6x1 x7 10 X 151.5 R5 34 50 57 100 50 10 35.3 x M6x1 x7 34 50 57 o118 x M4x0.7 x7 4x M6x1 x7 n45 x n6.6 75 100 10 4x M6x1 x7 x n4h7 x7 mm 10.3 151.8 01.8 APPENDIX UPS-150 UPM-160 HPS-170 LS-70 LMS-30 LMS-180 LS-180 LS-10 LS-110 LMS-80 LMS-60 PLS-85 LS-65 MTS-65 MTS-70 VT-75 VT-80 LS-40 VT-1 S CS-430 MS-8 MS-4 KT-10 MS-bio NPE-00 UPL-10 ES-100 ES-8 ES-70 ES-50 MA-35 MP-0 MP-0 B MP-15 ASS 5E www.pimicos.com // info@pi-usa.us // 508.83.3456 East 949.679.9191 West // www.pi-usa.us

4.16 Microscope Stage MS-bio New microscope stage MS-bio with integrated controller and linear motor drive. Advantages fast and precise positioning of compounds under the microscope. At any time immediately ready for operation without referencing. Integrated high-performance controller with minimal power consumption. Can run under a 65W table power supply unit. 100Mbit/s ethernet interface for fast communication with the application software. CAN bus to connect joystick or hand wheel. High stiffness by the use of prestressed industrial guidings. Serially with object holder for compounds of 3x1" und 3x" with automatic loading. For reflected and transmitted light applications. TECHNICAL DATA Travel range (mm) 76 x 5 Weight (kg).8 KEY FEATURES Travel range 76 mm x 5 mm Max. speed 1000 mm/s Uni-directional repeatability Motor Linear scale LM-030 Speed max. (mm/sec) 1000 Resolution calculated (µm) LS-08 Resolution typical (µm) 0.05 0.05 Bi-directional Repeatability (µm) ± 1 ± 1 Uni-directional Repeatability (µm) Nominal Current (A) 3 Accuracy on request Velocity range (mm/sec) 0.001... 1000 Material Note: FS = full step, RE = rotary encoder More info: Detailed information concerning motors and encoders, see appendix. Aluminium, Plasmaceramic, black, min. 900 HV Error and technical modifications are subject to change

Microscope Stage MS-bio 4.17 APPLICATIONS CONTROLLERS ROBOTICS LINEAR STAGES 0 ROTATION STAGES 67 58.5 PIEZO STAGES MANUAL STAGES ACCESSORIES 61 APPENDIX Order No. 6319-9- LM-030 76mm (3") x 5mm (") 1 LS-08 Linear absolut encoder 1 0 0 0 197.9 55 78 CAN-bus 66.6 164 #76 (3") R15 55.5 30 111.8 98 mm #5 (") UPS-150 UPM-160 HPS-170 LS-70 LMS-30 LMS-180 LS-180 LS-10 LS-110 LMS-80 LMS-60 PLS-85 LS-65 MTS-65 MTS-70 VT-75 VT-80 LS-40 VT-1 S CS-430 MS-8 MS-4 KT-10 MS-bio NPE-00 UPL-10 ES-100 ES-8 ES-70 ES-50 MA-35 MP-0 MP-0 B MP-15 ASS 5E www.pimicos.com // info@pi-usa.us // 508.83.3456 East 949.679.9191 West // www.pi-usa.us

XY Translation Stage MCS New Product Linear or Rotation Feedback Vaccum Option KEY FEATURES Travel range 10 mm x 10mm (4 ) Uni-directional repeatability down to 0.1µm Maximum speed 00 mm/sec Load capacity up to 0 kg Integrated optical limit switches Option: Linear scale FACTS Load Fx Fy Fz Mx My Mz kax kay Characteristics (N) (N) (N) (Nm) (Nm) (Nm) (µrad/nm) (µrad/nm) DC-B-040 00 00 00 130 130 90 80 60 Phase-048 80 80 00 130 130 90 80 60 LM-010 87 87 00 130 130 90 80 60 TECHNICAL DATA Travel range (mm) 10 x 10 Straightness / Flatness (µm) ± Pitch (µrad) ± 40 Yaw (µrad) ± 0 Orhogonality (µrad) on request Weight (kg) Motor (Pitch mm) DC-B-040 Phase-048 LM-010 Linear scale LS-07 LS-010 Speed max. (mm/sec) 90 35 300 Resolution calculated (µm) 0.1 (RE) 10 (FS) Resolution typical (µm) 0. 0.1 0.005 0.01 Bi-directional Repeatability (µm) ± 1 ± 1 Uni-directional Repeatability (µm) 0. 0. Nominal Current (A) 1. 3.8 4.4 Voltage Range (V) 4 Accuracy on request Velocity Range (mm/sec) 0.001... 00 Material Aluminium, black anodized Note: FS = full step, RE = rotary encoder More info: Detailed info, concerning the motors and encoders, see: Appendix... Travel (mm) 10 A 380 B 80 C 150 D 158, E 48 F 48

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