Products. Air Bearing- Linear systems EITZENBERGER. Luftlagertechnik GmbH. Feichtmayrstraße 17 D Wessobrunn

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1 Products Air Bearing- Linear systems ITZNBRGR D- mail: URL.

2 Index - Air Bearing linear Systems Z 0526 Air Bearing Linear Stage with high resolution encoder and iron free linear motor Z 0512 XY-Air Bearing Stage equipped with Z 0812 Z- Air Bearing Stage and with Z 0675 Air Bearing Rotary Table for Theta-Stage Z 0545 Air Bearing OF- Slide with linear motors Z 0755 Air Bearing XY Stage which can be equipped with Z 0742 Z-Theta Stage Repeatability ~ 20nm (at tool point) Z 0512 Air Bearing Cross Table with linear motor Z 0333 Air Bearing Stage XY open frame

3 Z 0526 Air bearing stage Z 0526 is an air bearing linear stage with a high resolution encoder and an iron free linear motor. The stage is designed for dynamic high accuracy applications in respect to step response, constant velocity and straightness. The system is entirely contact free and requires no maintenance. The air bearings are coated with an effective dry running coating and thus are very fail save. Patents: US , D A1 Other dimensions on request Technical changes without notification, 03/2007

4 Z 0526 Air bearing stage Technical Description Mechanical Stage Data Symbol Unit Value Comment outer dimensions l*w*h mm 774*180*131 Other length on request stroke Hl mm 420 Other stroke on request load, vertical Fv N 200 load, lateral Fl N 50 torque load, Z-direction* Tz Nm 5 torque load, X-direction* Tx Nm 5 torque load, Y-direction* Ty Nm 10 stiffness, vertical Sv N/µm 100 stiffness, lateral Sv N/µm 50 total weight mt kg 32 slide weight ms kg 6 Dynamical Stage Data speed m/s 3 aceleration m/s² 30 Accuracy straightness Sl µm 2 flatness Sv µm 4 lectrical Stage Data linear motor Tecnotion UM12 N maximum force Fm N 400 detailed technical data continuous force Fc N comp. appendix motor type 3 Phase supply voltage U Veff 300 Measurement System ncoder Heidenhain LIP 481 R signal periode µm 2 signal Vpp 1

5 Z 0526 Air bearing stage Technical Description Air Supply Symbol Unit Value Comment supply pressure relative Pn Pa 5*10 5 air consumption Vn Sl/min 8 standard liters particle size µm 1 class 2 max. condens temp C + 3 class 4 max. oil mg/m³ 1 class 3 Dynamic Performance load 10 kg step 20mm evaluation 65 mm over slide stability within +/- 0.2 µm Time to reach window: 180 ms (tool (evaluation) position 65 mm over slide) stability within +/- 0.1 µm Time to reach window: 210 ms (tool (evaluation) position 65 mm over slide) stability within +/ µm Time to reach window: 230 ms (tool (evaluation) position 65 mm over slide) stability within +/ µm Time to reach window: 280 ms (tool (evaluation) position 65 mm over slide) *) X direction equal to moving direction Y direction equal to slide surface rectangular to movement Z direction rectangular to slide surface and rectangular to movement

6 Z 0526 Air bearing Stage Clean Room Suitability All materials and surfaces are clean room suitable. Because of its entirely contact free operation there is no wear or abrasion. Step Response In a step response test the Z 0526 stage had to accelerate a mass of 10 kg. The position evaluation was done in a height of 65 mm over the slides surface with an interferometer. A 20 mm step response was performed. A position accuracy was reached as follows: position window Settling time +/- 0.2 µm 180 ms +/- 0.1 µm 210 ms +/ µm 230 ms +/ µm 280 ms Step 20 mm, load weight: 10 kg, evaluation height 65mm. Constant Velocity Because of its friction free air bearings, its cogging free motor concept and its high resolution encoder the Z 0526 stage is able to reach very high constant speed rates and is predestined for synchronous run applications. lectrical Connection The stages electrical interface consist of three connectors (linear motor, encoder and motor thermal guard). For details please refer to documentation enclosed. Pneumatic Supply Pneumatic interface is realised by a M5 thread. Please use adequate connectors. Air requirements are summarised below. Caution: Always use a pressure guard (adjustable pressure switch) to avoid damage by using the stage withot sufficient pressure.

7 Z 0526 Air bearing stage

8 Z 0545 Air bearing OF-Slide with linear Motors Patents: US , D A1 Other dimensions on request Technical changes without notification, 03/2007

9 Z 0545 Air bearing OF-Slide with linear Motors Technical Description Mechanical Stage Data Symbol Unit Value Comment load max, vertical Fz N +/- 100 load max., lateral Fy N +/- 50 load kg 10 stiffness of the bearing Sz µm 100 stiffness of the bearing, lateral Sy µm 25 Set up rail Granit fine quality slide Aluminium anodised bearings Air Bearings Accuracy straightness µm +/- 3 (3 sigma limit including repeatability) We can reach 1.2 and we guaranty in the moment only 2.5 short move straightness (15mm move) µm +/- 2 flatness µm +/- 3 short move flatness (15mm move) +/- 2 accuracy X over full stroke µm +/- 2 Stage to be mapped for accuracy at motion vendor using Interferometer. accuracy X over a short move (7.5mm) µm +/- 1 repeatability, bi-directional (µm) µm +/- 0.1 (measured at tool point) minimum step size µm +/ stability (µm) µm +/ yaw arcsec +/- 5 short move Yaw over 15 mm arcsec +/- 2 step and settle time to within stability criteria Compare simulation enclosed

10 Z 0545 Air bearing OF-Slide with linear Motors Technical Description lectrical Stage Data Symbol Unit Value Comment Linear Motor Tecnotion TM6 maximum force Fm N 210 continuous force Fc N supply voltage U Veff phase synchronous ironcare peak current Ip Arms 6.2 cont. Current Ic Arms 3.1 Measurement System ncoder Heidenhain, LIP or LIF Depending on accuracy equirements clean room classification for mask stage axis Class 100, depend on cable chain Supply Air supply pressure relative Pn Pa 5*10 5 air consumtion Vn Sl/min 25 standard liters particle size µm 1 Class 2 max. condens temp. C 3 Class 4 max. oil mg/m² 1 Class 3

11 Z 0545 Air bearing OF-Slide with linear Motors Motion Performance 1. The system uses C marked components only. 2. The system is designed for clean room class 1000 (Federal Standard 209) where not otherwise specified. 3. Ambient temperature variations +/-2 C. Stages shall meet all specifications under these temperature variations and acceptance tests shall demonstrate results at the extremes of the temperature range. 4. All motion platforms have travel limits switches on both ends operating on 24 VDC PNP control logic. 5. All motion platforms contain a homing switch. 6. Quick cable disconnects to be utilized where appropriate. 7. The motion stages is shipped with 5 m encoder and motor power cables. 8. High flex cables for all moving cables. 9. Shielded, twisted pair, continuous flex cable with a length of 5m should be used for all feedback signals. 10. All shielding is grounded at the amplifier end, and not at the motor end. 11. The system will be tested to the above specifications, at the vendor s site, using the cables that will ship with the stages and the amplifier models that shall be used with the stages. Specifications must meet at rated accelerations and velocities and over the specified temperature range.

12 Z 0545 Air bearing OF-Slide with linear Motors

13 Z 0512 Air bearing cross table with linear Motor Patents: US , D A1 Other dimensions on request Technical changes without notification, 01/2009

14 Z 0512 Air bearing cross table with linear Motor Technical Description Mechanical Stage Data Symbol Unit Value Comment outer dimensions L x W x H mm x x X stroke (upper axis) Xl mm 250 net stroke Y stroke (lower axis) Yl mm 250 net stroke, can be customized pay load N 200 max moment of load X/Y Nm 80 max moment of load Z Nm 40 max acceleration X/Y m/sec² * 10 * with 2kg load velocity m/sec² * 1 * with 2kg load Accuracy straightness of movement X / Y µm 2 flatness of movement µm 1 pitch / jaw arc sec 1 orthogonality arc sec 1 repeatability µm +/ back lash 0 stability on air µm +/ stability without air µm +/ lectrical Stage Data X-Axis (upper axis) linear motor Tecnotion UM 12 N Iron free maximum force Fm N 400 detailed technical data continuous force Fc N comp. appendix motor type 3 Phase supply voltage U Veff 300 peak current Ip Arms 11 cont. Current Ic Arms 3.2 Measurement System X-Axis (upper axis) ncoder Heidenhain LIP 481 R signal periode µm 2 signal Vpp 1

15 Z 0512 Air bearing cross table with linear Motor Technical Description lectrical Stage Data Y-Axis (lower axis) Symbol Unit Value Comment linear motor Tecnotion UXX 6 N Iron free maximum force Fm N 1400 detailed technical data continuous force Fc N comp. appendix motor type 3 Phase supply voltage U Veff 300 peak current Ip Arms 11.3 cont. current Ic Arms 2.27 Measurement System Y-Axis (lower axis) ncoder Heidenhain LIP 481 R signal periode µm 2 Signal Vpp 1 Air Supply supply pressure relative Pn Pa 5*10 5 air consumtion Vn Sl/min 12 standard liters particle size µm 1 class 2 max. condens temp C + 3 class 4 max. oil mg/m³ 1 class 3 *) X direction equal to moving direction Y direction equal to slide surface rectangular to movement Z direction rectangular to slide surface and rectangular to movement

16 Z 0512 Air bearing cross table with linear Motor Linear encoder options: Heidenhain LIP481, glass / zerodur; 8 / 0 µm/(m*k), accuracy +-1 µm Velocities and accelerations with 2 kg chuck: X-axis: a max =10 m/s², v max =1 m/s for point-to-point >100 mm Y-axis: a max =10 m/s², v max =1 m/s for point-to-point >100 mm Optionally equipped with Z and/or Theta axis lectrical connectors: connector array mounted on the granite base. Optional vacuum lead-through. Ambient temperature requirements: Short-term repeatability within specified values: +-2 C/30 min. (in calm air/without forced convection). With Zerodur scales: +-3 C/30 min. Absolute accuracy within specified values: C. With Zerodur scales: +-1 C

17 Z 0512 Air bearing cross table with linear Motor

18 Z Z Z 0675 xyz-theta Stage Z 0512 XY-Air Bearing Stage equippted with Z 0812 Z- Air Bearing Stage and with Z 0675 Air Bearing Rotary Table for Theta-Stage Patents: US , D A1 Other dimensions on request Technical changes without notification, 10/2008

19 Z Z Z 0675 xyz-theta Stage Technical Description Mechanical Stage Data Symbol Unit Value Comment outer dimensions L x W x H mm 940 x 1078 x (upper-axis) x 1078 (lower-axis) x 284 X stroke (upper axis) Xl mm 250 net stroke Y stroke (lower axis) Yl mm 450 net stroke, can be custmized Z stroke Zl mm 4 Theta ϑ 360 pay load Fv N 200 max acceleration X/Y m/sec² * 10 * with 2kg load velocity m/sec² * 1 * with 2kg load Accuracy straightness of movement X / Y µm 2 flatness of movement µm 1 pitch / jaw arc sec 1 orthogonality arc sec 1 repeatability µm +/ back lash 0

20 Z Z Z 0675 xyz-theta Stage Technical Description lectrical Stage Data X-Axis (upper axis) linear motor Tecnotion UM 12 N Iron free maximum force Fm N 400 detailed technical data continuous force Fc N comp. appendix motor type 3 Phase supply voltage U Veff 300 peak current Ip Arms 11 cont. Current Ic Arms 3.2 Measurement System X-Axis (upper axis) ncoder Heidenhain LIP 481 R signal periode µm 2 Signal Vpp 1 lectrical Stage Data Y-Axis (lower axis) linear motor Tecnotion UXX 6 N Iron free maximum force Fm N 1400 detailed technical data continuous force Fc N comp. appendix motor type 3 Phase supply voltage U Veff 300 peak current Ip Arms 11.3 cont. current Ic Arms 2.27 Measurement System Y-Axis (lower axis) ncoder Heidenhain LIP 481 R signal periode µm 2 Signal Vpp 1

21 Z Z Z 0675 xyz-theta Stage Technical Description lectrical Data Z-Axis Symbol Unit Value Comment Z 0812 with weight compensation linear motor IDAM L1A-3P-10x25 maximum force Fm N 199 detailed technical data continuous force Fc N 37 comp. appendix motor type 3 Phase Iron core supply voltage U Veff 300 peak current (lin. range) Ip Aeff 6.7 cont. current (not cooled) Ic Aeff 2.1 Measurement System Z-Axis with weight compensation encoder Heidenhain LIF 481 R signal periode µm 4 Signal Vpp 1 lectrical Data Theta-Axis Z 0675 Air Bearing Rotary Table see next page or data sheets rotary systems Air Supply supply pressure relative Pn Pa 5*10 5 air consumtion Vn Sl/min 12 standard liters particle size µm 1 class 2 max. condens temp C C + 3 class 4 max. oil mg/m³ 1 class 3 *) X direction equal to moving direction Y direction equal to slide surface rectangular to movement Z direction rectangular to slide surface and rectangular to movement

22 Z Z Z 0675 xyz-theta Stage Clean room suitability All materials and surfaces are clean room suitable. Because of its entirely contact free operation there is no wear or abrasion. Constant velocity Because of its friction free air bearings, its cogging free motor concept and its high resolution encoder the Z 0526 stage is able to reach very high constant speed rates and is predestined for synchronous run applications. lectrical Connection The stages electrical interface consist of three connectors (linear motor, encoder and motor thermal guard). For details please refer to documentation enclosed. Pneumatic Supply Pneumatic interface is realised by a M5 thread. Please use adequate connectors. Air requirements are summarised below. Caution: Always use a pressure guard (adjustable pressure switch) to avoid damage by using the stage without sufficient pressure.

23 Z Z Z 0675 xyz-theta Stage

24 Z 0755 XY + Z 0742 z-theta Stage Z 0755 is a high accuracy XY-Stage which can be equipped with a Z 0742 Z-Theta insert. Repeatability ~ 20nm (at tool point). Patents: US , D A1 Other dimensions on request Technical changes without notification, 06/2009

25 Z 0755 XY + Z 0742 z-theta Stage Technical Description Mechanical Stage Data Symbol Unit Value Comment outer dimensions L*W*H mm 900*1100*300 X stroke (upper axis) Xl mm 250 net stroke Y stroke (lower axis) Yl mm 350 net stroke Z stroke Zl mm 3 Theta ϑ 1 / 5 depending on measurement system, load vertical Fv N 200 Accuracy X / Y straightness of movement µm +/ flatness of movement µm +/ pitch / jaw arc sec +/- 0.5 orthogonality arc sec 1 repeatability µm +/ back lash 0 stability on air µm +/ stability without air µm +/ Accuracy Z-Axis with weight compensation orthogonality Z-XY arcsec 2 repeatability µm +/ stability µm +/ compare below Accuracy Theta-Axis orthogonality Z-XY arcsec 2 repeatability arcsec +/ with ncoder Heidenhain LIF 481 stability arcsec +/ with ncoder Heidenhain LIF 481

26 Z 0755 XY + Z 0742 z-theta Stage Technical Description lectrical Stage Data X-Axis (upper axis) Symbol Unit Value Comment linear motor Tecnotion UL 12 N iron free maximum force Fm N 400 detailed technical data continuous force Fc N comp. appendix motor type 3 Phase supply voltage U Veff 300 peak current Ip Arms 14.1 cont. current Ic Arms 4.1 Measurement System X-Axis (upper axis) ncoder Heidenhain LIP 481 G0 signal periode µm 2 Signal Vpp 1 lectrical Stage Data Y-Axis (lower axis) linear motor Tecnotion UXX 9 N iron free maximum force Fm N 2100 detailed technical data continuous force Fc N comp. Appendix motor type 3 Phase supply voltage U Veff 300 peak current Ip Arms 16.9 cont. current Ic Arms 3.4 Measurement System Y-Axis (lower axis) ncoder Heidenhain LIP 481 G0 signal periode µm 2 signal Vpp 1

27 Z 0755 XY + Z 0742 z-theta Stage Technical Description lectrical Data Z-Axis with weight compensation linear motor Tecnotion UC3 (two motors) maximum force Fm N 70 Plus constant continuous force Fc N 20 weight compensation motor type 3 Phase supply voltage U Veff 60 peak current Ip Arms 6.2 cont. current Ic Arms 1.7 lectrical Data Theta-Axis linear motor Tecnotion UM3 (modified) maximum torque Mm Nm 3 continuous torque Mc Nm 0.7 motor type 3 Phase supply voltage U Veff 300 peak current Ip Arms 2.8 cont. current Ic Arms 0.8 Measurement System ZTheta-Axis (option 1) ncoder Heidenhain LIF 481 Maximum theta angle 1 signal periode in Z direction µm 4 signal periode in Theta direction arcsec 5.5 qual lines per revolution Signal Vpp 1 Measurement System ZTheta-Axis (option 2) ncoder Numerik Jena Maximum theta angle 5 signal periode in Z direction µm 20 signal periode in Theta direction arcsec 28 qual lines per revolution Signal Vpp 1

28 Z 0755 XY + Z 0742 z-theta Stage Technical Description Air Supply supply pressure relative Pn Pa 5*10 5 air consumption Vn Sl/min 12 standard liters particle size µm 1 class 2 max. condens temp C + 3 class 4 max. oil mg/m³ 1 class 3 *) X direction equal to moving direction Y direction equal to slide surface rectangular to movement Z direction rectangular to slide surface and rectangular to movement

29 Z 0755 XY + Z 0742 z-theta Stage Clean room suitability All materials and surfaces are clean room suitable. Because of its entirely contact free operation there is no wear or abrasion. Constant velocity Because of its friction free air bearings, its cogging free motor concept and its high resolution encoder is able to reach very high constant speed rates and is predestined for synchronous run applications. lectrical Connection The stages electrical interface consist of three connectors (linear motor, encoder and motor thermal guard). For details please refer to documentation enclosed. Pneumatic Supply Pneumatic interface is realised by a M5 thread. Please use adequate connectors. Air requirements are summarised below. Caution: Always use a pressure guard (adjustable pressure switch) to avoid damage by using the stage without sufficient pressure.

30 Z 0333 Air bearing stage xy open Frame Description Z 0333 is an air bearing XY open frame linear stage with two times two linear motors (X: two linear motors iron free, Y: two linear motors iron core) in a gantry set up. The stage is dedicated for dynamic high accuracy open frame applications, the system is entirely contact free and requires no maintenance. The air bearings are coated with an effective dry running coating and thus are very fail save. Clean room suitability All materials and surfaces are clean room suitable. Because of its entirely contact free running properties there is no wear ore abrasion in the stage. Cable chains have to be shielded. Pneumatic Supply Pneumatic interface is realised by a G1/8 thread. Please use adequate connectors. Air requirements are summarised below. Caution: Always use a pressure guard (adjustable pressure switch) to avoid damage by using the stage without sufficient pressure. Patents: US , D A1 Other dimensions on request Technical changes without notification, 10/2008 Slide Integration The stage is designed for horizontal application. For other orientations please contact us.

31 Z 0333 Air bearing stage xy open Frame Technical Description Mechanical Stage Data Symbol Unit Value Comment outer dimensions l*w*h mm 1600*1000*400 stroke X Hx mm 800 net stroke stroke Y Hy mm 400 net stroke load, vertical Fv N 200 torque load, Z-direction* Tz Nm 20 torque load, X-direction* Tx Nm 20 torque load, Y-direction* Ty Nm 50 stiffness, vertical Sv N/µm 100 stiffness, lateral Sl N/µm 50 total weight mt kg 3000 slide weight ms kg 20 Dynamical Stage Data speed X m/s 5 speed Y m/s 0.5 acceleration X m/s² 30 acceleration Y m/s² 3 Accuracy straightness Sl µm 10 flatness Sv µm 10 accuracy absolute X µm ± 2 accuracy absolute Y µm ± 2 accuracy absolute total µm 14 repeatability µm 1

32 Z 0333 Air bearing stage xy open Frame Technical Description lectrical interface X-Axis (upper axis) Symbol Unit Value Comment linear motor Tecnotion UXX12 2 linear motors in gantry mode maximum force N 2 * 2800 detailed technical data continuous force N 2 * comp. appendix motor type 3 Phase supply voltage Veff 300 lectrical interface Y-Axis (lower axis) 2 linear motors in gantry mode linear motor Tecnotion TL 12 2 linear motors in gantry mode maximum force N 2 * 900 detailed technical data continuous force N 2 * comp. appendix motor type 3 Phase supply voltage Veff 600 Measurement System X- and Y-Axis ncoder Numerik Jena LIA 22 signal periode µm 20 Signal Vpp 1 Supply Air supply pressure relative Pn Pa 5*10 5 air consumtion Vn Sl/min 25 standard liters particle size µm 1 class 2 max. condens temp C + 3 class 4 max. oil mg/m³ 1 class 3

33 Z 0333 Air bearing stage xy open Frame

34 Air supply and assembly of air bearings Air Supply Assembly of Air Bearing Pads Description Value Remark Take care for high cleanness 1. Connect air bearing to supply pressure.. Particle size Class 2 Maximum size of particles Take care not to pollute bearings with particles in the tube. 1 µm 2. Clean air bearings and rail surface thoroughly. Condensing point Class 4 Maximum Condensing Point. g. with alcohol and an optics cleaning rag. + 3 C 3. Lower bearing carefully to rail. Before supply bearing with a low supply pressure. Contained Oil Class 2 Maximum Concentration of Oil 0.1 Watch bearings edge. It can be demaged easily. mg/m³ 4. If you are working on the bearings: compare DIN ISO Supply bearings with adequate pressure continuously. Never move bearings without supply pressure. Please note: Inspect and exchange the particle filter of the air service unit and drain the condensation water depending on daily use and pollution. Always monitor air bearings with a pressure switch to prevent the bearings from running with no or insufficient supply pressure during extended periods of time. Technical changes without notification 03/2009

35 Products Air Bearing- Linear Systems ITZNBRGR D- mail: URL.