Usage of AFM, SEM and TEM for the research of carbon nanotubes



Similar documents
Ion Beam Sputtering: Practical Applications to Electron Microscopy

View of ΣIGMA TM (Ref. 1)

Nanometer-scale imaging and metrology, nano-fabrication with the Orion Helium Ion Microscope

The Basics of Scanning Electron Microscopy

Usage of Carbon Nanotubes in Scanning Probe Microscopes as Probe. Keywords: Carbon Nanotube, Scanning Probe Microscope

7. advanced SEM. Latest generation of SEM SEM

CSCI 4974 / 6974 Hardware Reverse Engineering. Lecture 8: Microscopy and Imaging

CHAPTER 2 EXPERIMENTAL. g/mol, Sigma-Aldrich, Germany Magnesium acetate tetrahydrate (C 4 H 6 MgO. 4 4H 2 O), assay 99.0%,

OPTIMIZING OF THERMAL EVAPORATION PROCESS COMPARED TO MAGNETRON SPUTTERING FOR FABRICATION OF TITANIA QUANTUM DOTS

Vacuum Evaporation Recap

Coating Technology: Evaporation Vs Sputtering

Electron Microscopy 3. SEM. Image formation, detection, resolution, signal to noise ratio, interaction volume, contrasts

The Focused Ion Beam Scanning Electron Microscope: A tool for sample preparation, two and three dimensional imaging. Jacob R.

Mass production, R&D Failure analysis. Fault site pin-pointing (EM, OBIRCH, FIB, etc. ) Bottleneck Physical science analysis (SEM, TEM, Auger, etc.

Name: Due: September 21 st Physics 7230 Laboratory 3: High Resolution SEM Imaging

Physics 441/2: Transmission Electron Microscope

for Low power Energy Harvesting Sun to fiber' Solar Devices

VCR Ion Beam Sputter Coater

SALES SPECIFICATION. SC7640 Auto/Manual High Resolution Sputter Coater

Vacuum Pumping of Large Vessels and Modelling of Extended UHV Systems

STM and AFM Tutorial. Katie Mitchell January 20, 2010

Nanoelectronics 09. Atsufumi Hirohata Department of Electronics. Quick Review over the Last Lecture

Coating Thickness and Composition Analysis by Micro-EDXRF

Raman and AFM characterization of carbon nanotube polymer composites Illia Dobryden

Electron Microscopy SEM and TEM

Micro-CT for SEM Non-destructive Measurement and Volume Visualization of Specimens Internal Microstructure in SEM Micro-CT Innovation with Integrity

Preface Light Microscopy X-ray Diffraction Methods

Detailed Alignment Procedure for the JEOL 2010F Transmission Electron Microscope

Chapter 4. Microscopy, Staining, and Classification. Lecture prepared by Mindy Miller-Kittrell North Carolina State University

Demonstration of sub-4 nm nanoimprint lithography using a template fabricated by helium ion beam lithography

Sputtered AlN Thin Films on Si and Electrodes for MEMS Resonators: Relationship Between Surface Quality Microstructure and Film Properties

BAL-TEC SCD 005. Scientist in charge: Lhoussaine Belkoura 07/14/06. softcomp soft matter composites 1

Chemical vapor deposition of novel carbon materials

Microscopy. MICROSCOPY Light Electron Tunnelling Atomic Force RESOLVE: => INCREASE CONTRAST BIODIVERSITY I BIOL1051 MAJOR FUNCTIONS OF MICROSCOPES

Modification of Pd-H 2 and Pd-D 2 thin films processed by He-Ne laser

Lectures about XRF (X-Ray Fluorescence)

BIOACTIVE COATINGS ON 316L STAINLESS STEEL IMPLANTS

X-RAY TUBE SELECTION CRITERIA FOR BGA / CSP X-RAY INSPECTION

Introduction to the Scanning Electron Microscope

Keywords: Planar waveguides, sol-gel technology, transmission electron microscopy

Scanning Electron Microscopy: an overview on application and perspective

Microhardness study of Ti(C, N) films deposited on S-316 by the Hallow Cathode Discharge Gun

Scanning Electron Microscopy Primer

Forensic Science: The Basics. Microscopy

Scanning Electron Microscopy Services for Pharmaceutical Manufacturers

CREOL, College of Optics & Photonics, University of Central Florida

Atomic Force Microscopy. Long Phan Nanotechnology Summer Series May 15, 2013

Luminescence study of structural changes induced by laser cutting in diamond films

INFRARED MONITORING OF 110 GHz GYROTRON WINDOWS AT DIII D

Characterization and Properties of Carbon Nanotubes

Lateral Resolution of EDX Analysis with Low Acceleration Voltage SEM

SBO3 acntb s. NANOFORCE Next generation nano-engineered Polymer-Steel/CNT Hybrids. Lightweight and multi-functional. aligned Carbon Nanotube bundles

Lecture 12. Physical Vapor Deposition: Evaporation and Sputtering Reading: Chapter 12. ECE Dr. Alan Doolittle

Supporting Information

Optical Microscope; Scanning Electron Microscope (SEM); Transmission Electron Microscope (TEM);

NATIONAL NETWORK OF ELECTRON MICROSCOPY RNME. NETWORK MANAGEMENT MODEL a ARTICULATION AND GENERAL OPERATION. (English translation draft)

PHYSICAL METHODS, INSTRUMENTS AND MEASUREMENTS Vol. III - Surface Characterization - Marie-Geneviève Barthés-Labrousse

Onur Yavuzçetin Fakultät für Naturwissenschaften Department Physik ATOMIC SCALE NANOWIRES

Phase Characterization of TiO 2 Powder by XRD and TEM

Defense Technical Information Center Compilation Part Notice

Applications of Multi-Walled Carbon Nano Tubes in a Scanning Electron Microscope. Bachelor Thesis

SEM/FIB Workbench. Klocke Nanotechnik. Microtechnology Network. Motion from the Nanoworld. One of 279 members in a. Pascalstr. 17 Aachen, Germany

Projects and R&D activities

Le nanotecnologie: dal Laboratorio al Mercato. Fabrizio Pirri Politecnico di Torino Istituto Italiano di Tecnologia

Scanning He + Ion Beam Microscopy and Metrology. David C Joy University of Tennessee, and Oak Ridge National Laboratory

Supporting Information

EDS system. CRF Oxford Instruments INCA CRF EDAX Genesis EVEX- NanoAnalysis Table top system

LIFE SCIENCE I TECHNICAL BULLETIN ISSUE N 11 /JULY 2008

Scanning Surface Inspection System with Defect-review SEM and Analysis System Solutions

Helium-Neon Laser. Figure 1: Diagram of optical and electrical components used in the HeNe laser experiment.

Scanning Near Field Optical Microscopy: Principle, Instrumentation and Applications

Cathode Ray Tube. Introduction. Functional principle

INTRODUCTION TO THE XL30-FEG SEM. 1.1 The mouse The monitor. Figure THE USER INTERFACE

In the previous presentation, we discussed how x-rays were discovered and how they are generated at the atomic level. Today we will begin the

Improved Contact Formation for Large Area Solar Cells Using the Alternative Seed Layer (ASL) Process

Super Cool Sputter Coater

Introduction to vacuum gauges. Vacuum Gauges where the Pressure Readings are Independent of the Type of Gas (Mechanical Vacuum Gauges)

Investigation on Enhancement of Heat Transfer Using Different Type of Nanofluids Review

h e l p s y o u C O N T R O L

Electron Beam and Sputter Deposition Choosing Process Parameters

Basic principles and mechanisms of NSOM; Different scanning modes and systems of NSOM; General applications and advantages of NSOM.

Laser beam sintering of coatings and structures

Lecture 4 Scanning Probe Microscopy (SPM)

Nanoscience Course Descriptions

bulk 5. Surface Analysis Why surface Analysis? Introduction Methods: XPS, AES, RBS

History of the Atom & Atomic Theory

Radiation Strip Thickness Measurement Systems

How To Analyze Plasma With An Inductively Coupled Plasma Mass Spectrometer

Owner s Manual

Supporting information

Conductivity of silicon can be changed several orders of magnitude by introducing impurity atoms in silicon crystal lattice.

Fundamentals of Scanning Electron Microscopy

Proceedings of the Sixth Workshop on RF Superconductivity, CEBAF, Newport News, Virginia, USA

Scanning Electron Microscopy tools for material characterization

SILA Sistema Integrato di Laboratori per l Ambiente. CENTRE FOR MICROSCOPY AND MICROANALYSIS Scientific coordinator: Prof.ssa Rosanna De Rosa

THIN FILM MATERIALS TECHNOLOGY

Electron Microscopy 3. SEM. Image formation, detection, resolution, signal to noise ratio, interaction volume, contrasts

Atomic Force Microscopy Observation and Characterization of a CD Stamper, Lycopodium Spores, and Step-Height Standard Diffraction Grating

Polymer growth rate in a wire chamber with oxygen, water, or alcohol gas additives

Basics of Image and data analysis in 3D

Transcription:

Usage of AFM, SEM and TEM for the research of carbon nanotubes K.Safarova *1, A.Dvorak 2, R. Kubinek 1, M.Vujtek 1, A. Rek 3 1 Department of Experimental Physics, Faculty of Science, Palacky University, tr.17.listopadu 50, 772 07 Olomouc, Czech Republic 2 VOP-026 Sternberk, VTUO Brno Division, Veslarska 230, 637 00 Brno, Czech Republic 3 Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Kralovopolska 147, 612 64 Brno, Czech Republic This report is focused on a studying of single-walled carbon nanotubes (SWCNTs) by different microscopic methods. It is important for the number of researches to know basic parameters of SWCNTs, especially a diameter and length of one nanotube or a bundle of nanotubes and a number of nanotubes in the bundle. For determination of these parameters Transmission Electron Microscopy (TEM), Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM) were used. Keywords carbon nanotubes, Trasmission Electron Microscopy, Scanning Electron Microscopy, Atomic Force Microscopy 1. Introduction Single-walled carbon nanotubes (SWCNTs) are nanometric cylinders consisting of a single graphene sheet wrapped up to form a tube. They were discovered in 1993 [1,2] and their first electrical measurements were performed in 1997-1998 [3,4]. The discovery of SWCNTs opened a new field of interest. Using of this material is very important in several fields of science and technology, due to their excelent mechanical and electrical properties [5,6]. SWCNTs occur mainly in thick bundles, where they are combined by van der Waals attractions. There are the different kinds of methods to produce SWCNTs, such as thermal chemical vapor deposition (CVD), laser ablation, catalytic chemical vapor deposition (CCVD), plasma enhanced chemical vapor deposition (PECVD) or arc discharge. SWCNTs used in this work were prepared by arc discharge. The reason for the usage of AFM, TEM and SEM for nanotubes analysis is very simple. AFM is a powerful tool in manipulating and characterizing the properties of nanostructures. TEM has been traditionally applied to characterizing the interior structures of nanomaterials. Due to this method atomic planes of nanoparticles can be observed. 2. Materials and methods 2.1. Arc Discharge SWCNTs used in this work were prepared by arc discharge [7]. It was the first available method for the their production. It is the most common and one of the easiest methods of carbon nanotubes production. Fig. 1 shows a scheme of apparatus for producing carbon nanotubes. This apparatus is connected to a vacuum line with a diffusion pump, and to a helium supply. * Corresponding author: e-mail: safarova.k@seznam.cz, Phone: +420 777 981 000 513

FORMATEX 2007 A. Méndez-Vilas and J. Díaz (Eds.) As the cathode and anode two graphite electrodes, usually of high purity, are used in this method. Usually, the anode is a long rod of approximate diameter 6 mm and the cathode is much shorter of diameter 9 mm. A direct current of 50A to 100 A, driven by potencial difference of approximately 20-40 V creates a high temperature discharge between the two electrodes. The discharge vaporizes the surface of one of the carbon electrodes, and forms a small rod-shaped deposit on the other electrode. High yielding production of CNTs depends on the uniformity of the plasma arc and on the temperature of the deposit forming on the carbon electrode. To produce the SWCNTs the graphite rod must contain metal catalyst powder (Co, Ni, Fe). The pressure in the evaporation chamber and the current are the most important parameters of producing high quallity SWCNTs. Fig.1 Scheme of apparatus producing carbon nanotubes ([8]) 2.2. Sample preparation The suspension of single-walled carbon nanotubes for AFM, TEM and SEM methods was prepared by the same principle. Nanopowder of SWNTs was added in ethanol and exposed to ultrasonic waves. For TEM method, one drop of the suspension was placed on 300 mesh copper grip, which was coated with holey carbon film. Then the sample was dehydrated at 40 C. In case of SEM, the obtained solution was dropped on a sillicon slide. This sample was dehydrated at 40 C. For AFM, the obtained solution was dropped on a mica. Then was the sample dehydrated at 50 C. 2.3. TEM observation Transmission Electron Microscope JEOL 2010F- type-high contrast (HC) was used to observe the internal structure of sample. The microscope had accelerating voltage from 80 to 200 kv and standard magnification from 1000 to 800000 times. Illuminating system consisted of cool beam electron gun with pre-centered LaB 6 filaments. There were three-stage condenser lens (1st, 2nd, 3rd) and five apertures. A beam total angle was 2 in all directions. Evacuation system was created by oil rotary pump and oil diffusion pump for rough evacuation and by sputter ion pump for fine evacuation. Ultimate pressure was 10-5 Pa order (sample chamber). 514

Images were acquired using peltier-cooled CCD camera KeenView. CCD chip in this camera provides maximum resolution of 1376x1032 pixels with a 12bit dynamic range (4096 gray values). The KeenView supports frame rates of more than 20 images per second at 2x binning and of 10 images per second at full resolution. This high frame rate is ideal for locating suitable sample segments directly on screen. Platform item was used for images analysis. Accelerating voltage 200 kv and magnification 100000-400000 times were used in this work. 2.4. SEM observation Scanning Electron Microscope with high resolution is powerful instrument for imaging of fine structures of materials and nanoparticles fabricated by the nanotechnology. For SWCNTs observation and their morphological analysis the Field Emission Scanning Electron Microscope JEOL JSM- 6700F was used. The resolution of secondary electron image (SEI) of the microscope is 1.0 nm (at accelerating voltage 15 kv) or 2.2 nm (at accelerating voltage 1 kv). Accelerating voltage is changing from 0.5 to 2.9 kv in 10 V steps and from 2.9 to 30 kv in 100 V steps. Magnification is from 25 to 19 000 times for low magnification mode and from 100 to 650 000 times for high-resolution mode. The cold field emission gun (FEG) W <310> as a source of electrons is used. It works at the vacuum order 10-8 Pa and generates electrons with small energy spread, which is suitable for obtaining high resolution at low accelerating voltages. This microscope works in three basic imaging modes: SEI - secondary electron image with the in lens (Everhart-Thornley) detector (signal SE I+SEII), LEI - low secondary electron image with the low (Everhart-Thornley) detector (signal SE I+SE II+SE III +BSE) and AUX1 - backscattered electron image with the scintillation BSE detector based on the YAG single crystal under sample (signal BSE) which enable to observe the compositional contrast. The resolution of backscattered electron image with the mentioned BSE detector is units of nanometers. The basic configuration of the FE SEM is supplemented by the energy dispersive analyzer X-ray analyzer INCA (Oxford Instruments) with range of analyzed elements from the boron (atomic number Z=5) to uranium (Z=92). Maximal sample size is 150 mm x 10 mm. For imaging of micromorphology of SWCNTs sample the accelerating voltage 5.0 kv and SEI secondary electron mode was used. 2.5. AFM observation Atomic Force Microscope Explorer ThermoMicroscopes was used as an indirect method for morphological analysis of the sample. Maximum scanning size of the microscope probe was 2x2 µm. Resolution of AFM was 300x300 pixels. Our sample was measured in non-contact mode. Nominal diameter of tip was 10 nm. 3. Results The first used method was AFM. On the Fig.2, bundles of single walled carbon nanotubes among carbon particles can be observed. This method gives us information only about the length of nanotubes and approximate valuation of the bundles diameter. It was impossible to determine accurate value of diameter, because some of nanotubes didn t lie directly on a mica and oscillated under the daze. 515

FORMATEX 2007 A. Méndez-Vilas and J. Díaz (Eds.) Fig. 2 a),b) AFM image of the single-walled carbon nanotubes Due to requirement of accurate diameter of bundles SEM method was used. This method gives information mainly about surface morphology of the sample (Fig.3a, b) and about chemical composition of the sample (Fig.4a),b)). Metallic catalyst particles can be well-defined displayed using AUX1 mode (Fig.5). The only measurable parameters are a size of carbon particles and a diameter and length of bundles. Information about diameter of one nanotube is impossible to find. Fig.3 a), b) represent SEM images of SWCNTs with particles of amorphous carbon and metallic catalyst acquired in secondary electron mode 516

Fig.4 a) represent SEM images of SWCNTs with metallic catalyst particles acquired in secondary electron mode, b) the same place displayed using backscattered electron mode C Ni Spectrum 1 O Si Y Ni Ni 0 1 2 3 4 5 6 7 8 9 10 Full Scale 1011 cts Cursor: 4.464 kev (15 cts) kev Fig.5 represent EDX spectrum of the sample, Ni and Y belong to metallic catalyst particles The TEM was used due to its ability to measure nanotube diameter in the bundle. From the TEM image (Fig.6 a, b) it is possible to determine directly the diameter of one nanotube and bundle diameter. Due to this information number of nanotubes in the bundle can be found out. 517

FORMATEX 2007 A. Méndez-Vilas and J. Díaz (Eds.) Fig. 6 a), b) TEM image of the SWCNTs bundles with particles of metallic catalyst and amorphous carbon, fig. a) marker 20 nm, b) marker 50 nm Sometimes some nanotubes in the sample are not in bundle, so they are alone (Fig.7 a), b)). In this case we can determine nanotube length and diameter directly. Fig. 7 a, b TEM image of the single-walled carbon nanotubes, fig. a) marker 20nm, fig b) marker 10 nm. 4. Conclusion This study shows methods that are possible to use for measuring of carbon nanotubes basic parameters. It is evident, that the best method for detail analysis of carbon nanotubes is TEM. Due to high resolution of transmission electron microscope the sample can be observed even in atomic resolution. SEM and AFM give us information about surface morphology only. Acknowledgements. This work is supported by the project of the Czech Ministry of Education 1M0512 and project of FRVS 667/2007. 518

References [1] S.Iijima, T.Ichihashi, Nature 363, 56 (1993)p.603 [2] D.S.Bethune, C.H.Kiang, M.S.Devries, G.Gorman,Nature 363, p.605 [3] S.J.Tans, R.M.Verschueren, C. Dekker, Nature 393(1998), p.49 [4] S.J.Tans, M.H.Devoret, H. Dai, A.Thess, R.E.Smalley, C.Dekker, Nature 386 (1997), p.474 [5] C. Dekker, Physics Today 52, 1999, p.22 [6] P.L.McEuen, M.S.Fuhrer, H.K.Park, IEEE Trans.Nonotech. 1(2002), p.78 [7] Materials Science and Engineering: B, Volume 130, Issues 1-3, 15 June 2006, Pages 73-80 [8] Y.Ando, T.Sugai, X.Zhao, Materials Today, Oct 2004, pages 22-49 519