Heterogeneous Technology Alliance MIKROELEKTRONIK
Introduction Profile of Partners Europe is leading in the field of microsystem technologies both in research and industrial development. To strengthen this position four major European research institutes are linking their expertise and facilities. The objective is to meet the general trend of increasing complexity and multidisciplinarity for a variety of different branches of the industry. The HTA partners CEA (France), FhG (Germany), CSEM (Switzerland) and VTT (Finland) have concluded an agreement to join their competences. They will carry out joint research projects to create innovative solutions for the European industry. Our scientific and technological skills as well as our infrastructure are devoted to the development of new products for the benefit of European economy. Centre Suisse d Electronique et de Microtechnique SA CSEM, Centre Suisse d Electronique et de Microtechnique (Swiss Center for Electronics and Microtechnology), founded in 1984, is a private research and development center, specialized in micro- and nanotechnologies, microelectronics, systems engineering and communications technologies. It offers its customers and industry partners tailor-made innovative solutions based on its technological expertise from applied research. Approximately 400 highly qualified and specialized employees from various scientific and technical disciplines work for CSEM in Neuchâtel and the four regional centers in Zurich, Alpnach, Basel and Landquart. Commissariat à l Energie Atomique et aux Energies Alternatives CEA (alternative energies and atomic energy commission) is a French government-funded technological research organisation with 15,000 professionals involved in research, development and innovation. CEA is active in three main fields: energy, information and health technologies, and defense and national security. In Grenoble CEA provides world-class R&D for both public and industrial clients through the activities of more than 1,600 researchers and engineers at Leti in micro and nanotechnologies and 700 at Liten in the fields of new and renewable energies. VTT Technical Research Centre of Finland VTT is a globally networked multitechnological contract research organization. VTT provides high-end technology solutions and innovation services. Our aim is to increase the competitiveness of our customers position, promote the creation of new business, and improve and speed up the productivity of R&D. VTT offers access to the cross-disciplinary expertise of 2,900 professionals, unique research infrastructure, and comprehensive partnership networks. Approximately 300 VTT experts are specialized in microsystems and microelectronics. Our other technological focus areas are applied materials, bio- and chemical processes, energy, ICT, industrial systems, services and the built environment, and business research. Fraunhofer Group for Microelectronics The Fraunhofer-Gesellschaft with its approximately 17,000 employees is one of the leading European institutions for contract and advanced research. Its Fraunhofer Group for Microelectronics VµE brings together the activities of fifteen institutes working in the fields of micro- and nanoelectronics and microsystems. Strongly industry driven, more than 2,700 employees are working on the development and implementation of innovative concepts of miniaturized, highly integrated micro systems. Thus Fraunhofer VµE bridges the gap between semiconductor technologies and its applications. The focus is on creating new technical solutions for advanced systems integration, design and process technologies. Additionally, interdisciplinary research projects are prepared and coordinated, studies conducted and strategies identified.
Enabling Technologies & Integration Market-oriented Research Creating economic value from research Back-end, assembly and packaging Market & applications Information & communication knowledge System integration at wafer, chip and The core competences are combined in the Optical communications In terms of technology, future microelectronics board level fields of automotive, healthcare & wellness, (design, devices, etc.) and microsystems are distinguished by extreme 3D-packaging, high density interconnects, information & communication, building control Micropower sources miniaturization and significant cost-reduction embedded components & home automation, environment, security, con- Data storage while addressing environmental concerns. In MEMS assembly and packaging, sumer, aeronautics & space and industrial pro- Wireless (protocols, design, simulation, etc.) terms of implementation, assembly, interconnec- including RF-packaging, photonics and cess control. Backed by a 200 mm MEMS pro- Portable electronics tion and packaging technology will largely deter- flexible systems (SiP) duction line at CEA-Leti in Grenoble, the CSEM- mine the functionality, quality and cost of future Reliability analysis MEMS facilities in Neuchatel, a pilot line for Building control & home automation systems. Thermomechanical simulation organic devices and a MOEMS- production line Solar cells Thermal management at Fraunhofer IPMS in Dresden, and a pack- Smart sensors The Heterogeneous Technology Alliance HTA aging line at Fraunhofer IZM in Berlin, MEMS RF links and sensor network The HTA masters the entire value chain from Photonics sensor and RF MEMS processes on 150 mm Energy saving applied research to production, including mode- Optical elements, sensors and actuator wafers at VTT, the HTA represents a compre- ling, simulation, design and system engineering. devices and systems hensive technology platform. It develops and Security Lighting, high brightness LED produces all types of MEMS devices, including Authentification and anti-forgery Silicon and related CMOS technologies Detectors those using CMOS ICs as a backplane. It also Smart RFID Nanoelectronics down to sub 35 nm Vision sensing, visible and IR integrates all these heterogeneous technologies Vision sensors Low-power and low voltage SoC into a single package or even a single chip. The Terahertz imaging 300 mm CMOS facilities Mechatronics and robotics combination of the technological infrastructure Flexible structures and mechanisms of all four institutions enables the HTA to act as Consumer Silicon and non-silicon microsystems technologies Microhandling a one-stop shop for complete system solutions: Nomadic devices Functional thin films Object-driven robotics Multimedia Optoelectronics Control algorithms Automotive OLED displays and highly miniaturized mobile MEMS and MOEMS, including magnetic RF Electronics (silicon, polymers) displays and bio Bio and medical technologies Fuel cells and batteries Sport and wellness Biosensors Lighting Organic electronic technologies Biochips and lab-on-chip MEMS: pressure, acceleration, gyro, Aeronautics & space Organic CMOS Microfluidic devices encoder Mechatronics OLED integration on CMOS Monitoring systems Imagers and vision sensors Scientific instrumentation Organic photovoltaics Man machine interface Communication Smart power systems Head up projection displays Nanotechnology Microbatteries and supercapacitors, wafer Power control Industrial process control Nanomaterials and nanopowders level batteries Sensor systems solutions Surface structuring and nanopatterning Micro fuel cells technology Healthcare Chemical sensors Nanophotonics Thermoelectricity Lab-on-chip, biosensing, dispensing and Process analytical tools Nanotools Embedded micropower sources diagnosis Nanocharacterization Converters for energy harvesting Implantable devices Environmental control and monitoring Power electronics management Non-invasive monitoring Autonomous sensor network (ASN) Ultra low power electronics design Wearable electronics Clean processing : sustainable electronics, Signal processing Vital data monitoring ecological and economical analysis of pro- Medical imaging cesses Brain-computer interface
Cooperation Contact Cooperation is generally done by defining joint focal areas of research and through joint projects. This method of working enables the cooperating institutes to offer their customers, in particular innovative small and medium-sized firms, access to cutting-edge research and developments in applications at an extremely early stage, thus giving them a distinct competitive advantage. MIKROELEKTRONIK The HTA-partners act as key partners for the world of industry, large groups as well as SMEs, with several hundred contracts in progress. They have launched a variety of start-up companies. A main goal of HTA is to develop partnerships Joachim Pelka Hughes Metras Juha Palve Georges Kotrotsios with the European and global industry using powerful working tools such as technological FraunhoferGroup for Microelectronics CEA Commissariat à l Energie VTT Technical Research Centre CSEM Centre Suisse d Electronique platforms intended to facilitate the transfer of Anna-Louisa-Karsch-Str. 2 Atomique et aux Energies Alternatives of Finland et de Microtechnique SA technologies towards the industry. D-10178 Berlin 17, rue des Martyrs Vuorimiehentie 5, Espoo Jaquet-Droz 1 Germany F-38054 Grenoble Cedex 9 FI-02044 VTT CH-2000 Neuchâtel The format of cooperation ranges from feasibil- France Finland Switzerland ity studies or training courses to technology and process development, the solution to questions Phone: +49 30 688 3759 6101 Phone: +33 4 38 78 22 49 Phone: +358 20 722 2084 Phone: +41 32 720 5695 related to environment and reliability or the joachim.pelka@mikroelektronik.fraunhofer.de hughes.metras@cea.fr juha.palve@vtt.fi georges.kotrotsios@csem.ch special manufacturing of demonstrators and prototypes. The HTA platform will fulfill the pre-industrial research requirements but it will also be able to produce prototypes and small series, to optimize designs and processes in an iterative way by technology mixing. www.mikroelektronik.fraunhofer.de www.leti.fr www.liten.fr www.vtt.fi www.csem.ch The HTA-partners appreciate the support from local and federal authorities as well as from the European Commission.
www.hta-online.eu Imprint Editors: Claudine Julia-Schmutz, CSEM Centre Suisse d Electronique et de Microtechnique SA Maaretta Kalliokoski, VTT Technical Research Centre of Finland Hughes Metras, CEA LETI Commissariat à l Energie Atomique et aux Energies Alternatives Joachim Pelka, Fraunhofer Group for Microelectronics Photocredits: CSEM (5), CEA (2), Fraunhofer IZM (2), VTT (2) Layout : zappo www.zappo-berlin.de Production : Leïla Rognon, CSEM Centre Suisse d Electronique et de Microtechnique SA Print: Imprimerie Baillod SA, Boudry, Switzerland