Smart Systems for Healthcare and Energy Efficiency

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1 Smart Systems for Healthcare and Energy Efficiency EPOSS Annual Forum 8 th October 2010 Salvo Coffa Group VP, R&D General Manager Industrial & Multisegment Sector STMicroelectronics 1

2 Smart Systems Main Blocks

3 3D Heterogeneous Integration and TSV Integrating multiple functions via 3D/ TSV Vertical stacking and connection of various materials, technologies and functional components together : Bio, MEMs and other Sensors Digital processing (MCU, MPU) RF transceivers for data transmission Micro-battery (i.e.thin Film) Advantages Integrated multi-functionality More interconnections Reduced power consumption Smaller packaging Increased yield and reliability Reduced overall costs. Other analog ICs & mixed technologies Through Silicon Vias (TSV) Silicon Vias microscopic detail TSV example for IPAD 3

4 Smart systems on plastic foils Ink Layer Flex Drivers with Touch lamination AM Flex Display Backplane with Pressure Matrix Communication Flex PCB Energy CPUs lamination AM Optical Scan from back side Application fields -User interface (e.g. e-book) -Healthcare sensors (glucose, temperature, glaucoma, ) -Energy (eg. flexible solar cells, microbatteries) -.. 4

5 Smart systems in healthcare

6 Fabrication of devices on plastic substrates Electronics on flexible foils: batch approach Lamination/delamination of plastic foils on rigid substrates and standard clean room processing Tape lamination Protective pellicle cutting and removing Carrier Plastic lamination Plastic cutting Processing PEN bonded on carrier Devices on PEN after debonding Advantages: using existing equipments and facilities for developments and production

7 ST sensors foundry on flexible PI for glucose sensors Fabrication of disposable thin film glucose sensors For use in real-time monitoring / regulation of glucose level packaged sensor insertion device insertion The flexible sensor is packaged in this tube in preparation for insertion into body tissue. Once in the body, glucose levels are detected at the electrodes and communicated by a transmitter to a monitor connect transmitter activation

8 Contact Lens Sensor for Glaucoma detection Non-invasive solution for continuous monitoring of intraocular pressure. The complete system include: - Contact Lens - Antenna and data-cable - Recorder - Software 8

9 Flex Chip On Flex Substrate STMicroelectronics has in-house capability to manufacture thinned 8 wafers at 50µm and 60µm by Taiko process in standard manufacturing facility. Technology developments with wafer thinning down to 30µm by R&D using the same process and facility for flexible electronics application, including smart sensors on flex. Dice cutting and assembly on flexible panels 9

10 inemo : Inertial Measurement Unit MEMS 3xACCELEROMETER 3xMAGNETOMETER MODULE LSM303DLH USB Communication USBUF02W6 10 degrees of freedom (DoF) inertial measurement unit opens the way to new applications MEMS GYROSCOPE LY330ALH MEMS GYROSCOPE LPR430AL MEMS PRESSURE SENSOR LPS001DL TEMPERATURE SENSOR STLM75DS2F STM32F103R POWER MANAGEMENT LD3985M18R LD3985M33R Extended Connector for external module (i.e.wireless Connectivity) Data Storage usd EMIF06-MSD02N16 * ** Digital temperature sensor 6x geomagnetic module MEMS gyroscope Pressure sensor MEMS gyroscope STM32 MCU *Only GPI/O and connector available ** Any Firmware available The perfect integration and complementarity of ST sensors is demonstrated by the inemo (inertial module) system-on-board, giving you, for the first time, 10 degrees of freedom 10

11 inemo Awards 11

12 Rechargeable Solid-State Batteries A key element in the Smart System chain in WSN

13 Harvesting in Smart Systems An example in Wireless Sensor Nodes for Automation Integrating Harvesting in Smart Systems Energy Harvesting Device (PV, Piezo, etc) Energy Conversion Battery Storage Sensors Ultra Low Power Microcontroller Low Power RF Transceiver Autonomous Wireless Sensor Node Enabling wireless sensors for energy autonomy Courtesy EnOcean Alliance 13

14 From disposable sensors to disposable systems

15 A beat forward in remote monitoring BodyGateWay DUN profile Mobile phone Care Server cuff Internet SPP profile scale User / Doctor PC input 16Mbit Flash 1Gbit Flash output User set-top-box Microphone Optical FE Temperature 3axis accel. ECG-Impedance front-end SPI1 µbus PWM ADC STM32 I 2 C I 2 C USART3 PWM ADC LED Bluetooth module ST Integrated Remote Monitoring Solution for Advanced Telemedicine Platforms V - Energy manager 3.3 V 2.8 V ST Components 15

16 Innovation in Power Technologies Ultra Low Power Technologies 3D Heterogeneous Integration/ TSV Advanced BCD, BCD-SOI Harvesting and Thin Film Batteries Innovative Wire Bonding Si Power Transistors & Compound: SiC & GaN Advanced Packaging & System-in-Package 16

17 Improved power efficiency through better technologies Higher Efficiency through Smart Power ICs STripFET STripFET III STripFET VI DeepGATE -30% -80% today PowerMESH 1995 Platinum Implantation SuperMESH -20% MDmesh II MDmesh V -82% -90% Electron Irradiation -30% today Trench /FieldStop/ Emitter Implant -50% 1995 today Coming Soon Cutting Power losses through Power Discrete Technologies 17

18 The innovation in Si Power Devices The most recent Si MOSFET at ST Microelectronics 60 um Si wafer processing for advanced IGBTs devices 18

19 The current challenge: the use of compound semiconductors (SiC and GaN) in Power Electronic Much better performances expected (and already demonstrated) based on their electrical properties: Breakthroughs in SiC crystal growth and GaN epitaxy on Si have been achieved recently SiC 1000and GaN are the next technology node for power conversion ST is working on them at R&D level since many year and is already producing SiC Schottly diode RonArea (mohm*cm 2 ) Si ideal Limit Si SJ Limit MD5 Si IGBT SiC and GaN ideal Limit Breakdown Voltage (v) SiC MOSFET

20 Power devices in new materials (SiC, GaN) SiC Power Schottky (in production) SiC Power MOSFET (product prototype) GaN on Si HEMTs (product Prototype)

21 SiC & GaN - Main Application Map Pw 1 MW 350 kw 100 kw 50 kw 30 kw GaN SiC HEV / EV PHOTOVOLTAIC HEV / EV PHOTOVOLTAIC INDUSTRIAL DRIVES RAIL TRACTIONS SMART POWER GRID WIND MILLS 5kW 1kW NETCOM, SERVER, NOTEBOOK POWER SUPPLY HOME APPLIANCE 600V 1000V 1200V Rated Voltage

22 Smart system for Power efficiency: Power modules IPM Hi End Power Modules

23 Smart systems have a bright future.. with a strong emphasis on Ultra Low Power (ULP) and energy efficiency Growing ULP demand in: Portable electronics Healthcare Portable Monitoring Medical Disposable Devices Personal Fitness, Sport and Wellness Wireless Sensors Networks (WSN) i.e. in Building and Factory Automation, Logistic Energy Harvested Systems (EHS) 23