LiteScope. Highlights

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1 Scanning Probe Microscope designed for integration into the Scanning Electron Microscopes offering unique Correlative Probe and Electron technique. LiteScope

2 LiteScope The unique Scanning Probe Microscope (SPM) LiteScope is designed for easy integration into various Scanning Electron Microscopes (SEM). The combination of the complementary SPM and the SEM techniques enables it to utilize advantages of both commonly used microscopy techniques. The complex sample analysis, including characterization of surface topography, mechanical properties, electrical properties, chemical composition, magnetic properties and others, can be easily obtained by LiteScope measuring with different replaceable probes. The design of the LiteScope enables it to be combined also with other SEM accessories such as Focused Ion Beam (FIB) or Gas Injection System (GIS) for fabrication of the nano / microstructures and surface modifications. In this combination, the LiteScope offers easy and fast 3D inspection of fabricated structures. Moreover, the LiteScope opens a new field of applications introducing completely novel measurement techniques enabling correlative microscopy called Correlative Probe and Electron (CPEM). The CPEM technology is the first solution on the market, which allows measuring of the SPM and SEM in the same place and at the same time using the same coordination system. Only the CPEM technology brings you the full advantages of the correlative imaging of SPM and SEM techniques. Highlights LiteScope improve the performance of the SEM by the SPM techniques Ready for delivery with a new SEM or as a plug-in into existing microscopes Unique Correlative Probe and Electron technology CPEM Complex surface characterization Topography, Roughness, Magnetic properties, Conductivity, Electrical properties Self-sensing probes without optical detection, no laser adjustments Easy integration and mounting / removal of the LiteScope to the stage of SEM microscope Compatible with FIB, GIS, EDX and other accessories Operation of SPM in tilted position (tilt 0 60 ), WD min. 5 mm Possibility to retract measuring head into the body of the LiteScope to free up space around the sample Commercially available probes, wide range of measuring modes Easy and fast replacement of probes and samples User friendly software, operation in web browser, easy remote access LiteScope also works as stand-alone SPM unit

3 Something More Correlative Probe and Electron CPEM LiteScope offers not only powerful enhancement of existing SEM instrument s functionality, it offers even more Correlative microscopy is an approach which benefits from the imaging of the same object by two different techniques. Correlation between the data provided by the separate images provides further information about the sample, which is too complicated to analyze by the individual techniques separately. NenoVision introduces a unique technology Correlative Probe and Electron CPEM (patent pending) developed for application in Correlative Imaging. The CPEM enables simultaneous surface characterization by SEM and SPM of one area at the same time and in the same coordination system. Electron Beam Detector Scanning Electron Electron Signal SPM Signal Scanning Probe CPEM Correlative Probe & Electron The CPEM technology enables correlative imaging of the known standard SEM and SPM methods in a manner basically not available until now. The CPEM brings a solution, which synchronizes the scanned area, resolution and image distortion and enables to correlate both acquired SPM and SEM images in real time. Simultaneous scanning with known constant offset and identical resolution ensures that the analysis is performed on the same surface and it can directly be used for on-line imaging via our NenoView software. Electron Beam SPM Probe Electron Beam SPM Probe X, Y, Z Sample Sample Sample Scanner Scanning Electron Scanning Probe CPEM Correlative Probe & Electron 3

4 Technical Specification LiteScope is a fully operational SPM microscope, which allows you to get detailed characteristics of the sample down to the nanoscale. It can be used as a stand-alone microscope, however its biggest advantage is provided in combination with an electron beam. LiteScope is usually operated in high vacuum, but may be adopted also for ultra high vacuum conditions on request. LiteScope is placed on the stage of the SEM / FIB microscope, therefore it is possible to make common movements according to user s preferences. LiteScope is able to measure even in tilted position, for example for simultaneous usage with FIB technique. In this case the user will appreciate the docking option when the whole SPM probe is hidden in the body of LiteScope. Design highlights Low profile and small size enables integration within SEM / FIB instruments Easy integration procedure mounting on the SEM / FIB manipulator Universal probe holder suitable for several SPM methods and easy Plug & Play assembling Sample tilt up to 60 Optimized mechanical design regarding low vibration level (stiffness and appropriate resonance frequency), integrated preamplifier (to eliminate the signal distortion/noise as much as possible) LiteScope Data Total weight 1 kg The mechanical design respects all essential construction requirements (stiffness and appropriate resonance frequency) to achieve highly stable framework and reliable results with very low level of mechanical vibrations. Vacuum working range Scan range X, Y, Z Maximum sample size Maximum sample height Resolution 10 5 Pa to 10-5 Pa 100 μm 100 μm 100 μm 10 mm 10 mm 8 mm up to 0.4 nm All dimensions are in millimeters (mm). 4

5 Control Unit All electronics controlling the LiteScope are integrated and suited into one control unit. This unit is standard 19 rack and it can be easily mounted to the free slot of SEM electronics or just free positioned matching your actual needs. Features Maximal PLL frequency for dynamic measurements 75 khz suitable for tuning fork based probes (higher frequency, using external PLL, on request) 2 16 bit DAC per scan axis (scan range, offset) to reach maximal resolution everywhere within the view field 6 16 bit auxiliary inputs for simultaneous measurements of user signals (±10 V) Input channels could be used in feedback-loop mixer Probe signal output / monitor External probe excitation All necessary connections for using external Lock-in / PLL Ethernet connection to the LAN / PC 110 VAC or 230 VAC operation, 200 W Software NenoView NenoView is a user friendly software, which allows to fully control the measurements set-up, data acquisition and data processing. NenoView saves the data with all the information about measurement setup; this feature is very helpful for later analysis. Features Web based user interface Easy for new users, flexible for experts User accounts management Personal user accounts Individually configurable accounts layout, parameters, complexity, Remote access to the user data, download of data from control PC to the local computer Remote experiment control via e. g. tablet, smartphone Integrated data postprocessing, analysis, export, 5

6 Imaging Modes and Probes The LiteScope provides and supports a wide spectrum of SPM imaging modes and available probes. The cornerstone and most valuable technical feature of its design is the universal probe holder enabling very easy Plug & Play installation of different probes. The list of the methods and relevant probes supported by LiteScope Akiyama Probe Tuning Fork Based Probes PRS / A* Pt / Ir Wire STM (Scanning Tunneling ) AFM Contact Mode AFM Tapping Mode AFM Conductive MFM (Magnetic Force ) KPFM (Kelvin Probe Force ) EFM (Electrostatic Force ) FMM (Force Modulation Mode) Local voltage measurement Local current measurement * Piezo-Resistive Sensing / Active (PRSA) probes All provided probes are commercially available. Customer made probes can be utilized with the appropriate probe holder designed on request. SEM Integration LiteScope is specifically designed for integration to the SEM microscopes in the Plug & Play approach. LiteScope is simply attached to the electron microscope by four screws to the sample stage and the electrical cables are plugged into the prepared vacuum feedthrough. The LiteScope can be mounted and dismounted in less than 5 minutes. The LiteScope can be easily integrated into the electron microscopes from different manufactures. We provide adequate adapters and feedthroughs which can be adjusted as per a customer s request. 6

7 Application LiteScope could be utilized in many applications from basic academic research to failure analysis in industry. The main areas of the applications are focused to the analysis where conventional SEM does not provide sufficient information about the sample and needs to be extended also to the 3D imaging offered by SPM. The application field is even enlarged and complemented by other imaging modes, which are also available. The unique CPEM technology with the correlative imaging finds direct application in highly demanding fields where imaging by the conventional SEM may provide misleading information due to the surface contaminations related to the chemical contrast which interferes with the surface topography. The CPEM represents the ideal solution for the correct analysis and simple true image interpretation. Basic research in the field of material science and nanotechnology requires detailed and full analysis of the surfaces and nanostructures by the different analytical methods. This is based on the need to fully understand the principles in the nanoscale range. The LiteScope offers the ideal tool for these scientific applications. The direct advantage is evident for technologies like FIB and GIS where the structures are formed directly in the SEM. The tool for the 3D analysis of the newly created structures is essential. Furthermore, the LiteScope equipped with the CPEM and other imaging modes enables the complex analyzes of the prepared structures and nano-devices. SEM image Automated FIB preparation of pillars with well-defined shapes for applications such as atom probe or micro mechanical testing. Source: FEI Company SPM image SPM calibration grid. Source: CEITEC SEM image Logic Device 65 nm technology. Source: FEI Company SPM image Gold crystalline islands on silica / silicon substrate after high temperature annealing. Source: CEITEC SEM image Hexagonal pattern etched in silicon during optical exposure of the photoresist. Source: FEI Company In the industrial quality control and R&D laboratories, LiteScope helps to identify surface structures, topography, surface roughness, contaminations etc. These abilities will be appreciated especially by customers from industry where it is necessary to verify the quality of the surface and thus save on losses due to failure. The wide application range is dedicated to the industry in semiconductors, solar cells, memory devices, MEMS and NEMS. These fields require the nanoscale analysis more than anywhere else. Nowadays requirements for complex analysis of nano-circuits and nano-devices are increasing. LiteScope provides the demanded extension to the real 3D and multi-characterization of samples. 7

8 The NenoVision company has been founded in 2015 as a Spin-off of the Central European Institute of Technology / Brno University of Technology in the Czech Republic. The company is located in the city of Brno, which is friendly University City with a long tradition of scientific instruments development. Brno is also called the Mekka of electron microscopy for its long tradition in electron microscopes development and production. The company founders have more than 10 years of experiences with the development of the Scanning probe microscopes designed for wide range of applications and various environments. NenoVision continues in the tradition and expertise and brings to the market innovative solutions for Scanning probe microscopes with the innovative Correlative Probe and Electron technology. NenoVision s.r.o. Purkyňova 649/ Brno, Czech Republic info@nenovision.com