SEM/FIB Workbench. Klocke Nanotechnik. Microtechnology Network. Motion from the Nanoworld. One of 279 members in a. Pascalstr. 17 Aachen, Germany

Transcription

1 Intro_0 SEM/FIB Workbench Motion from the Nanoworld One of 279 members in a Pascalstr. 17 Aachen, Germany Microtechnology Network

2 Centimeter Stroke Atomic Resolution Modular Nanorobotics Modular Nanorobotics Pool of more than 200 Nanorobotics Components Since 1992 Configuration to independent machines -Assembly, -Tensile-Machine, 3D-Nanofinger, SPM-Lithographer,... Wafer Prober, SEM-Manipulators, X-Ray Sources,... Integration in Nanorobotics systems Universal Testing Benches Micro Production Systems

3 SWB_Ma ni_01 The SEM-FIB Workbench Expand your SEM and/or FIB to a material processing & analytical Nano-Workbench By closed loop Nanorobotics Manipulators Universal usage: For all following applications

4 SWB_Ma ni_01 Sub-nm Resolution Cartesian Manipulators Patented by since 2001 Absolute positioning Automation Secure and easy usage

5 SWB_Mani_04 4 Nanorobotics Manipulators: Installed with docking stations

6 Mani_Beispie le... in different Chambers LEO 15xx Sensors in all Axes FEI XL 30 Double manipulator in FEI XL 30

7 Wafer_Prober _3 Different Probe tips for Manipulation

8 Wafer_Prober _3 Different Probe tips for Current measurement

9 Material_Forensic The Material Research SEM/FIB

10 Wafer_Prober The Wafer Probing SEM Nano-Probing with up to 6 probe tips Single Device Characterization by Nano-probing to Identify Failure Root Cause, TSMC

11 Field_Emissio n Field Emission in a SEM with Nanorobotics manipulators Measurement of Field-emission emission properties of Si-emitter by Nanomanipulation in SEM, NDL Field emission behaviour of a single emitter for a 46 nm distance between emitter and sharp anode

12 Lithography The Lithography SEM High precision sub-stage for SEM based lithography

13 Xray X-Ray Imaging in a SEM X-ray ultramicroscope (XuM) from XRT Limited, sold by GATAN Inc

14 NanoFab The NanoFab in a SEM/FIB Automatic microassembly of smallest components Production of Carbon Nanotube transistors AFM tips sharpened by CNTs Production of GHz antennas The NanoFab from in a network of partners:

15 Principle_1 Inhalt Self Finding Tools The patented 1D-Nanofinger Move to sample and stop 5 nm above Automation => find e.g. a maximum or minimum by scanning and place needle on it:

16 Nanofab _FIB Self Finding Tools

17 FIB The NanoFab Handling of TEM lamellae since 1997 & Kleindiek Nanotechnologie

18 Nanofab _FIB The NanoFab Handling of TEM lamellae

19 Nanofab _FIB The NanoFab Handling of TEM lamellae

20 Mani_Beispie le NanoFab Turnkey solution Including SEM/FIB Automation offers also the automation of dedicated SEM/FIBs: with all features described before, in one control for the whole application

21 NanoFab_ 02 The NanoFab including several different Microgripper series: Force signal

22 A_CNT Nanoassembly of CNTs Handling & assembly of a CNT with 2 manipulators Assembly of a CNT at an AFM-Tip Handling & assembly of a CNT with a microgripper

23 Visible Inhalt Tip Nanoassembly of CNTs Gripping of a single CNT

24 Visible Inhalt Tip Nanoassembly of CNTs Gripping of a CNT bundle Several different gripper classes are available. Actually used version: - Piezo-Gripper Option: - Gripper tips with Force Feedback

25 Tribology _2 Measurements at CNTs Push-Pull experiments at CNT with two Manipulators and I/V-curve

26 Dimensional Inhalt SEM 3D-Nanofinger: The Dimensional SEM 3D Topography Dimensions Contours Angles Stroke: Up to 50 mm in XY and 20 mm in Z Resolution of movement: 1 nm Sensor resolution: 0.5 nm Smallest structure size: < 100 nm Automation Roughness

27 Nanofinger Inhalt Nanofinger : the Sensor A MEMS device Resolution: 0.5 nm

28 Principle_1 Inhalt Measurement Principle of Line Scans Approach with 1 nm increment Contact moment: Store Position of Z-stage Remove tip to predefined distance Move aside with predefined increment

29 DVD_Scratch_1 3D-Nanofinger: The Dimensional SEM Bits of a DVD having two defects that can be measured with the 3D-Nanofinger

30 V-Groove_01 Inhalt 3D-Nanofinger: The Dimensional SEM Measurement of V-grooves

31 V-Groove_01 Inhalt 3D-Nanofinger: The Dimensional SEM Measurement of V-grooves

32 V-Groove_01 Inhalt 3D-Nanofinger: The Dimensional SEM Measurement of V-grooves

33 3D-Nanofinger: CarBreak_01 Inhalt We checked it by stylus, optical profilometer and SEM, none of them can provide the result The Dimensional SEM impossible Measurements

34 CarBreak_02 Inhalt 3D-Nanofinger: The Dimensional SEM Imprint patterns of a car clutch

35 CarBreak_02 Inhalt 3D-Nanofinger: The Dimensional SEM Display Industry: Laser pattern

36 CarBreak_02 Inhalt 3D-Nanofinger: The Dimensional SEM Display Industry: Laser pattern Surface roughness measurement WITHIN a single groove Calculated roughness values: Ra: 8.0 nm, Rq: 8.8 nm, Rz: 20.1 nm, Rt: 35.5 nm

37 Results_3 Inhalt 3D-Nanofinger: impossible Measurements Measurements in small holes Linescan to determine the winding angle Internal screw thread with 1.4 mm diameter

38 LCD_Back_01 Inhalt 3D-Nanofinger: impossible Measurements Display Industry: Backlight pattern 4-facet pyramids Angle: Roughness: Ra = 12.0 nm Rq = 15.9 nm Rz = 70.6 nm Rt = nm Height: µm Width: µm

39 LCD_Back_02 Inhalt 3D-Nanofinger: impossible Measurements Display Industry: Backlight pattern 3-facet pyramids Angle 1: Angle 2: Angle 3: Ra = 24.5 nm Rq = 27.7 nm Rz = nm Rt = nm Height: µm Width: µm

40 Mani_Beispie le SEM DemoLab: Visit us at

41 Centimeter Stroke Atomic Resolution Modular Nanorobotics Modular Nanorobotics Configuration instead of Development Pool of more than 200 Nanorobotics Components Configuration to independent machines -Assembly, -Tensile-Machine, 3D-Nanofinger, SPM-Lithographer,... Wafer Prober, SEM-Manipulators, X-Ray Sources,... Integration in Nanorobotics systems Universal Testing Benches Micro Production Systems

42 Black