Omnidirectional lens and 2D-MEMS scanning mirror for a low cost automotive laser range sensor. Mika Aikio, VTT Ulrich Hofmann, Fraunhofer ISIT
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1 Omnidirectional lens and 2D-MEMS scanning mirror for a low cost automotive laser range sensor Mika Aikio, VTT Ulrich Hofmann, Fraunhofer ISIT 1
2 Minifaros sensor concept (1/4) The idea: A small, low cost laserscanner for automobile safety applications Design targets: Size: 40x40x60 mm Price: 40 in mass production 2
3 Minifaros sensor concept (2/4) How it all works together 3
4 Minifaros sensor concept (3/4) Avalanche photodiode receiver Fiber from the laserdiode Omnidirectional lens MEMS mirror 4
5 Minifaros sensor concept (4/4) So, the basic sensor design is based on two pieces of technology Omnidirectional lens (mouldable) MEMS mirror (semiconductor process) 5
6 Omnidirectional lens (1/5) Omnidirectional lens analogy 6
7 Omnidirectional lens (2/5) Sweeping the system around its axis of symmetry results in an omnidirectional lens, if the gaps are filled with material. 7
8 Omnidirectional lens (3/5) Two manufactured omnidirectional lenses 8
9 Omnidirectional lens (4/5) How does that lens see the world? 9
10 Omnidirectional lens (5/5) Some performance tests of the laserscanner omnidirectional lens. 9 mrad 6 mrad Transmitter divergence 9 x 6 mrad with a 50 µm fiber Surface roughness measurement: Rq 5 nm 10
11 MEMS mirrors MEMS mirrors can be produced with standard semiconductor industry processes Hermetical sealing is comparatively easy for the MEMS packages 11
12 Minifaros MEMS mirror (1/4) Sensor requires a circular scan pattern from the beam steering mirror, as with standard motors. Typical MEMS devices oscillate around one axis or two orthogonal axes Minifaros MEMS mirror uses a tripod support in order to allow a rotational mode for the scanning purpose. Mirror parameters: 7 mm diameter 15 degree tilt angle Minimum of 600 Hz rotation frequency 12
13 Minifaros MEMS mirror (2/4) MEMS mirror structure To prevent dynamic deformation during motion, stiffening rings were added on the backside of the mirror comb drive electrodes mirror circular suspension rear side of the mirror stiffening rings 13
14 Minifaros MEMS mirror (3/4) In order to achieve 15 degree tilts, the MEMS mirror must be vacuum packaged. 1.6mm titanium-getter 1.6mm 14
15 Minifaros MEMS mirror (4/4) Waferlevel packaging steps In a first step the reflection layer and the contact pads are made by deposition and patterning of titanium and protected silver In a second step photolithography and reactive plasma etching are applied to pattern the frontside and the reverse of the MEMS mirror wafer. In a third step, vacuum encapsulation applying wafer bond techniques at temperatures up to 400 degrees Celsius. 15
16 Vacuum encapsulated MEMS mirror wafer A silicon wafer with MEMS mirrors 16
17 MEMS performance testing (1/2) Single axis excitation does not invoke a rotational mode Dual axis excitation produces a circle, as designed Single electrode excitation f = Hz 17
18 MEMS performance testing (2/2) Flatness measurement 80µm mirror plate Deformation: ~400nm Roughness measurement Average roughness: ra~2nm 18
19 Electronic control of tripod mirror (1/2) MEMS mirror PCB 200V driving pulse circuits MEMS control capacitive feedback circuits 19
20 Electronic control of tripod mirror (2/2) MEMS PCB looks like this combined MEMS mirror device Transimpedance amplifier Bond pads Flex wire MEMS PCB Basically, it is a New World Record in the MEMS fabrication! 20
21 Acknowledgements The MiniFaros research project is part of the 7 th Framework Programme, funded by the European Commission. The partners of the consortium thank the European Commission for supporting the work of this project. 21
22 Thank you for your attention! I ll be glad to answer your questions! Mika Aikio, VTT Ulrich Hofmann, Fraunhofer ISIT 22
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