Hakan Ürey Koç University Istanbul Director of OML - Optical Microsystems Laboratory Electrical Engineering Department
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1 Hakan Ürey Koç University Istanbul Director of OML - Optical Microsystems Laboratory Electrical Engineering Department Micro Spectrometers and Laser Scanners on Silicon Wafer 5mm 1mm 2 Microlens Array on 2D MEMS Stage (2009)
2 Koç University, Istanbul, Turkey Private University established by Vehbi Koç Foundation in 1993 Among the World's top 250 universities by THE (Times Higher Education) rankings in ~4,000 undergraduate and ~500 graduate students (>300 international exchange students); Among the top Universities in Turkey based on scholarly research articles and faculty awards Koc University
3 Koc University Prof. Dr. Hakan Ürey Dr. Necmettin Kilinc Sven Holmström (Sr. Res. Eng.) Erhan Ermek (Res. Eng.) Berker Hüsam (Res. Eng.) Selim Ölçer (Tech.) Graduate Students Kaan Aksit Aref Mostafazadeh Ulas Adiyan Onur Cakmak Osman Eldeş Kivanc Hedili Basarbatu Can Ziya Isıksacan Özgecan Karabulut Uğur Aygün Research Focus: MEMS/NEMS sensors and actuators, Micro-optics, 2D/3D Display and Imaging Systems
4 Selected Patents
5 Awards and Invited Presentations
6 Projects Funding -Industrial Microvision, Aselsan, Fraunhofer IPMS, OPET, Inventram EC Projects FP6 Networks (NEMO, 3DTV, MINOS) FP7 STREP projects (MEMFIS, HELIUM3D) FP7 IAPP Project FET-Open Project TÜBİTAK (National Funding) 5 projects completed 2 projects on-going 3D displays (3D laser TV, 3D head-worn projection displays, 3D light-field display using LED arrays); Pico-projectors and Laser scanners (highperformance electromagnetic, electrostatic, and piezoelectric actuated record-performance MEMS scanners; FR4 based dynamic zoom barcode scanner); Micro-optics (exit pupil expanders, heads-up-display screens, Gabor super lenses); Endoscopic imaging (Microlens on MEMS stage based laser scanner); Portable Micro-Spectrometer (MEMS-based Fourier transform infrared spectrometer, Lamellar grating interferometers, FR4 based interferometers); Thermal imaging (MEMS bimaterial sensor array; CMOS optical readout IC; 3D CMOS integration); Portable Nano-Biosensor (MEMS sensor array for parallel multi-analyte screening for portable point of care diagnostics).
7 Patent Licensing Agreements (consists a portfolio of about 25 patents) Microvision Inc. (USA): MEMS and FR4 scanners, 3D displays, novel micro-optical screen. Fraunhofer IPMS (DE): MEMS spectrometers Aselsan Inc. (TR): Thermal imaging sensor array Inventram Inc. (TR): Biosensors for point-of-care diagnostics of multiple diseases. Opet Inc. (TR): Tagging and identification of functional fluids for vehicles
8 MEMS SCANNERS AND PICO-PROJECTOR APPLICATIONS
9 1 st Laser Scanning Display Product NOMAD à 2004 Red monochrome display with SVGA resolution Blue and green lasers were not yet commercial (direct green LD is available only recently)
10 Pico Projectors (Sponsor Microvision Inc.) Koc University Optics and MEMS scanners for laser projectors >10 patents licensed to industry; Sponsor: Microvision (USA) Latest Pico- projector product by Microvision st Pico Projector product by Microvision
11 MEMS scanners for pico- projectors and MEMS spectrometers on Si wafer. MEMS Scanners Single coil bimagnetic actuation WVGA Resolution 850 x 480 pixels 300um Silicon wafer Structure formed with DRIE Front Side: Electroplated multi-turn coils PZR sensors on both flexures Al mirror Backside KOH etched to reduce weight Yalcinkaya et.al. JMEMS,2006
12 Piezoelectric Actuated Fast- Axis Scanner Koc University 125um SOI PZT: 2um solgel deposi=on Collabora=on with Paul Muralt Group, EPFL Desired Mode Baran et.al. IEEE MEMS Conference, mm round mirror, 24V opera=on. 40deg op=cal scan angle 40kHz resonance, Also demonstrated PZT angle sensor. Record Performance!
13 Resonant MEMS Scanner Comparison for Dynamic Displays at 60 fps =Display Horizontal Resolution =Display Vertical Resolution Record performance obtained Piezo and EM actuation preferred Future Goal: Full HD resolution capable fast and slow axis scanners
14 Ice Hockey Using PicoP, Camera, and Retros Koc University
15 SCREEN TECHNOLOGIES FOR NOVEL DISPLAYS
16 Another Application of See-Through Screen Windshield Embedded HUD Built into windshield projector PicoP Requires varying pitch and varying tilt angle microlenses in 2D array form to form a large eyebox
17
18 See-through Screens For HUDs (Sponsor: Microvision Inc.) Demo in a car Camera focused on the screen
19 Transparent displays using embedded lenses Epoxy Partially reflective coating Cover glass Viewing window Thin metal dielectric mirror as the reflective surface and a narrow band-pass filter M. Hedili, SPIE Photonics Europe Conf., April 2012
20 Novel See-Through Screen and Transparent Display Concept
21 Novel 3D Displays Using Pico-Projectors Koc University Mixed- polarizanon Stereoscopic 3D Display Auto- stereoscopic 3D Display Aksit et al, IEEE-JDT 2012
22 3D Display PicoP Çalışması İle Kaan Akşit ve Osman Eldeş Ağustos 2012 de IMID Konferansında Merck Award Kazandılar Koc University
23 3D Head-Worn Projection Display and Retro Screen Hakan Urey, New Project Starting Jan 2013
24 3D Laser TV Koc University Sponsor: FP7, HELIUM3D project Completed in 2011 Partners: DMU, UCL, HHI, Philips, Barco, TuE
25 Bi-axial MEMS Scanner Exit Pupil Expanders for Head-Worn Displays Gaussian Beam from point light source Intermediate Image Plane Ocular (viewing optics) θ o D lens FOV Exit pupil Viewer s eye Diffractive Exit Pupil Expander (EPE) (NA expander) Expanded exit pupil
26 FR4 BASED MICRO-OPTO- MECHATRONIC SYSTEMS
27 FR4 as a Micro-Opto-Mechatronic Platform (using standard PCB technology) FR4 Board with EM actuated scanners LED / Waveguide Integrated with FR4 Scanner Sponsors: Microvision Inc (USA) NEMO (EC FP6 project)
28 Barcode Reader with Extended Depth of Focus Koc University 1 st Proto First barcode reader system with dynamic focusing ability! Result of 1.5 yrs development together with NEST, India
29 MEMS FT SPECTROMETER
30 Commonly Used Michelson Configura5on IR Source Elliptic reflector Beam Splitter LGI Configura5on IR Source Elliptic reflectors Stationary Mirror Lamellar Grating Interferometer (LGI) Based Fourier Transform Spectrometer Advantages Compensation Plate Reference Laser Moving Mirror Sample Plane - 1st 0th 1st PD MEMS device Sample Plane PD IR Detector Reference Laser IR Detector Lamellar Gra5ng Interferometer (LGI) Advantages over Michelson Interferometer: ü LGI eliminates ü reference mirror ü beam spliser ü compansa=on plate ü vacuum packaging of MEMS ü interference alignment efforts ü LGI is Achroma=c ü LGI is less suscep=ble to vibra=on noise ü LGI is smaller, more robust and easier to assemble X LGI useful range is limited by Talbot distance O. Ferhanoglu et al., OpNcs Express, 2009.
31 MEMS LGI Device Koc University Micro Fourier Transform Spectrometer Patent licensed to Fraunhofer IPMS (Dresden, DE) Sponsor: FP7 / MEMFIS project Partners: Bruker, FhG-IPMS, VIGO, RHE, CTR, Sopra MEMS Diffraction Grating
32 Transmission Spectra Comparison: Commercial Desktop FTIR vs. Our Compact FTIR Poor SNR at >3,000cm -1 Nearly all absorption peaks are resolved Achieved spectral resolution of 20-30cm -1 in 2.5um-16um range One of the best reported performance with MEMS spectrometers
33 MOEMS UNCOOLED THERMAL IMAGING
34 MEMS Thermal Imaging MEMS Thermal Imaging Sensor Array Patent pending Sponsor: ASELSAN (TR) Bimaterial bending due to IR hear Sensed using interferometric optical readout Nano-Biosensor for POC diagnostics Sponsor: TÜBİTAK IR window (BaF 2 ) Infrared Camera Pixels 50um Hermetic sealing by laser welding Package developed with VTT Vacuum pipe
35 BIOSENSOR FOR POC DIAGNOSTICS
36 Portable Biosensor for POC Diagnostics In-vitro multianalyte screening device Patent pending Sponsor: TÜBİTAK, Inventram Using MEMS and optical readout Multiplexed detection 64 sensor parallel readout Tested MDC <0.1 ng/ml; Standard ELISA MDC 0.2ng/ml Robust portable system PTL 2008; Biosensors and Bioelectronics 2010 and 2011 papers
37 Summary Micro-optics and MEMS is a powerful combination with many applications: MEMS scanners and pico-projectors Special Augmented Reality (AR) screens 3D displays Wearable displays FR4 as a micro-opto-mechatronic platform Spectrometers Thermal imaging Biosensors for multiplexed detection
38 Contact Details Prof. Dr. Hakan Urey Koç University Electrical Engineering Sariyer, Istanbul TURKEY Office Phone: Lab Phone: Web:
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