FRAUNHOFER IPMS: WE SHAPE THE LIGHT. PRODUCTS AND FIELDS OF APPLICATION

Transcription

1 FRAUNHOFER IPMS: WE SHAPE THE LIGHT. PRODUCTS AND FIELDS OF APPLICATION DR. HARALD SCHENK

2 AGENDA Fraunhofer- Gesellschaft Fraunhofer-IPMS in Profile Products and Fields of Application

3 AGENDA Fraunhofer- Gesellschaft Fraunhofer-IPMS in Profile Products and Fields of Application

4 JOSEPH VON FRAUNHOFER ( ) Researcher»Fraunhofer Lines«in the sun spectrum Inventor New methods of lens processing Entrepreneur Head of Royal Glass Factory

5 FRAUNHOFER MISSION Research and Development Applied research on behalf of industry and society Applied basic research Entrepreneurship Institutes as profit center One third of the budget through industrial commissions Institutes Spin-offs Customers Industry Public authorities

6 FRAUNHOFER FINANCING MODEL IPMS 35% Basic Funding Public Funding IPMS 30% IPMS 35% Industrial Commissions Research Budget 2009 Fraunhofer-Gesellschaft 1,6 billion Euros

7 DEVELOPMENT OF THE FRAUNHOFER-GESELLSCHAFT Number of Fraunhofer-Institutes Budget in million

8 FRAUNHOFER GROUPS Information and Communication Technology Life Sciences Microelectronics Light and Surfaces Production Materials and Components

9 FRAUNHOFER GROUP MICROELECTRONICS 12+2 Institutes Employees

10 AGENDA Fraunhofer- Gesellschaft Fraunhofer-IPMS in Profile Products and Fields of Application

11 HISTORY 1992 Foundation of the Dresden part of the Fraunhofer Institute for Microelectronic Circuits and Systems (IMS) Foundation of the Fraunhofer Institute for Photonic Microsystems (IPMS) Modernization of the institute. Opening of a new clean room Opening of COMEDD Center for Organic Materials and Electronic Devices Dresden

12 EXECUTIVE BOARD Managing Director MEMS/MOEMS Prof. Dr. Hubert Lakner Deputy Director Dr. Harald Schenk Director ORGANIC Prof. Dr. Karl Leo

13 BUDGET IN MIO EUROS Budget in mln euros Fraunhofer Basic Funding Public Projects (EU) Public Projects (national) Industrial Projects (plan)

14 STAFF MEMBERS Employees Scientific Assistants Employees (plan)

15 OUR BUSINESS MODELL: From R&D to Pilot-Fabrication Consulting service Feasibility tests Simulation Device and system development Complete process development Prototypes and demonstrators Characterization & Test Pilot-Fabrication Foundry Services

16 AGENDA Fraunhofer- Gesellschaft Fraunhofer-IPMS in Profile Applications and Competencies

17 INSTITUTE STRUCTURE Executive Board Prof. Dr. Hubert Lakner Prof. Dr. Karl Leo Dr. Harald Schenk Administration Marketing & Public Relations Facility Management Quality Management AD MPR GMI QM Micro Scanner Devices Spatial Light Modulators Organic Materials and Systems Sensor and Actuator Systems Lifetronics MSD SLM OMS SAS LIF Engineering ENG Fabrication FAB

18 MICRO SCANNER DEVICES Business Unit MSD Dr. Harald Schenk Head of Business Unit

19 TECHNOLOGICAL BACKGROUND Business Unit MSD 1D and 2D rotational/ translational Frequencies: 0.1 khz 35 khz Diameter: 0.5 mm 4.0 mm Deflection angle: up to +/-34 Optical scan range: 136 Flatness: better than λ/10

20 APPLICATIONS Business Unit MSD 1D & 2D-scanner projection displays grating spectrometer scanning microscope a) b) laser micro camera optical path length modulator

21 SPATIAL LIGHT MODULATORS Business Unit SLM Dr. Michael Wagner Head of Business Unit

22 TECHNOLOGICAL BACKGROUND Business Unit SLM 16 μm pitch 2048 x 512 pixel 2 khz frame rate row line n-1 row line n column lines m m+1 m+2 m+3

23 MASK WRITER: PRINCIPLE OF OPERATION Business Unit SLM Each flash from a pulsed excimer laser coincides with a fully loaded new pattern on the SLM and with the correct position on the maskblank simultaneously to print a stamp. Optical principle: Partially coherent diffractive imaging with filtering of high spatial frequencies in an aperture. High speed datapath with real-time rasterizing from CAD to grayscale bitmap in FPGA architecture. A stepper with a programmable reflective mask and 200X reduction = 248 nm

24 MICRONIC S SIGMA 7300/7500 Business Unit SLM Application Quick turn-around and costeffective production of 65 nm and 45 nm node reticles Interconnect layers (manhattan & X-design) 2 nd level printing of advanced PSM Status Several systems in the field 150 nm dense on mask 150 nm space on mask

25 ORGANIC MATERIALS AND SYSTEMS Business Unit OMS Dr. Christian May Head of Business Unit

26 OLED-TECHNOLOGY Business Unit OMS Flat area source Total thickness < 2mm Highly efficient Diffuse Lighting Lambert emission Non toxic Polymer (Spin-Coated) and Small-Molecule (Evaporated) Material Low weight _ + Transport layer Emitting layer Transport layer

27 Business Unit OMS Organic Photovoltaics OLED on CMOS Signage APPLICATIONS Lighting

28 LARGE AREA OLED LIGHTING Business Unit OMS LED Point source High Peak brightness High efficiency Long lifetime Loss for area distribution high 370mm x 470mm glass substrates OLED Area source Low Peak brightness High efficiency Lifetime to be improved Low loss for area distribution

29 OLED SIGNAGE APPLICATIONS Business Unit OMS OLED nameplate OLED steering wheel

30 OLED on CMOS Business Unit OMS Orange top emitting PIN-OLED on CMOS OLED Cam test chip (0.35μm CMOS) Active matrix OLED- Microdisplay Photodiode camera matrix

31 ORGANIC SOLAR CELLS Business Unit OMS Total thickness: < 1 μm Highly flexible High freedom in color and shape Only small amounts of org. materials are required (< 1g/m 2 ) Cost effective production due to close to room temperature processes Large area coating Production technologies similar to SM OLEDs Short energy payback time (~ 1 year (estimated))

32 SENSOR AND ACTUATOR SYSTEMS Business Unit SAS Dr. Michael Scholles Head of Business Unit

33 PERSONALIZED INFORMATION SYSTEMS Business Unit SAS OLED Microdisplays Laser Projection

34 SENSING AND IMAGING Business Unit SAS Laser Scanning Microscope (3D) Metrology

35 OPTICAL SENSORS AND SPECTROSCOPY Business Unit SAS Micro Spectrometer Hyperspectral Imaging

36 LIFETRONICS Business Unit LIF Prof. Dr. Wolf-Joachim Fischer Head of Business Unit

37 INTRACORPORAL SENSOR IMPLANTS Business Unit LIF 125 khz-rf tag Acceleration sensor Lock-In Amplifier Passive RF-tag with integrated controller and data memory Artificial hip joint with acceleration sensor and RFID data and energy transmission (relaxation of the joint) Wireless measurement of micro motions in surgical implants (monitoring of the healing process)

38 BODY AREA NETWORK FOR TELE HOME CARE Business Unit LIF 3-channel-ECG for 24 hours measurements Pulse oxymeter Continuous blood pressure measurements Bluetooth-data transmission

39 THANK YOU FOR YOUR ATTENTION! Dr. Harald Schenk 0049 (0)