Mikrosystemtechnik in Deutschland. Microsystems Technology

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1 Mikrosystemtechnik in Deutschland 2014 Microsystems Technology in Germany 2014

2 Impressum Publisher/Herausgeber trias Consult Johannes Lüders Crellestraße 31 D Berlin Phone +49 (0) Mail Web Layout Uta Eickworth, Dammerstorf Mail Web Printing/Druck Grafisches Centrum Cuno, Calbe 2014, Printed in Germany ISSN Picture Credits/Bildnachweis Title/Titel With the BionicOpter, Festo has technically mastered the highly complex flight characteristics of the dragonfly Mit dem BionicOpter hat Festo die hochkomplexen Flugeigenschaften der Libelle technisch umgesetzt Source/Quelle: Festo AG & Co. KG Page/Seite 8 Integration processes using polyurethane enable not only flexible but also stretchable electronics Integrationsprozesse auf Polyurethan machen Elektronik nicht nur flexibel, sondern auch dehnbar Source/Quelle: Fraunhofer IZM 14 Assembled flex PCB and thin pitch adapter at LHCb in CERN Assemblierte flexible Leiterplatte und Dünnschicht Pitchadapter am LHCb in CERN Source/Quelle: Cicor RHe Microsystems GmbH 50 Optical inspection of micro structures for 3D integration Optische Untersuchung von Mikrostrukturen für die 3D-Integration Source/Quelle: Fraunhofer IZM 62 Implantable microelectrode system for measuring brain signals Implantierbares Elektrodensystem für Hirnstrommessungen Source/Quelle: NMI Reutlingen 79 Structured wafer for sensor application. Strukturierter Wafer für Sensor-Anwendungen. Source/Quelle: SCHOTT AG 95 Sensors for highly dynamic and precise current measurement Sensoren zur hochdynamischen und präzisen Strommessung Source/Quelle: Sensitec GmbH

3 Table of Contents 6 Welcoming Address Grußwort Holger Reinecke, Director of IMTEK, University of Freiburg Executive Board HSG-IMIT, Villingen-Schwenningen Microsystems Technology Added Value for SMEs Mikrosystemtechnik mehr Wert für den Mittelstand 8 Positioning in International Competition Positionierung im internationalen Wettbewerb 10 Germany Trade and Invest GmbH: Germany: Europe s Key Market and Leading Innovator 12 VDE/VDI-GMM: Microsystems Technology a Key Technology of Great Strategic Importance 14 Contributions to Topical Fields of Innovation Beiträge zu aktuellen Innovationsfeldern 16 Klaus Meder, Robert Bosch GmbH: MEMS Enabler for the Internet of Things and Services 18 Markus Wächter, devolo AG: Security for Smart Grids in Germany 20 Volker Nestle, Festo AG & Co. KG: Microsystems Technology for Integrated Production 22 Dirk Schlenker, Fraunhofer IPA: Microsystem Technology as a Basis for Integrated Manufacturing 24 Klaus-Peter Hoffmann, Thomas Velten, Fraunhofer IBMT: Microsystems Technology in Implantable Medical Devices 26 Jürgen Spinke, Roche Diagnostics GmbH: Smart Reagent Dosing Novel Cartridge Concept for In-Vitro Diagnostic Applications 28 Thomas Gessner, Fraunhofer ENAS: From Microsystems to Smart Integrated Systems 30 Andreas Schuetze, Saarland University: Current Trends in Sensor Technology and Sensor Systems 32 Peter Krause, First Sensor AG: Trends in Sensor Technology 34 Rolf Slatter, Sensitec GmbH: High Bandwidth Magnetoresistive Current Sensors Open up New Possibilities in Power Electronics 36 Jan-Henning Dirks, MPI for Intelligent Systems, et al.: nano.ar Biomimetic Anti-Reflective Surface Coatings 3

4 Table of Contents 38 The German Congress on Microsystem Technologies 2013 Der Deutsche Mikrosystemtechnik-Kongress Bastian Memering, RWTH Aachen, et al.: Roll-to-Roll-Production of Micro Structures in Polymer Foils by Ultrasonic Hot Embossing 42 Jürgen Keck, HSG-IMAT, et al.: Printed Ferrite-Based Toroidal Core Coils as Magnetic Field Sensors 44 Simon Herrlich, HSG-IMIT, et al.: Clinical Evaluation of a Telemedically Linked Intraoral Drug Delivery System 46 Jürgen Wolf, Würth Elektronik GmbH & Co. KG, et al.: Ultra-thin Silicon Chips in Flexible Microsystems 48 Marcel Tondorf, IMTEK, University of Freiburg, et al.: Self-assembly of MEMS Using Electrostatic Forces 52 Adrian Grewe, Technische Universität Ilmenau, et al.: Opto-mechanical Microsystems for Hyperspectral Imaging Sensors 54 Christian Helke, Technische Universität Chemnitz, et al.: Integration of Rolled-up Nano Membranes with MEMS- and Lasertechnology 56 Alexander Rockenbach, RWTH Aachen, et al.: Fluidic Particle Transport at Interfaces through Actuated Micro-hairs with Switchable Nano Structure 58 Maziar Afshar, Universität des Saarlandes, et al.: Novel Laser Induced ITO Nanowires for Gas Sensor Applications 60 Nadine Winkin, RWTH Aachen, et al.: Nano-Modified Flexible Micro-Electrode Array with an Integrated Flexible CMOS-Chip for Biological and Medical Applications 62 Results and Portfolios of Research Institutions Ergebnisse und Leistungen aus Forschungseinrichtungen 64 Fraunhofer ENAS: Reliability of Smart Integrated Systems 66 Fraunhofer ICT-IMM 68 Fraunhofer IOF: Solutions with Light Embedded Optical Systems as Multifunctional Tools 70 Fraunhofer ISIT: Silicon Microsystems From Research & Development to Industrialization 72 Hahn-Schickard-Gesellschaft für angewandte Forschung e.v. 74 NMI Reutlingen: Microsystems for Life Sciences: Artificial micro organs, biosensors and electronic implants 76 Technische Universität Ilmenau: Micro-Nano-Integration at IMN MacroNano 78 Fraunhofer IPA: Solutions for Reliable Automated Microsystem Manufacture 4

5 Inhaltsverzeichnis 79 Innovations and Competencies of Companies Innovationen und Kompetenzen aus Unternehmen 80 2E mechatronic GmbH & Co. KG: 2E mechatronic: MID Specialist with High Innovation Potential 81 AIM Micro Systems GmbH: Innovative Optopackaging with MicRohCell compact 82 AMO GmbH: From MEMS to NEMS 83 Cicor Microelectronics Reinhardt Microtech GmbH: Cicor Microelectronics: Innovative Manufacturing Methods for Flexible Thin Film Substrates 84 ix-factory GmbH: Glass and Silicon for MEMS and Microfluidic Devices 86 Jobst Technologies GmbH: Lab on Chip for Life Sciences 87 mechonics ag: Competence in Micropositioning for more than 10 Years 88 Micro Systems Engineering GmbH: Micro Systems Engineering GmbH Partner and Specialist for Advanced Electronics 90 Micro-Hybrid Electronic GmbH: Infrared Expertise Maximum Performance IR Components 91 microworks GmbH: X-Ray LIGA a New Mainstream Appeal 92 Physik Instrumente (PI) GmbH & Co. KG: Raman Microscopy, Atomic Force Microscopy (AFM) and Piezo-Based Sample Positioning: A Combination of Methods for High-Precision Optical, Topographic and Molecular Analyses 93 Polytec GmbH: Optical Analysis of 3-D Mechanical Motions of Micro Systems with High Displacement Resolution 94 Advanced Optics SCHOTT AG: Glass Wafers 95 Networks between Research and Industry Netzwerke zwischen Forschung und Industrie 96 ZVEI Fachverband Electronic Components and Systems 98 VDMA Micro Technology Association 100 IVAM Microtechnology Network 102 AMA Verband für Sensorik und Messtechnik e. V. 104 MST BW Mikrosystemtechnik Baden-Württemberg e.v. 106 Berlin Partner für Wirtschaft and Technologie GmbH 5

6 Preface Microsystems Technology Added Value for SMEs Holger Reinecke Director of IMTEK, University of Freiburg Mechanics and electronics, chemistry and physics, materials engineering and computer science, optics and fluidics, biology and medicine, energy and the environment microsystems technology uses and combines scientific results of individual disciplines and thereby generates innovations which serve diverse markets. Microsystems technology is the driver for future systems referred to as cyber physical systems, smart systems integration or industry 4.0. These systems reliably accomplish their dedicated tasks, are self-adaptive and show remarkable cognitive functionalities. In recent decades microelectronics created the basis for technological progress. Through global standardization further developments and influences to new products were predictable. With the Road Map mass quantities as well as efficient manufacturing facilities became possible. The concentration on a few enterprises controlling the global market and the continued outsourcing of jobs to low-wage countries are negative side effects. In contrast, especially for SMEs, microsystems technology offers opportunities to operate across the value chain and to occupy market niches. The production of smaller quantities, the refinement of mass products by specific adjustments or the intelligent combination of methods, materials and intermediate products open up new prospects for the SMEs and generate knowledgebased jobs in different industries. As a result highly specialized jobs for professionals in development, production, sales and service will be generated. In microelectronics the approach of a specific refinement of components referred to as More than Moore creates value independent of the constant miniaturization of chips. The impact and potential of microsystems technology already today goes far beyond the options of microelectronics. In this sense, microsystems technology can certainly be considered as a forerunner for microelectronics industry, particularly in countries with high labour costs, such as Europe, Japan or the United States: the microelectronics could be described as a discipline of microsystems technology. As foolhardy this idea seems to be, so impressive are the implications for the strategic direction of science, business and politics. Physics, chemistry, mechanical engineering, electrical engineering, computer science or biology, these are the essential core areas for future creation of knowledge. Across disciplines microsystems technology is the platform for transferring the knowledge base into products and services for different markets and creates jobs for people with different trainings and skills. Hopefully you will enjoy reading Microsystems Technology in Germany and generate many new ideas. With best regards Holger Reinecke Director of IMTEK, University of Freiburg Executive Board HSG-IMIT, Villingen-Schwenningen 6

7 Grußwort Mikrosystemtechnik mehr Wert für den Mittelstand Mechanik und Elektronik, Chemie und Physik, Werkstofftechnik und Informatik, Optik und Fluidik, Biologie und Medizin, Energie und Umwelt die Mikrosystemtechnik nutzt und verbindet wissenschaftliche Erkenntnisse der einzelnen Disziplinen und generiert dadurch Innovationen für unterschiedlichste Märkte. Auf dem Weg zu Systemen, die sich gegenseitig identifizieren, synchronisieren und ihre dezidierten Aufgaben zuverlässig erfüllen, wird die Mikrosystemtechnik zum Treiber für Industrie 4.0, Cyber Physical Systems und Smart Systems Integration. Die Mikroelektronik schuf in den letzten Jahrzehnten die Grundlagen für technologischen Fortschritt. Durch weltweite Standardisierung wurden weitere Entwicklungen berechenbar, zukünftige Produkte frühzeitig planbar und eine Road Map für Massenstückzahlen sowie effiziente Fertigungsstätten erst möglich. Die Konzentration auf wenige, den Weltmarkt beherrschende Konzerne und die fortwährende Verlagerung von Arbeitsplätzen in Niedriglohnländer sind die negativen Begleiterscheinungen. Dahingegen ermöglicht die Mikrosystemtechnik es vor allem kleineren und mittelständischen Unternehmen innerhalb der Wertschöpfungskette zu agieren und Marktnischen zu besetzen. Die Produktion kleinerer Stückzahlen, die Verfeinerung von Massenprodukten durch spezifische Anpassungen oder auch die intelligente Kombination von Verfahren, Materialien und Zwischenprodukten eröffnen ganz neue Perspektiven für den Mittelstand und generieren wissensbasierte Arbeitsplätze in unterschiedlichsten Branchen. In deren Folge können hochspezialisierte Arbeitsplätze für Fachkräfte in Entwicklung, Produktion, Vertrieb und Service entstehen. Die Mikroelektronik verfolgt mit dem Ansatz More than Moore die spezifische Verfeinerung von Bauteilen, die Mehrwert unabhängig von der ständigen Verkleinerung der Chips schafft. Der Einfluss und die Potentiale der Mikrosystemtechnik gehen dabei schon heute deutlich über die Optionen der Mikroelektronik hinaus. In diesem Sinne kann die Mikrosystemtechnik durchaus als Wegbereiter für die Mikroelektronik insbesondere in Industrieländern mit hohen Lohnkosten wie Europa, Japan oder den USA betrachtet werden: die Mikroelektronik wird zur Teildisziplin der Mikrosystemtechnik. So vermessen dieser Gedanke erscheint, so beeindruckend ist die Folge für die strategische Ausrichtung für Wissenschaft, Wirtschaft und Politik. Physik, Chemie, Maschinenbau, Elektrotechnik, Informatik oder Biologie, dies sind die wesentlichen Kernbereiche der zukünftigen Wissensgenerierung. Die Mikrosystemtechnik stellt die Plattform zur Umsetzung der Wissensbasis in Produkte und Dienstleistungen für unterschiedlichste Märkte über die Disziplinen hinweg und schafft Arbeitsplätze für Menschen mit unterschiedlichsten Ausbildungen und Fähigkeiten. Ich wünsche bei der Lektüre Mikrosystemtechnik in Deutschland viele neue Ideen. Mit besten Grüßen Holger Reinecke Institutsleiter IMTEK Universität Freiburg Institutsleitung HSG-IMIT, Villingen-Schwenningen 7

8 Positionierung im internationalen Wettbewerb

9 Positioning in International Competition

10 Positioning in International Competition Germany: Europe s Key Market and Leading Innovator The German Market Thanks to astonishing innovation and a growing range of applications microsystems are performing more and more tasks in our daily life, often without being noticed. Much of this innovation is developed and applied in Germany, a leading high-tech nation with a long tradition in microtechnology. Germany s global market share in microsystems technology (MST) is forecast to increase to a significant 21 percent by The compound annual growth rate (CAGR) during the coming decade is estimated at nine percent, with turnover increasing from EUR 100 billion in 2010 to EUR 235 billion in The number of employees in the industry is expected to increase from 750,000 to over 964,000. Research and Innovation Both Research & Development and commercialization is supported by the Federal Ministry of Education Research (BMBF), which has provided hundreds of R&D projects with several hundreds of millions of Euros worth of funding. By providing financial support as well as other, non-monetary industry-supporting policies the German government is reinforcing Germany as a technology location. It has defined microsystems technology as one of the key technologies in its main national innovation program: High-Tech Strategy Germany welcomes international investors: The Brandenburg Gate, a national monument in the heart of Berlin Source: Michael Fuery Today s MST chips offer cost-optimized and value-added system solutions for an ever wider range of applications International companies are encouraged to join such programs in order to profit from research funding and the excellent quality of their German partners. Germany s MST industry consists of a large number of Small to Medium Enterprises (SMEs) supported by innovative research institutes such as the internationally-renowned Fraunhofer Institutes. This cooperative climate has helped Germany become a global leader in microsystems technology. It is also one of the major factors helping national and international companies that invest in Germany to become global players in microsystems technology. MST products Made in Germany benefit from an excellent international reputation thanks to a long tradition and a consistent focus on high-quality engineering. The attractiveness of the industry makes Germany the most important target market for European MST part suppliers, and an ideal location for MST company European headquarters. Market drivers and applications One of the main patterns of this sector is its cross-technology nature, which creates an impressively wide range of applications such as these following examples. Medical As Germany is Europe s most populous country and largest health care market, top German R&D institutes and companies play a 10

11 Positioning in International Competition Jonathan Schoo Manager Investment Electronics & Microtechnology leading role in developing eversmaller applications in preventative health care, diagnostics or microsurgery. Modern lab on a chip diagnosis techniques deliver reliable analyses in no time, while new devices can monitor and prevent diseases without the patient being admitted to a hospital. Drugs specifically prescribed according to individually conducted, highly accurate tests could make the treatments of widespread diseases such as Alzheimer s or cardiovascular diseases far more successful timeous and efficient. Underlining its long standing as a global leader in the industry, Germany s medical MST community has generated a turnover of EUR 12.9 billion in 2010, which is expected to double by Mobility MST is also revolutionizing mobility, both in Germany and elsewhere. In logistics, innovations such as Radio Frequency Identification (RFID) labels allow data on goods to be transmitted, read and stored through radio signals. Advanced driver assistance systems avoid collisions on the road, saving lives and easing transportation for millions of people. The world-renowned German automotive industry and its national and international suppliers are already integrating these systems into their products. Automotive MST has a market volume of more than EUR 30 billion in Germany MST-supported parking assistance systems make cars more comfortable and safer to drive today and this is forecast to increase by 200% by Industry Industry is another important MST application area. The importance of micro process engineering and functional systems in sectors such as machinery and equipment, chemistry and pharmaceuticals, and nanotechnology cannot be underestimated. Thanks to progress in areas such as mounting and connecting technology, micro-nano integration and technical cognition among many others, the industrial sector is another beneficiary of the innovation taking place in microsystems technology. In Germany, microsystems technology turnover for industry applications in 2020 will have increased threefold from 2010, amounting to EUR 47.1 billion. Germany Trade & Invest Germany Trade & Invest is the foreign trade and inward investment agency of the Federal Republic of Germany. Our mission is to promote Germany as a location for investments and to advise foreign companies on how to invest in German markets. With our team of industry experts, incentive specialists, and other investment-related services we assist companies in setting up business operations in Germany. At the same time, we also provide information on foreign markets for companies based in Germany, making Germany an ideal location for European headquarters. All investment services are treated with the utmost confidentiality and provided free of charge. Germany Trade and Invest GmbH Friedrichstraße 60 D Berlin Phone +49 (0) Fax +49 (0) Mail Web 11

12 Positioning in International Competition Microsystems Technology a Key Technology of Great Strategic Importance Dipl.-Ing. Dipl. Wirtsch.-Ing. Dirk Friebel, Chairman VDE / VDI Society of Microelectronics, Microsystems and Precision Engineering (GMM), Interim Manager, Neuss In recent decades, microsystems technology (MST) has developed into one of the most important interdisciplinary technologies. With double-digit growth rates, major leverage effects and steadily growing application potential, it numbers among the most important drivers of innovation and growth. It is a decisive factor for the competitiveness of many industrial application industries and thus has enormous strategic importance for Germany s industrial strength. Only those who master MST technologies and systems can prevail in global innovation competition, successfully develop new products for key markets of the future, and thus contribute to growth and employment in key industries. With its integration of sensor technology, evaluation electronics and actuation systems as well as miniaturization and software, MST makes possible innovative systems solutions for virtually all social, business and industrial applications. Fig.1: 300mm-wafer. Source: ST-Leti In particular, these include the key areas of energy/climate, mobility and communication, healthcare and aging societies, safety, production and logistics. Fig.2: Chip-to-Wafer Stock for 3D Integration Source: Fraunhofer IZM In automotive electronics, MST contributes to the reduction of CO2, increases safety and comfort with the help of innovative driver assistant systems, and supports the optimization of traffic flows through car-to-car communication. In medical engineering, MST solutions are becoming increasingly important for implants as well as for diagnostic and monitoring systems. In telecommunications, MST modules provide the basis for new functions and the evolution of mobile phones into intelligent mobile assistants. In industrial electronics, MST plays a growing role in wireless installation systems, building monitoring and the increasing use of sensor technology in machines and plants. The vision Industry 4.0 can t be realized without MST. In safety systems and logistics, countless MST-based solutions are 12

13 Positioning in International Competition Dr. Ronald Schnabel VDE/VDI Society of Microelectronics, Microsystems and Precision Engineering (GMM) Here, the VDE/VDI Society of Microelectronics, Microsystems and Precision Engineering (GMM) is playing an important role as a broadly-based expert platform for knowledge transfers, and is making major contributions to the strengthening of MST in Germany through position papers, workshops, conferences and initiatives. Fig.3: TU Darmstadt being developed or are already in use, such as in smart cards, secure authentication systems as well as in various RFID solutions for identifying goods. New MST applications are also opening up in micro-optics, the aerospace industry and in measuring and control systems. Germany s research and industry holds a very solid position in MST in international comparison. The fact that the importance of MST for German industry is growing is reflected by steadily increasing MST market volumes. By far the biggest customer industry here is automotive electronics, followed by industrial electronics, data processing and telecommunications as well as consumer electronics. The VDE believes the fields of energy efficiency and assistance systems for aging populations, in particular, will be important MST growth drivers in the future. Important technology trends in coming years will be selfsufficient microsystems with their own energy supply and wireless communication, the replacement of mechanical/ hydraulic systems with microelectronic solutions, on-board diagnostic systems, and multifunctional highly integrated solutions. The VDE and the German Federal Ministry of Education and Research (BMBF) are very successfully cooperating in the field of microsystems technology both in the framework of the VDE/BMBF Microsystems Technology Congress as well as in pre-competitive network projects to utilize the great innovation potential of MST in Germany for industry. The GMM believes one of the challenges in the future will be to support innovative small and mid-sized enterprises that are shaping Germany s industrial structure in the field of MST and that contribute to Germany s leading position for innovation in turning the results of their basic research into marketable products. Other challenges will be to reduce bureaucratic hurdles to innovation, expand knowledge networks and increase support for young talents and research. The VDE believes the goal of a far-sighted and future-oriented MST engagement is to rigorously utilize the great potential of MST and strategically strengthen Germany s competitive position in other key technologies and leading markets. VDE/VDI Society of Microelectronics, Microsystems and Precision Engineering (GMM) Dr. Ronald Schnabel Stresemannallee 15 D Frankfurt Phone +49 (0) Fax +49 (0) Mail Web 13

14 Positioning in International Competition 14

15 Beiträge zu aktuellen Innovationsfeldern Contributions to Topical Fields of Innovation

16 Contributions to Topical Fields of Innovation MEMS Enabler for the Internet of Things and Services When Robert Bosch in 1886 launched its Workshop for Precision Mechanics and Electrical Engineering, the company that today is the world s largest supplier of automotive electronics, already followed an interdisciplinary approach: Electrical Engineering and Fine Mechanics. This combination already describes two of the most pronounced genes in Bosch s DNA. Today, Bosch is manufacturer of one of the world s most diversified MEMS product ranges with new applications adding to the already impressive spectrum of possible uses. With their set of properties, MEMS are at the heart of today s most sophisticated technology developments and play a crucial role as enablers to the Internet of Things. MEMS are space-saving devices and thus can be integrated into even the smallest gadgets and consumer devices. They are easy to combine and impressively versatile, measuring many physical values from acceleration to rotation rate or magnetic field. An example could be Bosch s BNO055 an Application-Specific Sensor Node with Absolute Orientation-sensing using an integrated 32-bit microcontroller for Fig. 1: MEMS micro-electro-mechanical systems Figure 2: Bosch sets size, performance and integration benchmarks in consumer MEMS sensor fusion and signal pre-processing tasks. Being the world s largest automotive supplier, it is consequential that Bosch s first MEMS product, a pressure sensor, was designed for the automotive industry. Today, Bosch manufacturers a broad range of MEMS sensors for usage in vehicles from pressure and mass flow sensors to acceleration and angular rate sensors, enabling carmakers to improve the safety, fuel efficiency, and comfort of their vehicles. Current premium cars accommodate about 50 MEMS sensors a figure that highlights the versatility and significance of MEMS for automotive technology. This significance will even increase for coming car generations. MEMS sensors will be at the heart of future Advanced Driver Assistance Systems (ADAS), from Adaptive Cruise Control to Drowsiness Detection, Automated Parking and, eventually, semi- and fully automated driving functions. But over the past years, a new market segment for MEMS has emerged that grows even faster than automotive. Many modern consumer appliances and devices such as electronic games or smartphones are inconceivable without these sensors. With their ability to capture all kinds of physical movement, they enable system designers to implement innovative HMI concepts with constituents like scrolling, context awareness and even Augmented Reality. Cool functions like motion detection, portrait-landscape orientation switching, flat detection tap/double-tap sensing or free-fall detection are based on MEMS sensors. Even microphones, indispensable ingredient for voice control functions as another element of modern HMIs, are implemented as MEMS sensors. With its complete portfolio of such sensors, Bosch literally enables 16

17 Contributions to Topical Fields of Innovation Dipl.-Ing. Klaus Meder President of the Bosch Automotive Electronics Division Robert Bosch GmbH mobile devices to hear, feel, and sense the world around them. The success of smartphones is reflected in the global production figures: MEMS for consumer markets already surpassed automotive MEMS in 2012, when 27 per cent of the world s MEMS production was absorbed by automotive markets while consumer markets already bought 30 per cent of that production volume. This trend will continue in 2016, the automotive markets will account for 26 per cent while consumer markets are expected to absorb 38 per cent. Bosch s volume development also reflects this trend; since 2010, the company produces more consumer electronics sensors than automotive sensors. The overall MEMS production will continue to rise steeply. In 2012, 600 million MEMS sensors left Bosch s two wafer fabs located in Reutlingen, Germany. Within the next two years, the company will triple its production capacity. What s more, new applications will trigger a third wave of demand for MEMS after automotive and consumer electronics: The emerging Internet of Things and Services will only be possible with massive networking at the sensor level. With their small size and extremely low power consumption, MEMS are ideal for the implementation of Ubiquitous Sensor Networks (USNs) in the Internet of Things and Services (IoTs), which will connect products and devices of our daily use. Figure 3: Automatic communication among devices and systems makes internet of things and services possible In this environment, MEMS will play a key role as sensors for industrial and building applications. Connected Home concepts will bring new functionalities and applications to the users, helping them to optimize their use of energy, provide remote access to all devices of their living area and offer automated reaction on environmental situations for example, devices that automatically close the roof windows when it starts raining. This new world of useful applications will require the deployment of huge quantities of MEMS sensors. As it usually is the case with predictions, the estimates vary widely, but serious experts find figures possible from 1 billion up to 1 trillion units. It is important to mention that this demand is on top of the automotive and CE MEMS sensor demand which itself still continues to grow. The IoTs with its new world of innovative applications will continue to drive the MEMS development towards smaller size, higher integration and wider functionality much in the same way we encounter in the BN055 MEMS sensor which, in a way that stands out in this market environment, combines high functionality, sensor fusion technology, low power consumption and efficiency in data communication. Further useful applications are at the horizon, which all have one thing in common: They rely on MEMS sensor data. Examples are elderly care, connected vehicles, smart traffic and even smart cities. As a company, which owns the entire design and production value chain for MEMS in-house and as pioneer in MEMS technology, Bosch is very well prepared to take on these challenges. Dipl.-Ing. Klaus Meder Bosch Sensortec GmbH Gerhard-Kindler-Strasse 8 D Reutlingen Phone +49 (0) Fax +49 (0) Mail Web 17

18 Contributions to Topical Fields of Innovation Security for Smart Grids in Germany The power grid is currently undergoing changes, moving towards a model of highly volatile and localised energy production and storage, supported by IT and communication components. Smart metering enables the detailed measurement and automatic remote reading of consumption and production levels. It supports flexible tariffing and dynamic load optimisation, ultimately aiming to achieve cost and consumption reduction. The security requirements surrounding smart metering are mainly authenticity, integrity and privacy of data. Even more challenging is grid automation, which is critical for the safety and availability of the grid. The overall situation calls for an integrated security architecture that not only addresses all relevant security threats, but also satisfies functional, safety, performance, process integration and economic side conditions. An essential element of a smart grid is the smart metering system that monitors the consumption or production of certain commodities at the user s side and facilitates sending of consumption or production information to external entities. This data is then used as the basis for activities such as billig or management of supply. In Germany, the amendment of the Energy Industry Act makes the evaluation of smart metering systems mandatory. Therefore, the Federal Ministry of Economics and Technology (BMWi) has asked the Federal Agency for IT security (BSI), to develop a security concept for a smart meter gateway (SMGW). Technically the BSI decided to implement the protection profile (PP) according to the Common Criteria standard [1] and set the minimum assurance level for this PP to the EAL 4+. This standard is internationally acknowledged and therefore nables adoption in other countries. The protection profile describe the function of the device on an abstract level and is not a detailed device specification. The functional environment of the SMGW is depicted in Fig. 1. The SMGW is going to be placed on the premises of private or commercial customers and serves as a central communication hub for local devices. The SMGW has three distinct physically separated interfaces: The local metrological network (LMN) connects to different smart meters (for different energy sources). The home area network (HAN) provides private households and businesses with real-time analysis of their energy consumption. Tablet-computers at home turn into monitoring devices that show usage levels. Fig. 1: Application scenario for the smart meter gateway with its three distinct interfaces to the local metrological network (LMN), to the home area network (HAN) and to the wide area network (WAN). 18

19 Contributions to Topical Fields of Innovation Dr.-Ing. Markus Wächter Director Strategic Positioning devolo AG The wide area network (WAN) is the extended connection to authorised external organisations and the smart meter gateway administrator. Powerline communication will be used to transparently transmit data over the existing power grid from the user locations via a net station to authorised external market organisations or the smart meter gateway administrator. With these interfaces, the SMGW serves as the central communication unit between devices of private and commercial consumers and service providers of a commodity industry (e.g. gas, water, electricity). It also collects, processes, and stores meter data and is responsible for the distribution of this data to external parties. The SMGW is based on a threat model and features the following security functional requirements (among others [2] ): Establishment of trusted channels with meters and other entities. Transport-level protection on all channels (TLS V1.2). Cryptographic support (ECC-256, SHA-256, AES-128). Mandatory use of a certified hardware security module. Fig. 2: Close-up of the smart meter gateway. Local key/certificate management with mandatory use of full public key infrastructure. Stored data integrity monitoring and action, integrity self-tests. Physical tamper protection and detection. Secure gateway software update. Life-cycle management. Fig. 2 shows a prototype-illustration of the smart meter gateway. It will fit into a four unit wide top-hat rail housing and therefore can be easily installed at the user s premises. Within the framework of a 2 year project [3], which is funded by the BMWi, devolo AG teamed up with well wellknown companies, universities and energy utilities to meet the challenge of developing a SMGW that fulfils the above requirements. The German smart meter gateway sets the highest security and privacy standards on data handling and transmission in smart grids. It presents a clear level of assurance and sets a strong national standard ensuring the interoperability of devices. This necessitates complex and costly product development and certification processes. It raises the exciting question as to which other countries might follow the German approach. References [1] In addition to the protection profile for the gateway of a smart metering system BSI- CC-PP-0073, the protection profile BSI- CC-PP-0077 for the security module and the documents for the technical guidelines BSI TR must be applied. [2] BSI: Protection Profile for the Gateway of a Smart Metering System, https://www.bsi. bund.de/shareddocs/downloads/de/bsi/ SmartMeter/PP-SmartMeter.pdf [3] The project is called Sichere Powerline- Datenkommunikation im intelligenten Energienetz (SPIDER ). Further details can be found under Dr.-Ing. Markus Wächter Director Strategic Positioning devolo AG Charlottenburger Allee 60 D Aachen Phone +49 (0) Mail Web 19

20 Contributions to Topical Fields of Innovation Microsystems Technology for Integrated Production In recent publications about future production, integrated production systems increasingly attract attention and are considered to deliver answers to the upcoming questions about possible applications and requirements of Cyber Physical Systems in a broader sense. But irrespective of its popularity, it can be stated that the term integrated production itself is used inflationary and that the technological challenges that lie behind it are often overlooked. Hence, it very well makes sense to resolve the term of integrated production and assess the main activities that drive industrial research at present and will do so in the future. There are three vital aspects that can be associated with the term integration. Two of them describe the technological challenges that arise out of a strong demand on increased flexibility, adaptivity and cost efficiency of future production systems: integrated components like shown in Picture 1 with enhanced physical capabilities (sensing, acting, processing and communication) on the one hand and a virtual integration of capabilities of the Enterprise Resource Planning and Manufacturing Execution System (ERP and MES) onto the component level on the other hand. The third aspect of integration considers the role and working environment of human in future production systems and likewise represents a socio-economical perspective on the topic. Interestingly enough, each of these three aspects shows a clear link to Microsystems Technology: From a bottom-up perspective, intelligent components integrate sensors, actuators and controllers to provide a real-time image of the production process and to allow fast reconfiguration and adaptation as well as self optimization capabilities. For this purpose, the basic physical functionalities as well as media and data interfaces have to be integrated in a holistic approach on the micro level in smart and embedded systems. Moreover, to facilitate cost efficiency and functionality on the component level, the multiple use of basic functionalities has to be pursued. Fig. 1: Integrated Pneumatic Drive (Source: Festo) From a top-down perspective, the virtual integration of the functionality of control levels from ERP and MES enhances the decentralized intelligence of components. Adaptive production systems make use of agent technologies to ensure a maximum of flexibility and cost efficiency on the shop-floor level. Beyond the technological challenges of data processing on intelligent components, there is a strong need for action in the field of data interfaces and standardization of transfer protocols to allow a proper exchange of data between control levels and components vice versa. Adaptive production as well as inte- 20

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