Tecniche a scansione di sonda per nanoscopia e nanomanipolazione 2: AFM e derivati



Similar documents
Tecniche a scansione di sonda per nanoscopia e nanomanipolazione: STM, AFM e derivati

STM and AFM Tutorial. Katie Mitchell January 20, 2010

Piezoelectric Scanners

Atomic Force Microscopy. Long Phan Nanotechnology Summer Series May 15, 2013

Tecniche a scansione di sonda per nanoscopia e nanomanipolazione: SNOM e litografie

ATOMIC FORCE MICROSCOPY

Scanning Probe Microscopy

Lecture 4 Scanning Probe Microscopy (SPM)

5. Scanning Near-Field Optical Microscopy 5.1. Resolution of conventional optical microscopy

7/3/2014. Introduction to Atomic Force Microscope. Introduction to Scanning Force Microscope. Invention of Atomic Force Microscope (AFM)

1 Introduction. 1.1 Historical Perspective

(Nano)materials characterization

IBM's Millipede. Conor Walsh Friction and Wear of Materials RPI Hartford 12/13/12

Tecniche a scansione di sonda per nanoscopia e nanomanipolazione 3: SNOM e litografie

INTRODUCTION TO SCANNING TUNNELING MICROSCOPY

SPM 150 Aarhus with KolibriSensor

Keysight Technologies How to Choose your MAC Lever. Technical Overview

Nanotribology of Hard Thin Film Coatings: A Case Study Using the G200 Nanoindenter

Scanning probe microscopy AFM, STM. Near field Scanning Optical Microscopy(NSOM) Scanning probe fabrication

nanovea.com MECHANICAL TESTERS Indentation Scratch Wear

Multi-mode Atomic Force Microscope (with High Voltage Piezo Force Microscope and +/ Oe Variable Field module.)

UNIVERSITY OF SOUTHAMPTON. Scanning Near-Field Optical Microscope Characterisation of Microstructured Optical Fibre Devices.

Scanning Near-Field Optical Microscopy for Measuring Materials Properties at the Nanoscale

Microscopy and Nanoindentation. Combining Orientation Imaging. to investigate localized. deformation behaviour. Felix Reinauer

Basic principles and mechanisms of NSOM; Different scanning modes and systems of NSOM; General applications and advantages of NSOM.

Near-field scanning optical microscopy (SNOM)

CREOL, College of Optics & Photonics, University of Central Florida

Force Spectroscopy with the Atomic Force Microscope

A METHOD OF PRECISE CALIBRATION FOR PIEZOELECTRICAL ACTUATORS

NEAR FIELD OPTICAL MICROSCOPY AND SPECTROSCOPY WITH STM AND AFM PROBES

Surface Profilometry as a tool to Measure Thin Film Stress, A Practical Approach. Gianni Franceschinis, RIT MicroE Graduate Student

Surface Analysis with STM and AFM

It has long been a goal to achieve higher spatial resolution in optical imaging and

Usage of Carbon Nanotubes in Scanning Probe Microscopes as Probe. Keywords: Carbon Nanotube, Scanning Probe Microscope

Non-Contact Vibration Measurement of Micro-Structures

Lecture 6 Scanning Tunneling Microscopy (STM) General components of STM; Tunneling current; Feedback system; Tip --- the probe.

SCANNING PROBE MICROSCOPY NANOS-E3 SCHOOL 29/09/2015 An introduction to surface microscopy probes

1. Photon Beam Damage and Charging at Solid Surfaces John H. Thomas III

Counting and imaging bacteria using fluorescent microscopy & Electron Microscopy and Atomic Force Microscopy (AFM)

4 Thermomechanical Analysis (TMA)

AFM (Atomic Force Microscope) Instructions

Injection moulding and modelling on a micro scale

FRT - setting the standard

Atomic Force Microscopy. July, 2011 R. C. Decker and S. Qazi

DOE Solar Energy Technologies Program Peer Review. Denver, Colorado April 17-19, 2007

BNG 331 Cell-Tissue Material Interactions. Biomaterial Surfaces

Atomic Force Microscope Physics Assignment

Tecnologie convenzionali nell approccio top-down; I: metodi e problematiche per la deposizione di film sottili

Traceable cantilever stiffness calibration method using a MEMS nano-force transducer

Application Note #128 Quantitative Mechanical Property Mapping at the Nanoscale with PeakForce QNM

Calibration of AFM with virtual standards; robust, versatile and accurate. Richard Koops VSL Dutch Metrology Institute Delft

Le nanotecnologie: dal Laboratorio al Mercato. Fabrizio Pirri Politecnico di Torino Istituto Italiano di Tecnologia

Atomic Force Microscope and Magnetic Force Microscope Background Information

Preface Light Microscopy X-ray Diffraction Methods

Microscopy: Principles and Advances

Laboratorio Regionale LiCryL CNR-INFM

ENS 07 Paris, France, 3-4 December 2007

Laser-induced surface phonons and their excitation of nanostructures

Atomic Force Microscope

Characterization of surfaces by AFM topographical, mechanical and chemical properties

Microscopie à force atomique: Le mode noncontact

Advancements in High Frequency, High Resolution Acoustic Micro Imaging for Thin Silicon Applications

Bending, Forming and Flexing Printed Circuits

WOOD WEAR TESTING USING TRIBOMETER

Atomic Force Microscopy Observation and Characterization of a CD Stamper, Lycopodium Spores, and Step-Height Standard Diffraction Grating

Nano-Spectroscopy. Solutions AFM-Raman, TERS, NSOM Chemical imaging at the nanoscale

Microscopic Techniques

Nano-Microscopy: Lecture 1. Pavel Zinin HIGP, University of Hawaii, Honolulu, USA

Encoders for Linear Motors in the Electronics Industry

Photolithography. Class: Figure Various ways in which dust particles can interfere with photomask patterns.

Microscopy. MICROSCOPY Light Electron Tunnelling Atomic Force RESOLVE: => INCREASE CONTRAST BIODIVERSITY I BIOL1051 MAJOR FUNCTIONS OF MICROSCOPES

Unsteady Pressure Measurements

Charge injection and detection in semiconducting nanostructures studied by Atomic Force Microscopy

Modern Construction Materials Prof. Ravindra Gettu Department of Civil Engineering Indian Institute of Technology, Madras

Thermal Analysis Excellence

Indiana's Academic Standards 2010 ICP Indiana's Academic Standards 2016 ICP. map) that describe the relationship acceleration, velocity and distance.

Fast Z-stacking 3D Microscopy Extended Depth of Field Autofocus Z Depth Measurement 3D Surface Analysis

Nanoelectronics 09. Atsufumi Hirohata Department of Electronics. Quick Review over the Last Lecture

The Design and Characteristic Study of a 3-dimensional Piezoelectric Nano-positioner

STATIC COEFFICIENT OF FRICTION MEASUREMENT USING TRIBOMETER. Static COF Time(min) Prepared by Duanjie Li, PhD

DNA NANOWIRES USING NANOPARTICLES ECG653 Project Report submitted by GOPI

Microindentation characterization of polymers and polymer based nanocomposites. V. Lorenzo

Sputtered AlN Thin Films on Si and Electrodes for MEMS Resonators: Relationship Between Surface Quality Microstructure and Film Properties

Applying NiTi Shape-Memory Thin Films to Thermomechanical Data Storage Technology

The Study on Mechanical Performances of Thin SiO 2 Film by. Micro-Bridge Methods

Scanning Near Field Optical Microscopy: Principle, Instrumentation and Applications

Comparison of Bearings --- For the Bearing Choosing of High-speed Spindle Design. Xiaofan Xie. Dept. of Mechanical Engineering, University of Utah

MEMS mirror for low cost laser scanners. Ulrich Hofmann

Microscopie à champs proche: et application

Spin-flip excitation spectroscopy with STM excitation of allowed transition adds an inelastic contribution (group of Andreas Heinrich, IBM Almaden)

Chapter Outline. Mechanical Properties of Metals How do metals respond to external loads?

Agilent 5500 AFM. Data Sheet. Features and Benefits

Transcription:

LS Scienza dei Materiali - a.a. 2008/09 Fisica delle Nanotecnologie part 5.2 Version 7, Nov 2008 Francesco Fuso, tel 0502214305, 0502214293 - fuso@df.unipi.it http://www.df.unipi.it/~fuso/dida Tecniche a scansione di sonda per nanoscopia e nanomanipolazione 2: AFM e derivati Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 1

2. Scanning force microscopy (AFM and relatives) Scanning STM Tunneling Atomic AFMForce Microscope Microscope (STM) (AFM) Scanning SNOM Near field Optical Microscope Electron tunneling Force microscopy Optical near-field Locally probed quantity (SNOM) AFM is probably the most straightforward (and easy to understand/interpret) probe microscopy Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 2

AFM probes The local character of AFM relies on the availability of suitable probes Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 3

Cantilever/tip fabrication: examples Lithography Anisotropic etching Removal etching Nitride growth (Metallization) Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 4

Examples of commercial cantilevers Many different cantilevers are commercially available They are different for: -Dimensions and shape, typ 0.1-0.5 mm: -Elastic constant (materials and design, typ 0.05-50 05 50 N/m; -Tip coating (conductive, super-hard, etc.) Cantilever choice depends for instance on: -Operation mode (contact/non contact); -Quantities to be probed (e.g., if an electric field is needed, a conductive tip has to be used); -Possible material manipulation (e.g., nanoindentation requires super-hard tips) Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 5

Basics of tip/sample interaction When the tip is approached to the sample (at sub-nm distance!), forces depend roughly on van der Waals interaction between the apical tip atoms and the surface At large distance forces are weakly attractive, at short distance they are repulsive Surface topography (height variations) can be sensed by monitoring the force, i.e., the cantilever deflection When tip/sample distance is kept in the repulsive region, contact operating mode is achieved When tip/sample distance is kept (mostly) in the attractive region, non-contact operating mode is achieved Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 6

Tip/sample forces Various kind of forces do cooperate in providing the typical force vs distance behavior experienced in AFM Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 7

A few words on elastic forces Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 8

A few words on van der Waals I Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 9

A few words on van der Waals II Van der Waals interaction is based on different dipole/dipole interaction mechanisms, all leading to a r -6 behavior This results into a r -m force on the cantilever depending on specific tip shape and distance Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 10

Not to forget: adhesion/capillary effects Adhesion effects can further affect the interaction (unless UHV operation is performed!) Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 11

Scanning Force Microscopy An optical lever method is used to detect the cantilever deflection Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 12

Force vs distance curves In the approaching step, force (i.e., cantilever deflection) vs distance plots have a typical behavior Force vs distance curves can be used to get local information on the mechanical properties of the surface (force spectroscopy) Probe distance from sample Note: we are discussing of the contact mode operation and tip might penetrate into the sample (as in nanoindentation we will see later!) Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 13

Contact mode of operation Realistic tip/surface potential In the contact mode of operation, mechanical interaction leads to tip displacement, i.e., to cantilever deflection related to topography changes Contact mode is suitable for rather rigid surfaces As in STM (constant gap), typical operation foresees a feedback system, acting on the Z direction of the piezoscanner, which keeps constant the cantilever deflection during the scan The error signal of the feedback system provides a topography map (with a calibrated sub-nm space resolution) Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 14

Operation modes (AFM contact) The most straightforward AFM operation mode involves contact (repulsive) forces Constant height and constant force configurations are possible (the latter, the most common, is based on feedback) Major drawback: surface degradation, especially with soft matter Locally probing the (repulsive) force allows for topography and morphology reconstruction Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 15

Non-contact modes of operation Tapping mode Dynamic operation In non-contact (tapping) mode, the tip/sample distance is continuously modulated thanks to a vibrating tip Tip vibration is typically achieved by using a piezoelectric transducer fed by an oscillating voltage and mechanically coupled to the cantilver Oscillation frequency is typically set around the mechanical resonance frequency of the system (cantilever+tip), i.e., hundreds of khz The vibration reflects in an oscillation of the position-sensitive detector (multiquadrant diode) and amplitude is monitored Tip/sample interaction leads to a damping (and phase shift) of the recorded oscillation when the distance gets small Non-contact modes suitable for soft surfaces No sample preparation is needed!! Suitably conditioned electronic signals are sent into the feedback system in order to stabilize the distance and to derive the topography map Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 16

Effects on the cantilever resonance Cantilever oscillatons are strongly dependent on damping (both in terms of amplitude and frequency/phase) Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 17

True non-contact mode Vertical oscillation (tapping) is applied to the tip, at a frequency close to its resonance Resonance frequency variations (and dephasing) are measured Feedback keeps the resonance frequency constant by changing the probe/sample distance, hence topography is reconstructed Non-contact modes allow for analysis of soft surfaces Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 18

Examples of other operation modes Semicontact: t the tip gets in temporarily contact thus combining advantages of contact and non-contact Force modulation: an additional contrast mechanism related to material (mechanical) properties is found and exploited Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 19

A very few examples of AFM images I 1.2 1.0 nm 100 80 0.8 μm 0.6 0.4 60 40 YBCO/YSZ/Ni 02 0.2 20 0.0 0 0.0 0.2 0.4 0.6 μm 0.8 1.0 1.2 See http://www.veeco.com Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 20

A very few examples of AFM images II Multi-phase systems Huge variety of AFM applications!! Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 21

A very few examples of AFM images III 2D-FFT Contact-mode topography of nonanethiol SAM grown on Au/mica Hexagonal arrangement structural variant c ( 3x 3) R30 Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 22

Phase imaging techniques Animations at www.ntmdt.com! Dephasing between mechanical oscillation (e.g., the tapping oscillation) and the response of the surface (affecting the tip deflection) depends on the viscoleasticity of the surface (purely elastic vs Newton fluid) Interpretation similar to a forced and damped mechanical oscillator Topography p map Phase map Phase imaging: - adds a contast mechanism; - allows for local material analyses Materiale tratto da seminario PhD di Michele Alderighi, 2005 Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 23

4.A. Nanoindentation and AFM http://www.nanoindentation.cornell.edu/ edu/ Elastic recovery (Nano)indentation is a common technique to ascertain elastic/plastic behavior of the materials (if carried out with a load modulation, also surface viscoelasticity can be analyzed) Plastic deformation Data pertaining to the elastic modulus and to the plastic behavior (e.g., shear modulus) can be attained and comparison with macroscopic results (e.g., Vickers hardness, Rockwell, ) may lead to interesting insights on the microscopic nature of surfaces and nanostructures Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 24

More details on nanoindentation Polymers can be plastically deformed If thermoplastics are used (and tip is heated), deformations can be reversed Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 25

Examples of nanoindentation I Besides tribological and nanomechanical applications, nanoindentation can be envisioned as a nanofabrication tool or a data storage method Da B. Bhushan, Handbook of nanotechnology (Springer, 2003) Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 26

Examples of nanoindentation II Material AFM tip Material hardness: H P = MAX A C Gold Either h F or h C can be used as representative of the indentation depth h Contact area derived from h through specifiic models Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 27

Nanoindentation of a hard coating (BALINIT C) Examples of nanoindentation III (a) Aluminium Bulk DNISP (b) Silicon Wafer DNISP (c) Polystyrene Layer DDESP (d) PMMA Layer DDESP DNISP tip AFM image of an indentation mark Layers are 100 nm thick spin coated films on glass Material Investigated depth range [nm] α H 0 [GPa] Literature data [GPa] Silicon 0.5 4.0 1.9 13±2.4 13 Gold 5 28 1.3 1.3±0.2 1.1 1.4 Balinit C 2 15 1.0 5.5±1.2 5 8 (?) Polystyrene 3.0 10 1.2 PMMA 1.0 30 0.73 0.83±0.2 2 0.58±0.1 6 ~0.3 ~0.4 Behavior of H on h F : α Hh ( F ) khf + H with k constant, α < 0, H 0 asymptotic hardness at macroscopic indentations = + 0 (Apparent) hardness increase at small (<10 nm) indentation depths Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 28

Measurement of adhesion forces Bare Gold Adhesion forces of SAM (nonanethiol) layers SAM coated Gold Adhesion forces between tip and surface can be accurately measured F. Prescimone, Tesi di laurea in Scienza dei Materiali, 2008 Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 29

2.B. Force microscopies derived from AFM We have seen how AFM, based on the occurrence of tip/surface van der Waals forces, can map the local topography of the sample No sample preparation is needed, and the topography map is obtained with absolute calibration The achievable space resolution can reach the atomic level, even though most common instruments are capable of a slightly smaller resolution (in the nm range, depending also on the sample properties!) The close vicinity between tip and surface realized in AFM opens the way for probing physical quantities other than the van der Waals interaction force For instance, tribological and material quantities can be measured (e.g., friction, viscoelaticity, Young modulus, etc.) With suitable tips (conductive, magnetic), static and quasi-static electromagnetic forces locally occurring at the sample surface can be analyzed Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 30

Lateral Force Microscopy (LFM, SFFM) During the scan, the tip is continuously displaced with respect to the surface Friction forces occur, resulting in a twisting of the cantilever Cantilever twist can be recorded by a two-dimension position sensitive detector t (i.e., a 4-quadrant photodetector) Friction effects can be corrected by the topographical artifacts by comparing forward and backward scans (A+B)-(C+D) = normal force (AFM signal) (A+C)-(B+D) = lateral force (LFM signal) Materiale tratto dal seminario di Cinzia Rotella, 2006 Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 31

Friction and topography: artifacts and genuine Trace (forward scan) Retrace (backward scan) Friction force is always oriented against motion! From topography data (the space derivative ) Lateral force data (Local) friction data Lateral force data are always convuleted with topography (slope), but genuine information of the local friction can be derived by comparing trace and retrace and considering simultaneously acquired topography data Da B. Bhushan, Handbook of nanotechnology (Springer, 2003) Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 32

Examples of LFM/SFFM images A B A B LFM/SFFM offers an additional contrast mechanism Possibility to discriminate different materials at the atom level l Nanotribology investigations can be carried out Da B. Bhushan, Handbook of nanotechnology (Springer, 2003) Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 33

A few words on nanotribology Sliding motion of the AFM tip in contact with the surface turns out affected by tribological mechanisms at the atomic scale: - Adhesion; - Ploughing; - Deformation Friction models at the atomic scale must account for local tip /surface interaction Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 34

Stick-slip mechanism during the scan Interaction potential accounts for the periodic surface potential KBr : theory KBr :LFM image Detailed and quantitative info can be achieved at the atomic level Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 35

Magnetic Force Microscopy (MFM) Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 36

Electrostatic Force Microscopy (EFM) Basic idea: application of a ddp between tip at sample in order to be sensitive to electric forces, thus to the space distribution of charges on the sample surface and to its electrostatic potential Modulation/demodulation techniques used to get direct information on various surface/tip interaction features Excellent sensitivity to local charges Application to electronic devices (also in operating conditions) Application to ferroelectric materials (also know as Piezoelectric Force Microscopy - PFM) Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 37

Operating modes in EFM Double-pass technique to get rid of topography Materiale tratto dal seminario di Nicola Paradiso, 2006 Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 38

Examples of EFM images Electronic devices Ferroelectric materials Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 39

Conclusions AFM extends STM capabilities to any kind of material surfaces (not restricted to conductive as in STM) Topography can be retrieved with sub-nm accuracy by operation in either contact or non-contact modes Mechanical properties (e.g., hardness, Young modulus, etc.) can be measured at the local scale with nanoindentation techniques Lateral forces can be acquired and treated to get nanotribological tib i linformation AFM relatives open the way to a wide variety of local measurements and imaging methods Fisica delle Nanotecnologie 2008/9 - ver. 7 - parte 5.2 - pag. 40