FRT - setting the standard

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Damon Charles
10 years ago
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1 FRT - setting the standard Surface Analysis Metrology Instruments Process Control

2 Chromatic white light sensor Weißlicht Specs: Linse blauer Fokus roter Fokus max height range 300 µm 600 µm 3 mm 10 mm max resolution, z 3 nm max speed 100 mm /sec.

3 Chromatic white light sensor Weißlichtquelle (Halogenlampe) Faserkoppler Separater, kleiner, leichter, rein passiver Messkopf Spektrograph Messobjekt mit Stufe 400 nm 540 nm 680 nm blau grün rot x Ι auszuwertende Spektren Ι Ι Messobjekt 400 nm 540 nm 680 nm blau grün rot λ λ

Spektrograph Messobjekt mit Stufe 400 nm 540 nm 680 nm blau grün rot

4 FRT MicroGlider roughness, shape/contour, structure/topography planarity, film thickness Specs: max range x,y 100mm 2-600mm 2 max resolution x,y 1-2 µm max height range max resolution, z max speed reproducibility 3 mm (18 mm) 3 nm 100 mm /sec. < 100 nm / 350 mm

max resolution x,y 1-2 µm max height range max resolution, z max

5 FRT MicroProf roughness, profile, shape, topography, flatness, film thickness Specs: max. range x,y 100mm 2-600mm 2 max. resolution x,y 1-2 µm max. range height max. resolution, z max. scanning speed 3 mm (18 mm) 3 nm 100 mm/sec

6 applications in electronics topography height warpage

7 semiconductors and ceramics topography shape profile dimensions

8 optical devices, aspheres

9 Cardboard rough shape

10 Cardboard fine structure

11 metal mirror for laser optical measurement statistics of roughness (lambda= µm): x = [ µm, µm] y = [ µm, µm] sra: nm srq: nm srz(din): nm srmax: nm srp: nm srv: nm srt: nm

429 µm] y = [71.429 µm, 427.429 µm] sra: 14.061 nm srq: 17.

complete analysis of housing for LED sra: 0.460 µm srq: 0.

12 complete analysis of housing for LED sra: µm srq: µm srz(din): µm srmax: µm srp: µm srv: µm srt: µm

13 Bridging the gap between the nanometer and the meter The FRT instruments combines two sensors which allow to investigate large ranges with lower resolution as well as smaller ranges with very high resolution. The instruments are equipped with a chromatic optical sensor and an atomic force microscope (AFM), both mounted permanently. Without changing the measuring device complete components for industrial purposes (e.g. quality control) can be measured using a chromatic optical sensor. But also the AFM allows to investigate the surface at specific positions with nanometer resolution.

The instruments are equipped with a chromatic optical sensor and an atomic force microscope (AFM), both mounted permanently.

14 FRT AFM roughness, shape/contour, morphology/topography Specs: max range x,y 20µm 2-80µm 2 max height range 6 µm max resolution x,y,z available modes AFAM < 1 nm non contact lateral force phase contrast magnetic force liquid compatible (atomic force acoustic microscope)

available modes AFAM < 1 nm non contact lateral force phase

15 Atomic Force Microscopy Laserdiode positionsempfindliche F ototdiode Messung der Tastspitzenauslenkung Hebel Regelung Tastspitze Messobjekt P ie zoste lle le m e n t (X,Y,Z)

16 FRT MicroGlider with AFM Bridging the gap...

17 LCD-display Ni surface overlayer

18 9 orders of magnitude...to meters Metrology from Nanometers...

19 MicroGlider 300 mm application in semiconductor industry: planarity of chucks for CMP

20 semiconductor industry: complete wafer planarity and warpage

21 ...millimeter... application in semiconductor industry: data storage device on wafer

22 ...micrometer... application in semiconductor industry: data storage device on wafer

23 ...nanometer... application in semiconductor industry: data storage device on wafer

24 FRT AFM/AFAM atomic force acoustic microscopy ploymer with embedded ceramics AFAM 657 khz, nc cantilever elastic properties and modulus

25 FRT MicroProf film thickness Mapping of film thickness variation

26 MicroProf Vision with automated alignment and 2D metrology Specs: as MicroProf, but additionally: telecentrical CCD camera software for pattern recognition alignment functionality

27 MicroProf Vision

28 FRT metrology for optical industry: apparatus for measuring lenses up to 600 mm Ø 20 nm resolution 6,5 t weight

Fast Z-stacking 3D Microscopy Extended Depth of Field Autofocus Z Depth Measurement 3D Surface Analysis

Cam CANIMPEX CPX-SOLUTIONS 3D Digital Microscope Camera FAST PRECISE AFFORDABLE 3D CAMERA FOR MICROSCOPY Fast Z-stacking 3D Microscopy Extended Depth of Field Autofocus Z Depth Measurement 3D Surface Analysis