AVANCIS PowerMax 100 FB Process Review For comments, questions, or more information about this report, or for any additional technical needs concerning semiconductor and electronics technology, please call Sales at Chipworks. 3685 Richmond Road, Suite 500, Ottawa, ON K2H 5B7, Canada Tel: 613.829.0414 Fax: 613.829.0515 www.chipworks.com
Process Review Table of Contents 1.1 List of Figures 1.2 List of Tables 1.3 Company Profile 1.4 Introduction 1.5 Device Summary 1.6 Process Summary 2.1 Solar Cell Panel Overview 2.2 Solar Cell Panel Features 2.3 Solar Panel Scribe Lines 3.1 General Structure 3.2 Transparent Polymer Layer 3.3 Metal Interconnect 3.4 CIGS Stack 3.5 Interconnect Structure Scribe Lines 4 Materials Analysis 4.1 SEM-EDS and TEM-EDS Analyses 5 Critical Dimensions 5.1 Solar Panel Dimensions 5.2 Horizontal and Vertical Dimensions 6 References 7 Statement of Measurement Uncertainty and Scope Variation Appendix A: FTIR Analysis Report About Chipworks
Overview 1-1 1.1 List of Figures 1.4.1 CIGS Solar Cell Schematic Diagram 2.1.1 Solar Panel Front 2.1.2 Solar Panel Back 2.1.3 Solar Panel Identification Label 2.1.4 Module Top Right Corner Front 2.1.5 Module Bottom Left Corner Front 2.1.6 Panel Frame Cross Section Long Edge 2.1.7 Panel Frame Cross Section Short Edge and Cross Member 2.2.1 Anode and Cathode Connections Back 2.2.2 Cathode Connection X-Ray 2.2.3 Cathode Connection and Ribbon X-Ray 2.2.4 Panel Corner Top Left Front 2.2.5 Panel Corner Bottom Right Front 2.2.6 Panel Corner Top Left Back 2.2.7 Panel Corner Bottom Right Back 2.2.8 Panel Corner Top Left Back Tilt View 2.2.9 Panel Corner Bottom Right Front Tilt View 2.3.1 P1 Scribe Line Pitch Back Glass Side 2.3.2 P1 Scribe Line Width Back Glass Side 2.3.3 P2 and P3 Scribe Lines Pitch Front Glass Side 2.3.4 Scribe Lines Front Cathode Side 3.1.1 Solar Panel Polished Edge 3.2.1 Transparent Polymer 3.3.1 Aluminum Ribbon Edge Optical 3.3.2 Aluminum Ribbon and Conductive Organic Layer SEM 3.3.3 Aluminum Ribbon and Molybdenum Anode Contact Optical 3.3.4 Aluminum Ribbon and Molybdenum Anode Contact SEM 3.4.1 CIGS Stack Optical 3.4.2 CIGS Stack SEM 3.4.3 CIGS Stack TEM 3.4.4 ZnO:Al and CdS Buffer Layer SEM 3.4.5 CdS Buffer Layer TEM 3.4.6 Molybdenum Anode Layer SEM 3.4.7 Molybdenum Anode Contact Layer TEM
Overview 1-2 3.5.1 Interconnect Structure Scribe Lines Overview Optical 3.5.2 P1 Scribe Line Optical 3.5.3 P1 Scribe Line SEM 3.5.4 P1 Scribe Line Edge SEM 3.5.5 P2 Scribe Line Optical 3.5.6 P2 Scribe Line Edge SEM 3.5.7 P3 Scribe Line Edge SEM 4 Materials Analysis 4.1.1 TEM-EDS of ZnO:Al Transparent Conductive Oxide 4.1.2 TEM-EDS of CdS Interfacial Layer 4.1.3 TEM-EDS of CIGS Layer 4.1.4 TEM-EDS of SeMoCu Mo/CIGS Interface Layer 4.1.5 TEM-EDS of Mo Anode Plate 4.1.6 TEM-EDS of SiAlN Adhesion Layer 4.1.7 SEM-EDS of Aluminum Ribbon 4.1.8 SEM-EDS of Conductive Organic Layer 4.1.9 SEM-EDS of Top Glass 4.1.10 TEM-EDS of Bottom Glass 1.2 List of Tables 1.5.1 Device Summary 1.6.1 Process Summary 2.1.1 Solar Cell Panel Dimensions 2.3.1 Scribe Lines Horizontal Dimensions 3.4.1 CIGS Stack Vertical Dimensions 5 Critical Dimensions 5.1.1 Solar Cell Panel Dimensions 5.2.1 Scribe Lines Horizontal Dimensions 5.2.2 CIGS Stack Vertical Dimensions
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