VDL ETG Ultra Precision Technologies Manufacturing of ultra high precision mechanical and optical components

VDL ETG Ultra Precision Technologies Manufacturing of ultra high precision mechanical and optical components VDL Enabling Technologies Group VDL ETG Research

Contents Company introduction VDL VDL Enabling Technologies Group Core Technology Competences Core Technology Markets ETG Ultra Precision Technologies Competences Markets Best practices Plans for the future

VDL Groep

VDL Groep Sub contracting Bus group Finished products Car assembly mechatronic systems module assembly part and sheet metal Surface treatments plastic processing other specialties touring cars public transport bus mini and midi busses Chassis modules second hand trade medical equipment process installations consumer products production automation various products packaging equipment NedCar

VDL Enabling Technologies Group 1900 Philips Machine Fabrieken 1980 Also Non Philips Customers SYSTEMS 2000 New Name Philips Enabling Technologies Group 2006 ETG part of VDL Group

VDL Enabling Technologies Group EINDHOVEN Series manufacturing & assembly High volume Eindhoven Turn key & built to print mechanization Low medium volume Projects Proto type manufacturing & assembly Low volume Research ALMELO SINGAPORE SUZHOU

VDL ETG Core Technology Competences Machining Engineering Modern turning and milling centers Multi axis complex geometry machining Joining technologies Advanced materials technology Vacuum technology Ultra precision technology (Co ) Development and engineering Project management (Six Sigma, Prince 2) Design and product optimization (DFX) Sustaining of product documentation Access to Philips resources and Technical Campus Long standing relationships with knowledge institutes Sheet metal Supply chain management Modern sheet metal centers Complex frame production Vacuum and specific welding methods Production of covering including painting Advanced materials technology Supply chain control and optimization Flexibility Lead time road mapping and lead time reduction Break even point reduction System integration and assembly Property right Clean room and non clean room assembly Assembly of modules and complete systems Final test of complete systems and modules Process control and validation Intellectual property right protection Production under license

VDL ETG Core Technology Markets Semiconductor Capital Equipment Turn Key Projects Analytical Equipment Led Manufacturing Equipment Medical Equipment Solar Production Equipment Science & Technology Is a technology driver for our main stream business Benefits from our expertise in manufacturing and assembly for series manufacturing Focus of employing core technologies to : Free Electron lasers and CLIC Optical modules for instruments.

VDL ETG Research Located at Eindhoven High Tech Campus Epicenter at HTC 7 Large machining with other ETG companies Additional satellite workshops in HTC 7 + in 2 other buildings with direct connection to research groups and lab facilities Core technology products Parts for electron microscopes Actuators 1 st line hardware support for R&D Manufacturing of prototypes Mechatronic system integration Precision parts manufacturing Laser welding / cutting Wire / sink erosion Sub micron machining Metrology

VDL ETG Ultra Precision Competences Manufacturing Ultra High Precision parts Single Point Diamond Turning Form accuracies < 0.1 µm Surface finish better than 5 nm Ra 2/3 axis and freeform capabilities Milling Form accuracies < 1 µm Surface finish better than 25 nm Ra Up to 5 axis capabilities Pallet machining of micron accuracy parts

VDL ETG Ultra Precision Competences Manufacturing equipment Turning Fly cutting Milling Esdo (*) Comatic (*) Norton PHM 1000 LT Ultra MMC 1000 LT Ultra MMC 900 Promilla (**) Profil 2000 Micromatic Optomatic Own build equipment featuring : Oil bearing guide systems Rotating axes with air bearings Dedicated machine control Precision tool turret (*) Equipped with precision tool turret (**) Equipped with LRTS

VDL ETG Ultra Precision Competences Metrology Metrology 3D metrology 3D CMM 0.8 µm accuracy low measuring force Multi sensor CMM camera / touch probe / laser Profilometry Surface finish measurements Form measurements (2D and 3D) Optical measurement techniques Surface finish and step heights Flatness (up to ø100) and form

VDL ETG Ultra Precision Competences Metrology equipment Profilometry 3D metrology Optical techniques Form TalySurf inductive Form TalySurf laser Talyround Zeiss UPMC 850 Carat Zeiss Contura Mycrona Magnus (*) Zygo Newview 5030 Zygo GPI Fisba interferometer CyCoS (*) LMI (**) Mycrona Signum (*) (*) Multi sensor CMM NanoProf ((***) (*) Own build polar profilometer (**) Own build small profilometer (***) Own build large profilometer

VDL ETG Ultra Precision Competences : Evolution of the micron precision market The market for micron precision parts has evolved over the last decades. 1970 s Mirror optics Optical recording 1980 s Injection molding of contact lenses 1990 s Imaging Optics 2000 s Freeform optics LED illumination 2010 s Optical recording as driving force to achieve higher accuracies Other components as drivers for efficiency (costs) Form accuracy: 150 nm 50 nm Roughness Ra : 5 nm 2 nm

VDL ETG Ultra Precision Competences : Evolution of equipment Single point diamond turning Up to the 1980 s 1980 s 1990 s 2000 s 2010 s First machines at research institutes and universities Start of industrialization Optical recording contact lenses Larger machines Multiple axis ( X/Y/Z and C) Future? Intelligent machines? Robotisation? Ultra precision diamond milling (lagging more than a decade behind on turning) Up to the 1990 s 1990 s 2000 s 2010 s Future? Limited to fly cutting mirror optics Laser scanner mirrors Milling as add on on lathes Lens arrays Intra ocular lenses First proto type machines Micro fluidics Accelerator parts Pallet machining? Robotisation?

VDL ETG Ultra Precision Competences Markets Optical components Mirror optics Flat (A) Spherical Up to ø 600 mm Lenses Moulds & plastic prototypes Optical recording Imaging optics Lens arrays Illumination optics Moulds & plastic prototypes Turning & milling Structures & arrays 16

VDL ETG Ultra Precision Competences Markets Freeform optics Turning : Long Range Tool Servo Stroke of 2.7 mm Resolution of 1 nm Special developed CNC software Turning : slow tool servo Diameters up to 500 mm Sag up to 150 mm Resolution of 10 nm Using DIFFSYS for program generation Milling: Using diamond mills Spindle RPM up to 60000 Surface finish below 10 nm 17

VDL ETG Ultra Precision Competences Markets Mechanical components Air bearings Wafer chucks Guide ways Electron microscopes 18

VDL ETG Ultra Precision Competences Markets Science & Technology Space Optical instruments Housings Astronomy Optical instruments Manipulators Accelerators Prototype structures for CLIC Parts for Free Electron Lasers

Best Practice : Breadboard for TMA nano satellite Miniaturised satellites (CubeSats) as a cost effective platform Telescope with complex aspherical mirrors VDL s responsibility : Mechanical design Manufacturing Mechanical qualification Specified Achieved Assembly Results M1 M2 M3 M1 M2 M3 Form RMS [nm] 25 15 25 18 6 17 PV [nm] 125 65 125 95 36 84 Surface finish [nm] 5 5 5 3.1 3 4.7 X [µm] 21 22 20 0.7 0.1 0.1 Offset Y [µm] 31 22 16 1.0 2.3 2.3 Z [µm] 34 16 27 0.8 1.1 1.1 X [ ] 0.028 0.200 0.025 0.004 0.006 0.004 Tilt Y [ ] 0.016 0.300 0.020 0.009 0.016 0.011 Z [ ] 0.068 0.500 0.090 0.001 0.022 0.001

Best Practice : Matisse mirrors for VLT Mid IR spectro interferometer combining the light of up to the four VLT telescopes (Atacama Chili) Beam shaper box (3 types) as high accurate 5 axis milled part ø 100 mm freeform mirrors Form accuracy < 100 nm Surface finish < 10 nm 5 sets of 2 mirrors manufactured

Best Practice : X band structures for CLIC Manufacturing strategies Part handling and cleaning Part qualification Next step : sub module assembly Results Specified Achieved Form 5 µm 2 µm Ra Iris 25 nm 5 nm Ra Cross 50 nm 25 nm

Best Practice : Pulse Compressor Manufactured in OFE Cu ø 500 mm & stainless steel 316 LN Product optimalization for brazing Manufacturing engineering Leak testing < 2 x 10 10, tuning support Inner surface roughness < 25 nm 320 MW Pulsed power tested @ PSI 23

Best Practice : Cavitys for SwissFEL Reference structure manufactured Series of 108 cups X band accuracy for C band structure No tuning needed 24

Plans for the future Strengthening our capabilities Parts manufacturing Industrializing machining process Integrating quality control Confidential

Plans for the future Strengthening our capabilities Parts manufacturing Industrializing machining process Integrating quality control Assembly & test Confidential

Plans for the future Strengthening our capabilities Parts manufacturing Industrializing machining process Integrating quality control Assembly & test Strengthening our capabilities on Brazing E beam welding Etching Out baking Confidential

Plans for the future Strengthening our capabilities Parts manufacturing Industrializing machining process Integrating quality control Assembly & test Strengthening our capabilities on Brazing E beam welding Etching Out baking Building up experience on H 2 bonding RF testing Capability reinforcement needs to be done with (international) partners in academia and industry. Confidential

Plans for the future Targeting new markets for X band Using X band normal conducting accelerators opens new perspective on market drivers Increased field strengths / gradients Ability to scale down Cost of ownership Reliability (using C&S band frequencies and parts with X band specifications) Life Time (using C&S band frequencies and parts with X band specifications) Infrastructure (less energy & no cryogenic infrastructure required) Plan to address the potential markets Intensifying the relationship with our technology partners and capitalizing our common knowledge and (future) experiences in X band Identifying accelerator applications Building up expertise teams on commercial applications for X band Confidential

Applications divided into particle type Accelerators Electron Proton Other elements Low energy application (large market) Generating radiation Tumor treatment (small but growing market) Tumor treatment (proof of concept) Material treatment (existing / growing market) X Ray by collision (existing and large market) Free electron laser (growing market) Inverse Compton scattering (ideas) Materials Research (small market) Material treatment (growing market) E beam Welding (growing market) X ray imaging (large market) Materials and biological research (growing market) Water window imaging (ideas) Proton beam lithography (ideas) Fundamental research (niche market) SEM/ TEM (existing market) Tumor treatment (large market) Light source lithography (ideas) EUV metrology (ideas) Fundamental research (niche market) Fundamental research (niche market) Sterilization (existing / growing market) Defense (USA) (ideas) Security (proof of concept) Fundamental research (niche market) Confidential

Example of an expertise team Proton acceleration cancer treatment Existing Market Yes Market Size >500M Key Players ADAM, Varian, IBA, Mevion, Maastro,.. Drivers Cost of ownership, Flexibility Technology Partners CERN, TERA Supply Chain Partners Experts in team Prof. Dr. S. Brandenburg Confidential

Classical Rontgen Elekta 32

Classical Rontgen Beam with low intensity Absorption in body V ~ 30 cm Beam with high intensity Dose decreases with distance Highest dose at skin collateral damage Tumor does not receive the maximal dose ~ 5 m Beam with lower intensity Multiple directions (limited) Less collateral damage Tumor recieves maximum dose Relativly slow Movement of patient 33

Proton therapy Dose very local Penetration depth determined by beam energy Tumor receives the maximum dose Fast no artifacts of movement of patient Possible to scan larger tumors with varying dose

Conclusion Scientific world has benefits from our industrialization competences Time to market Co development & rapid proto typing Increased complexity requires higher level outsourcing EUV source: from idea to product in 1 year Industrialization Early customer involvement cost control & risk reduction Co / Redesign for manufacturability CLIC (future): from cell over bonding to (ultimately) complete module Industry benefits from the demands in science Current scientific projects can result in challenging spin offs in (near) future

Enabling your success in business... Mathieu Breukers : UPT machining & Metrology mathieu.breukers@vdletg.com +31 620421406 VDL ETG Research High Tech Campus 07 5656 AE Eindhoven The Netherlands