Flexible Measurements of Shapes and Roughness of Aspheres and Optical Freeforms

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1 Session 2: Digital Imaging for Industry 4.0 and Robots Flexible Measurements of Shapes and Roughness of Aspheres and Optical Freeforms 26. März 2014

2 Mahr in Facts Business Fields: System metrology Hand-held metrology High-precision gear and metering pumps High-precision ball bearing Founding: 1861 in Esslingen Turnover 2012: ca. 215 Mio. Employees 2012: whole group 1700 Main Locations: Göttingen / Germany Esslingen / Germany Jena / Germany Probostov /CZ Providence / USA Souzhou / China Mahr GmbH Jena 2

3 Mahr Jena Development of optical sensors for Mahr group Image evaluation Lightning systems Fringe Interferometry White light interferometry Fibre sensor Confocal microscopy Fringe projection systems Points Fringes Deflectometry World wide sales responsibility for Branch Optics Branch application round optics, like spheres, aspheres, free forms, eye lenses and micro-optics Sales coordination world wide Technical sales support and application Order processing and shipment Stray light Assembly and quality check of optical sensors and systems 3

4 Mahr- Application Specialist in Measurement Optics Existing application equipment 2014: MarSurf LD 130 2D/ 3D Aspheric MarSurf LD 260 2D/ 3D Aspheric MarForm MFU 200 3D Aspheric MarSurf WM 100 MarSurf CWM 100 MarSurf FP 40/180 Metrology Solution for Application for: Glass Plastic Micro-optic Spheres Aspheres Cylindrical optics Diffractive optics IOL Off axis optics Optical free forms 4

5 Form and Contour Measuring equipment of Mahr for the different steps of production Customer has one partner and one software! MarOptics TWI MarForm MFU 200 MarSurf CWM 100 Faser MarSurf LD 260 2D/3D MarSurf FP 40/180 Non-contact PV < 100 nm; 3D Non-contact PV < 50 nm R&D project Non-contact Contact PV < 200 nm; 3D Non-contact 5

6 Customer has one partner and one software! Roughness Measuring equipment of Mahr for the different steps of production MarSurf WM 100 MarSurf CWM 100 MarSurf XR 1 Non-contact Rq << 3 nm Non-contact Rq < 7 nm Contact Rq <15 nm 6

7 Measurement of aspheres MarSurf LD 130/260 Aspheric 2D/3D 2D 3D Measurement of aspheres Grinding process Polishing process 7

8 Measurement of cylinder optics MarSurf LD 130/260 Aspheric 2D Measurement and evaluation with Topography software: - MarSurf XT 20 - MarSurf XT 20 with MfM - MarSurf XT 20 with MfM plus Topography Difference Profile 8

9 Measurement of aspheres MarForm MFU 200 Aspheric 3D Complete 3D contact and non contact aspheric measurement Pre-polishing and polishing process Measuring probe T7W and IP-HNA: Free positioning of probe by motorized tilting Fast and easy change of probe arm Measuring accuracy PV < 100 nm (3D) Interface to grinding and turning machines Comparable measuring results to interferometer, but without CGH 9

10 Roughness measurement at lenses MarSurf WM 100 Interferences Topography 10 Evaluation

11 Measurement of plastic lenses MarSurf FP Measurement result: Triangulated plane Reference: CAD-Model Evaluation: 3D-comparison (colour coded) 11

12 God creates the volume, the devil did the surface Thank you! 12

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