SpeedLight 2D. for efficient production of printed circuit boards

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Mervin Russell
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1 laser direct imaging SpeedLight 2D laser direct imaging platform for efficient production of printed circuit boards

2 MANZ AG /// Manz SpeedLight 2D /// 2 History of the development of Manz SpeedLight 2D As a provider of automation solutions for the FPD and solar industry, Manz AG in 2008 acquired Intech Machines Co. Ltd. one of the leading Taiwanese providers of wet chemical processing equipment. With the more than 25 years of experience of Intech, Manz has specialized in the development and manufacture of wet chemical equipment for the production of TFT LCDs, touchpanels and printed circuit boards and is now the market leader in this sector. With the acquisition of KLEO Halbleitertechnik GmbH in 2015, the printed circuit board segment was expanded still further by the laser direct imaging process. Manz AG KLEO HALBLEITERTECHNIK GMBH Founding by Dieter Manz; Development of automation solutions for the FPD and solar industries from 1987 Delivery of first system for a fully automated crystalline solar cell production line Founding of the development company KLEO Halbleitertechnik GmbH & Co. KG Preliminary development for LDI for structure sizes > 500 nm on wafers Entry into the thin film market with systems for mechanical scribing of solar modules IPO on the Frankfurt stock exchange Manz becomes leading provider of wet chemical processing equipment (PCB) through the acquisition of Intech of Taiwan Entry into the lithium-ion battery market; Winner of the 2009 Industrial Excellence Award (PCB) Founding of the Manz Coating GmbH development center for vacuum coating technology Opening of the plant in Suzhou, China, for the manufacture of solar, display and PCB equipment Manz becomes one of the world's leading equipment providers for touch panel production; First order from the AMOLED display industry Acquisition of KLEO Halbleiter GmbH, Tettnang, from ZEISS; Integration into the PCB segment of Manz Further development of TFT (mask exposure) for structure sizes of 100 to 300 nm Experimental development of polygons as well as the creation of the double table Development of LDI prototype machine for the PCB industry Delivery of the first LDI prototype machine for the PCB industry Innovation prize Development of a New Imaging Process in Deutschland Land der Ideen (Germany Land of Ideas); KLEO becomes part of the ZEISS Group Delivery of the first LDI machine with water-cooled polygons 2015

With the more than 25 years of experience of Intech, Manz has specialized in the development and manufacture of wet chemical equipment for the production of TFT LCDs, touchpanels and printed circuit

3 MANZ AG /// Manz SpeedLight 2D /// 3 laser direct imaging Manz SpeedLight 2D: Innovative production equipment for the manufacture of high-resolution premium and XL printed circuit boards The market demands ever lighter, thinner and more powerful electronic devices. These demands can be applied equally to the components of such devices. There is a special emphasis on PCBs (printed circuit boards), one of the basic components of almost every electronic device. Industry can meet the rising demand for highresolution PCBs only through the use of innovative production equipment. Only in this way is it possible to increase the efficiency of production and the power of the printed circuit boards that are produced. With more than 25 years of experience in developing high-tech equipment for manufacturing high-efficiency printed circuit boards, Manz AG has earned an outstanding reputation as a provider of wet chemical processing equipment. The expansion of the technology portfolio with laser direct imaging of printed circuit boards using Manz SpeedLight 2D and its integration in the existing solutions for the manufacture of printed circuit boards make the following benefits possible in comparison with the conventional photolithographic process: Increase in the efficiency and flexibility of the product and the production process Significant cost savings of up to 75% Conventional photolithography Pre-Condition Scale Factor Plot Measure & Inspect Exemplary presentation 30 min. 10 min. 25 min. 2 Retouch Diazzo film Retouch Print 5 min. 10 min. 5 min. 10 min. Work in process LDI lithography with SpeedLight 2D Scale Factor Print The throughput time for LDI lithography is several times shorter than for the conventional photolithographic method. Thus adjustments, changes and eliminations of errors can be implemented more quickly and at 2 min. 10 sec. significantly lower costs.

There is a special emphasis on PCBs (printed circuit boards), one of the basic components of almost every electronic device.

4 MANZ AG /// Manz SpeedLight 2D /// 4 Manz SpeedLight 2D highly efficient laser direct imaging (LDI)

5 MANZ AG /// Manz SpeedLight 2D /// 5 The Manz SpeedLight 2D for laser direct imaging is distinguished by a well thought-out machine concept and efficient components. Twin-stage system The double table system provides the highest possible throughput, which is determined solely by the exposure time. During the exposure of the first panel, a new one can be registered at the same time on the second table. Lighting unit 288 laser beams are formed on the panel by 9 polygon modules, significantly increasing throughput in comparison with other technologies. Highly precise manufacturing technologies in the processing of the polygon mirror surfaces as well as in placement and balancing guarantee the required precision of the deflection in the micrometer range. The polygon mirrors rotating at more than 50,000 rpms are equipped with air bearings. Thus they are wear-free with uniformly high precision. Realtime scaling/ Distortion compensation Distortions are compensated with the use of powerful graphics processors without a reduction in throughput. The data are manually or automatically adjusted to the forms of distortion. For an optimal adjustment, individual PCBs are individually registered and imaged in one step. Simple light source service Maintenance expense is held to the lowest possible level through a smart service concept. Almost all wearing parts are designed so that they can be replaced by the user himself. In particular, the simple replacement of the 288 laser light sources increases the availability of the machine and leads to a significant reduction of service costs. Dynamic data The dynamic data for each individual exposure is generated without time delay as data matrix code or text. This means that for each exposure, changed data is automatically taken into consideration. Precise beam guidance The use of glass fibers for beam guidance enables the combination of mechanically stable beam guidance and the highest beam quality. Partial registration/ Inner layer registration without position marks Powerful image processing allows the registration, by way of example, of inner layers without position marks or special resists. This simplifies and accelerates the process and contributes to the high precision of the process. Twin-stage system Polygon mirrors KLEO laser direct imaging is fully compatible with existing resist processes for inner layer and outer layer resists and solder resists. Registration comparison: left: the conventional method, right: high precision with SpeedLight 2D laser direct imaging.

During the exposure of the first panel, a new one can be registered at the same time on the second table.

6 MANZ AG /// Manz SpeedLight 2D /// 6 Whether standalone or integrated SpeedLight 2D is always the right solution Manz SpeedLight 2D for laser direct imaging is available as a standalone piece of equipment or as a solution for integration into a production line. Efficient PCB production everything from one source. Manz SpeedLight 2D integrated solution Manz SpeedLight 2D standalone equipment Loading Pre-cleaning First buffer Dry film laminator Second buffer Laser direct imaging Third buffer Mylar peeler Developer Unloading Second buffer Laser direct imaging Third buffer Manz product Third-party product Technical data Size L x W x H 3,224 2,847 2,200 mm Weight 5,180 kg Throughput Maximal, double-sided exposed * 180 two-sided panels/hour (360 sides/hour) Light source Wavelength 405 nm Resist pattern Minimal feature 15 μm Roughness ± 2 μm Data resolution 2 μm Depth of focus ± 300 μm, with 3D option up to ± 1,000 µm Registration Front to backside up to ± 10 μm Panel format Size, maximum 660 mm width 650 mm length (extendable) Thickness 0.05 mm to 8 mm Exposure field width, max. 650 mm * Depending on resist and process

Manz SpeedLight 2D integrated solution Manz SpeedLight 2D standalone equipment Loading Pre-cleaning First buffer Dry film laminator Second buffer Laser direct imaging Third buffer Mylar peeler

7 MANZ AG /// Manz SpeedLight 2D /// 7 Your advantages at a glance Switch to Manz SpeedLight 2D laser direct imaging now and increase quality and profitability. Simple workflows High availability and yield profitable Production Simple workflows Even in comparison with the conventional photolithographic method, it is apparent how much faster and simpler laser direct imaging is to operate. Particularly with Manz SpeedLight 2D, special attention was given already in its development on simplification of workflows. This means short initial familiarization periods and little need for training. High machine uptime The polygon mirrors utilized are equipped with air bearings and thus are wearfree with uniformly high precision. Almost all wearing parts are designed so that they can be replaced by the user himself. This increases the availability of the equipment and leads to a significant reduction of service and operating costs. High yield and profitable production Both the twin-stage system for parallel loading and unloading as well as the polygon mirror technology with 288 laser beams contribute to the high throughput of the laser direct imaging. Thus 360 sides can be processed per hour. All processes are optimally tuned to each other and, along with throughput and yield, also increase the profitability of production.

direct imaging is to operate. Particularly with Manz SpeedLight 2D, special attention was given already in its development on simplification of workflows.

8 MANZ AG 02/2016 Manz AG Steigaeckerstrasse Reutlingen Germany Phone Fax [email protected]

FOR HIGH-TECH PRODUCTION

AUTOMATION & METROLOGY AUTOMATION & METROLOGY SOLUTIONS FOR HIGH-TECH PRODUCTION key technologies for multiple industries MANZ AG /// hightech solutions /// 5 2015 Acquisition of KLEO, a company of the