Asset Sale: AFM System Veeco / DI DIMENSION 3100

Transcription

1 Asset Sale: AFM System Veeco / DI DIMENSION 3100 DIMENSION 3100 AFM Control PC for magnetic coils and I(U) measurements with PCI 6030E AD/DA card, C BNC breakout box and GPIB interface Bipolar Operational Power Supplies Fig. 1: Complete Setup Nanoscope IV Controller Vibration protection table Fibre light source / vacuum pump Version: September 10, 2009

2 System Description The DI/Veeco DIMENSION 3100 AFM is a highly versatile scanning probe microscopy system. Its 90 x 90 µm piezo scanner allows standard AFM imaging as well as tapping mode operation. With the TUNA and SCM modules (both included), STM-like tunnelling mode imaging and scanning conductive microscopy becomes possible. A non-magnetic tip holder is also included, which can be used for magnetic-force-microscopy (MFM), although the instrument has not been operated in this mode. The samples are placed on a motorized translation stage with a range of 100 x 120 mm, the sample chucks will accept 200 mm Silicon wafers. Stage control is integrated into the SPM software. The microscope head is connected to a Nanoscope IV controller. A breakout box installed in the wiring between the controller and the microscope allows a direct access to all analog signals of the setup, e.g. piezo scan signals and tip feedback. The controller box, together with the original DI control PC, two TFT displays, trackball, keyboard and a fibre light source / vacuum pump are mounted in an DI electronics console. The microscope is placed on a vibration and noise protection table (included) to be connected to a pressurized air supply. The AFM system has originally been used for the acquisition of local I(U) characteristics of MRAM memory cells. A sample chuck with a pair of toroid coils has been installed to apply an in-plane magnetic field of variable direction. The coils are driven by two 36V, 6A Kepco four-quadrant power supplies (included). A Keithley 2400 Sourcemeter (included) has been used to acquire the I(U) characteristics. Both the sourcemeter and the power supplies are controlled by a separate PC equipped with a GPIB interface and a NI PCI 6030E AD/DAconverter connected to a C-2090 BNC Breakout Box. Georg Eggers, Qimonda AG i. IN. Page 2 / 13

3 General Operability Fig. 2: Tapping-Mode AFM-Image taken from Veeco s calibration sample on September 1 st, Image data is unprocessed except for a plane substraction. The instrument has been acquired in The AFM has been retested in a standard setup to prove its operability. The tapping mode AFM image from the DI standard calibration sample shown in Fig. 2 has been acquired on September 1 st, The calibration sample consists of a pattern of quadratic dents with a periodicity of 10 µm. The nominal scan size programmed by the Nanoscope SW is 50 x 50 µm. As visible in Fig. 2, the software setting and the actual scan width correlate for the x (fast) scan axis, while for the y (slow) direction, the scan size is just about one half of the setting. The reason for this discrepancy is unknown. Possible explanations might be a broken contact in one of the y piezo scan electrode s wiring, a failure of the high voltage piezo driver electronics or a wrong setting in the piezo calibration parameters. Georg Eggers, Qimonda AG i. IN. Page 3 / 13

4 SPM-Platform DIMENSION 3100 Fig. 3: SPM-Platform DIMENSION 3100 Features: Motorized sample stage with 120 x 100 mm travel range Vacuum chuck to accept 200 mm wafers; vacuum pump included. Video microscope for live observations of tip and sample. Sample spacer block D3FS3 installed by DI increases distance between scanner and sample base. This allows either thick samples or the use of thick sample chucks, e.g. with integrated magnet coils. Vacuum pump and fibre light source included (see lower drawer of rack in Fig. 5) Functional Status: Appears functional; sample stage operates; video microscope delivers images. Georg Eggers, Qimonda AG i. IN. Page 4 / 13

5 Scanning Head DAFMLN Parts List: Scanner Head DAFMLN Two standard cantilever holders Cantilever preparation stand Fig. 4: AFM Scanning Head Functional Status: Appears functional, AFM pictures in tapping mode have been taken in August However, when scanning a geometrical reference sample; the y scan width was found to be only about on half of the x scan size (see Fig. 2Fig. 3). The reason for this effect is unknown; possible explanations might be a weak contact in one of the y piezo scan electrode s wiring, a failure of the high voltage piezo driver electronics or a wrong setting in the piezo calibration parameters. Georg Eggers, Qimonda AG i. IN. Page 5 / 13

6 NanoScope IV Control Station Fig. 5: Nanoscope IV Control Station within Electronics Console Parts List: Nanoscope IV Controler (upper drawer of rack in Fig. 5) Control PC (with complete installation of Nanoscope SW versions 5.31 and 6.11 (left side in Fig. 5); ZIP-drive installed; frame grabber installed to display video image of microscope head. Two TFT displays NEC Multisync 19 DI Trackball Keyboard, Mouse Complete cable set to connect to scanner Electronics Console to house controller, Dimension light controller, PC and to act as workplace Functional Status: Appears functional. AFM-images have been acquired with this unit in August However, when scanning a geometrical reference sample; the y scan width was found to be only about on half of the x scan size (see Fig. 2). The reason for this effect is unknown; possible explanations might be a weak contact in one of the y piezo scan electrode s wiring, a failure of the high voltage piezo driver electronics or a wrong setting in the piezo calibration parameters. Georg Eggers, Qimonda AG i. IN. Page 6 / 13

7 Vibration / Noise Protection Enclosure Fig. 6: Protection enclosure Features: Pneumatic vibration damping (requires pressurized air connection) Noise / airflow protection by isolated hood; spring loaded for easy operation Feed through openings for microscope cables Functional Status: Appears functional; baseplate is floationg if connected to pressurized air. Georg Eggers, Qimonda AG i. IN. Page 7 / 13

8 Signal Access Module (SAM III) Fig. 7: Signal Access Module (SAM III) Parts List: SAM III box (defect, see note below) Connector cable to NanoScope IV Control Station The SAM III is a breakout box for all AFM analog signals. Installed between the NanoScope IV Control Station and the microscope itself, all AFM control signals are routed to BNC connectors. Toggle switches allow either to monitor the signals or to replace them with external input. Functional Status: Untested. According to documentation, one of the toggle switches is broken. As a workaround, the input and the output BNC of the affected signal have to be connected to bridge the switch (see top left of Fig. 7). The SAM can also be omitted by directly connecting the microscope to the controller. Georg Eggers, Qimonda AG i. IN. Page 8 / 13

9 Tunneling/Conductive AFM (TUNA/CAFM) Application Module Parts List (see Fig. 8): Amplifier electronics (bottom) Tip holder with wiring (top left) Calibration resistor (top right) Functional Status: Untested. Fig. 8: TUNA Module for tunneling microscopy Scanning Capacitance Microscopy (SCM) Application Module Parts List: Detector electronics (bottom) SCM Tip Holder (top) Functional Status: Untested. Fig. 9: SCM Module Georg Eggers, Qimonda AG i. IN. Page 9 / 13

10 Control PC for Magnetic Coil Operation and I(U) Measurements Fig. 10: Control PC for coil operation and C-2090 BNC Breakout Box Features: NI PCI 6030E AD/DA-converter connected to a C-2090 BNC Breakout Box (untested) GPIB interface 17 CRT monitor Keyboard, mouse Functional Status: PC boots up and is accessible without Password. Functionality of ADDA- Unit and GPIB interface is untested. Georg Eggers, Qimonda AG i. IN. Page 10 / 13

11 Bipolar Operational Power Supplies for Coil Operation Fig. 11: Bipolar Operational Power Supplies for Coil Operation Features: Each supply can both source and sink 6A of current at up to 36V Supplies are controlled via analog inputs by separate PC (included) Functional Status: Untested. Keithley 2400 Source Meter See Keithley catalogue for details. Functional Status: Untested. Fig. 12: Keithley 2400 Sourcemeter Georg Eggers, Qimonda AG i. IN. Page 11 / 13

12 Manuals and Accessories Fig. 13: Thick sample chuck (left) and cantilever workbench Accessories (might already have been listed above) Two standard cantilever holders Non-magnetic cantilever holder DCHNM Thick chuck to examine thin samples in spite of sample spacer block DI cantilever preparation stage Calibration Sample Magnetic sample holder Vertical disc holder Sample disks Spare cantilevers Two vacuum pumps (unknown purpose) Available Manuals: Command Reference Manual V5.12 Rev B SPM Training Notebook 3.0 Nanoscope IV Controler 5.12r3 Dimension 3100 Manual 4.43B Manual Signal Access Module III Nanoscope 6.11 SW User's Guide Software: Nanoscope 6.11 Software CD Backup CD of control PC s HDD at time of delivery Georg Eggers, Qimonda AG i. IN. Page 12 / 13

13 Parts List Pos Inv-Nr. Com Anz Beschr Typ IFX 1 1 Atomic Force Mikroskop Veeco Digital Instruments Dimension 3100 Baujahr: 2003 Ident-Nr.: 1972G Inv- Nr.: mit Präzisionsuntertisch, mit Messplatz best. aus: 1 Matrix Digital Instruments Signal Acces Module III 2 bipolare Labornetzteile Kepco, Inv.-Nr.: / Data-Switch National Instruments C ''-TFT-Monitore NEC 1 Tastatur, 1 Scrollmouse Digital Instruments _Dim3100_298.pdf Hersteller- Ser-Nr. Ins-SerNo AFM-System AFM-Scankopf 90 um Scanweite SPM-Träger DIMENSION 3100 mit Vakuumpumpe und Illumination Controler Motortisch mit 12x10 cm Fahrbereich zur Aufnahme von 200mm-Wafern DAFMLN 1972G / September 2003 D NanoScope IV Control Station NS mit Steuer-PC Pentium 4, 2,4 GHz, 2x TFT 19'' NEC, DI Trackball-Controler, Keyboard, Software Signal Acces Module SBOB3 (Breakout Box mit BNC-Steckern) Sample Spacer D3FS Thick Chucks D3TC Non-Magnetic Cantilever Holder DCHNM Vibration Isolation Enclosure Pressluft-Schwingungsdämpfung, Schutzhaube Electronics Console Rack für Control Station, PC, Illumination Contoler mit Arbeitsplatte VTK-103-3K-2 TMC ELCON-100/240V Messsystem Tunneling/Conductive AFM (TUNA/CAFM) TUNA2 Application Module Scanning Capacitance Microscopy (SCM) SCM Application Module Diverse Manuals: * Command Reference Manual V5.12 Rev B * SPM Training Notebook 3.0 * Nanoscope IV Controler 5.12r3 * Dimension 3100 Manual 4.43B * Manual Signal Access Module III * Nanoscope 6.11 SW User's Guide Stück Vakuumpumpen für Probenfixierung (1 "Backup") 2 Messsystem zur lokalisierten Aufnahme von I(U)-Kennlinien im Magnetfeld Toroid-Magnetspulenpaar zur Erzeugung eines In-Plane-Magnetfeld varabler Stärke und Richtung Source Meter Keithley 2400 Keithley na Qimo Kepco Vier-Quadranten-Netzteile +/- 36V; +/- 6A mit Adaptern zur analogen Fernsteuerung mit 2x Manual Magnetfeld Steuer-PC Intel Pentium II MMX 450 MHz, Win NT, 256 MB National Instruments PCI 6030E AD/DA-Karte mit C-2090 BNC Breakout Box Kepco BOP 36-6M Pentium II MMX 450 MHz NI PCI 6030E NI C Contact Qimonda AG in. IN. Dr. Georg Eggers Am Campeon 1-12, Neubiberg Phone: +49 (89) georg.eggers@qimonda.com Georg Eggers, Qimonda AG i. IN. Page 13 / 13