Process energy from TRUMPF Hüttinger. Powering industry into the future.

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1 Process energy from TRUMPF Hüttinger Powering industry into the future.

2 Future technologies rely on TRUMPF Hüttinger process energy. TRUMPF Hüttinger: A world leader in process energy. Across the industrial spectrum, today s state-of-the-art quickly becomes tomorrow s obsolescence. Faster, smaller, more reliable, more powerful: these are the driving forces in everything from flat panel displays to jet turbines. Without a reliable source of process energy, progress in technology would be slowed to a crawl. Around the world, many key processes in production, research and development get that energy from TRUMPF generators. Decades of experience in induction heating, plasma and laser excitation enables us to continually provide new and innovative solutions to process energy needs. This, in turn, has earned TRUMPF Hüttinger world-wide recognition and many collaborative business arrangements across the industrial landscape.

3 Our areas of expertise Plasma excitation TRUMPF Hüttinger is pushing plasma excitation technology ahead with products that enable state-of-the-art applications. Even our standard line of generators has made an impact with their wide matching ranges, high reproducibility, short-circuit protection and long-term reliability. Induction heating Precise, non-contact, cost-effective heat provided by TRUMPF generators delivers complete performance over a wide range of frequencies and load conditions. Their reliability and robustness under harsh everyday industrial conditions have been proven across all sectors, from soldering, welding and sealing to the extremely stable output requirements demanded for crystal growing and zone floating. CO 2 laser excitation Industrial laser applications are the third future-oriented technology that we enable. The advantages of laser based manu facturing tools include flexibility, precision and high throughput. For many years TRUMPF Hüttinger has been, and remains, the exclusive supplier of generators for CO 2 laser excitation to TRUMPF, the world s market leader in lasers and laser systems for material processing.

4 Two distinguished organizations combine their strengths. TRUMPF Hüttinger is TRUMPF. Since After many years as TRUMPF s exclusive provider of generators for CO 2 laser excitation, TRUMPF Hüttinger became a member of the TRUMPF family in The complementary technologies of these two organizations, leadership in laser and mechanical engineering and leadership in process energy have given TRUMPF Hüttinger the ability to excel in its specialized areas of power conversion. At the same time, similar corporate cultures and a shared vision about building long and lasting customer relationships have enabled TRUMPF Hüttinger to remain flexible, innovative and forwardthinking.

5 From humble beginnings comes a world leader in process energy Founded by Fritz Hüttinger, in Freiburg, Germany, as a company producing specialized electrical apparatus 1926 Production of medical devices for surgery and therapy 1936 Development and production of HÜTTINGER high-vacuum amplifier tubes 1949 Expansion of production program with HF and MF generators for in ductive and capacitive appli cations. Target group: industrial users 1960 Introduction of RF generators for semiconductor production (BALZERS, IBM) 1983 Beginning of production of RF generators for laser excitation 1990 TRUMPF becomes a shareholder in the HÜTTINGER Group 1992 Founding of our US sub sidiary HÜTTINGER Electronic, Inc. in Farmington, CT 1996 ISO 9001 certification Establishment of a sales and service office in Fremont, CA, USA Founding of our sales and service company HÜTTINGER Electronic K.K. in Yokohama, Japan 1999 Market leader in generators for large area coatings; conversion of assembly to lean synchronous production methodology 2004 Delivery of our 10,000th Series IS RF generator. World s largest number of generators supplied for RF laser excitation 2005 Entry into the flat panel display market 2007 Acquisition of Advanced Converters and integration as new subsidiary. Expanding DC product portfolio 2008 Market leader in generators for critical coating pro cesses used in the flat panel display production 2012 Construction of a test and qualification center for examining new product developments in the business field of plasma generators 2013 Change of name from formerly HÜTTINGER Elektronik into TRUMPF Hüttinger 2014 TruPlasma MF Series 7000 (G2) Further improvements in arc management for optimum productivity, even in critical, reactive processes. TRUMPF Hüttinger therefore sustains its position as the technology and market leader in the field of large area coating

6 TRUMPF Hüttinger: your source for complete application solutions. One source from start to finish. Our most important asset is our people. That s because TRUMPF Hüttinger not only generates power, we also generate ideas and solutions. For example, in the production of solar cells. Depending on their manufacturing technology crystalline or thin-film solar cells a variety of thin film deposition and etching processes are required. Over 700 employees in R&D, production, sales and service work cooperatively with our customers to design, build and service the generators that best meet their need, now and in the future.

7 A highly experienced and knowledgeable staff, plus our numerous inventions and patents are the secret of TRUMPF Hüttinger s success. Bernhard Moosmann, Development We develop, produce and test the central components of our systems ourselves for uncompromising quality. This has been proven by customer satisfaction over many years. Thomas Zipfel, Production We re ready to help. Anytime, anywhere. Natalie Philipp, Service A good sales department listens. We do and thoroughly familiarize ourselves with your needs. Then we develop the optimum solution for you. Dirk Künzig, Sales

8 Power from nature; power from TRUMPF Hüttinger True, not every plasma comes from TRUMPF Hüttinger. We certainly can t compete with Mother Nature! But for your terrestrial cold fire plasma application you ll probably need an energy source that is more adjustable and consistent. TRUMPF plasma generators are engineered to meet these requirements. They are available in high output ranges, with control functions that permit precise regulation and repeatable accuracy. TRUMPF DC, MF and RF generators, with stateof-the-art electronic and interface architectures, make it easy for you to harness this energy for today s high technology plasma processes while protecting against undesirable effects. We set the standards for such applications as flat panel displays, low-e glass coatings and solar photovoltaics. As these newer technologies advance into the future, TRUMPF Hüttinger is poised to support them.

9 Product families for plasma excitation: TruPlasma DC Series 3000 Compact, modular generators with very high power density. TruPlasma Bias Series 3000 DC power supplies for bias applications. TruPlasma Arc Series 3000 DC generators for cathodic arc applications. TruPlasma DC Series 4000 Modular DC power supplies in pulsed mode. TruPlasma Bias Series 4000 Pulsed DC power supplies for bias applications. TruPlasma Highpulse Series 4000 High impulse DC system for extremely precise sputtering applications. TruPlasma Bipolar Series 4000 Bi-polar pulsed DC generators featuring a broad power range. Plasma excitation: Processes Activation, etching and sputter processes Plasma enhanced CVD processes (PECVD) Plasma enhanced PVD processes Plasma polymerization Plasma cleaning Plasma diffusion Hard coating TruPlasma MF Series 3000 / 7000 MF generator solutions for both depositing ultra-thin films and large area sputter processes at high deposition rates. TruPlasma RF Series 1000 Robust and energy-efficient RF generator with accurate output power regulation for PECVD processes in semiconductor manufacturing. TruPlasma RF Series 7000 Powerful RF generators for large area activation, etching and sputter applications. Arc management SensorLine, DetectLine and CompensateLine Intelligent circuits for protecting against unwanted arcs and discharges. Provides immediate detection and fast reaction for optimum process yields. CombineLine Unique high-frequency combiner technology with true 50-Ohm output impedance. Ensures stable processes for best productivity.

10 TRUMPF Hüttinger masters the art of induction heating. An unbeatable induction heating team. You and us. Working in close collaboration with you, our customers, TRUMPF Hüttinger has developed solutions in many areas related to induction heating. Playing a key role in numerous industrial processes, induction heating allows non-contact heating of many different materials with pinpoint accuracy. Surfaces can be hardened, crystals grown and containers sealed, the latter without affecting the package or its contents. Induction offers high energy efficiency and rapid heating for the short throughput times required in today s highly competitive environment. At TRUMPF Hüttinger we stand ready to supply you with the generators you need to meet all your objectives. Our products are renowned for their robustness and reliability which helps you to maximize your up-time and production yields.

11 Product families for induction heating: TruHeat MF Series 3000 / 5000 / 7000 MF generators with a wide frequency range and high matching range; suitable for use in numerous applications across many fields. TruHeat HF Series 1000 / 3000 / 5000 Extremly compact, powerful HF generators with a particularly wide frequency range for many standard industrial heating applications. TruHeat HF Series 7000 HF generators for energy-intensive applications, from hardening to zone floating. Induction heating: Processes Hardening, annealing, tempering Heating cables Soldering, melting, shrinking Vaporization Drying, gluing Sealing, tube welding Crystal growing and zone floating Epitaxy Inductively coupled plasma

12 Flawless energy for high-yield results. Your success depends on our proven reliability, even under the most demanding conditions. Semiconductor production applications typify the sophisticated demands placed by users on our generators. Wafer production processes, for example, are among the most difficult production tasks one can imagine. They require process energy sources that perform flawlessly over many days of uninterrupted operation! During this time, even the smallest output disturbances can cause the process to fail, leading to reduced yields and substantial financial losses. With so much on the line, these users must select their process energy partners with great care and more often than not, they select TRUMPF Hüttinger.

13 The availability of flawless crystals is critical to many applications. The success of companies producing semiconductors and optical com ponents is almost entirely based on the quality of man-made crystalline materials. Induction heating is often the method used to facilitate the growth of these materials. TRUMPF generators have proven their superior performance and reliability in all zone melting and crystal pulling activities.

14 May I help you? Service anywhere, any time. TRUMPF Hüttinger has added another dimension to the concept of service. It goes beyond the service specialists who are deployed around the world and ready to visit you at all possible (and impossible) times. It is more than training on our products or the support and rapid delivery of spare parts to your company, no matter where it is located. Our service story begins even before you buy our products. We start by focusing on designing and building the most efficient, reliable and durable generators possible. We follow up with service that keeps our generators performing year after year, even under the harshest conditions.

15 Help, when you need it We offer 24 hour hotlines in Europe, North America, South Korea and Taiwan. Where you need it Service centers in Europe, America, China, Japan, South Korea and Taiwan insure comprehensive global support. Fast! TRUMPF Hüttinger spare parts depots in America, Europe and Asia permit short reaction times when service is required.

16 Trumpf Hüttinger GmbH + Co. KG Bötzinger Straße Freiburg Germany Phone Fax Info.Electronic@de.trumpf.com TRUMPF Hüttinger GmbH + Co. KG, All rights reserved. Subject to errors and technical changes V09 Illustrations with friendly permission from Aixtron, Haldor Topsoe.