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2 Imprint Ilmenau University of Technology Institute of Micro- and Nanotechnologies Center for Micro- and Nanotechnologies Editor: Principal of the Ilmenau University of Technology Univ.-Prof. Dr. rer. nat. habil. Dr. h. c. Prof. h. c. Peter Scharff Editorial office: Martin Hoffmann, IMN Stefan Krischok, IMN Liliana Sendler, mnst-broker Ilona Hirt, mnst-broker Cordula Giewald, MacroNano Simone Gutsche, ZMN Funding: Micro-Comp e.v. Printing shop: IlmPrint, Langewiesen Cover picture: Array of 32 AFM active cantilever mounted on LTCC carrier, developed in Institute of Micro- and nanoelectronics at the Ilmenau University of Technology in the Frame of European Project PRONANO in collaboration between the Department of Micro- and Nanoelectronic Systems and Department of Electronics Technology

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4 Preface MacroNano isn t it too big as a headline for an institute at a university? Nanotechnology is a hot topic in many ways: it is used for innovative products (even if they do not use real nanotechnology), it enters our daily life in any computer with nano-sized transistors or in new technical coatings with unique properties, but it is also under discussion with respect to the risks caused by nanoparticles. But why MacroNano? In Ilmenau, nanotechnology is investigated with respect to the integration into technical systems: new sensors are developed, that are based on nanoscopic dimensions; nanostructured surfaces are used as interfaces between materials which are difficult to assemble. They help to improve systems that can be used in a macroscopic scale. On the other hand, a nanopositioning tool is successfully developed in the SFB 622 Nanopositionier und Nanomesstechnik : a macroscopic analytical system that is unique in the scientific world: it can measure and position reproducibly a tool within a few nanometers within a field of 25 x 25 x 5mm 3. Many of the current research projects bridge the gap between the macro and the nano world. There s still plenty of room at the bottom, this headline used by Richard P. Feynman in the 50 th of the last century is still true. Many of his visionary ideas are not yet fulfilled. His ideas are still part of the driving forces for nanotechnology. Tailored materials as well as self-assembling micro-machines leave room for many more new ideas and future scientific research. The last two years have also been a phase of changes within the Institute of Micro- and Nanotechnologies. The last preface was given by Prof. Oliver Ambacher. In 2007, he has left the TU Ilmenau and he is now Director of the Fraunhofer Institut für Angewandte Festkörperpyhsik in Freiburg that has an excellent standing in the scientific world. Our best wishes for his new job, the cooperation with Prof. Ambacher will continue as joint projects have already been started. After more than 5 years of successful work as managing director of the Center for Micro- and Nanotechnologies, Dr. Herwig Döllefeld took over a new job at an industrial partner. I would like to thank Prof. Ambacher and Dr. Döllefeld on behalf of all the people within the Institute and the Center for their very successful work in the first and important years! Without their ideas and enthusiastic engagement it would not have been possible to set-up an Institute with currently about 32 departments and young research groups. On the other hand, we are lucky to welcome new partners within the institute: Among them are the heads of the following departments: Prof. Edda Rädlein (Department of Inorganic non-metallic Materials), Prof. Peter Schaaf (Department of Materials for Electronics), Prof. Thomas Klar (Department of Experimental Physics II), Prof. Jens Müller (Department of Electronics Technology). As the new managing director, Dr. Stephan Karmann joined the ZMN-team in September 2008 after years of research at the Friedrich-Schiller-Universität Jena and of industrial practice. The Institute of Micro- and Nanotechnologies MacroNano has made significant steps into the future. Many examples of the research performed in the last two years is given in this report as short one-page overviews. We invite you to contact the scientists for more details. Among the successful results are also important new projects: - establishing of a third young research group within the Center of Innovation Competence - Partner in the pilote phase of Spitzenforschung and Innovation in den Neuen Ländern, a program for excellent research, within Kompetenzdreieck Optische Mikrosysteme together with partners in Erfurt and Jena. Please enjoy reading through this report! Don t hesitate to contact us or visit us to learn more about Micro- and Nanotechnologies in Ilmenau. Prof. Dr.-Ing. Martin Hoffmann Director of the Institute of Micro- and Nanotechnologies

5 CONTENTS Contents Research Departments and Staff of the IMN Administration of the ZMN Junior Research Group Functionalised Peripherics. Junior Research Group Microfluidics and Biosensors.... Department of Automotive Engineering..... Department of Biomechatronics.... Department of Biosignal Processing Department of Chemistry.... Department of Electrothermal Energy Conversion.... Department for Electrochemistry and Plating..... Department of Experimental Physics II..... Department of Electronic Measurement Department of Electronics Technology.... Department of Experimental Physics I Department of Inorganic Non-Metallic Materials... Department of Materials for Electronics.. Department of Media Design and Media Psychology... Department of Metallic Materials and Composite Materials... Department of Micro- and Nanoelectronic Systems Department of Micromechanical Systems... Department of Nanotechnology.... Department of Optical Engineering Department for Physical Chemistry and Microreaction Technology Department of Power Electronics and Control Department of Process Measurement.. Department of Production Engineering... Department of RF and Microwave Techniques Department of Solid-State Electronics.. Department of System Analysis. Department of Technical and Economic History. Department of Technical Physics and Junior Research Group.. Department Theoretical Physics I... Department Theoretical Physics II / Polymer Physics Infrastructure and Equipment Technological labs and equipments inside the clean room.. Technological labs outside the clean room Finances Neighbouring Institutions Application Center Ilmenau.... Institution for Microelectronic and Mechatronic Systems IMMS

6 CONTENTS SFB The collaborative research centre (SFB) 622 Nanopositioning and Nanomeasuring Machines mnst-broker Scientific Activities Materials Science Growth and In Situ Surface Analysis of GaN.... REM and TEM Investigations of Electrophoretic Deposited Si 3 N 4 and SiC Particles... TEM Investigation of Sputtered and Epitaxial Grown Indium Oxide Layers for Ozone Sensors.. Synthesis of Nanolaminar MAX Phase Functional Coatings by Pulsed Laser Deposition. Plasma Treatment of Cu Ions Dissolved in the Ionic Liquid [EMIM]Tf 2 N. Surface Investigation of SU-8 by Atomic Force and Scanning Electron Microscopy. Diazoalkane Addition Reaction on the Fullerene Dimer C 120 O and Characterization of the Resulting Mono-adduct. Crystallization of Undercooled Melts of the Ternary System BaO-Fe 2 O 3 -B 2 O Influence of Electric Fields on the Absorption of GaN.... TEM Investigation of Sputtered Indium Oxide Layers on Silicon for Gas Sensors. Transport Properties of Transition Metal Graphite Intercalation Compounds... Synthesis of Zirconium Tungstate (ZrW 2 O 8 ) by the Amorphous Citrate Process... Cellulose-based Composites as Bipolar Plates in Fuel Cells.... Improved Molecular Weight Distribution of Radical Polymerization Carried Out in a Micro Segmented Flow Setup Graphene a Material for Future Transistors... Suspended Nanowire Web Radiation Damage and Raman Vibrational Modes of Single-walled Carbon Nanotubes. Conjugated Fullerenes New Organic Semiconductors?... Charge Transfer between Covalently Bound Oligothiophenes and Fullerenes Analytics Optical Characterization of E. Coli Growth Inside Micro Fluid Segments for Toxicological Screenings... Label Free Measurement of Sodium Ion Fluxes... Determination of Conduction-Band Parameters of Wurtzite GaN and ZnO by Spectroscopic Ellipsometry. Wire Shape Shapes Surface Plasmon Resonances... Biosensing with Plasmonic Nanoparticles..... Stress in Wide Band Gap Silicon Heterostructures Monitored by FTIR Ellipsometry.. Space Charged Region in GaN and InN Nanocolumns Investigated by Atomic Force Microscopy. Long Range Nanoprofiling of Spoted Polymer Arrays for the Characterization of Chemochips Technology EasyKit - Innovative Development and Didactic Tools for Mechatronical Systems... High-Temperature-Functionalization of Surfaces: Drag Reduction and Self-Cleaning. Magneto-hydrodynamic Convection at Flat and Microstructured Electrodes for Metal Finishing..... Packaging for High Temperature Applications in LTCC-M Technology... New Methods for Joining Based on Scale Effects.... Halftone Masks for Analog Lithography Based on the Interferometric Phase Contrast Method

7 CONTENTS Ultraprecision Micromilling of Freeform Optical Elements for Microoptical Systems Integration..... Piezoelectric AlN Thin Film Sensors by Sputter Deposition (Innosens). Isotropic Etching of Silicon Carbide SiC nucleation control on Si and SiC-Si interface modification with group IV elements. Technology Development for Graphene Devices..... Bonding of Polymers and Ceramics on Nanostructured Silicon.... Modification of Black Silicon Properties in Deep Reactive Ion Etching Processes.. Reliability Assessment of LTCC Packages for Space Applications.. ZiLuZell a Rechargable Microstructured Zinc-Air Fuel Cell for Self-sustaining Microsystems... Study of the Behaviour of Tuneable Dielectrics Embedded in LTCC Design Compact Modelling of Electro-mechanical Behaviour of Self-actuated Piezo-resistive Cantilever Arrays with SPICE. Transfer of the Beam Bending Equation in an Equivalent Circuit Model Towards a Biologically Inspired Climbing Robot..... Precise Simulation of Uncharged Reactant Transport in Plasma Processes at the Vicinity of the Sample Numerical Calculation of Electric Field during Modeling of Charging Effect in Plasma Etching Simulator.. Development and Investigations of a Metrological Scanning Probe Microscope for Application in NPM-machine... Thermal Optimisation of Microwave Packages in LTCC..... Simulation of 3-Pulse Photon Echo Experiments Devices MiniMags Miniaturized Electromagnetic Valves... Realisation of 60 GHz Front End Modules for UWB Applications. Fluidic Characterization of a Micromixer made from Low-Temperature Co-fired Ceramics (LTCC)... Electro-thermal Silicon Micro Grippers..... Non-Contact AFM with Self-Actuated Piezoresistive Cantilever... Advanced High-speed AFM-stage for Precise Positioning..... Miniaturised Hybrid-LTCC Diplexer Module for Tetra / UMTS-Mobile Applications.. Two Designs of Tactile Sensor Peripheries MEMS Resonator Based Pressure Sensing.... Optical Metallic Nano-Resonators LTCC-glass-hybrid-vessel for Microfluidic Applications... Tool for Positioning of Atoms and Clusters with Nano-resolution... Maskless SPP Nanolithography Micro-optical Sensor for Micro- and nano-fluidic Analysis.... Development of Silicon Dioxide Structures as Combined Step Width and Step Height Standard..... Simultaneous Opto-electrochemically Monitoring of Enzyme Kinetics with AlGaN-ISFETs..... Precision Alignment of Multifunctional Sensor Tips for the Use in an NPM-machine.. Biocompatible Thick Film Flow Sensor Molecular Recognition Based on Functionalized Self-actuated Microcantilever Transducers.... Technological Aspects of the Manufacturing of a Ka-Band Switch Unit in LTCC.. Switching Behaviour of Organic Field Effect Transistors Optical Manipulation of Cell Cultures in Integrated Micro-Opto-Fluidic Systems

8 CONTENTS Qualification of LTCC Multilayer Technology for On-Orbit-Verification.. AlGaN / GaN based MEMS with Two-dimensional Electron Gas for Novel Sensor Applications Properties of Embedded LTCC Capacitors for Microwave Applications Uncooled IR-sensor Based on Arch Type Microcantilevers..... Innovative Microfluidic Chip with Electrical and Optical Functions for Optical Tweezers No-power Sensors for Application in RFID.... AlN Membranes as a Mechanical Material... Compact RF-Filter-Module with Lumped Elements in LTCC for Applications up to 10 GHz.... Miniature Lumped-Element Rat-Race Coupler in Ceramic Multilayer Technology. Standard and Non-Standard Applications of LTCC Modules Systems Microsystems for the Cultivation of Cells on 3D-Scaffolds Design and Fabrication of a New Co-Culture Platform for Cell Stimulation and Communication. Experimental Platform for Educational Courses in Microfluidics and Micro Reaction Technologies..... Micro Bioreactor for Multiwell Plates with an Active Micro Fluidic System for 3D Cultivation... Silicon on Ceramics A New Concept for Micro-Nano-Integration on Wafer Level..... LTCC Switch Matrix Experiment for On-orbit Satellite Verification.. Precision Positioning System with Integrated Planar Guides. Establishing a Neuromuscular Communication in a Multi Electrode Array- Based Co-culture System.. Fluidic Components for Chemical Applications - Made in LTCC Communications Science Media Coverage of Genetic Research in Germany and Great Britain: Spiegel versus Economist... New Concepts for Teaching in Microsystem Technology: FasiMiT + Microteaching Selected Publications and invited Conference Contributions. 146 Theses Invited Talks and Colloquia Scientific Projects 2007 / Fair participations 193

9 RESEARCH DEPARTMENTS Research Departments and Staff of the IMN Administration of the ZMN Staff Director: Deputy director: Central services: former: Financial management: Financial management: Accounting and office: Office: Head of technical engineering: Lab supervisor: Network administration: Scientific coworkers: Prof. Dr. Martin Hoffmann Prof. Dr. Stefan Sinzinger Dr. Stephan Karmann Dr. Herwig Döllefeld Kirsti Schneider Sabine Jahn Renate Röhner Simone Gutsche Torsten Sändig Dr. Arne Albrecht Olaf Marufke Alexander Konkin Henry Romanus Univ.-Prof. Dr.-Ing. habil. Martin Hoffmann Technical coworkers: Contact: Simone Gutsche, Phone: +49 (0) simone.gutsche@tu-ilmenau.de Birgitt Hartmann Karin Friedel Manuela Breiter Stefanie Amm Dr. rer. nat. Stephan Karmann

10 - 7 - RESEARCH DEPARTMENTS Junior Research Group Functionalised Peripherics The Junior Research Group Functionalised Peripherics is part of the Centre for Innovation Competence MacroNano which is an initiative of the BMBF (Federal Ministry for Education an Research). The research of this project concentrates on multifunctional system-in-package (SiP) approaches for microwave applications up to 80 GHz based on multilayer ceramic technology. System-in-Packages allow combinations of different semiconductor technologies (e.g. GaAs and SiGe) with non-monolithic components in one package. It offers high flexibility for re-designs at moderate costs and in short time. It includes the development of microwave modules with high power dissipation, integration of functional materials in substrates, optimisation of microwave interconnects and transitions, substrate integration of passive components and development of assembly concepts for modules on different boards (2nd level interconnect). Furthermore, combination of fluidic structures and electronics in a multilayer ceramic substrate is part of the ongoing research. The focus points of this project are the following work packages: Interconnecting structures for working frequencies up to 80 GHz Lumped passive RF-elements Advanced cooling concepts for high power dissipation Wafer level Silicon Ceramic compound materials The research activity is based on LTCC and comprises the following subjects: optimisation of the design phase (costs, time) through standardisation of microwave functions (impedance controlled transitions, passive integrated components) development of microwave-compatible cost-effective module concepts for efficient cooling improvement of the structure resolution for high integration densities development of reliable bonding technologies to connect large ceramic modules on materials with different thermo-mechanical properties (2nd level interconnect) broadening the applicable latitude of microwave components and circuit boards by use of new structures (design) and functional materials. The results will be adaptable on the market and can be transferred to potential industrial partners, especially to SME's in Germany. The field of applications include mobile communication, Gbit-WLAN, medical electronics, automotive and ultra wide band radar sensing. Staff Head of research group: Jens Müller Scientific coworkers: Heike Bartsch de Torres Xia Lei Waleed Ehrhardt Michael Fischer Torsten Thelemann Matthias Mach Rubén Perrone Sven Rentsch Technical coworkers: Christine Lohmann Ina Koch Contact: Cordula Giewald, Phone: +49 (0) cordula.giewald@tu-ilmenau.de Prof. Dr.-Ing. Jens Müller Univ.-Prof. Dr.-Ing. Jens Müller

11 RESEARCH DEPARTMENTS Junior Research Group Microfluidics and Biosensors The focus of the research group is the development of a novel highly integrated complex system for the high-content-screening of pharmacologically active compounds, i.e. the determination of several physico-chemical parameters in a biological assay. This includes the design of new microfluidic devices and the development of novel biosensor structures which allow to transduce functional activities into electric or optic signals with high specificity and high signal-to-noise ratio. The work ranges from biophysical research, nano- and nanobiotechnological approaches to the assembly of whole systems. This nanosystem integration leads to the understanding of nanobiosystems for biological applications. The research activities can be divided into different work packages: Development of various parallel systems for the cultivation of cells, 3D tissues analysing the interactions between cells and tissues integrating fluidic, dosing systems together with electronic sensor arrays and optical sensor methods into a multifunctional system Development of generalised assays for pharmaceutical applications utilizing integrated microfluidic and biosensoric systems (cell-free and cell based assay systems like Protease-, HDAC- assays or cell lines as HepG2, stem cell lines as the P19, Fibroblast and primary 3D tissue systems) System biological studies, e.g. cell differentiation and coculture Development of assays for activity tests of membrane proteins in cells Generation of stably transfected mammal cell lines which overexpress certain membrane proteins. This material constitutes the basis for assay development which helps to investigate problems in biological research and it will be used for biofunctionalisation of the sensor structures being developed. Evaluation and development of High-Electron-Mobility-Transistor Structures based on group-iii-nitrides for biosensor applications in conjunction with cells or membrane proteins. Optimization of sensor structures for different applications ( Life Science ) Development and manufacturing of thermoformed and hot embossed micro fluidic structures for biotechnical applications Development and evaluation of surface structuring techniques and processing of high-tech polymers for cell culture and micro fluidic applications Proof-of-Concept-Studies will be developed to prove the feasibility of technical solutions which form the basis for application in device (or: instrument) technologies. The results will be adaptable on the market and there for transfered to potential industrial partners, especially to medium-sized and larger pharmacological research companies. Staff Head of research group: Andreas Schober Scientific coworkers: Caroline Augspurger Irina Cimalla Uta Fernekorn Fichael Fischer Michael Gebinoga Jörg Hampl Christian Hildmann Mario Kittler Katharina Lilienthal Liele Costa Silveira Sukhdeep Singh Bertram Tittel Frank Weise Frank Weise PD Dr. rer. nat. habil. Andreas Schober Technical coworkers: Karin Friedel Maren-Jördis Klett Annette Läffert Contact: Cordula Giewald, Phone: +49 (0) cordula.giewald@tu-ilmenau.de

12 - 9 - RESEARCH DEPARTMENTS Department of Automotive Engineering Founded in 1992, Professor Klaus Augsburg became the head of department in 1999 and from that time the growth concerning staff and business volume has been very high. In 2003 the department has moved to the Newtonbau, the new laboratory facility of the Faculty of Mechanical Engineering. Daily business of the department can be divided in 2 parts: education and research & development (R&D). The first one is mainly represented by the new course of study automotive engineering which was introduced in October R&D is mostly linked to collaborations with external partners like well known OEM s (BMW, DaimlerChrysler, BOSCH, ). The department is mainly specialised in the field and problems of brake technology. Generally the R&D is focussed on applied research in automotive technology, development of complex mechatronic systems, construction and preparation of stationary and mobile test facilities and investigations concerning human machine interface (HMI). In those special R&D areas the Department of Automotive Engineering is the first department in the newly-formed German states which is certified according to ISO 9001:2000. Staff Head of department: Scientific coworkers: Technical coworkers: Klaus Augsburg Robert Fetter Sebastian Gramstadt Stefan Heimann Maik Hoppert Rüdiger Horn Valentin Ivanov Marat Karibayev Karl-Heinz Müseler Jan Sendler Joachim Stahl Bernard Thomas Heinz-Dieter Vehmann Falk Amling Victor Beez Thomas Klein Achim Kuhne Michael Posselt Univ.-Prof. Dr.-Ing. Klaus Augsburg Contact: Madlen Schmelcher, Phone: +49 (0) madlen.schmelcher@tu-ilmenau.de

13 RESEARCH DEPARTMENTS Department of Biomechatronics The department of Biomechatronics was founded as the first chair of biomechatronics in Germany. Biomechatronics focuses on the development and improvement of mechatronic devices by transfering principles of biological and medical systems into technical systems. On one hand specific mechatronic products and methods have to be adapted to applications for biological systems and human beings focussing on their possibilities and demands. On the other hand mechatronic design is biologically inspired. This process is based on principles of bionically oriented methods of engineering. In conclusion biomechatronic is not an opposite strategy to existing high technology, it complements und expands the method repertoire of engineering sciences. Main research topics are the analysis and design of technical locomotion systems, in which the size spectrum of biological from small to large organisms is considered. Great interest is directed towards the human being as a motion system, as well as an object of human medicine. Its locomotion including the use of the trunk, the gripping, and manipulation is studied with focus on prevention, diagnostics, and therapy, as well as an example of biological inspiration for adaptive mechanisms in the field of robotics. Robotic strategies, especially of swarm leading are used for e.g. touristic assistance systems with a focus on human-machine-interfaces. At the moment one main activity is the coordination between the requirements of motoric and sensoric systems. Competences for research and teaching in cooperation with other departments at the TU Ilmenau and external specialists: Bionics of micro systems Compliant mechanisms Bionics of construction and material Ecological Models / environment analytics Neuro cybernetic (Bio-) Medical Engineering Ergonomy Robotics Staff Head of department: Scientific coworkers: Technical coworkers: Hartmut Witte Emanuel Andrada Kathrin Carl Helge Drumm Robert Fetter Ulrike Fröber Irina Gavrilova Silvia Lehmann Stefan Lutherdt Jörg Mämpel Alexander Müller Cornelius Schilling Mike Stubenrauch Wolfgang Kempf Danja Voges Univ.-Prof. Dipl.-Ing. Dr. med. (habil.) Hartmut Witte Contact: Kerstin Schmidt, Phone: +49 (0) kerstin.schmidt@tu-ilmenau.de

14 RESEARCH DEPARTMENTS Department of Biosignal Processing Main areas in research and development of technology are wearable und implantable multisensor arrays for noninvasive polygraphic measurement of electric and magnetic fields, pressure of liquids and gases in human vessels, breathing and movement. In image processing techniques und technologies are developed which enable very fast and real time detection of arbitrary patterns for use in trackers of eyes, head and body. In methodical research the focus is on adaptive timefrequency-space filtering, detection and tensor-based decomposition (closed form PARAFAC) of physiological multisensory multidimensional data and fusion of multimodal information. Staff Head of department: Peter Husar Scientific coworkers: Technical coworkers: Vesselin Detschew Dunja Jannek Danny Ammon Annegret Köhring Daniel Laqua Sebastian Röhr Dmitry Lazutkin Maria Franczyk Kirsti Legien Contact: Peter Husar, Phone: +49 (0) peter.husar@tu-ilmenau.de Univ.-Prof. Dr.-Ing. habil. Peter Husar

15 RESEARCH DEPARTMENTS Department of Chemistry Carbon nanotubes are still in the focus of scientists interested in their unique physical properties, but over the last years our interest begun to focus on their chemical properties. The carbon nanotube chemistry leads to the synthesis of defined functionalised carbon nanotubes and enhances the opportunities for future technological applications ranging from nanoelectronics to composite materials with improved functional characteristics. The department of Chemistry is involved in the development of new carbon compounds and materials from the preparation of the carbon nanotubes; their purification from catalyst residues, carbon nanoparticles, and fullerenes; their separation according to length, diameter, and chirality into semiconducing and metallic nanotubes; and finally to the understanding and control of their formation and chemistry. To be successful in these challenging fields we have a strong collaboration with other groups of the university, as well as industrial partners. We could demonstrate on different samples the functionalization of carbon nanotubes at their ends and walls. Due to the relative curvatures, the caps are much more reactive than the walls of the nanotubes, and are readily lost during chemical processing. A unique possibility for a functionalization of nanotubes is to encapsulate fullerenes inside. For the first time we could describe the insertion of fullerenes (C 60 ) into MWCNTs. Our future research program is contributed to the design, synthesis and identification of novel carbon-based nanostructures and their application. Staff Head of department: Scientific coworkers: Technical coworkers: Peter Scharff Loredana Carta-Abelmann Klaus Heinemann Uwe Ritter Carlo Tiebe Lars Weber Sabine Heusing Susann Klötzer Katrin Risch Doreen Schneider Carmen Siegmund Univ.-Prof. Dr. rer. nat. habil. Dr. h. c. Prof. h. c. Peter Scharff Contact: Yvonne Raab, Phone: +49 (0) yvonne.raab@tu-ilmenau.de

16 RESEARCH DEPARTMENTS Department of Electrical Energy and Control Engineering Electrothermal Energy Conversion In teaching as well as in research, the Electrothermal Energy Conversion Group represents methods and processes covering the use of electrical energy for direct treatment of materials, e.g. melts, semi finished parts and work pieces. The group combines electrical power engineering and materials science to system knowledge for the technological use of the related electro-physical processes. We have close scientific connections to other divisions: the Power Electronic Group, Thermodynamics Group, Fluid Dynamics Group, Materials Science Group, Automatic Controls Group and the Theoretical Electrical Engineering Group. Further development of the division is supported by new materials, components, appliance systems and control techniques on one hand, and on the other, it is essentially required by material-, micro-, environment- and recycling-technologies. The equipment and processes utilized in the division's teaching and research are highly energy intensive and specific, thus the theoretical, numerical and experimental considerations are very important. In the field of electromagnetic processing of materials the group investigates the electromagnetic influences on materials caused by strong magnetic fields. For the experimental investigations a cryogen-free DC-magnet forms the centre of the research project. It is able to create magnetic flux densities up to 5 Tesla. The DC-magnet was equipped with a specially designed high temperature furnace allowing peak temperatures of 1500 C and a gas supply for working with defined pressures of Argon, CO/CO2, O2, N2 and air. At present, studies are accomplished concerning the crystallisation of Bariumhexaferrite (BaFe12O19), which is known to crystallise out of amorphous flakes of the glass system BaO-B2O3- Fe2O3 in the magnetic field. Staff Head of department: Scientific coworkers: Technical coworkers: Ulrich Lüdtke Rico Klein Yvonne Ludwig Stefan Buchelt Eckhard Roth Contact: Gaby Böhme, Phone: +49 (0) gaby.boehme@tu-illmenau.de Dr.-Ing. Ulrich Lüdtke

17 RESEARCH DEPARTMENTS Department for Electrochemistry and Plating Main research: Galvanoforming of microstructures Microsystems of Gold an other noble metals for swiss watchers (Partner Precision Engineering) Fe-Ni-alloys for microsystems by high current density deposition LIGA-4H (Partner Forschungszentrum Karlsruhe) Dispersion deposition with ceramics nanoparticles in metallic alloys Fored electrolyte movement in microstructures of high aspect ratios by using external magnetic fields Staff Head of department: Scientific coworkers: Christine Jakob Peter Kutzschbach Thomas Mache Franziska Petzoldt Udo Schmidt Technical coworkers: Karin Keller Marianne Lerp Anneliese Täglich Contact: Maren Lange, Phone: +49 (0) maren.lange@tu-ilmenau.de apl. Prof. Dr.-Ing. habil. Christine Jakob

18 RESEARCH DEPARTMENTS Department of Experimental Physics II Work at Experimental Physics II can be summarized by the heading Nanophotonics. Currently, several disciplines of science are merging into the nano-world. This is the size regime where things often get too complicated to be explained from scratch, i.e. by quantum mechanics, but are also far from our macroscopic experience. There are many ways to access this size regime. The one we chose is by optical means. This includes single gold nanoparticle spectroscopy, spectroscopy of hybrid systems of metallic and semiconducting nanocrystals and organic materials such as dye molecules or biomolecules. Further, we are interested in microscopy beyond the diffraction limit. Staff Head of department: Scientific coworkers: Thomas Klar René Müller Andreas Richter Technical coworkers: Erika Baudach Heidi Reimer Contact: Silke Syptroth, Phone: +49 (0) silke.syptroth@tu-ilmenau.de Univ.-Prof. Dr. rer.nat. Thomas Klar

19 RESEARCH DEPARTMENTS Department of Electronic Measurement Communications, RF engineering, signal processing, and electronic measurement engineering are very distinct disciplines. While their respective methods and applications appear to be quite different, they share common problems in measurement data acquisition, sensor interface design, signal processing, parameter identification, data analysis and information extraction. The Electronic Measurement Research Laboratory is currently conducting several research projects that lie in the crossroad of these disciplines. The main goal is to apply advanced digital signal processing and RF circuit design methods for solving leading edge measurement problems in mobile radio and RF sensing. Research activities: Measurement and Modelling of Wave Propagation in Mobile Radio Signal Analysis and System Identification Space-Time Signal Processing in Mobile Radio Ultra-wideband Radar and RF Sensing Staff Head of department: Scientific coworkers: Technical coworker: Reiner S. Thomä Vadim Algeier Frank Bonitz Michael Eidner Marcus Grossmann Marko Helbig Ralf Herrmann Ole Hirsch Aihua Hong Martin Kmec Wim Kottermann Markus Landmann Milan Narandzic Peter Rauschenbach Jürgen Sachs Kai Schilling Christian Schneider Guowei Shen Gerd Sommerkorn Frantisek Tkac Sebastian Wöckel Yahor Zaikou Rudolf Zetik Karl Borkowski Univ.-Prof. Dr.-Ing. habil. Reiner S. Thomä Contact: Gitta Weber, Phone: +49 (0) gitta.weber@tu-ilmenau.de www-emt.tu-ilmenau.de

20 RESEARCH DEPARTMENTS Department of Electronics Technology The department of Electronics Technology covers the field of microelectronic packaging between integrated circuits and systems. This includes electronic layout design, substrate manufacturing technologies and component assembly processes. Packaging of microelectronic components and systems is becoming more and more important to achieve the desired functionality. Particular reasons for this are related to the systems technical specification (e.g. working frequency, power loss, miniaturisation) and the environmental working conditions like temperature or temperature gradient, vibration or radiation. Handling of such systems requires an interdisciplinary approach considering material property investigation, design optimisation (electrical, thermal and thermalmechanical) and process technology development. Focal points of interest are: - Assembly technology for microwave applications - Ceramic modules for extreme requirements (e.g. satellite applications) - 3D-Integration of functional materials (System-In-Package) - Mesoscale fluidic systems for bio- and chemical applications - Packaging for Nanosystems Staff Head of department: Scientific coworkers: Technical coworkers: Jens Müller Gernot Bischoff Karl-Heinz Drüe Waleed Ehrhardt Thorsten Mülln Dirk Stöpel Helmut Fischer Uwe Genatis Regina Lenk Martina Sieler Univ.-Prof. Dr.-Ing. Jens Müller Contact: Regina Simon, Phone: +49-(0) regina.simon@tu-ilmenau.de

21 RESEARCH DEPARTMENTS Department of Experimental Physics I The research activities of the department of Experimental Physics I are mainly focussed on optical, electronic and structural properties of semiconductors, semiconductor micro- and nanostructures and polymer optoelectronic devices, and on solar-energy components. The department consists of three research groups dealing with: inorganic semiconductor and devices - hexagonal and cubic group-iii-nitride semiconductors (In,Ga,Al)N and their heterostructures for development of light emitting devices and sensor structures, - strained InGaAs/GaAs and InGaAsP/GaAs quantum well structures for high-power laser applications, - modulation-doped AlGaAs/GaAs heterostructures, InAs/GaAs and InAs/Si quantum dot multilayers, - chalcopyrite semiconductors Cu(In,Ga)S 2 for the development of thin film solar cells organic semiconductors and optoelectronic devices - structure-property relation of thin films made by conjugated polymers such as P3AT, PPV and novel polymers - related composites with nano-carbons like fullerenes or carbon nanotubes, preparation and investigation of polymer bulk-heterojunction solar cells development and characterization of solar-energy components - thermal collectors and novel absorber layers - support of local PV companies by optical investigations - benchmark tests of photovoltaic power plants The experimental investigations are mainly realized by several methods of optical spectroscopy (spectroscopic ellipsometry, modulation spectroscopy, photoluminescence and PL excitation spectroscopy), by electrical characterization (I-V, C-V, photocurrent, magneto-transport) and by X- ray analysis (XRD, small-angle scattering). The solar-energy components are analyzed by using an out-door test facility. Further on, the technological equipment provided by the Center of Micro- and Nanotechnologies of the TU Ilmenau (lithography, ion beam etching, metal deposition etc.) is widely used. Staff Head of department: Scientific coworkers: Technical coworkers: Gerhard Gobsch Carsten Buchheim Tobias Erb Rüdiger Goldhahn Harald Hoppe Burhan Muhsin Pascal Schley Andreas Winzer Helmut Barth Barbara Krause Dirk Schulze Norbert Stein Univ.-Prof. Dr. rer. nat. habil. Gerhard Gobsch Contact: Petra Sieck, Phone: +49 (0) petra.sieck@tu-ilmenau.de

22 RESEARCH DEPARTMENTS Department of Inorganic Non-Metallic Materials Study, some lectures: Fundamentals of material science Inorganic-nonmetallic materials Glass and ceramic technologies Special glasses Micro and nano structuring of glasses and ceramics Recycling The lectures are assisted by practica. Research topics: Micro structuring of glasses for micro systems technology development of glasses micro structuring application Glass-crystallization-technology to make nano or micro crystalline oxidic powders Magnetic powder-composites Stirring of glass melts by externally generated Lorentz forces Glass surfaces and coating Staff Head of department: Scientific coworkers: Technical coworkers: Edda Rädlein Stefan Belau Ulrike Brokmann Bernd Halbedel Annett Hesse Uwe Hoppe Uwe Krieger Petra Mahr Susanne Mrotzek Uwe Schadewald Michael Jakob Stefan Neudert Frank Oßmann Dagmar Raab Karin Sönnichsen Univ.-Prof. Dr.-Ing. habil. Edda Rädlein Contact: Irina Hoffmann, Phone: +49 (0) irina.hoffmann@tu-ilmenau.de

23 RESEARCH DEPARTMENTS Department of Materials for Electronics The department of Materials for Electronics is concerned with the development of new materials for nanopositioning, as well as the development of new metallisation materials for wide bandgap semiconductor contacts. Furthermore, this department focusses on the analysis of liquid metals and the development of new adaptive materials which have low or negative thermal coefficients. These materials are produced by sputtering of thin films or by electrochemical or electrophoresis methods. Samples of different materials, such as deposited layers and post annealed layers, are also provided from other groups of the university, as well as from industrial partners. The main focus of this work is analysis with different methods: X-ray diffraction in different measurement setups X-ray fluorescence spectroscopy, X-ray imaging analytical scanning electron microscopy (ESEM, EDX, EBSD) analytical transmission electron microscopy (EDX, PEELS, diffraction, high resolution) atomic force microscopy different electrical methods thermo wave inspection system classical mechanical testing of materials Staff Head of department: Scientific coworkers: Technical coworkers: Peter Schaaf Volkmar Breternitz Maik Gubisch Friedhelm Günter Thomas Kups Henry Romanus Friedhelm Scharmann Lothar Spieß Gerd Teichert Herbert Tippmann Marcus Wilke Anke Kais Elvira Remdt Jens Schawohl Univ.-Prof. Dr. rer. nat. habil. Peter Schaaf Contact: Brigitte Weiß, Phone: +49 (0) wet@tu-ilmenau.de

24 RESEARCH DEPARTMENTS Department of Media Design and Media Psychology The Institute of Media and Communication Science provides Bachelor studies in "Applied Media Science" (B.A.) and Master studies in "Media and Communication Research" (M.A./ M.Sc.). The studies combine a social science oriented media and communication perspective with expertise from media technology and media economy (so called "three-pillar-model of media education in Ilmenau"). The Department of Media Design and Media Psychology is one of seven divisions within the Institute of Media and Communication Science. It focuses on two main research questions: How should media products be designed to meet the users' needs and interests? What psychological effects do different media have? Current research emphasis of the Division of Media Design and Media Psychology: Communication about Nanotechnology Psycho physiological Media Research Human-Robot-Interaction Social and Psychological Dimensions of Online and Mobile Communication Learning and Teaching with New Media Gender Studies Social Research Methods and Evaluation Research Staff Head of department: Scientific coworkers: Nicola Döring Dorothee Arlt Andreas Ingerl Sandra Pöschl Contact: Ines Birnschein, Phone: +49 (0) ines.birnschein@tu-ilmenau.de Univ.-Prof. Dr. phil. Nicola Döring

25 RESEARCH DEPARTMENTS Department of Metallic Materials and Composite Materials With the appointment of Prof. Dr.-Ing. habil. H. Kern as head of the department of Metallic Materials and Composite Materials Technology, the teaching and research activities related to materials at the Technical University of Ilmenau gained new momentum. The integration of the department into the Faculty of Mechanical Engineering reflects the significance of materials science engineering. The research areas in the department cover metallic, non-metallic, inorganic, and composite materials. The focus of the research is the improvement of available conventional materials, the development of new materials and the creation of innovative material approaches. Research Activities: Tribological behaviour of materials and surface topography Characteristics of ceramic suspensions (rheology) Ceramic shaping Electrophoretic Deposition Materials testing Metallography, microscopy and image processing techniques Special materials for mechanical engineering Composite Materials Metal-ceramic and ceramic matrix composites Glass matrix composites Interfacial characterisation and interface design of composites Staff Head of department: Scientific coworkers: Technical coworkers: Heinz-Volker Winkler Katrin Friedberger Christian Georgi Andreas Knote Horst Günter Krüger Matthias Linß Kerstin Pfeiffer Contact: Irina Hoffmann, Phone: +49 (0) irina.hoffmann@tu-ilmenau.de Dr.-Ing. Heinz-Volker Winkler

26 RESEARCH DEPARTMENTS Department of Micro- and Nanoelectronic Systems The Department of Micro- and Nanoelectronic Systems deals with scientific questions concerning Micro- and nanoelectronic systems. It is expected that in the near future the technological breakthrough in the area of micro- and nanoelectronic systems will play a key tole in our society. Micro- and nanoelectronic systems become possible when combining functional micro- and nanotechniques in a miniaturized setup. It is conceivable that by joining individual nanoelectronic components by connestion techniques, system architectures and signal processing concepts, the development of complex products is made possible. The goal of our division is to push the advancement of micro- and nanoelectronic systems by combining different single nanotechniques utilizing system technologies. Staff Head of department: Scientific coworkers: Technical coworkers: Ivo W. Rangelow Ahmad Ahmad Chrisian Bitterlich Tobias Danz Denys Filenko Andreas Frank Elshad Guliyev Maik Hauguth Valentyn Ishchuk Tzvetan Ivanov Katerina Ivanova Stefan Klett Alexander Reum Yanko Sarov Burkhard E. Volland Ute Wenzel Silvia Probst Gabriele Winkler Jens-Peter Zöllner Univ.-Prof. Dr.-Ing. habil. Ivo W. Rangelow Contact: Silvia Herda, Phone: +49 (0) silvia.herda@tu-ilmenau.de

27 RESEARCH DEPARTMENTS Department of Micromechanical Systems Micromechanical Systems, also known as MEMS (micro-electro-mechanical systems), become more and more part of our daily life. Nearly all technical systems profit from Microsystems: mobile phones and automobiles, consumer electronics and medical equipment as well as many other applications. The department deals with the integration of micromechanics, optics and fluidics into systems to develop new technical solutions. It also bridges the gap between the macro world of application and nanostructures. Currently, the focus of research is set on Si-based MEMS in combination with new materials: Self-masking nanostructured silicon (also known as Black Si ) is investigated in different ways: How can it efficiently be prepared, e.g. by modified reactive ion etching processes? What are key parameters that influence the shape and density of the nanostructures? It is applied to biological applications as well as for assembly processes connecting silicon devices with silicon, polymers or ceramics. AlN as a mechanical material is intensively investigated for membrane applications. Extremely stable, free-standing membranes as thin as 300 nm have been achieved. The AlN is proven to be polycrystalline with a defined orientation of the crystal axis resulting in piezoelectric properties of the material. Currently, its application is investigated for a number of new applications. Microfluidic devices are part of the research for applications in microbiology. Besides intensive simulations, also different technologies for the fabrication of these devices are available: SU-8 based systems for segmented flow, Si-based systems for 3D extracellular matrices and LTCC-based systems for new sensors. Deep quartz etching will be available, soon. No-energy sensors have become the focus of research for RFID applications: The surveillance of the integrity of goods can be improved, if it is possible to read-out the status of a product at any time by an electrical reader on item level even in larger units. New battery-less sensor concepts have been developed for temperature-time integration and humidity control. Further sensors are under investigation. Optical microsystems are a key part of systems research as they combine the previously-mentioned research areas for new applications. Besides new technologies based on new material systems for optical devices a micro-tracker for position sensing is under investigation. Additionally, key components for new multi-functional bioreactors with optical read-out are developed. Micro-nano-integration, as an overall topic of research, is driving new projects: New effects based on nanotechnologies are not relevant if they cannot be made useful for macroscopic applications. Microsystems are a very efficient way to bridge this gap. As it was mentioned before, nanostructured silicon is an example for a technology that is now successfully used in Microsystems. Staff Head of department: Martin Hoffmann Scientific coworkers: Arne Albrecht Heike Bartsch de Torres Lars Dittrich Siegmar Hecht Matthias Kallenbach Christoph Kremin Eric Markweg Tobias Polster Mike Schneider Liliana Sendler Mike Stubenrauch Stefan Weinberger Frank Weise Clemens Wystup Univ.-Prof. Dr.-Ing. habil. Martin Hoffmann Technical coworkers: Lothar Dressler Karin Friedel Gabriele Harnisch Ilona Hirt Contact: Annette Volk, Phone: +49 (0) annette.volk@tu-ilmenau.de

28 RESEARCH DEPARTMENTS Department of Nanotechnology The work scope of Nanotechnology includes the development, characterization and optimization of high quality hetero- and nanostructures processed from conjugated polymers, silicon carbide, metal oxides or group-iii nitrides in order to realize modern semiconducting devices for nanoelectronic and sensor applications. The outstanding potentialities of the group of Nanotechnology are based on the expertise in the fabrication of systems as well as on the epitaxy of wide band gap semiconductors. Further more the scientific progress is based on the long lasting knowledge in micro- and nanotechnology for processing electronic as well as optical devices. The development and realization of novel devices is supported by a modern and state of the art analytical infrastructure for structural, electronic, as well as optical characterization of semiconducting materials and nanostructures. Scientific Topics Intention of the scientific work is the growth, characterization and optimization of high quality hetero- and nanostructures based on organic materials, group III-nitrides as well as metal oxides and carbides. The goal is the design, development and realization of novel device concepts for nanoelectronic and -sensor devices, which is strongly motivated by the fabrication of smart materials and their application in the analysis of nanostructures and nano-quantities. The following scientific topics are currently under investigation: - Processing of nanostructures based on wide band gap semiconductors (SiC, GaN), which are grown by molecular beam epitaxy or chemical vapor deposition. - Realization of sensors for nano- and picofluidic applications by using pyroelectric heterostructures. - Development of AlGaN/Si-based micro- and nanoresonators for applications as electrical filters as well as for sensing of biological and biomedical substances. - Processing of wave guides made from pyroelectric AlGaN/GaN lateral polarity heterostructures for optical parametric oscillators with applications in single molecule spectroscopy. - Optimization of nano-wires and nano-resonators for applications as gas- as well as liquidsensors. Staff Head of department: Andreas Schober Scientific coworkers: Gernot Ecke Sindy Hauguth Christian Hummel Benedikt Lübbers Merten Niebelschütz Jörg Pezoldt Thomas Stauden Katja Tonisch Florentina Will Technical coworkers: Ilona Marquardt Dietmar Schäfer Jutta Uziel Contact: Simone Gutsche, Phone: +49 (0) simone.gutsche@tu-ilmenau.de PD Dr. rer. nat. habil. Andreas Schober