FRT - setting the standard Surface Analysis Metrology Instruments Process Control
Chromatic white light sensor Weißlicht Specs: Linse blauer Fokus roter Fokus max height range 300 µm 600 µm 3 mm 10 mm max resolution, z 3 nm max speed 100 mm /sec.
Chromatic white light sensor Weißlichtquelle (Halogenlampe) Faserkoppler Separater, kleiner, leichter, rein passiver Messkopf Spektrograph Messobjekt mit Stufe 400 nm 540 nm 680 nm blau grün rot x Ι auszuwertende Spektren Ι Ι Messobjekt 400 nm 540 nm 680 nm blau grün rot λ λ
FRT MicroGlider roughness, shape/contour, structure/topography planarity, film thickness Specs: max range x,y 100mm 2-600mm 2 max resolution x,y 1-2 µm max height range max resolution, z max speed reproducibility 3 mm (18 mm) 3 nm 100 mm /sec. < 100 nm / 350 mm
FRT MicroProf roughness, profile, shape, topography, flatness, film thickness Specs: max. range x,y 100mm 2-600mm 2 max. resolution x,y 1-2 µm max. range height max. resolution, z max. scanning speed 3 mm (18 mm) 3 nm 100 mm/sec
applications in electronics topography height warpage
semiconductors and ceramics topography shape profile dimensions
optical devices, aspheres
Cardboard rough shape
Cardboard fine structure
metal mirror for laser optical measurement statistics of roughness (lambda=71.429 µm): x = [71.429 µm, 427.429 µm] y = [71.429 µm, 427.429 µm] sra: 14.061 nm srq: 17.883 nm srz(din): 173.889 nm srmax: 191.956 nm srp: 102.173 nm srv: 111.932 nm srt: 214.105 nm
complete analysis of housing for LED sra: 0.460 µm srq: 0.585 µm srz(din): 5.029 µm srmax: 5.640 µm srp: 2.983 µm srv: 3.092 µm srt: 6.074 µm
Bridging the gap between the nanometer and the meter The FRT instruments combines two sensors which allow to investigate large ranges with lower resolution as well as smaller ranges with very high resolution. The instruments are equipped with a chromatic optical sensor and an atomic force microscope (AFM), both mounted permanently. Without changing the measuring device complete components for industrial purposes (e.g. quality control) can be measured using a chromatic optical sensor. But also the AFM allows to investigate the surface at specific positions with nanometer resolution.
FRT AFM roughness, shape/contour, morphology/topography Specs: max range x,y 20µm 2-80µm 2 max height range 6 µm max resolution x,y,z available modes AFAM < 1 nm non contact lateral force phase contrast magnetic force liquid compatible (atomic force acoustic microscope)
Atomic Force Microscopy Laserdiode positionsempfindliche F ototdiode Messung der Tastspitzenauslenkung Hebel Regelung Tastspitze Messobjekt P ie zoste lle le m e n t (X,Y,Z)
FRT MicroGlider with AFM Bridging the gap...
LCD-display Ni surface overlayer
9 orders of magnitude...to meters Metrology from Nanometers...
MicroGlider 300 mm application in semiconductor industry: planarity of chucks for CMP
semiconductor industry: complete wafer planarity and warpage
...millimeter... application in semiconductor industry: data storage device on wafer
...micrometer... application in semiconductor industry: data storage device on wafer
...nanometer... application in semiconductor industry: data storage device on wafer
FRT AFM/AFAM atomic force acoustic microscopy ploymer with embedded ceramics AFAM 657 khz, nc cantilever elastic properties and modulus
FRT MicroProf film thickness Mapping of film thickness variation
MicroProf Vision with automated alignment and 2D metrology Specs: as MicroProf, but additionally: telecentrical CCD camera software for pattern recognition alignment functionality
MicroProf Vision
FRT metrology for optical industry: apparatus for measuring lenses up to 600 mm Ø 20 nm resolution 6,5 t weight