Zuordnung dimensionelle Messgeräte zu Prüf- und Kalibriernormalen



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Zuordu disioll Mssrät zu Prüf- ud Klibrirorl This tbultd syosis cotis currtly vilbl rtfcts wh y b usd s stdrds d wh r suitbl for th clibrtio of stylus or oticl istruts d SPMs. Stdrds r listd i rbitrry ordr withi th sctios without y rki or rfrc. This list dos ot ily rcodtio or dorst by Physiklisch-Tchisch Budsstlt, or dos it ily tht th listd stdrds r cssrily th bst d/or oly vilbl for th uros. No cli is ut forwrd to th coltss d corrctss of th list of ufcturrs d roducts. f you kow of furthr stdrds tht iht b icludd or if you hv discovrd outdtd rs. icorrct dt, PTB wlcos your fdbck d rcits y hl to irov this list. This list y iv first ovrviw, but it cot rlc cosulttio with th ufcturr rs. distributor. Pls ot tht PTB itslf dos ot sll stdrds d dos ithr bfit fro th sl of stdrds or fro icludi th i this list. For crtifid clibrtio, ls cotct PTB or y othr Ntiol Mtroloy stitut (NM).txt A) z - Axis: Sil St E) x-, y-axis: 2-Disiol ) Rouhss M) Di, Roudss B) z-axis: Priodic Sts F) 3D-Stdrds J) Criticl Disio N) Probi C) z-axis: St Grti G) Fltss K) Ti Rdius, Al, Prlllity D) x-, y-axis: 1-Disiol H) Thickss L) Cotour, Profil

A01 A02 A03 A04 A05 A) Mufcturr z - Axis: Sil St SiMtricS Plco SLOAN/DEKTAK ow Vco VLS VLS A) z - Achs: Eizlstuf Dth Stti Stdrds VS Gold Clibrtio Kit SHS 80, -180, -440, -880, -1800, -4500, -9400, - QC SHS 1.8, -8.0, -24.0, -50.0, - Q t r Ll t llr Disio Rskrft icrosco Rslkt ro Oticl Ot. Bild fr c icr. Cofocl frzikr., Kofok., Oticl Ot. Pukt Fokusss s Läs Pukt 3D ss µ- ssor Fsrts, Mikrots 50,..., 1000 µ 50 50 x 50 x x x x x 5, 15, 30 9,9 x 20, 50, 100, 200, 500, 1000, 5000, 10000 8, 18, 44, 88, 180, 450, 940 1800, 8000, 24000, 50000 A06 Hll 200,..., 9µ 25 x 25 x 9 25 x 25 x 3 25 x 25 x 3 40 x 20 x 10 x x x x x Sc 3D x x

Mufcturr t r Ll t llr Disio Rskrft icrosco Rsl ktro Oticl Ot. Bild fr c icr. Cofocl frzikr., Kofok., Oticl Ot. Pukt Fokussss Läs Pukt 3D ss µ- ssor Fsrts, Mikrots Sc 3D A07 MTT 30,..., 3000 37, 3 thick A08 PTB 5.1 Cu Dth Stti Stdrds 1, 5, 20, 50, 200, 450, 600, 900, 1000, 2000, 5000 µ 1,..., 8 45 x 23, thickss : 10/12 x x x B) B) z-axis: z-achs: Priodic Sts riodisch Stuf B01 MikroMsch TGZ, -01,-02,-03,-04, - 11; TGF11 20, 100, 500, 1000, 1500 3 x 3 5 x 5 x 0,45 x x x B02 MikroMsch TGF11 1750 3 x 3 5 x 5 x 0,45 x x x

Mufcturr t r Ll t llr Disio Rskrft icrosco Rsl ktro Oticl Ot. Bild fr c icr. Cofocl frzikr., Kofok., Oticl Ot. Pukt Fokussss Läs Pukt 3D ss µ- ssor Fsrts, Mikrots Sc 3D B03 NTT-AT Si(111) Atoic Sts 0,13, 0,31 6 x 6 10 x 10 x x x C) z-axis: St Grti C) z-achs: Stuf C01 MikroMsch UMG01, 02 20, 31 400 x 400 5 x 5 x x x STS 2 180P, -440P, 12 x 8 x C02 VLS 18, 44, 100, 180 270 x 270 x x x x -1000S, -1800S 0,675 C03 C04 C05 VLS VLS VLS STS 3 180, -440, -1000, -1800, P STR 3 180, -440, -1000, -1800, -P STR 10-180, -440, -1000, -1800 18, 44, 100, 180 270 x 270 18, 44, 100, 180 18, 44, 100, 180 1 200 x 1 200 4 000 x 4 000 12 x 8 x 0,5 x x x x 8 x 8 x x x x 8 x 8 x x x x

Mufcturr t r Ll t llr Disio Rskrft icrosco Rsl ktro Oticl Ot. Bild fr c icr. Cofocl frzikr., Kofok., Oticl Ot. Pukt Fokussss Läs Pukt 3D ss µ- ssor Fsrts, Mikrots Sc 3D C06 EU-Stdrd rtly vilbl fro Nossors 8, 24, 80, 240, 800, 2 400 200 x 200 (1000 x 1000) 5 x 7 x x x x D) x-, y-axis: 1-Disiol D) x-, y-achs: 1-Disiol Noil itch D01 SiMtricS Ll Stdrd LS 10...2500 µ D02 ASM 750-HD 750 D03 MikroMsch TGG 01 3 000 D04 Moxtk MXS 301, -701,-CE 300, 700 Msur. Ar 250...62500 0,3 dick 3 000 x 3 000 75 x 20 x x (x) x 6,35 x x x 5 x 5 x 0,45 3 x 4 x0,5 x x x x x x

Mufcturr t r Ll t llr Disio Rskrft icrosco Rsl ktro Oticl Ot. Bild fr c icr. Cofocl frzikr., Kofok., Oticl Ot. Pukt Fokussss Läs Pukt 3D ss µ- ssor Fsrts, Mikrots Sc 3D E) x-, y-axis: 2-Disiol E) x-, y-achs: 2-Disiol E01 ML&C GbH Photosk 120 E02 E03 E04 E05 E06 VLS VLS VLS EU-Stdrd EU-Stdrd STS 2 180, -440, -1000, -1800 STR 3 180, -440, -1000, -1800 STR 3 180, -440, -1000, -1800 rtly vilbl fro Nossors Prtly vilbl fro Nossors / bs 120 x 120 1 800 + 3 000 + 5 000 270 x 270 3 000 10 000 100, 300 1 000, 3 000, 10 000 1 200 x 1 200 4 000 x 4 000 175 x 175 12 x 8 x 0,675 x x x x x x x 8 x 8 x x x x 8 x 8 x x x x 200 x 200 5 x 7 x x x x 2 000 x 2 000 5 x 7 x x x x

Mufcturr t r Ll t llr Disio Rskrft icrosco Rsl ktro Oticl Ot. Bild fr c icr. Cofocl frzikr., Kofok., Oticl Ot. Pukt Fokussss Läs Pukt 3D ss µ- ssor Fsrts, Mikrots Sc 3D E07 Nosrch Mbr NoCl 10... 15 x x E08 MikroMsch TGX01 3 000 E09 Moxtk MXS 302 CE 300 E10 Moxtk MXS 702 CE 700 2 000 x 2 000 5 x 5 x 0,45 3 x 4 x 0,5 3 x 4 x 0,5 E11 NoSsors 200 500 x 500 7 x 7 x x E12 Plco 607 607 STM 463 (2160 lis/) x x x x x x x x x x x x x x E13 SS 1 500 100 x 100 x x x E14 Surco Noscl Liwidth/Pitch - Stdrd Pitch: 160, 200, 230, 260, 300, 500, 700, 1000, 4000 CD: 80 to 2µ 10 x 10 8 x 8 x x x

Mufcturr t r Ll t llr Disio Rskrft icrosco Rsl ktro Oticl Ot. Bild fr c icr. Cofocl frzikr., Kofok., Oticl Ot. Pukt Fokussss Läs Pukt 3D ss µ- ssor Fsrts, Mikrots Sc 3D F) F) 3D-Stdrds 3D-Norl F01 3D-No-Norl, BAM, Pyrid x x x G) Fltss G) Ebhit G01 SiMtricS Fltss Stdrd Ty FtS PV < 110/65 10 x 10/ 5 x 5 15 x 15 x 6 x x x x x G02 EU-Stdrd rtly vilbl fro Nossors PV < 10 250 x 250 5 x 7 x 2 x x x x x

Mufcturr t r Ll t llr Disio Rskrft icrosco Rsl ktro Oticl Ot. Bild fr c icr. Cofocl frzikr., Kofok., Oticl Ot. Pukt Fokussss Läs Pukt 3D ss µ- ssor Fsrts, Mikrots Sc 3D H01 H) Thickss st. Mikro lktrod H) Schtdick SiO2 o Si 7, 20, 70, 300, 800 4000 5 x 7 x ) ) Rouhss Ruhit 01 VLS RAS-90, 220, 440, 900, 2250, 4700 9, 22, 44, 90, 225, 470 ~5000 x 4500 25 x 25 x 6 x x x x J) J) Criticl Disio Kritisch Disio

Mufcturr t r Ll t llr Disio Rskrft icrosco Rsl ktro Oticl Ot. Bild fr c icr. Cofocl frzikr., Kofok., Oticl Ot. Pukt Fokussss Läs Pukt 3D ss µ- ssor Fsrts, Mikrots Sc 3D J01 Plco 1, 2, 5, 10µ J02 Surco Noscl CD - Stdrd CD: 50, 100, 150, 200, 300 ud 800 lth 180 µ 4.8 x 4.5 x x x x 10 x 10 8 x 8 x x (x) K) Ti Rdius, Al, Prlllity K) Sitzrdius, Wikl, Prlllität K01 SiMtricS Ty 1 4 rtis with th riods: 0.8; 1.0; 2.0; 2.5 µ Triulr rofil: GrT70 (l 70.52 ) Triulr rofil: GrT109 (l 109.48 ) 10 x 10 x x x x

Mufcturr t r Ll t llr Disio Rskrft icrosco Rsl ktro Oticl Ot. Bild fr c icr. Cofocl frzikr., Kofok., Oticl Ot. Pukt Fokussss Läs Pukt 3D ss µ- ssor Fsrts, Mikrots Sc 3D K02 SiMtricS Ty2 K03 SiMtricS Ty3 1 rti with th riod: 8 or 25 µ Trzoidl rofil: GrTz55 (Trzoidl l 54.74 ) Dth: 3 µ for 8 µ riod Dth: 11 µ for 25 µ riod Triulr rofil: GrT70 (l 70.52 ) Triulr rofil: GrT109 (l 109.48 ) Archd rofil: GrA 1 rti with th riod: 8 or 25 µ Rctulr rofil: GrRw Dth: 1 µ for 8 µ riod Dth: 5 µ for 25 µ riod 10 x 10 x x x x 10 x 10 x x x x

Mufcturr t r Ll t llr Disio Rskrft icrosco Rsl ktro Oticl Ot. Bild fr c icr. Cofocl frzikr., Kofok., Oticl Ot. Pukt Fokussss Läs Pukt 3D ss µ- ssor Fsrts, Mikrots Sc 3D K04 SiMtricS Rsolutio stdrd Ty 4 GrRd Rctulr rofil 8 rtis with th riods: 4; 8; 20; 40; 80; 200; 400; 800 µ Rctulr rofil: GrRd Dth: 90 or 3,4 µ (x) x x x x L) L) Cotour, Profil Kotur, Profil L01 PTB 5.3 Micro cotour rtfct 100 µ, 250 µ, 500 µ, 1000 µ, 2000 µ 0.5 x 0.5 to 18 x 3 50 x 3 x 15 x x x x

Mufcturr t r Ll t llr Disio Rskrft icrosco Rsl ktro Oticl Ot. Bild fr c icr. Cofocl frzikr., Kofok., Oticl Ot. Pukt Fokussss Läs Pukt 3D ss µ- ssor Fsrts, Mikrots Sc 3D M) Di, Poudss M) Durchssr, Zylidrizität M01 PTB 5.3 Micro hol rtfct Ø 100 µ x 2.4 10 x 10 x N) Probi N) Atstkrft N01 SiMtricS Probi forc stdrd Ty FC 0.005 1.0 N/µ 15 x 15 x x N02 SiMtricS Probi forc stdrd Ty FB 0.3 5.5 N/µ 15 x 15 x x

Mufcturr t r Ll t llr Disio Rskrft icrosco Rsl ktro Oticl Ot. Bild fr c icr. Cofocl frzikr., Kofok., Oticl Ot. Pukt Fokussss Läs Pukt 3D ss µ- ssor Fsrts, Mikrots Sc 3D (x) ischräkt This tbultd syosis cotis currtly vilbl rtfcts wh y b usd s stdrds d wh r suitbl for th clibrtio of stylus or oticl istruts d SPMs. Stdrds r listd i rbitrry ordr withi th sctios without y rki or rfrc. This list dos ot ily rcodtio or dorst by PTB, or dos it ily tht th listd stdrds r cssrily th bst d/or oly vilbl for th uros. No cli is ut forwrd to th coltss d corrctss of th list of ufcturrs d roducts.

Mufcturr / Distributor d cotct ddrss A01. SiMtricS GbH, Siliziukoot für di Msstchik, A Südh 5, 09212 Libch-Obrfroh d J. Fruhuf, S. Krort, U. Brd, R. Krur-Sh: Attibl rcisio of silico disiol stdrds. Proc. Eus Cof. (2004), jochi.fruhuf@-tchik.tu-chitz.d d < www.simtrics.d > A02. PELCO NTERNATONAL, P.O. Box 492477, Rddi, CA 96049-2477, USA;< www.lcoit.co/idx > A03. Vco GbH, D-85716 Uschlißhi, Gry; < www.vco-uro.co > or < www.vco.co > A04. VLS Stdrds c.; 3087 North First Strt; S Jos, CA 95134-2006, USA; < www.vlsistd.co > A05. S A04. A06. Hll Präzisios-Klibrirorl GbH, Bühfld 12, D-31234 Ediss, Gry; Fx: +49 5373 7669 A07. Mrci Tchik- Tchoctru, P.O. Box 249, SK 84000 Brtislv, Slovki; Fx: +42 17 6542 6143 A08. PTB Cu Dth Stti Stdrds, PTB, AG 5.11, Budsll 100, 38116 Bruschwi; < www.tb.d/d/or/5/51/511/idx.ht > d U. Brd, G. Hiz, H. Schädlbch, C. Fist, P. Stuht, R. Krür-Sh, V. Jär: Rückführbr Präzisios-Tif-Eistllorl für vo 1 µ bis 1 (Trcbl rcisio dth stti stdrds for surt rs fro 1 µ to 1 ). Tchischs Mss 66, 12 (1999), 496-503. uw.brd@tb.d B01. MikroMsch, Nrv t. 13, 10151 Tlli, Estoi; < www.ikrosch.co > B02. S B01. B03. NTT Advcd Tch. Cor., 3-1 Moriosto-Wkiy, Atsui, Kw 243-0198, J; < www.kytch.tt-t.co.j > C01. S B01. C02. S A04. C03. S A04. C04. S A04. C05. S A04. C06. EU rojct "Trsfr Stdrds for Clibrtio of SPMs fortio y b obtid fro th coorditor Dr. Jør Græs, DFM, Lyby, Drk (JG@df.dk). NANOSENSORS, MO-Buildi, At 6, D-35578 Wtzlr-Blkfld, Gry; <www.ossors.co >

D01. SiMtricS GbH, Siliziukoot für di Msstchik, A Südh 5, 09212 Libch-Obrfroh jochi.fruhuf@-tchik.tu-chitz.d d < www.simtrics.d > D02. Advcd Surfc y, c. 6009 Kyhto Rd; diolis, N 46220, USA; < www.sicro.co > D03. S B01. D04. Moxtk c. Or, UT 84057, USA; < www.oxtk.co > E01. ML&C GbH, Stifld 5, D-07751 J ifo@lc-j.d < www.lc-j.d > E02. S A04. E03. S A04. E04. S A04. E05. EU rojct "Trsfr Stdrds for Clibrtio of SPMs fortio y b obtid fro th coorditor Dr. Jør Græs, DFM, Lyby, Drk (JG@df.dk). NANOSENSORS, MO-Buildi, At 6, D-35578 Wtzlr-Blkfld, Gry; <www.ossors.co > 7669 ud bs Photoics A/S, DK-3520 Fru, Drk; < www.ibshotoics.co > E06. EU rojct "Trsfr Stdrds for Clibrtio of SPMs fortio y b obtid fro th coorditor Dr. Jør Græs, DFM, Lyby, Drk (JG@df.dk). NANOSENSORS, MO-Buildi, At 6, D-35578 Wtzlr-Blkfld, Gry; <www.ossors.co > ud bs Photoics A/S, DK-3520 Fru, Drk; < www.ibshotoics.co > E07. Nosrch Mbr GbH, TSP Noiri, A-1160 Vi, Austri; < www.osrch.t > E08. S B01. E09. S D04. E10. S D04. E11. NANOSENSORS, MO-Buildi, At 6, D-35578 Wtzlr-Blkfld, Gry; <www.ossors.co > E12. S A02. E13. SS Surfc i Systs GbH; Kisrstr. 100, D-52134 Hrzorth, Gry; < www.sis-bh.co > E14. Surco AG, Wildbruchstr. 15, 07745 J, Gry, Tl. +49 (3641) 67 53 80, Fx. +49 (3641) 67 53 87, ifo@surco.co, < www.surco.co > F01. M. Rit, Budsstlt für Milforschu ud-rüfu (BAM), U d E 87, 12205 Brli, ifo@b.d < www.b.d >

G01. S D01. G02. EU rojct "Trsfr Stdrds for Clibrtio of SPMs fortio y b obtid fro th coorditor Dr. Jør Græs, DFM, Lyby, Drk (JG@df.dk). NANOSENSORS, MO-Buildi, At 6, D-35578 Wtzlr-Blkfld, Gry; <www.ossors.co > H01. stitut for Microlctroics Stuttrt, Alldri 30, D-70569 Stuttrt, Gry;< www.is-chis.d > 01. S A04. J01. S A02. J02. S E14. K01. S D01. K02. S D01. K03. S D01. K04. S D01. L01. Nubur M, Jusko O, Nuschfr-Rub U, Wäldl F: Drf s tws klir si? Qulity Eiri, 9 (2004), 32. Ad: Nubur M, Nuschfr-Rub U: A w icro rtfct for tsti of oticl d tctil ssors. Procdis of Eus cofrc 2005. l.ubur@tb.d M01. Brd, U; Nubur, M; Nuschfr-Rub, U; Wilki, G: Micro-Stdrds Stt of th Art, Proscts d Liits. Proc. Ssor Cof., Vol. 2 (2005), 169-174. ulr.uschfr-rub@tb.d N01. S D01. N02. S D01.

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