MEMS Industry Group Presents M2M Forum Webinar: Technology Development Process and Product Life Cycle: A MEMS View

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MEMS Industry Group Presents M2M Forum Webinar: Technology Development Process and Product Life Cycle: A MEMS View Presented by David DiPaola, Managing Director, DiPaola Consulting Tina Lamers, Ph.D., R & D Manager, Avago Technologies Valerie Marty, MEMS Integration Engineer, Hewlett-Packard Co. Hosted by Karen Lightman, Managing Director MEMS Industry Group February 23, 2012

Over 130 members and partners - from start-ups to Fortune 500 companies MIG members ARE the MEMS supply chain.

MEMS Industry Group is the trade association advancing MEMS across global markets

Educate the Marketplace Explain why MEMS is important and how it s being used MEMS in the Machine Encourage Information-sharing Steering Committees, Industry News, PR Opportunities, MEMSblog, Twitter, LinkedIn, YouTube and newsletter MEMS Marketplace, one-stop matchmaking portal for MEMS supply chain and their customers Collaborative Projects MEMS Foundry Engagement Guide Share Resources White Papers, Industry Data, Presentations Membership Directory Introductions Webinars, workshops and networking

MEMS Park Consortium Eric Levy-Myers

MEMS Education Series March 27 Reliability Case Study, Mehran Mehregany, Case Western April 10 MEMS in Diagnostics, Livingston Securities April 17 - MARKET PULL VS. TECHNOLOGY PUSH, Eric Levy-Myers MEMS Executive Congress March 20, 2012 Zurich, Switzerland November 7-8, 2012 Scottsdale, AZ Smart Systems Integration US MEMS Session Zurich, Switzerland Sensors in Design - ESC Silicon Valley March 28-29, 2012 San Jose, CA M2M Forum MEMS New Product Development May 8-10, 2012 Pittsburgh, PA Sensors Expo Chicago June 5 Symposium: MEMS in the Mainstream June 6-7, 2012 MEMS Tracks SEMICON West July 10-13, 2012 MEMS Booth/MIG member event

M2M Forum: Focus on MEMS New Product Development May 8-10, Pittsburgh, PA - Renaissance Hotel Pittsburgh M2M Forum is a one-of-a-kind technical conference, for MIG members, with a focus on tackling critical MEMS commercialization challenges. Call for papers www.memsindustrygroup.org/m2m

May 8 CMU Site Visit/lab tour Evening dinner and keynote speaker winner of MIG s call for papers. May 9 Keynote Speaker The Importance of MEMS Standardization Len Sheynblat, Qualcomm CDMA Technologies Working Groups Group #1 - MEMS Technology Development Group #2 - New Product Development Market Pull vs. Technology Push Panel: Successful MEMS Commercialization - Lessons Learned May 10 Networking event at PNC Bank (Pittsburgh Pirates baseball) Breakfast at ACUTRONIC 23 Feb 2012

Moderator Karen Lightman Presenters Tina Lamers, Ph.D., R&D Manager, Avago Valerie Marty, MEMS Integration, HP David DiPaola, Managing Director, DiPaola Consulting

Discussions started in MIG TAC in fall 2011 Focus on aspects unique to MEMS Create a tool Peer validate by TDP Sub-Team Create variants of tool for product and market segments Low volume vs. high volume Emerging technology/application vs. incremental

Concept Feasibility Prototype Pilot Manufacturing Gate Gate Gate Gate Origin : Stage Gate Process MEMS product focused vs. System product focused MIG-TAC TDP sub team peer reviewed Includes: Protocols, Roles & Responsibilities and Gating Requirements Goal : Provide a foundation for making the best decisions across organizations

Assessment Prototyping Manufacturing Ramp Concept Feasibility Prototype Pilot Manufacturing Gate Gate Gate Gate Science Fundamentals R& D Engineering Integration Development Manufacturing Automation Production

Protocols / Roles & Responsibilities Category Concept Feasibility Prototype Pilot Production Product Maturity Design Defined Design Qualified Design Frozen Idea Proof of Concept Process Maturity Validated Established Process Frozen Lead Engineer R&D R&D / Development R&D / Development Development / Manufacturing Manufacturing Layout Design Team Design Team Design Team Process Mapping Process Team Process Team Process Development Process Team Process Team Process Team Process Improvement Process Team Process Team Processing Engineers Engineers Engineers/ Operators Operators Operators Experimental Approach Manufacturing POC DOE Manufacturing POC DOE Target spec and tolerances DOE Process windowing DOE Surface response DOE Quality Protocols Process/Material/ Equipment Changes Charge Safety and Equipment Development project Safety and Equipment Add Product Subset Add Full Product Full Frequent Permissible Controlled change Development project Development project Lot charge Qualification required Yielded dies/wafers

R&D Development Manufacturing Life Cycle Concept Feasibility Prototype Pilot Production Early Life Cycle Concept Feasibility Prototype Pilot Production Mid Life Cycle Concept Feasibility Prototype Pilot Production Mature Duration

Foundry 1 R&D Foundry 2 Life Cycle Concept Feasibility Prototype Pilot Production Microphone 10 yrs 4 yrs High Volume, Low Margin Shorter duration for subsequent designs Total : ~ 15 yrs Wavelength Selective Switch Low Volume, High Margin Also shorter duration for subsequent designs Total : ~ 4 yrs Fab-less : R&D Internal Fab-lite : R&D and Development Internal

TDP role in developing a new product (design) TDP steps identified product issues and was influential during communication between the design team and customer Gating Requirements Concept Feasibility Prototype Pilot Production Specifications Draft Target specifications Establish specifications/ acceptance criteria Specifications in place Specifications fully documented Template Includes 18 Gating Requirements Will be reviewed in more detail at M2M

TDP Case Study: Product, MEMS Force Sensor Production sensor shown Silicon piezoresistors create full Wheatstone bridge Stress reduction component (SRC) reduces sensor error by mitigating parasitic loads from mounting Microfused MEMS Gages Sensor Body Pivots as a Joy Stick SRC - O-rings Top and Bottom Of Disc

TDP Case Study: Application, MEMS Force Sensor 5% Females and teens meeting weight limit get normal force airbag Children get low force deployment and infants get no airbag Sensors in passenger seat structure measure weight of occupant This information is used to activate (full or reduced force) or deactivate the airbag 4 Sensors in Seat Structure

TDP Case Study: Gating Requirements Gating Requirements Design DFMEA Concept Feasibility Prototype Pilot Production Preliminary Test Optimize / Freeze Run at Rate Full Scale Production 1 st Draft Refined Draft Finalized Reviewed Reviewed Specifications Target Specifications Specifications Finalized Specifications Reviewed Specifications Reviewed In Document Control Pricing/Contract Development Finalized Reviewed / Adjusted Reviewed / Adjusted Cost Reductions Life Cycle Concept Feasibility Prototype Pilot Production Early Technology Selection - First Prototype First Beta Samples Production Ramp Sensors Off Production Equipment - Sustaining

TDP Case Study: Product Issue Resulted in Redesign during Prototype Stage Original design in prototype stage could not meet sensor accuracy or drift specifications provided by the customer This was highlighted in the TDP with DFMEA, validation and gaps to specification discussions with customer Stress reduction component (SRC) was added to potentially resolve the issue Customer was resistant to adding elastomer to safety critical structure Original Prototype O-rings Prototype with SRC Added Sensor Mechanical Stop Seat Structure SRC Nut

TDP Case Study: The Issue and Impact Identified in DFMEA Issue identified in DFMEA with high RPN number with recommended action of SRC (stress reduction component) Item / Process Function Potential Failure Mode Potential Effect(s) of Failure S e v Potential Cause(s)/ Mechanism(s) of Failure O c c u r Current Design Controls Prevention Current Design Controls Detection D e t e c R. P. N. Recommended Action(s) Sensor Functions Within Customer Accuracy Specification Sensor Output Outside of Accuracy Specification Sensor Not Capable to Specification System Cannot Properly Classify Occupant System Sometimes Cannot Properly Classify Occupant 9 9 9 9 Parasitic Strain Sensed in Gages from Undesired Loads due to Tolerances, Mounting Conditions, Etc Sensor Output Shifts Due to Low Speed Crash Event Parasitic Strain Sensed in Gages from Undesired Loads due to Tolerances, Mounting Conditions, Etc Sensor Output Shifts Due to Low Speed Crash Event 9 9 9 9 Seat Structure Tolerances, Position of Sensor in Structure Sensor Mechanical Stop Seat Structure Tolerances, Position of Sensor in Structure Sensor Mechanical Stop Validation Testing 3 243 Validation Testing 3 243 Validation Testing 3 243 Validation Testing 3 243 Stress Reduction Component Stress Reduction Component Stress Reduction Component Stress Reduction Component

TDP Case Study: The Issue Identified in Gaps to Specification Initial Accuracy Drift over Life Thermal Shock Vibration Time at Temperature Low Speed Crash High Speed Crash Moment Sensitivity Fore-Aft Skew Test Not Capable to Specification Marginal to Specification Capable to Specification

TDP Case Study: The Impact Without the SRC, the sensor would not have met the accuracy requirements and the customer would not be able to properly classify occupants Without proper occupant classification the customer system would not properly deploy airbags per FMVSS requirements Not meeting FMVSS requirements results in discipline from the federal government (i.e. fines, cannot ship product, etc.) TDP actions, DFMEA, validation and gaps to specification influenced customer to make design change

TDP Case Study: Product Solution The SRC (stress reduction component) was integrated internal to the product per the new customer requirement and resulted in a 3X improvement in performance The sensor met all of the validation requirements from the customer Summary: Customer system met FMVSS requirements, vehicle passengers obtained improved protection during a crash and the product launched on-time Sensor Body Pivots as a Joy Stick SRC - O-rings Top and Bottom Of Disc

TDP Case Study: Conclusions Gating Requirements Concept Feasibility Prototype Pilot Production Design Preliminary Test Optimize / Freeze Run at Rate Full Scale Production DFMEA 1 st Draft Refined Draft Finalized Reviewed Reviewed TDP DFMEA identified critical areas of interest before validation Specifications Target specifications Specifications Finalized Specifications Reviewed Specifications Reviewed Specifications in Place Validation solidified DFMEA and identified gaps to specification Both DFMEA and gaps to specification were used to influence design change Pricing/Contract Development Finalized Reviewed / Adjusted Reviewed / Adjusted Cost Reductions Contract modified to accommodate design change and product launched on-time

MEMS Industry Group www.memsindustrygroup.org 1620 Murray Avenue, Pittsburgh, PA 15217 PH: 412.390.1644 www.memsindustrygroup.org info@memsindustrygroup.org Sign up for the MIG Newsletter! www.memsindustrygroup.org/newsletter Connect to us on MIG social media:

Gating Requirements Concept Feasibility Prototype Pilot Production Design Preliminary Test Freeze Optimize Revision Design Failure Mode and Effect Analysis Preliminary Finalize Compare with Process Process Failure Mode and Effect Analysis Preliminary Finalized Adjust/revise Process Flow Diagram Draft Preliminary Test Finalized Finalized Statistical Processing Identify and Draft Populate/setup/control Monitor/OCAP/Adjus Charts establish charts t Equipment Capability Study Test Identified Validated Finalized Process Capabilities for critical nodes Study Test Meeting physical specs Cp > 1 Cp> 1.3 Yield Estimate Model Initial Establish baseline yields Yield improvement Specifications Draft Establish specifications/ Specifications in Target specifications Specifications in place acceptance criteria place Bill of Materials (BOM) Draft Preliminary Finalize Frozen Frozen Inventory Control Study Build demand Adjust when Initial Plan In place forecast required Manufacturing Execution Build demand Draft System forecast Build models Models in place Modify as necessary Capacity/Throughput Study Build demand Establish capacity and Add capacity if Address constraints forecast identify constraints required Safety Study Identify Initiate Plan Rectify Sustain Shipping Protocols Schedule Identify Establish In place Frozen Training Schedule Plan Initiate Issue documents Revised documents Manufacturing price in Adjust Pricing/Contract Development Development Development place manufacturing price External Vendors Establish Establish Qualify Qualified Qualified