Photonic and Biophotonic Materials and Microsystems χlab Politecnico di Torino Ref. fabrizio.giorgis@polito.it

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1 Photonic and Biophotonic Materials and Microsystems χlab Politecnico di Torino Ref. fabrizio.giorgis@polito.it and Molecular Photonics Laboratory SAPIENZA Università di Roma Ref. francesco.michelotti@uniroma1.it

2 Microelectronics & Electrical Design & Characterization Section leaders: S. Ferrero L.Scaltrito M. Naretto D. Perrone A. Sacco FEM Simulations Section leaders: E. Giuri A. Ricci E. Giuri A. Ricci MATERIALS & MICROSYSTEMS Plasma Technologies & Thin-films Growth Section leader: P. Mandracci R. Gazia C. Ricciardi P. Rivolo LABORATORY Photovoltaic Activity Section leader: E. Tresso S. Bianco G. Cicero. A. Chiodoni L. Scaltrito Magnetism & Spintronics Section leader: P. Allia E. Celasco A. Chiolerio S. Giurdanella P. Martino Ink-Jet Technologies Section leader: A. Chiolerio G. Canavese S. Giurdanella P. Rivolo GROUP ORGANIZATION: Coordinator C. F. Pirri Theory Section leader: G. Cicero A. Aliano A. Terentjevis Laser Technologies Section leaders: S. Ferrero L.Scaltrito G. Grange G. Maccioni A. Sacco Carbon Nanotubes Growth & Applications Section leaders: A. Tagliaferro S. Musso S. Bianco M. Castellino G. Di Gregorio M. Giorcelli Characterization A. Chiodoni, E. Celasco Technological Transfer L. Boschis, L. Dallacqua MEMS Technologies & Sensors Section leaders: M. Cocuzza C. Ricciardi L.Scaltrito G. Canavese E. Giuri S. Marasso D. Perrone M. Quaglio Optics & Photonics Section leaders: F. Giorgis E. Descrovi F. Geobaldo M. Ballarini D. Brunazzo E. Celasco A. Virga B. Sciacca Functionalization & Biotechnologies Section leaders: C. Ricciardi P. Rivolo R. Castagna G. Di Gregorio I. Ferrante Technical S. Guastella, G. Mina, A. Nesca Administrative M. Barale

3 Class 100 [15 m 2 ] Class 1000 [45 m 2 ] CLEAN χlab Class [90 m 2 ] Total area 150 m 2

4 TECHNOLOGICAL & CHARACTERIZATION FACILITIES Coventor + Comsol for MEMS/Photonics simul. Thin Films growth technologies - Metal evaporation systems: thermal + electron gun - Magnetron sputtering - Plasma Enhanced Chemical Vapor Deposition (PECVD) - Low Pressure CVD (LPCVD) - Silicon oxidation - Rapid Thermal Annealing - Electroplating Optical Lithography Laser Lithography Electron Beam Lithography AFM/STM Lithography Etching: Wet, Dry, Powder Blasting) Laser Machining Microscopies Optical FE-SEM + EDX AFM / STM SNOM UV-Vis Spectrometer Micro-FT-IR Spectrometer Micro-Raman Spectrometer Micro-Xray Diffractometer (XRD) Macro and micro-photoluminescence Anodic Bonding Hot Embossing Plasma Polymerization X-ray Photoelectron Spectroscopy (XPS) Electrical characterizations

5 SAPIENZA Università di Roma Molecular Photonics Laboratory A B E A SHG C F D G B Photonic components C GloveBox for polymers spin-coating D Poling E Electro Optic Ellipsometry and Reflectometry F OLEDs G Nonlinear Optics

6 Micro and nanophotonics Photonic Crystals Optical sensing 0.5µm a-sin based Fabry-Perot µcavity 2D-PhC on SOI structures Si-based artificial direct/inverted opals

7 Porous silicon based optical microcavities Single µ-cavity emission tuning spacer 1,0 0,8 Experim ental Spectrum Simulated Spectrum Double µ-cavity Reflectance 0,6 0,4 0,2 spacer 1 spacer 2 0, excitation tuning W avelength (nm) emission tuning

8 Coupled µcavity application to organic molecules/biomolecules detection Emission (arb. units) Emission (arb. units) 5 *1 0-9 M Reference (bare sample) C y-3 -H in liq u id s o lu tio n M 5 *1 0-8 M W a v e le n g th (n m ) Cy-3-H [10-12 M] Wavelength (nm) Reflectance spectrum Reflectance Enhanced fluorescence also on Pt A marked by Fluorescein 5(6)-isothiocyanate Fluorescence intensity (arb. units) psi single layer detection threshold Dye Molar Concentration Sensors and Act. B 137 (2009) 467

9 Porous Silicon and amorphous Silicon Nitride based multilayers for coupling Bloch Surface Waves (BSW) Otto configuration Pushing force 25-period PhC P + silicon wafer q Porous silicon Reflected beam Prism Incident beam Pol. TE

10 BSW Gas sensing scheme BSW resonances can shift after surface perturbations Real-time detection: R(λ,θ 0,t) θ 0 fixed, λ sweep Appl. Phys. Lett , (2007)

11 BSW Gas sensing scheme BSW resonances can shift after surface perturbations Real-time detection: R(λ,θ 0,t) θ 0 fixed, λ sweep Appl. Phys. Lett , (2007)

12 Porous Silicon and amorphous Silicon Nitride based multilayers for coupling Bloch Surface Waves (BSW) a-sin x :H BSW Air Inc. Refl. Kretschmann ellipsometric set-up Optics Lett. 33, 2439 (2008)

13 Porous Silicon and amorphous Silicon Nitride based multilayers for coupling Bloch Surface Waves (BSW) a-sin x :H Kretschmann ellipsometric set-up Reflectance map Optics Lett. 33, 2439 (2008)

14 Work in progress: BSW-based biosensing R R: 3-aminopropyl end: CH 2 - CH 2 -CH 2 - NH 2 Protein A R Si + l i n k + e r R O Si OR OR Organosilane R =-CH 3, -CH 2 -CH 3 Linker molecule: glutaraldehyde SiO 2 OHO OO OHOH OH O Optofluidic chip top view SiN x Flow IN Microchannel Flow OUT

15 Plasmonic substrates for SERS/Surface Enhanced-fluorescence Au/Ag nanosized pillars array by e-beam litho/ag evap./lift-off Au pillars array by nanosphere-litho Ag nanoparticles on porous silicon

16 Reflectance [arb. units] Plasmonic substrates for SERS/Surface Enhanced-fluorescence LSP fingerprint Raman excitation nm Wavelength [nm] 15 min 30 min 60 min homogeneous Ag film

17 Plasmonic substrates for SERS/Surface Enhanced-fluorescence Micro-Raman/SERS of Horseradish Peroxidase ν 4 =1374 cm -1 ν 2 =1575 cm -1 ν 10 =1630 cm -1 Intensity [arb. units] x15 x M 10-7 M 10-8 M p-si + HRP M Raman shift [cm -1 ] Appl. Surf. Sci. 254, 7494 (2008)

18 Plasmonic substrates for SERS/Surface Enhanced-fluorescence ν 4 =1374 cm -1 ν 2 =1575 cm -1 ν 10 =1630 cm -1 Intensity [arb. units] x15 x25 p-si + HRP Raman shift [cm -1 ] Intensity [arb. units] PL enhancement PL of 10-5 M Cy-3 dye 10-6 M 10-7 M 10-8 M 10-4 M 100nm Ag/p-Si + MgO Ag/p-Si Ag NPs + MgO x ultrathin films Appl. Surf. Sci. 254, 7494 (2008) Appl. Surf. Sci. 254, Wavelengths 7494 (2008) [nm] EOS Meeting 2008

19 Projects concerning with bio-photonics Fondi Integrativi per la Ricerca di Base FIRB 2004 Laboratory of miniaturized electrobiochemical technologies for genomic and proteomic analysis and research LATEMAR ( ) running Project of Piedmont Region on Converging technologies 2007 PHotonic biosensors for Early cancer diagnotics PHOENICS ( ) just started Project of Piedmont Region on industrial research and competitive research Sector Nanoscience and Nanotechnology 2006 Smart PLAsmonic Surfaces for Enhanced Raman spectroscopy in Biological Assays SPLASERBA ( ) running Joint Piedmont-Russian Research Project ASP-RFBR 2007 Nanooptics/spectroscopy of nanostructures and single nanoparticles for biosensing applications ( ) running Programmi di ricerca scient. di rilevante interesse nazionale PRIN 2005 Advanced photonic devices for biomedical applications ( ) concluded (STREP) proposal - ICT Call 4 -FP7-ICT Organic Photonics and Other Disruptive Photonic Technologies and Materials Plasmon-like BIo and gas-sensors based on BLOch electromagnetic surface wave micro-resonators - BIBLO submitted