CT Traceability - Prof. Wim Dewulf, Group T - KU Leuven
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1 CT Traceability - Calibration and Accuracy Prof. Wim Dewulf, Group T - KU Leuven
2 Outline Introduction: terminology and procedures Voxel size calibration Edge offset calibration Conclusions
3 Outline Introduction: terminology and procedures Voxel size calibration Edge offset calibration Conclusions
4 CT metrology: no resolution, but accuracy - Medical and material applications are satisfied with resolution - Dimensional metrology requires accuracy and traceability to the unit of length (the meter) Required accuracy: - Medical and material applications: none or (1..5%) - Dimensional metrology: CMM (laserinterferometry ) 1µm 1µm 5µm X-ray image with Nanotech transmission target 5µm Electron microscopy image of test pattern Outer bar width = 5 µm Inner bar width = 1 µm Thickness 1 µm gold Image at 80kV
5 Resolution
6 Traceability
7 CT metrology procedure CT scan Data Processing 3D Reconstruction (CT Pro) 3D grey voxel model Object Data Analysis Dimensional measurement (VolumeGraphics) 2D X-ray images Thresholding Edge detection (VolumeGraphics) Dimensions Surface model
8 Influencing parameters
9 Two main questions Voxel size? Edge
10 Outline Introduction: terminology and procedures Voxel size calibration Edge offset calibration Conclusions
11 Voxel size calibration Influence of workpiece position 2 µm 1 µm
12 Voxel size calibration Calibration with traceable reference objects
13 Voxel size calibration Calibration with traceable reference objects Excellent repeatability
14 Voxel size calibration Calibration with traceable reference objects Repeatability Distance between spheres [mm] 4,002 4,001 Repeatability of distance between spheres
15 Voxel size calibration Calibration with traceable reference objects Repeatability Sphere center distance [mm] Measurement n
16 Voxel size calibration Calibration with traceable reference objects Repeatability
17 Voxel size calibration Calibration by combining CT and CMM
18 Voxel size calibration Calibration by combining CT and CMM
19 Voxel size calibration Calibration by combining CT and CMM
20 Voxel size calibration Calibration by combining CT and CMM
21 Voxel size calibration Calibration by combining CT and CMM Repeatability Repeatability of data Spreiding processing: van 30 metingen 2D-3D reconstruction in software (VG)(CT-pro), automatic edge detection and plane-plane measurement (Volume Graphics) mean value measurements -1 sigma +1 sigma 4,9640 (30 measurements in software) 4,9630 Measured value (mm) Meetwaarde [mm] 4,9620 4,9610 4,9600 4,9590 4,9580 4,9570 σ 1µm Range 5.7µm ±3σ Repeatability including data acquisition: Range: 15 µm (at 35µA, 180kV) 30 µm (for 45µA and voltage varying from 160 to 190 kv) (5 measurements in approx. same conditions: temperature, time of day and machine warm-up, but no temperature controlled room)
22 Influences on the voxel size Drift of X-ray source Source: Vogeler et al., 2011
23 Influences on the voxel size Drift of X-ray source Source: Vogeler et al., 2011
24 Influences on the voxel size Tilt of detector and/or rotation stage
25 Influences on the voxel size Tilt of detector and/or rotation stage
26 Outline Introduction: terminology and procedures Voxel size calibration Edge offset calibration Conclusions
27 Edge detection Partial volume effect
28 Edge detection Background Material ISO50%
29 Edge detection
30
31
32 32
33 33
34 Edge detection Edge Background Material ISO50%
35 Deviation Afwijking compared t.o.v. meting to CMM met measurements CMM for i.f.v. grijswaarde different grey voor values de rand automatischeranddetectie Automatic edge (= ISO50%) detection D 47D 39D 48D Deviation Afwijking t.o.v. compared meting met to CMM CMM (CMM measurements -CT) [mm] [mm] Grey value for edge detection Grijswaarde voor randdetectie
36 Calibration by combining CT and CMM
37 Calibration by combining CT and CMM Source: Carmignato et al., 2009
38 Calibration by combining CT and CMM 38
39 Advanced edge detection
40 Deviation Afwijking compared t.o.v. meting to CMM met measurements CMM for i.f.v. grijswaarde different grey voor values de rand automatischeranddetectie Automatic edge (= ISO50%) detection D 47D 39D 48D Deviation Afwijking t.o.v. compared meting met to CMM CMM (CMM measurements -CT) [mm] [mm] Grey value for edge detection Grijswaarde voor randdetectie
41 Calibration workpieces
42 Calibration workpieces
43 Influence of workpiece properties (e.g. material, roughness, ) Tactile Optical
44 Influence of spot size and workpiece position
45 Influence of feature orientation
46 Influence of source settings No BHC
47 Influence of beam hardening Initial spectrum After e.g. 1mm
48 Influence of beam hardening
49 Influence of beam hardening
50 Influence of beam hardening Reconstructed slice
51 Influence of beam hardening
52 Influence of beam hardening Source: Wenig et al., 2006
53 Influence of beam hardening Source: Wenig et al., 2006
54 Influence of beam hardening
55 Influence of beam hardening
56 Influence of beam hardening Inwards offset
57 Influence of beam hardening
58 Influence of beam hardening
59 Multi-material objects Number (Source: Shammaa et al., 2010) Grey value
60 Multi-material objects Steel Steel Ceramic Ceramic Advanced calibration method (local thresholding) Thresholding on 1 greyvalue
61 Outline Introduction: terminology and procedures Voxel size calibration Edge offset calibration Conclusions
62 Conclusions Traceability of CT is challenging Influencing factors relate to CT device, measurement procedure, data processing, object, and environment Good measurement procedures, including calibration of both voxel size and edge offset, can reduce measurement uncertainties by a factor 5-10
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