CT Traceability - Prof. Wim Dewulf, Group T - KU Leuven

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1 CT Traceability - Calibration and Accuracy Prof. Wim Dewulf, Group T - KU Leuven

2 Outline Introduction: terminology and procedures Voxel size calibration Edge offset calibration Conclusions

3 Outline Introduction: terminology and procedures Voxel size calibration Edge offset calibration Conclusions

4 CT metrology: no resolution, but accuracy - Medical and material applications are satisfied with resolution - Dimensional metrology requires accuracy and traceability to the unit of length (the meter) Required accuracy: - Medical and material applications: none or (1..5%) - Dimensional metrology: CMM (laserinterferometry ) 1µm 1µm 5µm X-ray image with Nanotech transmission target 5µm Electron microscopy image of test pattern Outer bar width = 5 µm Inner bar width = 1 µm Thickness 1 µm gold Image at 80kV

5 Resolution

6 Traceability

7 CT metrology procedure CT scan Data Processing 3D Reconstruction (CT Pro) 3D grey voxel model Object Data Analysis Dimensional measurement (VolumeGraphics) 2D X-ray images Thresholding Edge detection (VolumeGraphics) Dimensions Surface model

8 Influencing parameters

9 Two main questions Voxel size? Edge

10 Outline Introduction: terminology and procedures Voxel size calibration Edge offset calibration Conclusions

11 Voxel size calibration Influence of workpiece position 2 µm 1 µm

12 Voxel size calibration Calibration with traceable reference objects

13 Voxel size calibration Calibration with traceable reference objects Excellent repeatability

14 Voxel size calibration Calibration with traceable reference objects Repeatability Distance between spheres [mm] 4,002 4,001 Repeatability of distance between spheres

15 Voxel size calibration Calibration with traceable reference objects Repeatability Sphere center distance [mm] Measurement n

16 Voxel size calibration Calibration with traceable reference objects Repeatability

17 Voxel size calibration Calibration by combining CT and CMM

18 Voxel size calibration Calibration by combining CT and CMM

19 Voxel size calibration Calibration by combining CT and CMM

20 Voxel size calibration Calibration by combining CT and CMM

21 Voxel size calibration Calibration by combining CT and CMM Repeatability Repeatability of data Spreiding processing: van 30 metingen 2D-3D reconstruction in software (VG)(CT-pro), automatic edge detection and plane-plane measurement (Volume Graphics) mean value measurements -1 sigma +1 sigma 4,9640 (30 measurements in software) 4,9630 Measured value (mm) Meetwaarde [mm] 4,9620 4,9610 4,9600 4,9590 4,9580 4,9570 σ 1µm Range 5.7µm ±3σ Repeatability including data acquisition: Range: 15 µm (at 35µA, 180kV) 30 µm (for 45µA and voltage varying from 160 to 190 kv) (5 measurements in approx. same conditions: temperature, time of day and machine warm-up, but no temperature controlled room)

22 Influences on the voxel size Drift of X-ray source Source: Vogeler et al., 2011

23 Influences on the voxel size Drift of X-ray source Source: Vogeler et al., 2011

24 Influences on the voxel size Tilt of detector and/or rotation stage

25 Influences on the voxel size Tilt of detector and/or rotation stage

26 Outline Introduction: terminology and procedures Voxel size calibration Edge offset calibration Conclusions

27 Edge detection Partial volume effect

28 Edge detection Background Material ISO50%

29 Edge detection

30

31

32 32

33 33

34 Edge detection Edge Background Material ISO50%

35 Deviation Afwijking compared t.o.v. meting to CMM met measurements CMM for i.f.v. grijswaarde different grey voor values de rand automatischeranddetectie Automatic edge (= ISO50%) detection D 47D 39D 48D Deviation Afwijking t.o.v. compared meting met to CMM CMM (CMM measurements -CT) [mm] [mm] Grey value for edge detection Grijswaarde voor randdetectie

36 Calibration by combining CT and CMM

37 Calibration by combining CT and CMM Source: Carmignato et al., 2009

38 Calibration by combining CT and CMM 38

39 Advanced edge detection

40 Deviation Afwijking compared t.o.v. meting to CMM met measurements CMM for i.f.v. grijswaarde different grey voor values de rand automatischeranddetectie Automatic edge (= ISO50%) detection D 47D 39D 48D Deviation Afwijking t.o.v. compared meting met to CMM CMM (CMM measurements -CT) [mm] [mm] Grey value for edge detection Grijswaarde voor randdetectie

41 Calibration workpieces

42 Calibration workpieces

43 Influence of workpiece properties (e.g. material, roughness, ) Tactile Optical

44 Influence of spot size and workpiece position

45 Influence of feature orientation

46 Influence of source settings No BHC

47 Influence of beam hardening Initial spectrum After e.g. 1mm

48 Influence of beam hardening

49 Influence of beam hardening

50 Influence of beam hardening Reconstructed slice

51 Influence of beam hardening

52 Influence of beam hardening Source: Wenig et al., 2006

53 Influence of beam hardening Source: Wenig et al., 2006

54 Influence of beam hardening

55 Influence of beam hardening

56 Influence of beam hardening Inwards offset

57 Influence of beam hardening

58 Influence of beam hardening

59 Multi-material objects Number (Source: Shammaa et al., 2010) Grey value

60 Multi-material objects Steel Steel Ceramic Ceramic Advanced calibration method (local thresholding) Thresholding on 1 greyvalue

61 Outline Introduction: terminology and procedures Voxel size calibration Edge offset calibration Conclusions

62 Conclusions Traceability of CT is challenging Influencing factors relate to CT device, measurement procedure, data processing, object, and environment Good measurement procedures, including calibration of both voxel size and edge offset, can reduce measurement uncertainties by a factor 5-10

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