SURFACE TEXTURE (SURFACE ROUGHNESS, WAVINESS, AND LAY)

Transcription

1 A N A M E R I C A N N A T I O N A L S T A N D A R D SURFACE TEXTURE (SURFACE ROUGHNESS, WAVINESS, AND LAY) ASME B (Revision of ASME B )

2 CONTENTS Foreword... Committee Roster... Correspondence with the B46 Committee... Section 1 Terms Related to Surface Texture General Definitions Related to Surfaces Definitions Related to the Measurement of Surface Texture by Profiling Methods Definitions of Surface Parameters for Profiling Methods Definitions Related to the Measurement of Surface Texture by Area Profiling and Area Averaging Methods Definitions of Surface Parameters for Area Profiling and Area Averaging Methods Section 2 Classification of Instruments for Surface Texture Measurement Scope of Section Recommendation Classification Scheme Section 3 Terminology and Measurement Procedures for Profiling, Contact, Skidless Instruments Scope of Section References Terminology Measurement Procedure Section 4 Measurement Procedures for Contact, Skidded Instruments Scope of Section References Purpose Instrumentation Section 5 Measurement Techniques for Area Profiling Scope of Section References Recommendations Imaging Methods Scanning Methods Section 6 Measurement Techniques for Area Averaging Scope of Section Examples of Area Averaging Methods Section 7 Nanometer Surface Texture And Step Height Measurements By Stylus Profiling Instruments Scope of Section Applicable Document Definitions Recommendations Preparation for Measurement Calibration Artifacts Reports iii vii ix x

3 Section 8 Nanometer Surface Roughness as Measured with Phase Measuring Interferometric Microscopy Scope of Section Description and Definitions: Noncontact Phase Measuring Interferometer Key Sources of Uncertainty Noncontact Phase Measuring Interferometer Instrument Requirements Test Methods Measurement Procedures Data Analysis and Reporting References Section 9 Filtering of Surface Profiles Scope of Section References Definitions and General Specifications RC Filter Specification for Roughness Phase Correct Gaussian Filter for Roughness Filtering for Waviness Section 10 Terminology and Procedures for Evaluation of Surface Textures Using Fractal Geometry General Definitions Relative to Fractal Based Analyses of Surfaces Reporting the Results of Fractal Analyses References Section 11 Specifications and Procedures for Precision Reference Specimens Scope of Section References Definitions Reference Specimens: Profile Shape and Application Physical Requirements Assigned Value Calculation Mechanical Requirements Marking Section 12 Specifications and Procedures for Roughness Comparison Specimens Scope of Section References Definitions Roughness Comparison Specimens Surface Characteristics Nominal Roughness Grades Specimen Size, Form, and Lay Calibration of Comparison Specimens Marking Figures 1-1 Schematic Diagram of Surface Characteristics Measured vs Nominal Profile Stylus Profile Displayed With Two Different Aspect Ratios Examples of Nominal Profiles Filtering a Surface Profile Profile Peak and Valley Surface Profile Measurement Lengths Illustration for the Calculation of Roughness Average Ra Rt, Rp, and Rv Parameters... 7 iv

4 1-10 Surface Profile Containing Two Sampling Lengths, l 1 and l 2, Also Showing the Rp i and Rt i Parameters The Rt and Rmax Parameters The Waviness Height, Wt The Mean Spacing of Profile Irregularities, RSm The Peak Count Level, Used for Calculating Peak Density Amplitude Density Function ADF(z) or p(z) The Profile Bearing Length The Bearing Area Curve and Related Parameters Three Surface Profiles With Different Skewness Three Surface Profiles With Different Kurtosis Topographic Map Obtained by an Area Profiling Method Area Peaks (Left) and Area Valleys (Right) Comparison of Profiles Measured in Two Directions on a Uniaxial, Periodic Surface Showing the Difference in Peak Spacing as a Function of Direction Classification of Common Instruments for Measurement of Surface Texture Profile Coordinate System Conical Stylus Tip Truncated Pyramid Tip Aliasing Schematic Diagrams of a Typical Stylus Probe and Fringe-Field Capacitance Probe Effects of Various Cutoff Values Examples of Profile Distortion Due to Skid Motion Example of Profile Distortion The Radius of Curvature for a Surface Sine Wave Stylus Tip Touching Bottom and Shoulders of Groove The Stylus Tip Contact Distance, x A Typical Phase Measuring Interferometer System Demonstration of the Detector Array With Element Spacing and the Measurement of the Longest Spatial Wavelength, L Covering the Total Number (N) Pixels Demonstration of the Detector Array With Element spacing and the Measurement of the Smallest Spatial Wavelength R Covering 5 Pixels Wavelength Transmission Characteristics for the 2RC Filter System Gaussian Transmission Characteristics Together With the Uncertain Nominal Transmission Characteristic of a 2 m Stylus Radius Weighting Function of the Gaussian Profile Filter Gaussian Transmission Characteristic for the Waviness Short-Wavelength Cutoff or for Deriving the Roughness Mean Line Having Cutoff Wavelengths c p 0.08, 0.25, 0.8, 2.5, and 8.0 mm Gaussian Transmission Characteristic for the Roughness Long- Wavelength Cutoff Having Cutoff Wavelengths c p 0.08, 0.25, 0.8, 2.5, and 8.0 mm Example of a Deviation Curve of an Implemented Filter From the Ideal Gaussian Filter as a Function of Spatial Wavelength Self-Similarity Illustrated on a Simulated Profile An Idealized Log-Log Plot of Relative Length (of a Profile) or Relative Area (of a Surface) Versus the Scale of Observation An Idealized Log-Log Plot of Relative Length or Area Versus the Scale of Observation (Length-Scale or Area-Scale Plot), Showing Multi-Fractal Characteristics and Crossover Scales Three Stepping Exercises from a Length-Scale Analysis on a Simulated Profile v

5 10-5 Four Tiling Exercises From an Area-Scale Analysis, Illustrated for a Diamond Coating on a Silicon Substrate, Fabricated and Measured With a Scanning Tunneling Microscope at UNCC An Area-Scale Plot Including the Results of the Tiling Series in Fig Type A1 Groove Type A2 Groove Allowable Waviness Height Wt for Roughness Calibration Specimens Assessment of Calibrated Values for Type A Type B1 Grooves: Set of 4 Grooves Type B2 or C2 Specimens With Multiple Grooves Use of Type B3 Specimen Type C1 Grooves Type C3 Grooves Type C4 Grooves Unidirectional Irregular Grooves Having Profile Repitions at 4 mm Intervals Tables 3-1 Cutoff Values for Periodic Profiles Using RSm Cutoff Values for Nonperiodic Profiles Using Ra Measurement Cutoffs and Traversing Lengths for Continuously Averaging Instruments Using Analog Meter Readouts Measurement Cutoffs and Minimum Evaluation Lengths for Instruments Measuring Integrated Roughness Values Over a Fixed Evaluation Length Limits for the Transmission Characteristics for 2RC Long-Wavelength Cutoff Filters Typical Cutoffs for Gaussian Filters and Associated Cutoff Ratios Typical Values for the Waviness Long-Wavelength Cutoff ( cw) and Recommended Minimum Values for the Waviness Traversing Length Example of a Report on Fractal Analysis Nominal Values of Depth or Height and Examples of Width for Type A Nominal Values of Depth and Radius for Type A Tolerances for Types A1 and A Tip Size Estimation From the Profile Graph for Type B Recommended Ra and RSm Values for Type C1 Specimens Tolerances for Types C1 to C Nominal Values of Ra and RSm for Type C Nominal Values of Ra fortype C Tolerances for Unidirectional Irregular Profiles Nominal Roughness Grades (Ra) for Roughness Comparison Specimens Form and Lay of Roughness Comparison Specimens Representing Various Types of Machined Surfaces Examples of Sampling Lengths for Calibration of Comparison Specimens, mm Nonmandatory Appendices A General Notes on Use and Interpretation of Data Produced by Stylus Instruments B Control and Production of Surface Texture C A Review of Additional Surface Measurement Methods D Additional Parameters for Surface Characterization E Characteristics of Certain Area Profiling Methods F Descriptions of Area Averaging Methods G Observations on the Filtering of Surface Profiles H Reference Subroutines I A Comparison of ASME and ISO Surface Texture Parameters vi