Automatisierte, hochpräzise Optikmontage Lösungen für die Industrie



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Transcription:

Automatisierte, hochpräzise Optikmontage Lösungen für die Industrie Alexander Steinecker, CSEM Trends in Micro Nano, HSLU, Horw, 5. Dezember 2013

High power laser sources Motivation Laser manufacturing needs highly efficient and cost sensitive modules Compact systems searched Target: output of 100 W Longterm vision: 10 $ / W Copyright 2013 CSEM Trends in Micro Nano, 5.12.2013, HSLU Hochpräzise Optikmontage A. Steinecker Seite 1

Today s industrial offer OCLARO s high power laser diode Fiber-coupled single emitter 80 W emission (in 105 mm fiber) 9xx nm wavelength Applications Fiber laser pumping Direct diode material processing Medical applications Copyright 2013 CSEM Trends in Micro Nano, 5.12.2013, HSLU Hochpräzise Optikmontage A. Steinecker Seite 2

3 years ago: the way to implementation CSEM proposal Optical design for assembly Combination of beams from 12 laser diodes @ 10 W Assembly strategy and assembly of prototype Assessment of prototype Copyright 2013 CSEM Trends in Micro Nano, 5.12.2013, HSLU Hochpräzise Optikmontage A. Steinecker Seite 3

Laser diode with «fast» and «slow axis» emission Laser emission Fast axis: large exit angle, sharp focus point => critical collimation lens alignment Slow axis: small exit angle, blurred focus => less critical lens alignment Copyright 2013 CSEM Trends in Micro Nano, 5.12.2013, HSLU Hochpräzise Optikmontage A. Steinecker Seite 4

Fast axis collimation requires high alignment precision «side view» y x z «top view» y x Alignment High sensitivity of fast axis collimation (FAC) to misalignment Alignment process with sub micro-meter positioning accuracy in 5-6 degrees of freedom z x Copyright 2013 CSEM Trends in Micro Nano, 5.12.2013, HSLU Hochpräzise Optikmontage A. Steinecker Seite 5

FAC assembly without standoff 1. Lens alignment active layer of laser die 2. Adhesive dispensing adhesive forms chamfer 3. Adhesive curing adhesive shrinks in curing process and tilts the lens Copyright 2013 CSEM Trends in Micro Nano, 5.12.2013, HSLU Hochpräzise Optikmontage A. Steinecker Seite 6

FAC assembly with standoff 1. Lens alignment standoff heat curable adhesive 2. Adhesive dispensing uniform and very thin adhesive layer 3. Adhesive curing adhesive shrinks in curing process, due to small gap absolute shrinkage negligable Copyright 2013 CSEM Trends in Micro Nano, 5.12.2013, HSLU Hochpräzise Optikmontage A. Steinecker Seite 7

FAC assembly 2-sided adhesive bonding T Due to adhesive bonding on two sides the lens will deform: - while curing. - at changing temperature. Copyright 2013 CSEM Trends in Micro Nano, 5.12.2013, HSLU Hochpräzise Optikmontage A. Steinecker Seite 8

FAC assembly 1-side bonded with standoff T F Due to adhesive bonding on one side the lens will expand. As it has no optical power in the long direction the expansion has no effect. Copyright 2013 CSEM Trends in Micro Nano, 5.12.2013, HSLU Hochpräzise Optikmontage A. Steinecker Seite 9

Challenge: Quality of components Front view Top view Screening of 21 lenses (mechanical and optical characterization) Good lens mechanical dimensions not as specified Bad lens Specified Measured Focal length [mm] 6.31 +/- 0.02 6.87 +/- 0.21 Big difference in focal length Radius [mm] 3.21 +/- 0.01 3.26 +/- 0.03 Copyright 2013 CSEM Trends in Micro Nano, 5.12.2013, HSLU Hochpräzise Optikmontage A. Steinecker Seite 10

Top view on components laser die submount standoff adhesive FAC gripper Copyright 2013 CSEM Trends in Micro Nano, 5.12.2013, HSLU Hochpräzise Optikmontage A. Steinecker Seite 11

Critical process steps Dispensing lens Reproducable droplets of nl volume (0.1 x 0.1 x 0.1 mm 3 ) cu re Passive alignment UV curable adhesive Camera based pre-alignment => accuracy several mm Active alignment Alignment with optical feedback => accuracy several 100 nm Copyright 2013 CSEM Trends in Micro Nano, 5.12.2013, HSLU Hochpräzise Optikmontage A. Steinecker Seite 12

Assembly station overview IP500 Hexapod linear stage On shelf above setup (not shown) are: current driver, power meter, UV curing unit, dispenser control unit Copyright 2013 CSEM Trends in Micro Nano, 5.12.2013, HSLU Hochpräzise Optikmontage A. Steinecker Seite 13

Packaging @ CSEM Link to Video http://www.youtube.com/watch?v=iykl6u4rdxo Copyright 2013 CSEM Trends in Micro Nano, 5.12.2013, HSLU Hochpräzise Optikmontage A. Steinecker Seite 14

Process development and automation Industrialization Prototypes of 100 W modules have been assessed and assembled for Oclaro Further extension to 400 W modules is planned Copyright 2013 CSEM Trends in Micro Nano, 5.12.2013, HSLU Hochpräzise Optikmontage A. Steinecker Seite 15