Soft lithography for diffractive microfabrications



Similar documents
Light management for photovoltaics using surface nanostructures

Simple and scalable fabrication approaches of Nanophotonic structures for PV

Light management for photovoltaics. Ando Kuypers, TNO Program manager Solar

Basic principles and mechanisms of NSOM; Different scanning modes and systems of NSOM; General applications and advantages of NSOM.

Ultrahigh-efficiency solar cells based on nanophotonic design

Focused Ion beam nanopatterning: potential application in photovoltaics

Spectral Characterisation of Photovoltaic Devices Technical Note

Excimer Laser Technology

Porous silicon based optical multilayers

Organic semiconductors

Laboratory #3 Guide: Optical and Electrical Properties of Transparent Conductors -- September 23, 2014

The study of structural and optical properties of TiO 2 :Tb thin films

OPTIMIZING OF THERMAL EVAPORATION PROCESS COMPARED TO MAGNETRON SPUTTERING FOR FABRICATION OF TITANIA QUANTUM DOTS

JOURNAL INTEGRATED CIRCUITS AND SYSTEMS, VOL 1, NO. 3, JULY

TECNOTTICA CONSONNI SRL CERTIFIED QUALITY MANAGEMENT SYSTEM COMPANY BY DNV UNI EN ISO 9001:2008

NANO SILICON DOTS EMBEDDED SIO 2 /SIO 2 MULTILAYERS FOR PV HIGH EFFICIENCY APPLICATION

Solar Photovoltaic (PV) Cells

Project 2B Building a Solar Cell (2): Solar Cell Performance

Technology White Papers nr. 13 Paul Holister Cristina Román Vas Tim Harper

The Physics of Energy sources Renewable sources of energy. Solar Energy

Graphene a material for the future

Chemical Synthesis. Overview. Chemical Synthesis of Nanocrystals. Self-Assembly of Nanocrystals. Example: Cu 146 Se 73 (PPh 3 ) 30

Conductivity of silicon can be changed several orders of magnitude by introducing impurity atoms in silicon crystal lattice.

Neuere Entwicklungen zur Herstellung optischer Schichten durch reaktive. Wolfgang Hentsch, Dr. Reinhard Fendler. FHR Anlagenbau GmbH

Recent developments in high bandwidth optical interconnects. Brian Corbett.

Surface plasmon nanophotonics: optics below the diffraction limit

Robert G. Hunsperger. Integrated Optics. Theory and Technology. Fourth Edition. With 195 Figures and 17 Tables. Springer

Patrick F. Murphy, Ph.D., P.E., CFEI Senior Managing Engineer

Pulsed laser deposition of organic materials

Production of Solar Energy Using Nanosemiconductors

Nanoscience Course Descriptions

Applied Physics of solar energy conversion

GREEN NANOTECHNOLOGY. Geoffrey. Energy in the Built Environment. Solutions for Sustainability and. B. Smith Claes G. Granqvist.

Over the last 50 years, commercial silicon photovoltaics

Back to Basics Fundamentals of Polymer Analysis

UNIT I: INTRFERENCE & DIFFRACTION Div. B Div. D Div. F INTRFERENCE

Materials for Organic Electronic. Jeremy Burroughes FRS FREng

SOLAR ELECTRICITY: PROBLEM, CONSTRAINTS AND SOLUTIONS

Micro-Power Generation

Why silicon MEMS? Silicon is a strong material... Photolithography. Micromachining. Dicing and packaging

Rapid Prototyping and Development of Microfluidic and BioMEMS Devices

A Promising Energy Source for Portable MEMS Devices

Experiment #5: Qualitative Absorption Spectroscopy

Hard Condensed Matter WZI

We know how to write nanometer. extreme lithography. extreme lithography. xlith Gesellschaft für Hochauflösende Lithografie Support & Consulting mbh

5. Scanning Near-Field Optical Microscopy 5.1. Resolution of conventional optical microscopy

2. Deposition process

Raman spectroscopy Lecture

Photonic Hydrophones based on Coated Fiber Bragg Gratings

Effect of Deposition Time on ZnS Thin Films Properties by Chemical Bath Deposition (CBD) Techinique

Master in Condensed Matter Physics. Master académique

RAY TRACING UNIFIED FIELD TRACING

Optical Hyperdoping: Transforming Semiconductor Band Structure for Solar Energy Harvesting

Fabrication and Characterization of Nanostructured Silicon Films For Photovoltaic Applications. Kai Wang

Types of Epitaxy. Homoepitaxy. Heteroepitaxy

Characterization of surfaces by AFM topographical, mechanical and chemical properties

Acousto-optic modulator

Novel inkjettable copper ink utilizing processing temperatures under 100 degrees C without the need of inert atmosphere

Outline. Self-assembled monolayer (SAM) formation and growth. Metal nanoparticles (NP) anchoring on SAM

Near-field scanning optical microscopy (SNOM)

Durability and Scale-Up of PerovskiteBased Mesoscopic Solar Cells

The effect of film thickness on physical properties of fluorine-doped indium oxide thin films

Nanotechnology and Its Impact on Modern Computer

NOVEL SOLAR CELL CONCEPTS

Ricerca su celle fotovoltaiche innovative

Scanning Near-Field Optical Microscopy for Measuring Materials Properties at the Nanoscale

Low-cost Printed Electronic Nose Gas Sensors for Distributed Environmental Monitoring

Materials and Technologies for Renewable Energy. ENEA R&D activities on PV. Anna De Lillo

MCQ - ENERGY and CLIMATE

OLED display. Ying Cao

Scientific Exchange Program

Arizona Institute for Renewable Energy & the Solar Power Laboratories

Integrated Photonic. Electronic. Optics. Optoelettronics. Integrated Photonic - G. Breglio L1. Quantum Mechanics Materials Science Nano/Bio-photonic

Esnek Güneş Pilleri ve Fotovoltaik Tekstiller

2 Absorbing Solar Energy

Graduate Student Presentations

CREOL, College of Optics & Photonics, University of Central Florida

Deposition of Conducting Oxide Thin Films as Anode for Solar Cell Device

Staff: 1277 including students and student assistants Annual Budget: 86,1 million euros, including investments. (December 2014)

Spectral Measurement Solutions for Industry and Research

Advanced Laser Microfabrication in High Volume Manufacturing

How To Increase Areal Density For A Year

Laserwelding of plastics Ir. Luc Janssen 2008

Le nanotecnologie: dal Laboratorio al Mercato. Fabrizio Pirri Politecnico di Torino Istituto Italiano di Tecnologia

Celle solari di terza generazione (a fotosintesi )

Problem Set 6 UV-Vis Absorption Spectroscopy Express the following absorbances in terms of percent transmittance:

Micro Power Generators. Sung Park Kelvin Yuk ECS 203

Lecture 15 - application of solid state materials solar cells and photovoltaics. Copying Nature... Anoxygenic photosynthesis in purple bacteria

Emerging new non conventional tools

Grad Student Presentation Topics PHGN/CHEN/MLGN 435/535: Interdisciplinary Silicon Processing Laboratory

Development of the Extreme Ultraviolet Spectrometer: EXCEED

Luminescence and Optical Properties of Tm 3+ :TeO 2 - ZnO-TiO 2 Glasses for Fiber Optic Applications

Supporting Information. Rapid Prototyping of Microchannels with Surface Patterns for Fabrication of Polymer Fibers

BROADBAND PHOTOCURRENT ENHANCEMENT IN LONGWAVE INFRARED QUANTUM DOT PHOTODETECTORS BY SUB-WAVELENGTH SURFACE GRATINGS

Transcription:

Soft lithography for diffractive microfabrications Liliana D Amico PhD Section: Materials Engineering XXVIII Cycle (3 Year) Mauro Casalboni, Fabio De Matteis, Paolo Prosposito, Roberta De Angelis

Summary Diffractive elements in Optoelectonic Method & materials to fabricate Bragg gratings Introduction to soft lithography & PDMS Properties DSC: Titania layer nanostructuring to enhance cell efficiency Recent challanges

Diffractive elements in optoelectronics Diffraction gratings are often used as dispersive elements in monochromators, spectrometers, lasers, filters. Recently in photovoltaic applications for Light Management Techniques to realize light trapping schemes Scattering layers or centers materials of different morphologies able to confine light in TiO2 layer Photonic crystals Highly reflecting layers Periodic structures on the top side Coupling/diffracting elements H. Chang et al; Journal of Solid State Science and Technology, 2014. D.Colonna et al; Energy & Environmental Science, 2012.

How to realize diffractive Bragg Grating

Laser Interference Lithography (LIL) 1. Photoresist AZ5214E 2. Spin coating Laser Ar + 3. Exposition/Lloyd Mirror configuration sin m 2 Mirror

How to easily & faithfully replicate diffractive patterns on different substrates?

How to easily & faithfully replicate diffractive patterns on different substrates? SOFT LITHOGRAPHY

Introduction to Technique Soft lithography is a non conventional lithographic process based on the use of «soft materials» like organic polymers to perform replication & patterning transfer for carrying out micro- and nanofabrication molding Replication Pattern transfer

1.Molding PDMS - Polydimethylsiloxane A unique combination of properties resulting from the presence of an inorganic siloxane backbone and organic methyl groups attached to silicon. Main Properties: Very low glass transition temperatures (fluid at room temperature); Can be readily converted into flexible solid elastomer by cross-linking; Optically transparent from 235 nm to near IR; Biocompatible; Inert & Non toxic; Not flammable and gas permeable; Thermally & electrically isulating.

2. Replication Master Diffractive pattern Heat treatment under vacuum peeling Final mold Can replicate nanostructures in one step over large areas; Convenient, effective, and low-cost; Enable the fabrication on nonplanar surfaces with a wide range of materials.

3.Pattern Transfer on DSC TiO 2 layer

Theoretical Prediction Calculations based on 2D - FEM with COMSOL Multiphysics TM To enhance cell efficiency

Theoretical Prediction Calculations based on 2D - FEM with COMSOL Multiphysics TM To enhance cell efficiency

Theoretical Prediction Calculations based on 2D - FEM with COMSOL Multiphysics TM To enhance cell efficiency ᴧ = 500 nm h = 300 nm

Theoretical Prediction Traditional cell vs nanostructured cell Redistribution of radiation in bunches owing to diffraction effects D. Barettin, A. Di Carlo, R. De Angelis, M. Casalboni and P. Prosposito. Opt. Express 20 (S6) A888-A897 (2012). Absorption enhancement, in the range 500-700 nm +23.4%

DSC layer nanostructuring UV-Nanoimprinting of TiO2 layer

DSC layer nanostructuring UV-Nanoimprinting of TiO2 layer

Morphological characterization ACK Dr. E. Placidi, Dr. I. Cacciotti

Optical characterization Integrating sphere system measurements 50 2,0 Transmittance (%) 40 30 20 10 (a) 0 500 550 600 650 700 750 Reflectance (%) 1,5 1,0 (b) Legend: Standard cell Nanostructured 0,5 500 550 600 650 700 750 Wavelength (nm) Wavelength (nm) Lower transmittance and lower reflectance means enhanced absorption Collaboration

Photovoltaic characterization Legend: Standard cell Nanostructured +15% Density of current (J SC ) +6% Voltage (V OC ) +32% of IPCE L. D Amico, D. Colonna, R. De Angelis, M. Casalboni, F. De Matteis, A. Di Carlo, P. Prosposito. RSC Advances 4 (2014) 43828-43833. Collaboration

Recent Challange: Large area replication 0,25 cm 2 greater by a factor of 10! 2,5 cm 2 E. Calabrò. Tesi Magistrale in Scienze e Tecnologie dei Materiali. «Ottimizzazione di Perovskite Solar cell e DSC mediante reticoli di Bragg di larga area. 2015. Collaboration

Recent Challange: 2D Structures & Replication 0,06 Reflectance (s-pol, i =20 ) 0,05 0,04 0,03 0,02 400 500 600 700 800 900 Wavelength (nm) without coating with coating Collaboration

Thank you for attention!

Pubblications & other activieties [1] R. De Angelis, L. D Amico, M. Casalboni, F. Hatami, W.T. Masselink, P. Prosposito, Surface InP Quantum Dots: Effect of Morphology on the Photoluminescence Sensitivity ; Procedia Engineering, 26th European Conference on Solid-State Transducers, EUROSENSORS 2012. [2] R. De Angelis, L. D Amico, M. Casalboni, F. Hatami, W.T. Masselink, P. Prosposito, Photoluminescence sensitivity to methanol vapours of surface InP quantum dot: Effect of dot size and coverage ; Sensors and Actuators B: Chemical, February 2013. [3] R. De Angelis, M. Casalboni, I. Colantoni, L. D Amico, F. De Matteis, F. Hatami, W.T. Masselink, P. Prosposito. Luminescence sensitivity investigations on epitaxial surface InP quantum dots ; Journal of Sensor Technology, 2013. [4] R. De Angelis, Ilaria Fratoddi, F. De Matteis, P. Prosposito, I. Cacciotti, L. D'Amico, F. Nanni, A.Yadav, M. Casalboni, M. V Russo. From nanospheres to microribbons: self-assembled Eosin Y doped PMMA nanoparticles as photonic crystals ; Journal of Colloid Interface Sci.,2013. [5] R. De Angelis, M. Casalboni, L. D Amico, F. De Matteis, F. Hatami, W. T. Masselink, P. Prosposito. Vapour sensitivity of InP Surface Quantum Dots, Accepted for publication in Key Engineering Materials, 2013. [6] L. D Amico, D. Colonna, R. De Angelis, M. Casalboni, F. De Matteis, A. Di Carlo, P. Prosposito. Bragg grating Nanostructuring of TiO 2 layer in dye sensitized solar cells: an efficien method to enhance light harvesting. RSC Advances, 2014. Symposium: Innovative solar cells for renewable and sustainable energy production, Milan 18 December 2013. Bragg grating nanostructuring for light harvesting in Dye Sensitized Solar Cells (talk) Tutoring Activity Physics 1 excercises