Scanning Electron Microscope

Scanning Electron Microscope

Compact & High-performance Features 1. Turbo Molecular Pump (TMP) is standard. As an oil-free pumping system, sample contamination is minimised. Unlike conventional oil diffusion pumped SEM, it does not require large heating capacity or water re-circulator, making it an energy saving ecological SEM. 2. To assist inexperienced users the SU1510 includes an on-screen operation guide that walks the user step by step through the complete imaging process from vacuum mode selection to image capture. This unique feature allows users of all experience levels to quickly obtain high quality images. 3. The advanced technologies incorporated into the SU1510 provide a guaranteed secondary electron resolution of 3.0nm (high vacuum mode) and a guaranteed backscattered electron resolution of 4.0nm (variable pressure mode). 4. For quick observation of non-conductive samples the SU1510 utilizes variable pressure mode that eliminates negative charging, and provides the optimum conditions for both imaging and EDX microanalysis 1. 5. The specimen chamber and stage have been designed to accommodate samples as large as 153mm in diameter. Simultaneous EDX microanalysis and imaging can be completed on a sample that is up to 60mm in height at the analytical working distance of 15mm. 6. The ESED- 2 is optionally available if secondary electron imaging in variable pressure mode is desired. This detector is integrated into the GUI of the SU1510 and is completely software driven with all automatic features ready for instant use by the operator. 1 : Energy Dispersive X-ray microanalysis (option) 2 : Environmental Secondary Electron Detector (option) Table is to be prepared locally. The images are simulated, and are not actual images. 1

Operation Guide - Good quality images by easy operate 3 - STEP1 Condition setting The key to obtaining good quality images is to optimize the microscope to suit the requirement. The SU1510 GUI has pre-prepared versatile conditions for observation and EDX microanalysis. The software helps the operator to select the optimum operating conditions depending on the user s application. STEP2 Image adjustment Just follow the instruction in the GUI, SU1510 will be set to the proper operating conditions for both focus and astigmatism adjustment. One-point advice 3 : An impression of easy operate varies between individuals. 2

Electron optics for high resolution microscopy High resolution image (High Vacuum 3.0nm/30kV, Low vacuum 4.0nm/30kV) The SU1510 electron optics incorporate a low aberration objective lens and a unique gun bias system that allows delivery of high emission current. This design allows a guaranteed resolution of 3.0nm at High Vacuum (SE) and 4.0nm at Low Vacuum (BSE). High Vacuum, SE image Magnification : 100,000 Low Vacuum, BSE image Magnification : 60,000 Sample : Evaporated gold particles Gun bias voltage system The SU1510, in addition to the traditional variable bias, has a unique Quad bias system, in which allows delivery of high emission currents at the four most frequently used accelerating voltages. This produces images with good signal to noise ratio even when operated at a low accelerating voltage. Traditional variable bias Accelerating voltage : 3kV magnification : 30,000 A unique Quad bias system Accelerating voltage : 3kV magnification : 30,000 Accelerating voltage : 3kV Magnification : 15,000 Sample : Zeolite Accelerating voltage : 15kV Magnification : 30,000 Sample : Metal hydride 3

Various Real Time Image Function those are Easy to Use Real time image display The SU1510 has a choice of image displays. The operator can choose from real time displays of full screen, small screen or simultaneously display two different live signals as shown below. A small screen real time image (640 480 pixels) A full frame real time image (1,280 960 pixels) A simultaneous live display of two different images (640 480 pixels 2) Sample : Clock Signal mixing function The SU1510 has a signal mixing function in which operators can mix different live signals generated from the same field of view and produce one combined image. If operators mix a secondary electron signal (which is sensitive to surface topography) and a backscattered electron signal (which is sensitive to atomic number contrast), for example, they may be able to evaluate surface details and compositions using a single image. Left : SE image Right : BSE image Signal mixing image (SE+BSE) Sample : Ball grid array The images are simulated, and are not actual images. 4

Observation of insulating samples Observation in Variable pressure (VP) mode A beam of electrons The objective lens A variable pressure environment (6 to 270Pa) Sample Residual gas molecules Neutralization of a sample surface potential by ions A variable pressure environment Preventing sample charging Microscopy of water/oil containing wet samples without metal coatings The VP mode allows observation of non-conductive or hydrated samples without the need for sample preparation, such as a conductive coating. Positive ions generated by either interaction of the incident electron beam or with electrons leaving the sample with the chamber gas, act to neutralize the build up of negative charge on the sample surface. The chamber pressure is controlled by a simple slide bar. Real-time Vacuum Feedback (RVF) system permits rapid vacuum stability in the specimen chamber at the user specified pressure setting. A comparison of BSE images at high and low accelerating voltages in VP-mode The high sensitivity, 4 segment BSE detector makes observation of samples at low accelerating voltages a reality. Accelerating voltage : 15kV Accelerating voltage : 3kV Sample : Photocatalyst fiber Accelerating voltage : 15kV Accelerating voltage : 5kV Sample: Saccaromyces cerevisiae (containing Zinc) 5

BSE imaging at high speed scan rates High sensitivity semiconductor BSE detector It is well known that BSE images reflect sample composition due to atomic number contrast. This has been widely used in the examination of metallic samples, as well as particles on various surfaces, such as molded parts. The SU1510 has a 4 segment BSE detector. In addition to the normal compositional image this allows observation of sample topography from four different orientations without the need to rotate the sample. The BSE detector is so compact that samples can be imaged at short working distances at very high sensitivity. BSE/Composition BSE/Topography BSE/3D SE (Secondary electron) Sample : Blade for a cutting tool 6

Versatile Specimen Chamber for Various Analytical Tools A sample as tall as 60mm for EDX The specimen stage of the SU1510 will accept a sample as tall as 60mm for image observation and elemental analysis (EDX), or 70mm tall sample is applicable if elemental analysis is not required. Japanese Seal (60mm height) EDX analysis (option) The SU1510 design provides optimum column conditions for fast and accurate analytical X-ray mapping, qualitative analysis and quantitative analysis. BSE image EDX Mixed mapping image EDX Qualitative analysis EDX Mapping image EDX Mapping image EDX Mapping image Sample : A block lava Analyzed by XFlash5010 (Bruker AXS) 7

X-Y Axis Motor Drive (option) Move function The Move function uses both electrical image shift and motordrive stage controls. This function allows operators to move an object of interest to the center of the monitor screen with a click of the mouse. It also allows any part of the image to be brought to a new location as shown below. This is a point of interest. This is brought to the center of the screen by clicking the point of interest. Clicking Here is a point of interest. It is brought to the right or any new position by dragging it. Dragging Returning the stage to a captured image position Selecting one of the last 16 captured images allows the operator to return to the stage coordinates of that image. This is convenient for further study of a previously visited area. Capture Box Image navigation This function allows the operator to navigate around the sample using either a low magnification SEM image, an image from an optical microscope or digital image (available file format is BMP, JPEG and TIFF), from another source. Montage function (option) This function allows the operator to record SEM images automatically across a large sample from neighboring fields. By combining the recorded images it is possible to make an image covering a large field of view on a sample. Sample : MEMS (Racheting Torsion Motor) Courtesy of Dalhousie University,Canada Sample : Key (10 10 images) The images are simulated, and are not actual images. 8

High sensitivity imaging by using secondary electrons in a VP-mode ESED- (Environmental Secondary Electron Detector )(Option) The ESED- detects a signal that is the result of the secondary electrons interacting with the gas in the chamber. The resultant image has all the characteristics and topographical information of a traditional secondary electron image. A comparison of the ESED- and BSE images in VP-mode A complementary use of the ESED- with the standard BSE detector allows a comparison of two images. BSE images show sample compositions while ESED- images show surface topography of a sample closely. BSE image ESED- image Sample : Rubber roller BSE image ESED- image Sample : Powder of cosmetic 9

Cooling stage (Option) Cooling stage can be used to image hydrated samples such as biological material, plants, food products and emulsions as the vaporization of water content can be minimized by keeping the sample between 0 to 20. It allows observation and analysis of water-containing samples for a few tens of minutes to a couple of hours without causing deformation of samples. 30 0 Variable pressure range of the SU1510 A cooling stage Freezing Evaporation Freezing A water (ice) vapor pressure curve A general view of a cooling stage 60 6 10 10 2 10 3 10 4 A relation of water and its vapor pressure Typical applications of a cooling stage At an ambient temperature Sample shrinkage is seen after 5 minutes. At -20 (A cooling stage was used) Sample shrinkage is not seen after 5 minutes. Sample : Petal of a hydrangea 10

Simple maintenance 3D animated maintenance guide The SU1510 has a 3D animated maintenance guide that shows the procedure for routine tasks such as to replace a filament. Auto Beam Setting After the installation of a new filament, it is necessary to adjust the filament current, electron beam alignment, focus brightness and contrast. This can all be achieved automatically with the click of a single button. Pre-centered cartridge filament There is no need for the operator to perform complicated and delicate alignment procedures. The filaments for the SU1510 are pre-aligned at the factory so there is no need to perform centering in the field. Condenser lens apertures (Column liner design) The condenser lens fixed apertures are all located within the liner tube and can be simply removed through the gun chamber. It is not necessary to disassemble the column to gain access to the aperture assembly. 3D animated maintenance guide provides users with step by step instructions on how to replace the apertures. 11

Optional software for extended data analysis 3D VIEW software (Option) Using the BSE detector equipped as standard the 3D software generates surface roughness measurements and an interactive 3D model display of the sample. A 3D-model Sample : chromium molybdenum steel (Vickers hardness) A bird s-eye view A 3D-model Sample : Multi-crystalline Si photovoltaic cells A bird s-eye view 12

Sample holders A set of sample holders and stubs (Standard) An appropriate specimen stub is selectable dependent upon the purpose. Special holders (Option) Here are sample holders prepared for some specific purposes. Multiple sample holder (15mm dia. 4 pcs) Sample holder for resin embedded samples Wafer holders (Option) Here are sample holders for wafers of 2 to 6 inches (SEM compatible). These holders allow loading/unloading wafers at one touch. Wafer holders for 2,4,6 inch wafers 13

Specifications Items Resolution SE Resolution BSE Magnification Accelerating Voltage Low Vacuum Range Image Shift Maximum Specimen Size X Y Z R T Observable area Maximum Height Electron Gun Objective Aperture Gun Bias Detector Specimen Stage Electron Optics Display Operation Turbo molecular pump Oil Rotary Pump Protection Auxiliary Functions Evacuation System Analytical Position OS Controls Monitor Auto Alignment Auto Image Adjustment Image Data Saving Image Filing Filing Format Auto Data Display Image Display Mode Description 3.0nm at 30kV (High Vacuum Mode) 4.0nm at 30kV (Variable Pressure Mode) 5 to 300,000 0.3 to 30kV 6 to 270Pa through graphic menu ±50µ (WD=15mm) 153mm in diameter 0 to 80mm 0 to 40mm 5 to 50mm 360-20 to 90 126mm in diameter (with rotation) 60mm (WD=15mm) Precentered Cartridge Filament 5-position, click stop objective aperture Quad bias with variable bias control Secondary Electron Detector High Sensitivity Semiconductor BSE Detector WD=15mm, TOA.=35 Windows R XP (subject to change without notice) Mouse, Keyboard 19 type LCD (subject to change without notice) Auto Beam Setting, Auto Axial Alignment Auto Focus, Auto Stigmator/Focus Auto Brightness & Contrast 640 480 pixels, 1,280 960 pixels 2,560 1,920 pixels, 5,120 3,840 pixels Search Functions / Built-in Image Data Base with Image Processing Functions BMP, TIFF, JPEG Accelerating Voltage, Magnification, Micron Marker, Unit, Working Distance,Date/Time, Detector, Pressure Full Screen Display 1,280 960 pixels Small Screen Display 640 480 pixels Dual Image Display 640 480 pixels 2 Signal Mixing Full Automatic Sequence 210L/s 1 135L/min (162L/min. with 60Hz) 1 Power Failure and Vacuum Failure Raster Rotation Dynamic Focus / Tilt Compensation Dynamic Stigma Monitor Free Layout Print Function 3D Animation Maintenance Guide Operation Guide Easy Measurement Oblique image Windows R is a registered trademark of Microsoft Corp. in the U.S. and other countries. Observable area is restricted by specimen size. Optional Accessories Detector and Analytical Tool Environmental secondary electron detector (ESED- ) Energy Dispersive X-ray Spectrometer (EDX) made by each manufacturer Chamber scope made by each manufacturer Specimen Stage X-Y Axis Motor Drive Cool Stage made by Deben UK Limited. Camera navigation system Software 3D-VIEW (3D Image View and Measurement software) CD Measurement Hi-Mouse (Common software for Mouse and Keyboard) Consecutive image recording function (Zigzag capture function). Stitch Interface External communication Interface, DBC Others Rotary Knob Dimension / Weight Items Description Main Unit 550(W) 1,000(D) 1,460(H) mm, 380kg Oil Rotary Pump 526(W) 225(D) 306(H) mm, 28kg Weight 200(W) 180(D) 160(H) mm, 40kg Installation Requirements Items Description Room Temperature 15 to 30 Humidity 70% RH or less Power Supply Single Phase AC100, 110, 115, 200, 220 or 240V (±10%) 2.0kVA Power Cable 10 meters long with M5 crimp-type terminal Grounding 100 or better Typical installation room layout 500 180 1,700 200 Weight 526 Rotary pump 1,000 (600) 2,000 PC Table 225 500 550 (600) Doorway (600 or greater) unit : mm Table is to be prepared locally. 14

Notice: For proper operation, follow the instruction manual when using the instrument. Specifications in this catalog are subject to change with or without notice, as Hitachi High-Technologies Corporation continues to develop the latest technologies and products for our customers. Tokyo, Japan http://www.hitachi-hitec.com/em/world/ 24-14 Nishi-Shimbashi 1-chome, Minato-ku, Tokyo, 105-8717, Japan Printed in Japan (H) HTD-E175 2010.3