SEMTech Solutions. Leaders in Refurbished SEMs. SEMTech Solutions Windows 7 SOFTWARE CONTROL SYSTEM

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1 SEMTech Solutions Leaders in Refurbished SEMs SEMTech Solutions Windows 7 SOFTWARE CONTROL SYSTEM

2 Recertification Process Our Goal: Value Added Technologies Demo Outgoing Inspection Can Include: New PC Win7 Pumps Monitors Painted Panels Options, etc. Build Plan Generated Purchase Incoming Inspection

3 Value Added Technologies IR Chamberscope Multiple Save Formats Flat Panel Displays Networking Digital Imaging with Feature Measurement

4 Windows 7 User Interface Customer Value: Provide a reconditioned SEM with a mouse driven Windows 7 user interface for ease of performance for multi operator facilities. SEM Functions and Image Control Features provided in one user intuitive Graphical Users Interface (GUI). SEMTech Solutions has designed the Graphical User Interface (GUI) Software and will supply service support for the complete SEM system Package. SEM operation with a click of the mouse

5 SEM User Interface Features Features: User configurable menus for quick selection of Magnification, Spot Size, Accelerating Voltage, Working Distance and Scan Rotation Unlimited alphanumeric lengths for file saving and image annotation Various Image Save Formats (TIFF, JPEG, BMP, PNG, GIF) with incremental numeric append for quick saves of the same job Integrated measurements for width, height, and angle of image features..and more

6 SEM User Interface Description ELECTRON GUN VOLTAGE: The gun voltage section allows the gun voltage to be set three different ways; (1) Using the radio buttons; (2) Clicking on the plus or minus buttons or (3) Right clicking on the voltage setting label. Clicking on a radio button causes the gun voltage to be set to the corresponding value. If the SEM is a thermionic gun, the voltage jumps to the voltage setting immediately. If it is a field emission (FE) gun and the voltage setting is higher than the present setting and greater than 10KV, the voltage will immediately be set to 10KV, then it will ramp to the desired voltage at a rate of 1KV per 0.5 seconds. Right clicking on one of the radio button labels, brings up a dialog that allows the setting to be changed. This method of setting the voltage can be configured to automatically degauss the final lens when the voltage setting is changed. Left clicking on the plus or minus buttons causes the gun voltage to increase or decrease in 100V steps. Right clicking on the buttons causes the gun voltage to increase or decrease in 1000V steps. Right clicking on the voltage setting label opens a dialog form that allows a voltage to be typed in. When the Set button is clicked, the gun voltage is set and the dialog closes. If the SEM is a thermionic gun, the voltage jumps to the voltage setting immediately. If it is a field emission (FE) gun and the voltage setting is higher than the present setting and greater than 10KV, the voltage will immediately be set to 10KV, then it will ramp to the desired voltage at a rate of 1KV per 0.5 seconds. This method of setting the voltage can be configured to automatically degauss the final lens when the voltage setting is changed. BEAM ALIGNMENT: The beam alignment section has two slider bars that are used to change the beam alignment setting. The sliders can be changed three differ ways. The adjustment slider can be clicked on and dragged until the desired setting is achieved. For small jumps, the slider bar can be clicked on between the adjustment slider and one of the ends of the control. For fine adjustments the arrows at the end of the control can be clicked on. BEAM CURRENT: For a thermionic gun, an emission current meter is displayed along with a numeric read out in the center of the meter. If the system is equipped with a motorized filament rack, auto heat and auto bias buttons are available. The auto heat button will automatically ramp the filament current to a preset level. The button will flash while the filament is heating and will be shown as pressed when the filament is done heating. The auto bias button sets the emission current to a preset level. The button will be shown in the pressed state when auto bias is active.

7 SEM User Interface Description IMAGE ADJUSTMENT BUTTONS: CONTRAST BRIGHTNESS CONSENSER STIMATOR FOCUS MAGNIFICATION +/- BUTTONS: Each button is a multi-function button which accept left click (fine),right click (medium) and middle click (coarse) mouse clicks. When the mouse is clicked and held down on a button, the cursor changes to an Up / Down arrow and moves to the center of the left edge of the form. Moving the mouse up or down, adjusts the control in fine medium or coarse increments depending on which mouse button is pressed and held. When one of these buttons is clicked, the button face changes to an indicator bar which shows the amount of adjustment being set. The Mag plus and Mag minus buttons are multi-function buttons which accept left click (fine), right click (medium) and middle click (coarse) mouse clicks. When the mouse is either clicked on or clicked and held down on one of the mag buttons - the mag increases or decreases in fine, medium, or coarse increments, depending on which mouse button is clicked. Image Shift: Image shift is implemented as a click and drag function. When the magnification is above a user settable minimum magnification the image is moved using beam shift by left clicking on the image area and dragging the mouse. The image shift is reset to its center position when the magnification goes below a user settable magnification.

8 SEM User Interface Description SCANNING MODES: PARTIAL FIELD BUTTON: In partial field mode the box can be moved by clicking on the box and dragging it to a new location. It can be resized by clicking on the lower right corner of the partial field box and dragging. In partial field mode a new partial field box can be created by clicking outside the current partial field box and dragging the mouse to create a new box. The frame averaging can also be set to 0, 1, 2, 4 and 9 in partial field mode. FULL FIELD BUTTON: In full field mode, there are six scan rates. Rapid scan and slow scan rates 1 thru 5. For PIC systems, the resolution is fixed regardless of scan rates. For X-stream Imaging systems, the resolution will change depending on the scan field chosen. For example, in rapid scan and slow scan rate 1 the image size is 640 X 480. In slow scan rate 2 the image size is 1200 X 960. In scan rates 3, 4 and 5 the image size is 2400 X Rate 4 also does 2X line averaging and rate 5 does 4X line averaging. In rapid scan the frame averaging can be set to 0, 1, 2, 4 and 9. SCAN RATE RADIO BUTTON STRIP: In full field mode the scan rate is set using this control. The scan rate can be set to rapid scan or slow scan rates 1 thru 5. Rapid scan is five frames per second. Slow scan rate 1 is 8 seconds and doubled for each selected scan rate for a maximum scan rate of 128 seconds at scan rate 5. If the image is frozen, clicking this control will unfreeze the image and set the scan mode to full field at the clicked on rate. RAPID SCAN AVERAGE STRIP: In full field rapid scan or partial field, the frame averaging is selected using this control. Frame averaging of 2 0, 2 1, 2 2, 2 4 and 2 9 frames can be selected. IMAGE FREEZE: The image must be frozen before an image can be saved. The SEM annotation can be set up so that it will appear when the image is frozen. When active, the SEM annotation along with any displayed user text, measurements or graphics will appear on saved images.

9 SEM User Interface Description BOTTOM STATUS BUTTONS: MAGNIFICATION LABEL: The mag label can be set to display either mag or field of view. When set to mag, left clicking on the label brings up a quick set mag form with five user configurable mag settings. Clicking on one of the radio buttons sets the mag to the radio button setting and closes the form. Right clicking on one of the radio button labels brings up a dialog that allows the setting to be changed. Right clicking on the mag label opens a mag dialog form that allows mag to be typed in and when the Set Mag button is clicked the mag is set and the dialog closes. When set to field of view the action of this label is the same except that the forms and dialogs set the field of view instead of magnification. GUN VOTAGE, WORKING DISTANCE, SPOT SIZE and SCAN ROTATION LABELS: Left clicking on any of these labels brings up a quick set form with five user configurable settings. Clicking on one of the forms radio buttons sets the parameter to the radio button setting and closes the form. Right clicking on one of the radio button labels brings up a dialog that allows the setting to be changed. Right clicking on the label opens a dialog form that allows a setting to be typed in. When the Set button is clicked the parameter is set and the dialog closes. MENU ITEMS: Tools>Customize: Opens a form that allows user customization of the UI. Logo Text Enables a user to replace the SEMTech Solutions text on the alphanumeric with text of their choice. Mag / FOV Enables the magnification label on the bottom of the UI to switch between magnification or field of view. Alphanumeric Over Live Image Turns the alphanumeric on / off when the SEM image is not frozen. Alphanumeric Over Captured Image - Turns the alphanumeric on / off when the SEM image is frozen. Date Displayed on Alphanumeric Turns the date field on / off on the alphanumeric. Minimum Mag for Image Shift Active Enables the user to set the magnification above which the image shift becomes active. Min Mag for Image Shift Reset Enables the user to set the magnification below which the image shift DACs are reset to the center of their range. Tools>Options>Tabs Visible - Toggles the tabs on the right side of the image on / off. Tools>Configuration - Opens a form that is used by service personnel to set up and debug the SEM. When clicked on, a password dialog opens that must have the correct password entered before the configuration form will open. Help>Symbol Table - Opens a form that shows the various key combinations that can be used to enter Greek letters and symbols.

10 SEM User Interface Description TOOL BAR BUTTONS: SAVE AS: Opens a Dialog which allows the file name, file type (jpg, bmp, gif, tiff or png) and file location to be entered. When the Save button is clicked, the frozen image along with any displayed user text, measurements or graphics are saved with the entered file name and type at the selected location. SAVE INCREMENTAL: Saves the image along with any displayed user text, measurements or graphics using the last saved file type and location. The last saved file name has its suffix incremented if one exists or appending a 1 if one does not exist. INSERT USER TEXT or SYMBOLS: When selected, it allows user text to be entered onto the image area by clicking the area where the text is to be entered and entering the text using the keyboard. Lower case and upper case Greek letters can be entered by holding Ctrl and typing the letter (lower case) or Shift and typing the letter (upper case). Symbols can be entered by holding Alt and typing a letter. A symbol table can be opened by selecting Help>Symbol Table. User text can be repositioned once the Enter key is pressed. Click on the text and drag it to a new location or remove it by dragging it off of the SEM image area. MEASURE ORTHOGONAL: When selected, it allows user measurements to be made in the horizontal or vertical directions. Measurements can be horizontal or vertical lines or rectangles with horizontal, vertical and diagonal measurements. Once they are drawn, they can be moved or resized and the measurement text can be moved independently using the mouse. A measurement can be removed by dragging it off of the SEM image area. MEASURE ANY DIRECTION: When selected, it allows user measurements to be made in any direction. Once they are drawn, they can be moved or resized and the measurement text can be moved independently using the mouse. A measurement can be removed by dragging it off of the SEM image area. MEASURE ANGLE: When selected, it allows angular measurements to be made. Once they are drawn, they can be moved or resized and the measurement text can be moved independently using the mouse. A measurement can be removed by dragging it off of the SEM image area. INSERT SHAPE/ARROWS: Allows horizontal or vertical lines or rectangles to be drawn. These work the same as Measure Orthogonal except there is no measurement text. Allows arrows to be drawn on the image area. Once they are drawn they can be moved or resized. An arrow can be removed by dragging it off of the SEM image area.