EVR Series Precision Vacuum Regulating Valves

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EVR Series Precision Vacuum Regulating Valves Electronic Control Automated Vacuum Control 1 EVR-GSD8A vacuum regulator with electronic set-point regulator Manual Control Manual Vacuum Control 1/2 EVR-GSD4P vacuum regulator with manual set-point regulator

How It Works The Equilibar vacuum regulator (EVR) uses the same patented technology as the Equilibar Precision Back Pressure Regulator, with unmatched precision across varying flow rates. The EVR series regulators are pilot operated (dome loaded). They match your process (Inlet) vacuum 1:1 to a pilot set-point vacuum. They work to restrict flow between your process and the vacuum pump in order to keep your process very closely matched to the pilot setpoint vacuum. Unique Direct-Sealing Diaphragm Technology The key to the incredible performance of the Equilibar vacuum valve is the unique direct sealing diaphragm technology. It works like a fluid transistor by forming a force balance on a flexible membrane between three separate pressures. The fluid inlet pressure and the downstream outlet pressure exist on the wetted side of the membrane, separated by an orifice plate. The reference air pressure exists on the non-wetted side. The lower pressure of the outlet tries to hold the membrane in a leak-tight seal with the valve seat. However, any slight excess between the fluid inlet pressure and the reference pressure quickly overwhelms these seating forces and pulls the membrane away from the orifices. Flow is automatically controlled at a level that maintains pressure equilibrium between the Inlet and Reference pilot ports. For manual applications, a sensitive 20-turn vacuum regulator is used to supply the set-point (see below). For computer automation, an electro-pneumatic regulator is used to provide the set-point signal. Visit our website to learn more about how our unique vacuum regulator technology works. Unlike common vacuum breakers or vacuum relief valves, the Equilibar vacuum regulating valve is a non-relieving regulator. It restricts flow to your vacuum pump in order to hold your process at the right vacuum pressure upstream. In order to lower the vacuum pressure in your process, there will need to be at least a small in-flow of gas. Fortunately, most processes have at least a small gas flow or in-leakage. Simply connect the Outlet of the Equilibar to your vacuum supply, and the Inlet to your process is in the Figure below. 2 Set-Point Options Electronic Vacuum Regulator Manual Vacuum Regulator E/P Controlled Vacuum Diaphragm Membrane - OR - Pilot (Reference) Vacuum Supply (Pump) Inlet Outlet Figure 1: An illustration of one way the vacuum regulator can be installed for precision volume control

Performance 1/2" Equilibar EVR-4 vs. Fairchild Model 16 Vacuum Flow Stability Curve 25 Stability Equilibar EVR Series Vacuum Regulators have more than 5X the flow stability of traditional spring regulators. This means that your vacuum process remains stable even as gas flow rates change over a wide range. Vacuum Pressure, in Hg 20 15 10 5 Competitive Fairchild Model 1/2 Regulator 16 (1/2") Equilibar 1/2 EVR-4 EVR-4 0 0 2 4 6 8 Air Flow, SCFM Effect of Vacuum Supply 3/8" EVR-3, 1 SCFH flow rate 16 Effect of Varying Pump Pressure Traditional vacuum regulators have much larger pressure variability with increasing flow rates. This chart below shows the excellent vacuum stability through various flow rates and pressure ranges. Vacuum Inlet Pressure, inhg 14 12 10 8 6 4 2 0 10 15 20 25 Vacuum Supply Presure, inhg www.equilibar.com 3

Selecting The Right Size The chart below shows the projected vacuum performance at various regulator body sizes. For a given regulator size, as flow increases past a critical point, droop increases. Droop is defined as the reduction in vacuum pressure due to friction in the regulator. In order to select the optimum size for your application, find the smallest regulator that has acceptable pressure variance in your flow range. For example, for flow rates between 5 and 20 SCFM, the 3/4 shows only 0.25 in Hg variance and would be acceptable for most applications. The 1 regulator shows virtually no variance in this range. If you don t know your flow rates, you can select the Equilibar Vacuum Regulator to match your existing pipe size.

EVR Series Specifications 3.0 B Figure 1 - Dimensional Drawing for Regulators with line size 1/4 to 1 Figure 2 - Dimensional Drawing for Regulators with line size 1.5 to 4 A MODEL NUMBER INLET / OUTLET PORT STANDARD BODY MATERIALS DIM A DIM B REGULATORS WITH LINE SIZE 1/4 TO 1 REFERENCE FIGURE 1 CV RANGE (PRECISION) INCH (MM) MIN 1 MAX EVR-GSD2A 1/4 Anodized Aluminum 3 (76) 1.3 (33) 1.00E-03 1 EVR-GSD2S 1/4 Stainless Steel 316 3 (76) 1.3 (33) 1.00E-03 1 EVR-GSD2P 1/4 PVC 3.25 (83) 1.5 (38) 1.00E-03 1 EVR-GSD3A 3/8 Anodized Aluminum 3.5 (89) 1.4 (36) 1.00E-03 1.8 EVR-GSD3S 3/8 Stainless Steel 316 3.5 (89) 1.4 (36) 1.00E-03 1.8 EVR-GSD3P 3/8 PVC 3.75 (95) 1.6 (41) 1.00E-03 1.8 EVR-GSD4A 1/2 Anodized Aluminum 4.5 (114) 1.6 (41) 1.00E-03 3 EVR-GSD4S 1/2 Stainless Steel 316 4.5 (114) 1.6 (41) 1.00E-03 3 EVR-GSD4P 1/2 PVC 4.75 (121) 1.8 (46) 1.00E-03 3 EVR-GSD6A 3/4 Anodized Aluminum 6 (152) 2 (51) 1.00E-02 6.2 EVR-GSD6S 3/4 Stainless Steel 316 6 (152) 2 (51) 1.00E-02 6.2 EVR-GSD6P 3/4 PVC 6.25 (159) 2.25 (57) 1.00E-02 6.2 EVR-GSD8A 1 Anodized Aluminum 7 (178) 2.6 (66) 1.00E-02 9.9 EVR-GSD8S 1 Stainless Steel 316 7 (178) 2.6 (66) 1.00E-02 9.9 EVR-GSD8P 1 PVC 7.25 (184) 2.9 (74) 1.00E-02 9.9 REGULATORS WITH LINE SIZE 1.5 TO 4 REFERENCE FIGURE 2 EVR-BD12A 1.5" Anodized Aluminum 9.5 (241) 3.9 (99) 1.00E-02 14.3 EVR-BD12S 1.5" Stainless Steel 316 9.5 (241) 3.9 (99) 1.00E-02 14.3 EVR-BD12P 1.5 PVC 9 (229) 4.3 (109) 1.00E-02 14.3 EVR-BD16A 2" Anodized Aluminum 11 (279) 4.1 (104) 3.00E-02 30.2 EVR-BD16S 2" Stainless Steel 316 11 (279) 4.1 (104) 3.00E-02 30.2 EVR-BD16P 2 PVC 11 (279) 5.1 (130) 3.00E-02 30.2 EVR-BD24A 3" Anodized Aluminum 15 (381) 6.1 (155) 6.00E-01 60 EVR-BD24S 3" Stainless Steel 316 15 (381) 6.1 (155) 6.00E-01 60 EVR-BD24P 3 PVC 15 (381) 8.8 (226) 6.00E-01 60 EVR-BD32A 4" Anodized Aluminum 20 (508) 8.1 (206) 1.50 160 EVR-BD32S 4" Stainless Steel 316 20 (508) 8.1 (206) 1.50 160 EVR-BD32P 4 PVC 20 (508) 9.6 (244) 1.50 160 PRESSURE RANGES 0 to -29.5 inhg (12 to 760 torr) [0 to -980 mbar] 0-10 in Hg [0 to -340 mbar) *Pressure ranges as low as 0 to -2 in H2O [0 to -5 mbar] and custom pressure ranges available with electronic options. Consult an application engineer for assistance. FITTINGS NPT (Standard) BSPP SAE 150# Flange DIAPHRAGM OPTIONS Buna - N (Nitrile) FKM EPDM PTFE (Glass Reinforced) PTFE (Virgin) O RING OPTIONS Buna - N (Nitrile) Viton Kalrez EPDM PTFE TEMPERATURE RATING Polymer Units - 40C Metallic Units - 60C *High temperature models are available, consult an application engineer. Vacuum only, absolute, and vacuum-to-positive options are available. Consult an application engineer for assistance. www.equilibar.com 5

Electronic Pilot Regulators For use with EVR Series Vacuum Regulators PART NUMBER TYPE MANIFOLD MATERIAL THREAD TYPE INPUT SIGNAL RANGE MONITOR SIGNAL RANGE PRESSURE RANGE BLEED ORIFICE2 DIGITAL DISPLAY? LEAD TIME QPV1MANEEZN30IHGXCL Aluminum NPT 0 to 10 Vdc 0 to 10 Vdc 0-30 in Hg N 1 Day QPV1MANISZN30IHGXCL Aluminum NPT 4 to 20 madc 4 to 20 madc (Sourcing) 0-30 in Hg N 1 Day QPV1MANEEZP760TRACXL Aluminum NPT 0 to 10 Vdc 0 to 10 Vdc 0-760 torr N 1 Day QPV1MANEEZN30IHGXCL-DD Aluminum NPT 0 to 10 Vdc 0 to 10 Vdc 0-30 in Hg Y 4-6 Weeks QPV1MANISZN30IHGXCL-DD Aluminum NPT 4 to 20 madc 4 to 20 madc (Sourcing) 0-30 in Hg Y 4-6 Weeks QPV1MANEEZP760TRACXL-DD Aluminum NPT 0 to 10 Vdc 0 to 10 Vdc 0-760 torr Y 4-6 Weeks How to upgrade your EVR vacuum regulator to Electronic Control 1. Remove the manual set point kit that comes with your EVR vacuum regulator 2. Replace the manual set point regulator with your desired electronic vacuum regulator from the list above, or pick your own part number from the QPV Series Brochure. Fig 1: Manual EVR Regulator Fig 2: EVR Regulator with Electronic Pilot

Application Spotlight: Centralized Vacuum Distribution In industrial settings, it is common for a single vacuum utility header to supply several diverse processes, each with separate vacuum pressure requirements. For example, one piece of equipment function best with 10 inhg vacuum, while another process requires 15 inhg vacuum. For this application, a vacuum regulating valve is needed on the process requiring the lower vacuum. While vacuum breaking regulators (VBR) are commonly used on vacuum pumps that supply a single pressure, these VBR s are not suitable because they spoil the system vacuum for the entire header. In the illustration above, Tool #1 requires a higher vacuum level than Tool #2. In order to use a shared pump or pumps, vacuum regulators would be needed to reduce the vacuum to the required level. EVR Series Vacuum regulators work by restricting the flow from the pump to the process, and do not let any significant amount of air into the process. www.equilibar.com 7

Ordering Information for Pipe Size 1/4 to 1 EXAMPLE EVR - GS 2 S N G X - N S X P 30 T 100 V X VV B EVR - 1 2 3 4 5 6 7-8 9 10 11 12 13 14 15 16 1 MODEL EVR Equilibar Vacuum Use Regulator 2 MODEL TYPE GSD GSD Series (s Wetted Elastomers) GS GS Series (No Wetted Elastomers) 3 PORT SIZE 2 1/4 3 3/8 4 1/2 6 3/4 8 1 4 BODY MATERIAL S Stainless Steel 316/316L P PVC A Anodized Aluminum Others available. Consult an application engineer for assistance 5 PORT THREADS N NPT B BSPP S SAE O VCO R VCR F 150# Flanges 6 RECESS 7 MOD # 8 REFERENCE PORT THREADS N NPT B BSPP 9 CAP MATERIAL (NON WETTED) S Stainless Steel 316/316L P PVC A Anodized Aluminum 10 BOLTS 11 PRESSURE RATING 30 30 in Hg 10 10 in Hg 12 TEMPERATURE RATING 40 40C (Polymer Units) 60 60C (Metallic Units) Others available. Consult an application engineer for assistance 13 DIAPHRAGM MATERIAL G PTFE (Glass Reinforced) B Buna-N (Nitrile) V FKM Fluoroelastomer M EPDM E Polyethylene F PTFE (Virgin) I Polyimide 14 DIAPHRAGM THICKNESS 15 O RING (GSD UNITS ONLY) (Wetted) VV Viton Shore 75 KK Kalrez Grade 7075 FF PTFE EE EPDM BB Buna-N (Nitrile) 16 SPECIAL OPTIONS B Mounting Bracket (Port Size 2 & 3 Only) O Oxygen Cleaning Items marked in blue are typically in stock for fast shipment

Ordering Information for Pipe Size 1.5 to 4 EXAMPLE EVR - BD 12 S N G X - N S X P 30 T 100 V X V EVR - BD 1 2 3 4 5 6 7-8 9 10 11 12 13 14 15 1 MODEL EVR Equilibar Vacuum Use Regulator 2 MODEL TYPE BD BD 3 PORT SIZE 12 1.5 16 2 24 3 32 4 4 BODY MATERIAL S Stainless Steel 316/316L P PVC A Anodized Aluminum Others available. Consult an application engineer for assistance 5 PORT THREADS N NPT B BSPP F 150# Flanges 6 RECESS 7 MOD # 8 REFERENCE PORT THREADS N NPT B BSPP 9 CAP MATERIAL (NON WETTED) S Stainless Steel 316/316L P PVC A Anodized Aluminum Items marked in blue are typically in stock for fast shipment 10 BOLTS 11 PRESSURE RATING 30 30 in Hg 10 10 in Hg 12 TEMPERATURE RATING 40 40C (Polymer Units) 60 60C (Metallic Units) Others available. Consult an application engineer for assistance 13 DIAPHRAGM MATERIAL G PTFE (Glass Reinforced) B Buna-N (Nitrile) V FKM Fluoroelastomer M EPDM E Polyethylene F PTFE (Virgin) I Polyimide 14 DIAPHRAGM THICKNESS 15 O RING (Wetted) VVVV Viton Shore 75 KKKK Kalrez Grade 7075 FFFF PTFE EEEE EPDM BBBB Buna www.equilibar.com 9

About Equilibar Equilibar, LLC manufactures and markets our specialized products worldwide. Equilibar branded products are made in the USA, and protected by US and foreign patents. All of our products are assembled, inspected and tested by trained technicians in Fletcher, NC. Application Engineering how we are different Unlike mass-market regulator distributors, everything about Equilibar is focused on you, the scientist or engineer with a unique pressure control challenge. We assign an Application Engineer to you, typically within moments of your call. We work with you closely to identify the optimum model, trim, and diaphragm to best meet your challenge. You can stay in touch with your Application Engineer by email, telephone, mobile phone, or fax. After installation, if there are any unexpected issues, your Application Engineer is still available to support you with start-up information or (if needed) expedited replacement parts. Each application is reviewed by our engineering team to ensure quality performance of our products. Contact our Engineers At Equilibar, your application s unique requirements will be carefully addressed by one of our trained Application Engineers. Please contact us if you have any questions or special requirements. Equilibar, LLC 320 Rutledge Rd. Fletcher, North Carolina 28732 United States Tel: +1-828-650-6590 Fax: +1-801-504-4439 Monday - Friday 8:00 AM - 5:00 PM EST 12:00-21:00 GMT inquiry@equilibar.com Have a special application? Equilibar also offers custom designed solutions to meet your needs.

320 Rutledge Rd. Fletcher, NC 28732 Tel: (828)650-6590 Fax: (801)504-4439 www.equilibar.com