SPUTTERING OPERATIONS TABLE 12 KEY ADVANTAGES OF SPUTTERING Radio Frequency (RF) and Direct Current (DC) Diode Sputtering...

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CHAPTER ONE: INTRODUCTION... 1 STUDY GOAL AND OBJECTIVES... 1 REASONS FOR DOING THE STUDY... 1 INTENDED AUDIENCE... 1 SCOPE OF REPORT... 2 METHODOLOGY... 2 INFORMATION SOURCES... 2 ANALYST S CREDENTIALS... 3 RELATED BCC REPORTS... 3 BCC ONLINE SERVICES... 3 DISCLAIMER... 4 CHAPTER TWO: SUMMARY... 5 SUMMARY... 5 SUMMARY TABLE VALUE OF GLOBAL PVD INDUSTRY, THROUGH 2016 ($ MILLIONS)... 6 SUMMARY FIGURE GLOBAL VALUE OF THE PVD INDUSTRY, 2010-2016 ($ MILLIONS)... 7 CHAPTER THREE: OVERVIEW... 8 PVD DEPOSITION TECHNOLOGY... 9 TABLE 1 THE BASIC PHYSICAL VAPOR DEPOSITION TECHNOLOGIES... 9 CLASSIFICATION OF MATERIALS... 10 TABLE 2 TYPICAL MATERIALS DEPOSITED BY PVD AND THEIR KEY PROPERTIES... 10 MAJOR APPLICATIONS... 10 TABLE 3 LEADING PVD APPLICATIONS... 11 CHAPTER FOUR: PVD INDUSTRY STRUCTURE... 12 TABLE 4 KEY COMPANIES INVOLVED IN THE GLOBAL PVD BUSINESS... 12 TABLE 4 (CONTINUED)... 13 TABLE 4 (CONTINUED)... 14 TABLE 4 (CONTINUED)... 15 INDUSTRY TRENDS... 15 ENERGY APPLICATIONS DRIVING PVD SYSTEMS... 16 Emerging Technologies... 16 CONTINUED PVD EXPANSION IN ASIA... 17 ECONOMIC CHANGES CAUSE VARIATIONS IN DEMAND... 17 PVD PROCESSES, MATERIALS KEEP UP WITH MARKETS... 18 TABLE 5 KEY TECHNICAL AREAS REFLECTING PVD IMPROVEMENTS... 18 GLOBAL PVD MANUFACTURING... 19

TABLE 6 REGIONAL SHARE OF GLOBAL PVD MANUFACTURING, 2010-2016 (%)... 19 FIGURE 1 GLOBAL PVD MANUFACTURING BY REGION, 2010-2016 (%)... 20 GLOBAL CONSUMPTION OF PVD EQUIPMENT... 21 TABLE 7 GLOBAL SHARE OF PVD CONSUMPTION, 2010-2016 (%)... 21 FIGURE 2 GLOBAL PVD CONSUMPTION BY REGION, 2010-2016 (%)... 22 MARKET SHARES... 23 TABLE 8 MARKET SHARES OF GLOBAL PVD MANUFACTURING COMPANIES, 2011 ($ MILLIONS, %)... 23 COMPANY PROFILES... 24 AJA INTERNATIONAL INC.... 24 ANGSTROM ENGINEERING... 25 APPLIED MATERIALS INC.... 25 CHA INDUSTRIES... 26 DENTON VACUUM U.S.A.... 27 GALILEO VACUUM SYSTEMS... 28 GROUP INTERNATIONAL INDUSTRIES LTD.... 29 IMPREGLON GROUP... 29 INTEVAC INC.... 30 KDF ELECTRONICS... 31 KURT J. LESKER COMPANY... 32 LEYBOLD OPTICS GMBH... 33 NEXX SYSTEMS INC.... 33 NOVELLUS SYSTEMS INC.... 34 OERLIKON BALZERS AND LEYBOLD... 35 PENTA TECHNOLOGY CO. LTD.... 36 RICHTER PRECISION INC.... 37 SEMICORE EQUIPMENT INC.... 37 SINOVACUUM TECHNOLOGY LTD.... 38 SINGULUS TECHNOLOGIES AG... 39 SYSTEM CONTROL TECHNOLOGIES... 40 ULVAC TECHNOLOGIES INC.... 40 VEECO INSTRUMENTS INC.... 41 Veeco Instruments Inc. (Continued)... 42 CHAPTER FIVE: PVD TECHNOLOGY... 43 THE BASIC PHYSICAL VAPOR DEPOSITION PROCESS... 43 THE EVAPORATION PHASE... 44 TABLE 9 PVD EVAPORATION SOURCES... 45 Key Advantages of Evaporation... 45 TABLE 10 KEY ADVANTAGES OF THE PVD EVAPORATION PROCESS... 46 Some Limitations of Evaporation... 46 TABLE 11 MAJOR LIMITATIONS OF EVAPORATION... 46

SPUTTERING OPERATIONS... 47 TABLE 12 KEY ADVANTAGES OF SPUTTERING... 48 Radio Frequency (RF) and Direct Current (DC) Diode Sputtering... 48 Magnetically Enhanced Sputtering... 48 Magnetron Sputtering Can Produce High Rates... 49 Reactive Sputtering... 49 TABLE 13 MAJOR LIMITATIONS OF SPUTTERING... 50 ION BEAM ASSISTED DEPOSITION... 50 TABLE 14 ADVANTAGES/LIMITATIONS OF THE ION BEAM ASSISTED DEPOSITION PROCESS... 51 PULSED LASER DEPOSITION... 52 Basic Components... 52 TABLE 15 KEY ADVANTAGES OF PULSED LASER DEPOSITION... 53 CATHODIC ARC DEPOSITION... 53 Key Components... 54 TABLE 16 ADVANTAGES AND LIMITATIONS OF THE CATHODIC ARC PROCESS... 55 ROLL COATING... 55 TABLE 17 BASIC ADVANTAGES OF ROLL COATING... 56 PVD EQUIPMENT CONFIGURATIONS... 56 CLUSTER TOOLS... 57 Technical Advantages... 57 TABLE 18 TECHNICAL ADVANTAGES OF CLUSTER TOOLS... 58 IN-LINE SYSTEMS... 58 Advantages of In-Line Systems... 59 TABLE 19 BASIC BENEFITS OF IN-LINE PVD SYSTEMS... 59 TECHNOLOGY TRENDS IN PVD... 60 NANOTECHNOLOGY OFFERS IMPROVEMENTS... 60 PVD Has Had Success with Nanocoatings... 60 NANOCOMPOSITES ARE ANOTHER CLASS OF COATINGS... 61 TABLE 20 INDUSTRIAL APPLICATIONS OF NANOCOMPOSITES... 61 CUSTOM-MADE PVD SYSTEMS... 62 Twin Door Metallization Systems for the Automotive Industry... 62 LARGE AREA VACUUM COATER FOR TELESCOPE MIRROR... 62 ROTATABLE SPUTTER TARGETS FOR LARGE AREA GLASS COATING... 63 TABLE 21 APPLICATIONS OF A ROTATABLE SPUTTER TARGET SYSTEM... 63 LARGE AREA ROLL-TO-ROLL DEPOSITION... 64 TABLE 22 MAJOR APPLICATIONS FOR LARGE AREA ROLL-TO- ROLL DEPOSITION SYSTEMS... 64

PERSPECTIVE ON TRADITIONAL AND EVOLVING TECHNOLOGIES... 65 INDUSTRY COMPETITIVENESS... 65 PATENT ANALYSIS... 66 SCOPE OF PATENT ACTIVITY... 66 OUR FOCUS ON PATENTS... 66 PATENTS BY TECHNICAL SUBJECT... 67 TABLE 23 PVD PATENTS BY TECHNICAL CATEGORY, LATE 2009-2011... 67 PATENTS BY COMPANY... 68 TABLE 24 PVD PATENTS BY COMPANY (TWO OR MORE PATENTS) LATE 2009-2011... 68 TABLE 24 (CONTINUED)... 69 SAMPLE PATENT ABSTRACTS... 69 Resputtering Process for Eliminating Dielectric Damage... 70 Method for Magnetron Sputter Deposition... 70 Methods and Apparatus for Engineering an Interface Between a Diffusion Barrier Layer and a Seed Layer... 70 Physical Vapor Deposition Plasma Reactor with Arcing Suppression... 71 Ionized Physical Vapor Deposition (ipvd) Process... 71 Ionized Physical Vapor (Continued)... 72 CHAPTER SIX: THE PVD MARKET... 73 INDUSTRY APPROACH... 73 MARKET PERSPECTIVE... 73 TABLE 25 ESTIMATED GLOBAL PHYSICAL VAPOR DEPOSITION EQUIPMENT REVENUES AND MARKET SHARE, 2010-2016 ($ MILLIONS, SHARE %)... 73 FIGURE 3 ESTIMATED GLOBAL PVD EQUIPMENT MARKET SHARE, 2010-2016 (%)... 74 MARKET ANALYSIS... 75 MEASUREMENT OBJECTIVES... 75 Measurement Objectives (Continued)... 76 CHAPTER SEVEN: PVD IN THE MICROELECTRONICS MARKET... 77 PVD IN THE MICROELECTRONICS MARKET... 77 WHAT ARE THE BASIC MICROELECTRONIC PRODUCTS?... 78 TABLE 26 BASIC MICROELECTRONIC PRODUCTS THAT EMPLOY THE PVD PROCESS... 78 PRODUCT CHARACTERISTICS CONTINUE TO CHANGE... 79 TABLE 27 CHARACTERISTICS OF INTEGRATED CIRCUITS... 79 THE COMPETITIVENESS OF PVD IN MICROELECTRONICS... 80 GLOBAL ECONOMIC CONDITIONS STILL IMPACTING PVD... 80

TABLE 28 GLOBAL DEMAND FOR SEMICONDUCTORS THROUGH 2011 ($ BILLIONS)... 81 Current Consensus on the Technology Industry... 81 Growth Should Be Larger Than Planned, Per Most Industry Economists... 82 Long Term Look at the Economy and Microelectronic Products... 83 TABLE 29 ECONOMIC ASSUMPTIONS FOR THE FUTURE GROWTH OF SEMICONDUCTORS AND PVD EQUIPMENT... 83 GLOBAL INDUSTRY SUPPORT FOR MICROELECTRONICS... 84 SEMI... 84 Globalization... 84 Standards... 84 How SEMI Serves Its Members... 85 TABLE 30 THE PURPOSE OF THE SEMI ORGANIZATION... 85 SEMATECH... 85 What They Do... 86 International Technology Roadmap for Semiconductors (ITRS)... 86 The Semiconductor Industry Association... 86 TABLE 31 CHALLENGES FACING THE SIA... 87 THE EFFECTIVENESS OF PVD TECHNOLOGY... 87 The Challenge of Technology... 88 GLOBAL ENVIRONMENT... 88 TABLE 32 ESTIMATED GLOBAL FABRICATION CAPACITY, 2011 (%)... 88 MICROELECTRONICS COMPETITIVE GROWTH FACTORS... 89 Global Economy is Current Driving Force for PVD... 90 Impact of Market Growth Factors... 90 TABLE 33 IMPACT OF MAJOR COMPETITIVE FACTORS ON THE GROWTH OF PVD IN THE MICROELECTRONICS INDUSTRY (%)... 90 SEMICONDUCTOR APPLICATIONS... 91 TABLE 34 BASIC SEMICONDUCTOR APPLICATIONS DONE BY PVD... 91 SEMICONDUCTOR METALLURGY... 91 DEPOSITION OF THIN FILMS... 92 Gate Dielectrics... 93 TABLE 35 DESIRED DIELECTRIC PROPERTIES FOR MICROELECTRONIC PRODUCTS... 93 Interconnects... 94 Barrier Layers... 94 Contacts and Adhesion Layers... 95 TYPES OF PVD SYSTEMS... 95 TABLE 36 IMPACT ON PVD SYSTEMS BY CHANGES IN SEMICONDUCTOR APPLICATIONS... 96 Combined Functions... 96

ADVANTAGES OF PVD IN SEMICONDUCTOR FABRICATION... 97 TABLE 37 ADVANTAGES OF PVD IN SEMICONDUCTOR FABRICATION... 97 PVD System Capabilities for Semiconductors... 98 MAJOR MATERIALS USED IN PVD FOR SEMICONDUCTOR PRODUCTS... 98 TABLE 38 KEY MATERIALS DEPOSITED BY PVD FOR SEMICONDUCTOR FABRICATION... 99 Sputtering Targets... 99 New Materials... 100 SEMICONDUCTOR MARKET DRIVERS AND TRENDS... 100 PVD EQUIPMENT DEMAND... 101 TABLE 39 PVD FUNCTIONS VERSUS OTHER TECHNOLOGIES IN SEMICONDUCTOR FABRICATION... 101 CMOS Business Model... 102 PVD and Industry Growth Trends... 102 TABLE 40 GLOBAL GROWTH TREND OF PVD FOR SEMICONDUCTORS, THROUGH 2011 (VALUE AND PERCENTAGE RATIO)... 103 OTHER MICROELECTRONIC APPLICATIONS... 104 FLAT-PANEL DISPLAYS... 104 ELECTRONIC COMPONENTS... 105 MEMS Manufacturing... 105 Mobile Devices... 105 TABLE 41 OVERVIEW OF OTHER MICROELECTRONICS PVD PRODUCTS AND APPLICATIONS... 106 ADVANTAGES OF PVD FOR OTHER MICROELECTRONIC APPLICATIONS... 106 TABLE 42 ADVANTAGES OF PVD FOR OTHER MICROELECTRONIC PRODUCTS... 106 KEY MATERIALS USED IN OTHER MICROELECTRONIC PRODUCTS... 107 TABLE 43 KEY MATERIALS USED IN OTHER MICROELECTRONIC PRODUCTS... 107 MARKET DRIVERS FOR OTHER MICROELECTRONIC PRODUCTS... 107 PVD Demand... 107 FORECAST ASSUMPTIONS PVD IN MICROELECTRONICS... 108 TABLE 44 FORECAST ASSUMPTIONS PVD GROWTH IN MICROELECTRONICS... 109 TABLE 45 PROJECTED GLOBAL GROWTH TREND OF PVD FOR SEMICONDUCTORS, THROUGH 2016... 110 FORECAST VALUE OF PVD EQUIPMENT SHIPMENTS... 110

TABLE 46 FORECAST VALUE OF GLOBAL SHIPMENTS OF PVD EQUIPMENT FOR MICROELECTRONICS, THROUGH 2016 ($ MILLIONS)... 111 FIGURE 4 GLOBAL SHIPMENTS OF PVD EQUIPMENT FOR THE MICROELECTRONICS INDUSTRY, 2010-2016 ($ MILLIONS)... 112 BCC Sees More Constant Growth Pattern over Five-Year Period... 112 FORECAST VALUE OF DEPOSITED PVD MATERIALS... 113 Measurement Considerations... 114 Sputtering Target Materials... 114 TABLE 47 FORECAST--GLOBAL VALUE OF MATERIALS DEPOSITED BY PVD IN MICROELECTRONICS, THROUGH 2016 ($ MILLIONS)... 115 FIGURE 5 GLOBAL VALUE OF MATERIALS DEPOSITED BY PVD IN MICROELECTRONICS, 2010-2016 ($ MILLIONS)... 116 FORECAST VALUE OF PVD SERVICES... 116 TABLE 48 VALUE OF GLOBAL PVD DEPOSITION SERVICES FOR THE MICROELECTRONICS INDUSTRY, THROUGH 2016 ($ MILLIONS)... 117 CHAPTER EIGHT: PVD IN THE STORAGE MARKET... 118 PVD IN THE STORAGE MARKET... 118 SAMPLE STORAGE PRODUCTS... 119 TABLE 49 COMMON DATA STORAGE PRODUCTS... 119 STORAGE IS STILL A GROWING APPLICATION FOR PVD... 120 STORAGE INDUSTRY COMPETITIVENESS... 120 AN EXAMPLE OF DATA STORAGE ECONOMICS... 120 THE COMING OF CLOUD COMPUTING BRINGS STORAGE... 121 Cost Is Important to Storage... 121 Tape Drives... 121 Tape Packaging... 122 Storage Developments... 122 TABLE 50 ADVANCEMENTS IN DATA STORAGE... 122 CONTINUING GLOBAL ECONOMIC PROBLEMS AND DEMAND... 123 TABLE 51 GLOBAL DEMAND FOR DATA STORAGE PRODUCTS THROUGH 2011 ($ BILLIONS)... 123 Current Storage Industry Outlook... 124 Direct Storage Best for Consumer... 124 GLOBAL INDUSTRY SUPPORT AND STANDARDS... 125 An International Disk Storage Organization... 125 TABLE 52 MISSION OF THE IDEMA... 125 Where Storage Is Made... 126 TABLE 53 GLOBAL STORAGE MANUFACTURING COMPANIES BY REGION, 2011 (%)... 126 STANDARDS... 127

TABLE 54 REPRESENTATIVE STANDARDS TOPICS... 127 DEVELOPMENTS IN PVD TECHNOLOGY... 127 STORAGE GROWTH FACTORS... 128 Driving Force for PVD... 129 Impact of Market Growth Factors... 129 TABLE 55 IMPACT OF MAJOR FACTORS ON THE GROWTH OF PVD IN THE DATA STORAGE PRODUCTS MARKET, 2010 (%)... 129 STORAGE APPLICATIONS... 130 TABLE 56 KEY STORAGE APPLICATIONS BY SUBSTRATE MATERIAL... 130 PVD SYSTEM TYPES... 131 EMERGING APPLICATIONS... 131 Tape Products Have a Long History... 132 TABLE 57 HISTORY OF TAPE STORAGE PRODUCTS AND FUNCTION... 132 Disk Products... 133 Optical Disks... 133 Nanofilms... 134 ADVANTAGES OF PVD IN THE STORAGE INDUSTRY... 134 TABLE 58 MAJOR PLUSES OF PVD FOR STORAGE PRODUCTS... 134 Driving More Flash Storage Presents Challenges... 135 MAJOR MATERIALS USED IN STORAGE MEDIA... 135 TABLE 59 MAJOR MATERIALS DEPOSITED BY PVD FOR THE FABRICATION OF STORAGE DEVICES, 2010... 136 STORAGE MARKET DRIVERS AND TRENDS... 137 PROJECTED PVD EQUIPMENT DEMAND... 138 Growth Trends... 138 TABLE 60 GLOBAL GROWTH TREND OF PVD FOR THE DATA STORAGE INDUSTRY, THROUGH 2011 (VALUE AND PERCENTAGE RATIO)... 138 FORECAST ASSUMPTIONS PVD GROWTH IN THE STORAGE INDUSTRY... 139 TABLE 61 FORECAST ASSUMPTIONS PVD GROWTH IN DATA STORAGE... 140 TABLE 62 PROJECTED GLOBAL GROWTH TREND OF PVD FOR DATA STORAGE, THROUGH 2016... 141 FORECAST VALUE OF PVD SHIPMENTS... 141 TABLE 63 FORECAST VALUE OF GLOBAL PVD SHIPMENTS BY TYPE FOR THE STORAGE PRODUCTS INDUSTRY, THROUGH 2016 ($ MILLIONS)... 141 FIGURE 6 GLOBAL VALUE OF PVD EQUIPMENT SHIPMENTS FOR THE DATA STORAGE INDUSTRY, 2010-2016 ($ MILLIONS)... 142 FORECAST VALUE OF DEPOSITED MATERIALS FOR STORAGE PRODUCTS... 143

Measurement Considerations... 143 Sputtering Target Materials... 144 TABLE 64 FORECAST GLOBAL VALUE OF MATERIALS DEPOSITED BY PVD IN THE STORAGE INDUSTRY, THROUGH 2016 ($ MILLIONS)... 144 FIGURE 7 GLOBAL SHIPMENTS OF MATERIALS FOR PVD IN THE STORAGE INDUSTRY, 2010-2016 ($ MILLIONS)... 145 FORECAST VALUE OF PVD SERVICES... 146 TABLE 65 FORECAST VALUE OF GLOBAL PVD SERVICES IN THE DATA STORAGE INDUSTRY, THROUGH 2016 ($ MILLIONS)... 146 CHAPTER NINE: PVD IN THE CUTTING TOOL MARKET... 147 PVD IN THE CUTTING TOOL MARKET... 147 PRODUCT DEFINITION... 148 TABLE 66 GENERAL TYPES OF CUTTING TOOLS COATED BY PVD... 148 CUTTING TOOL INDUSTRY COMPETITIVENESS... 148 IMPACT OF A CONTINUING GLOBAL ECONOMIC CRISIS... 149 TABLE 67 GLOBAL DEMAND FOR CUTTING TOOLS, THROUGH 2011 ($ BILLIONS)... 149 Industry Reaction... 150 CUTTING TOOL ECONOMICS... 150 INTERNATIONAL CONDITIONS... 151 Changing Market Shares... 151 TABLE 68 GLOBAL CUTTING TOOL MARKET BY REGION, 2010-2016 (%)... 151 TECHNOLOGY... 152 CUTTING TOOL GROWTH FACTORS... 152 Driving Force for PVD... 153 Impact of Market Growth Factors... 153 TABLE 69 IMPACT OF MAJOR FACTORS ON THE GROWTH OF PVD IN THE CUTTING TOOL INDUSTRY (%)... 153 CUTTING TOOL APPLICATIONS... 154 TABLE 70 BASIC CUTTING TOOL PVD APPLICATIONS... 154 TYPES OF PVD SYSTEMS... 155 PVD Versus CVD Process... 155 ADVANTAGES OF PVD IN CUTTING TOOL COATING... 156 KEY MATERIALS DEPOSITED ON CUTTING TOOLS... 157 TABLE 71 KEY MATERIALS DEPOSITED BY PVD FOR CUTTING TOOL APPLICATIONS... 157 NANOCOATINGS... 158 PVD COATED CARBIDES... 158 CUTTING TOOL MARKET DRIVERS AND TRENDS... 158 PVD EQUIPMENT DEMAND... 159 Fluctuating Growth Trends... 159

TABLE 72 GLOBAL GROWTH TREND OF PVD FOR THE CUTTING TOOL INDUSTRY, THROUGH 2011 (VALUE AND PERCENTAGE RATIO)... 160 FORECAST ASSUMPTIONS PVD IN THE CUTTING TOOL INDUSTRY... 160 TABLE 73 FORECAST ASSUMPTIONS FOR PVD GROWTH IN CUTTING TOOLS... 161 TABLE 74 PROJECTED GLOBAL GROWTH TREND OF PVD FOR THE CUTTING TOOL INDUSTRY, THROUGH 2016... 162 FORECAST VALUE OF PVD SHIPMENTS... 162 TABLE 75 FORECAST VALUE OF GLOBAL PVD EQUIPMENT FOR THE CUTTING TOOL INDUSTRY, THROUGH 2016 ($ MILLIONS)... 163 FIGURE 8 GLOBAL VALUE OF PVD SHIPMENTS FOR THE CUTTING TOOL INDUSTRY, 2010-2016 ($ MILLIONS)... 164 FORECAST VALUE OF CUTTING TOOL MATERIAL SHIPMENTS... 164 Measurement Considerations... 165 Sputtering Target Materials... 165 TABLE 76 FORECAST-GLOBAL VALUE OF MATERIALS DEPOSITED BY PVD FOR CUTTING TOOL APPLICATIONS, THROUGH 2016 ($ MILLIONS)... 165 FIGURE 9 GLOBAL VALUE OF MATERIALS DEPOSITED BY PVD FOR THE CUTTING TOOL INDUSTRY, 2010-2016 ($ MILLIONS)... 166 FORECAST VALUE OF PVD SERVICES... 166 TABLE 77 FORECAST VALUE OF PVD COATING SERVICES IN THE CUTTING TOOL INDUSTRY, THROUGH 2016 ($ MILLIONS)... 167 CHAPTER TEN: PVD IN THE SOLAR INDUSTRY... 168 PRODUCT DEFINITION... 169 THE PHOTOVOLTAIC EFFECT... 169 SOLAR THERMAL TECHNOLOGY... 169 Our Focus... 170 KINDS OF PHOTOVOLTAIC PRODUCTS... 170 TABLE 78 BASIC TYPES OF PHOTOVOLTAIC PRODUCTS... 170 SOLAR INDUSTRY COMPETITIVENESS... 171 ENERGY DEMAND, THE ENVIRONMENT AND COSTS... 171 TABLE 79 OVERVIEW OF SOLAR ENERGY STATUS, 2011... 172 IMPACT OF CURRENT GLOBAL ECONOMIC CONDITIONS... 173 TABLE 80 GLOBAL DEMAND FOR SOLAR CELLS, THROUGH 2011 ($ BILLIONS)... 173 Future Expectations... 173 GLOBAL RESEARCH AND EDUCATIONAL ACTIVITY IN SOLAR ENERGY... 174 North America... 174 TABLE 81 MAJOR RESEARCH PROJECTS AT ENREL... 174

European Industry Activities... 175 Japanese Participation in Solar... 175 TABLE 82 WHY THE JAPANESE INVESTED IN PHOTOVOLTAICS... 176 Other Asian and Chinese Activities... 176 TECHNOLOGY... 176 Nanoscale Solar Technology... 177 SOLAR INDUSTRY GROWTH FACTORS... 177 Driving Force for PVD... 178 Impact of Market Growth Factors... 178 TABLE 83 IMPACT OF MAJOR FACTORS IN THE GROWTH OF PVD IN THE SOLAR INDUSTRY (%)... 178 SOLAR INDUSTRY APPLICATIONS... 179 TABLE 84 BASIC PVD SOLAR INDUSTRY APPLICATIONS... 179 EMERGING SOLAR APPLICATIONS... 180 TABLE 85 EMERGING PVD SOLAR APPLICATIONS... 180 Organic Solar Cells... 180 More Nanofilms... 180 Traditional Materials... 181 TYPES OF PVD SYSTEMS... 181 ADVANTAGES OF PVD IN SOLAR MANUFACTURING... 181 TABLE 86 MAJOR ADVANTAGES OF PVD IN MAKING SOLAR CELLS... 182 MAJOR MATERIALS USED IN THE SOLAR INDUSTRY... 182 TABLE 87 MAJOR MATERIALS FOR SOLAR APPLICATIONS... 183 NEWER MATERIALS... 184 SOLAR MARKET DRIVERS AND TRENDS... 184 PVD EQUIPMENT DEMAND... 185 Solar and PVD Growth Trends... 185 TABLE 88 GROWTH TRENDS FOR PVD IN THE SOLAR INDUSTRY, THROUGH 2011 ($ MILLIONS)... 185 FORECAST ASSUMPTIONS PVD GROWTH IN THE SOLAR INDUSTRY... 186 TABLE 89 FORECAST ASSUMPTIONS FOR PVD GROWTH IN THE SOLAR INDUSTRY... 186 TABLE 90 PROJECTED GLOBAL GROWTH TRENDS FOR PVD IN THE SOLAR MARKET, THROUGH 2016... 187 FORECAST VALUE OF PVD SHIPMENTS... 188 TABLE 91 FORECAST VALUE OF GLOBAL PVD SHIPMENTS FOR THE SOLAR INDUSTRY, THROUGH 2016 ($ MILLIONS)... 188 FIGURE 10 GLOBAL SHIPMENTS OF PVD EQUIPMENT FOR USE IN THE SOLAR INDUSTRY, 2010-2016 ($ MILLIONS)... 189 FORECAST VALUE OF SOLAR MATERIALS... 189 Material Market Definition... 189 Measurement Considerations... 190

TABLE 92 FORECAST GLOBAL VALUE OF MATERIALS DEPOSITED BY PVD FOR THE SOLAR INDUSTRY, THROUGH 2016 ($ MILLIONS)... 190 FIGURE 11 GLOBAL VALUE OF PVD SHIPMENTS FOR THE SOLAR INDUSTRY, 2010-2016 ($ MILLION)... 191 FORECAST VALUE OF PVD SERVICES... 192 TABLE 93 FORECAST VALUE OF GLOBAL PVD SERVICES IN THE SOLAR INDUSTRY, THROUGH 2016 ($ MILLIONS)... 192 CHAPTER ELEVEN: PVD IN THE OPTICS INDUSTRY... 193 PVD IN THE OPTICS INDUSTRY... 193 TABLE 94 BASIC TYPES OF OPTICAL PRODUCTS... 194 COMPETITIVENESS OF THE OPTICAL INDUSTRY... 194 ECONOMIC ENVIRONMENT... 194 TABLE 95 ECONOMIC GROWTH FACTORS FOR THE OPTICS INDUSTRY... 195 IMPACT OF GLOBAL ECONOMIC CONDITIONS... 195 TABLE 96 GLOBAL DEMAND FOR OPTICAL PRODUCTS, THROUGH 2011 ($ BILLIONS)... 196 OPTICS INDUSTRY AND GOVERNMENT SUPPORT... 196 TECHNOLOGY... 197 TABLE 97 KEY TO SUCCESSFUL OPTICAL COATINGS... 197 OPTICAL MARKET GROWTH FACTORS... 198 Driving Force for PVD... 198 Impact on Market Growth Factors... 199 TABLE 98 IMPACT OF MAJOR FACTORS IN PVD GROWTH IN THE OPTICS INDUSTRY (%)... 199 OPTICS INDUSTRY APPLICATIONS... 199 TABLE 99 MOST COMMON OPTICS PVD APPLICATIONS... 200 Plastic Lenses... 200 Nanocoatings... 201 TYPES OF PVD SYSTEMS... 201 MATERIALS USED FOR OPTICAL APPLICATIONS... 202 TABLE 100 KEY MATERIALS USED FOR OPTICAL COATINGS... 202 OPTICAL MARKET DRIVERS AND TRENDS... 203 PVD EQUIPMENT DEMAND... 203 Changing Growth Trends... 204 TABLE 101 GLOBAL GROWTH TREND OF PVD FOR THE OPTICS INDUSTRY, THROUGH 2011... 204 FORECAST ASSUMPTIONS PVD IN OPTICS... 204 TABLE 102 FORECAST ASSUMPTIONS PVD GROWTH IN THE OPTICS MARKET... 205 TABLE 103 PROJECTED GLOBAL GROWTH TREND OF PVD FOR THE OPTICS INDUSTRY, THROUGH 2016... 206 FORECAST VALUE OF GLOBAL PVD SHIPMENTS... 206

TABLE 104 FORECAST VALUE OF GLOBAL PVD EQUIPMENT SHIPMENTS BY TYPE FOR THE OPTICS INDUSTRY, THROUGH 2016 ($ MILLIONS)... 207 FIGURE 12 GLOBAL VALUE OF PVD SHIPMENTS FOR THE OPTICAL INDUSTRY, 2010-2016 ($ MILLIONS)... 208 FORECAST VALUE OF OPTICAL MATERIAL SHIPMENTS... 208 Measurement Considerations... 209 Sputtering Target Materials... 209 TABLE 105 FORECAST GLOBAL VALUE OF MATERIALS DEPOSITED BY PVD IN THE OPTICS INDUSTRY, THROUGH 2016 ($ MILLIONS)... 210 FIGURE 13 GLOBAL VALUE OF MATERIALS DEPOSITED BY PVD IN THE OPTICS INDUSTRY, 2010-2016 ($ MILLIONS)... 211 FORECAST VALUE OF PVD SERVICES... 211 TABLE 106 FORECAST VALUE OF GLOBAL PVD SERVICES IN THE OPTICS INDUSTRY, THROUGH 2016 ($ MILLIONS)... 212 CHAPTER TWELVE: PVD IN THE MEDICAL EQUIPMENT MARKET... 213 PVD IN THE MEDICAL EQUIPMENT MARKET... 213 PRODUCT DEFINITION... 214 TABLE 107 BASIC TYPES OF MEDICAL DEVICES... 214 MEDICAL INDUSTRY COMPETITIVENESS... 214 THE GLOBAL MEDICAL EQUIPMENT BUSINESS... 215 TABLE 108 GLOBAL PRODUCTION OF MEDICAL EQUIPMENT AND SUPPLIES BY REGION, 2010-2016 (%)... 215 GLOBAL ECONOMIC CRISIS... 216 TABLE 109 GLOBAL DEMAND FOR MEDICAL PRODUCTS THROUGH 2010 ($ BILLIONS)... 216 COST ISSUES... 217 TECHNOLOGY... 217 MEDICAL MARKET GROWTH FACTORS... 218 Driving Force for PVD... 218 Impact of Marketing Growth Factors... 219 TABLE 110 IMPACT OF MAJOR FACTORS ON THE GROWTH OF PVD IN THE MEDICAL EQUIPMENT INDUSTRY (%)... 219 MEDICAL EQUIPMENT APPLICATIONS... 219 TABLE 111 OVERVIEW OF MEDICAL EQUIPMENT APPLICATIONS... 220 GROWING APPLICATIONS... 220 TYPES OF PVD EQUIPMENT... 221 MAJOR MATERIALS USED IN THE MEDICAL DEVICE INDUSTRY... 221 TABLE 112 MAJOR THIN FILM MATERIALS USED TO MANUFACTURE MEDICAL DEVICES AND EQUIPMENT... 222 NANOMATERIALS... 222 MARKET DRIVERS AND TRENDS... 223 SECOND-PHASE ECONOMIC PROBLEMS... 223

GROWTH TRENDS... 223 TABLE 113 GLOBAL GROWTH TRENDS OF PVD AND THE MEDICAL EQUIPMENT INDUSTRY, THROUGH 2011 (VALUE AND PERCENTAGE RATIO)... 224 FORECAST ASSUMPTIONS FOR PVD IN THE MEDICAL INDUSTRY... 224 TABLE 114 FORECAST ASSUMPTIONS FOR PVD GROWTH IN THE MEDICAL EQUIPMENT MARKET... 225 TABLE 115 PROJECTED GLOBAL GROWTH TREND OF PVD FOR THE MEDICAL EQUIPMENT MARKET, THROUGH 2016... 225 FORECAST VALUE OF PVD EQUIPMENT SHIPMENTS... 226 TABLE 116 FORECAST GLOBAL VALUE OF PVD EQUIPMENT SHIPMENTS FOR THE MEDICAL EQUIPMENT INDUSTRY, THROUGH 2016 ($ MILLIONS)... 226 FIGURE 14 GLOBAL VALUE OF PVD EQUIPMENT SHIPMENTS FOR THE MEDICAL EQUIPMENT MARKET, 2010-2016 ($ MILLIONS)... 227 FORECAST VALUE OF PVD MATERIALS... 227 Measurement Considerations... 228 Sputtering Target Materials... 228 TABLE 117 FORECAST GLOBAL VALUE OF MATERIALS DEPOSITED BY PVD IN THE MEDICAL EQUIPMENT MARKET, THROUGH 2016 ($ MILLIONS)... 228 FIGURE 15 GLOBAL VALUE OF PVD SHIPMENTS FOR THE MEDICAL EQUIPMENT MARKET, 2010-2016 ($ MILLIONS)... 229 FORECAST VALUE OF PVD SERVICES... 229 TABLE 118 FORECAST VALUE OF WORLDWIDE PVD SERVICES IN THE MEDICAL EQUIPMENT MARKET, THROUGH 2016 ($ MILLIONS)... 230 CHAPTER THIRTEEN: PVD IN THE FLEXIBLE PACKAGING MARKET... 231 PVD IN THE FLEXIBLE PACKAGING MARKET... 231 PRODUCT DEFINITION... 232 TABLE 119 REPRESENTATIVE PRODUCTS USING FLEXIBLE PACKAGING... 232 PACKAGING INDUSTRY COMPETITIVENESS... 233 ECONOMIC CONSIDERATIONS AND THE RECESSION... 233 Economic Impact Problems Still Impeding Growth... 233 TABLE 120 GLOBAL DEMAND FOR FLEXIBLE PACKAGING, THROUGH 2011 ($ BILLIONS)... 233 INTERNATIONAL ACTIVITIES... 234 European Activity... 234 Increased Asian Activity... 235 TABLE 121 POSITIVE FACTORS FOR INTERNATIONAL FLEXIBLE PACKAGING... 235 TECHNOLOGY... 236

FLEXIBLE PACKAGING MARKET GROWTH FACTORS... 236 Driving Force for PVD... 236 Impact of Market Growth Factors... 237 TABLE 122 IMPACT OF MAJOR GROWTH FACTORS ON PVD FOR FLEXIBLE PACKAGING (%)... 237 PACKAGING INDUSTRY APPLICATIONS... 238 TRANSPARENT COATINGS... 238 TABLE 123 KEY ADVANTAGES OF GLASS COATINGS... 239 TABLE 124 OVERVIEW OF FLEXIBLE PACKAGING APPLICATIONS... 239 TYPES OF PVD SYSTEMS... 240 Web Coating Process... 240 ADVANTAGES OF PVD IN FLEXIBLE PACKAGING... 241 TABLE 125 ADVANTAGES OF PVD IN FLEXIBLE PACKAGING... 241 KEY MATERIALS USED FOR FLEXIBLE PACKAGING... 241 NANOMATERIALS... 242 TABLE 126 KEY MATERIALS DEPOSITED BY PVD IN FLEXIBLE PACKAGING... 242 FLEXIBLE PACKAGING MARKET DRIVERS AND TRENDS... 243 PVD EQUIPMENT DEMAND... 243 Growth Trends... 244 TABLE 127 GLOBAL GROWTH TREND OF PVD FOR THE FLEXIBLE PACKAGING INDUSTRY, THROUGH 2011... 244 FORECAST ASSUMPTIONS PVD IN FLEXIBLE PACKAGING... 244 TABLE 128 FORECAST ASSUMPTIONS FOR PVD GROWTH IN THE FLEXIBLE PACKAGING MARKET... 245 TABLE 129 PROJECTED GLOBAL GROWTH TREND OF PVD FOR THE SPECIALTY PACKAGING MARKET, THROUGH 2016... 245 TABLE 130 GLOBAL SHIPMENTS OF PVD EQUIPMENT BY TYPE FOR FLEXIBLE PACKAGING, THROUGH 2016 ($ MILLIONS)... 246 FIGURE 16 GLOBAL VALUE OF PVD EQUIPMENT SHIPMENTS FOR THE FLEXIBLE PACKAGING MARKET, 2010-2016 ($ MILLIONS)... 247 FORECAST VALUE OF FLEXIBLE PACKAGING MATERIALS... 247 Measurement Considerations... 248 Sputtering Targets... 248 TABLE 131 FORECAST GLOBAL VALUE OF MATERIALS DEPOSITED BY PVD IN THE FLEXIBLE PACKAGING INDUSTRY, THROUGH 2016 ($ THOUSANDS)... 249 FIGURE 17 GLOBAL VALUE OF MATERIALS DEPOSITED BY PVD IN THE FLEXIBLE PACKAGING INDUSTRY, 2010-2016 ($ THOUSANDS)... 250 FORECAST VALUE OF PVD SERVICES... 250

TABLE 132 FORECAST VALUE OF WORLDWIDE PVD SERVICES IN THE FLEXIBLE PACKAGING INDUSTRY, THROUGH 2016 ($ MILLIONS)... 251 CHAPTER FOURTEEN: PVD IN THE INDUSTRIAL MARKET... 252 PVD IN THE INDUSTRIAL MARKET... 252 PRODUCT DEFINITION... 253 TABLE 133 BASIC TYPES OF INDUSTRIAL PRODUCTS... 253 INDUSTRIAL MARKET COMPETITIVENESS... 254 AUTOMOTIVE MARKET... 254 Impact of the Economic Crisis... 254 TABLE 134 GLOBAL AUTO PRODUCTION, THROUGH 2011 (UNITS MILLIONS)... 255 What s Next?... 255 TABLE 135 POSITIVE SIGNS FOR THE AUTO INDUSTRY S FUTURE... 255 Technology... 256 AEROSPACE MARKET... 256 Impact of the Economic Crisis... 256 TABLE 136 U.S. AEROSPACE SALES, THROUGH 2011... 256 International Market... 257 Technology... 257 MARKET GROWTH FACTORS FOR INDUSTRIAL PVD... 257 Driving Force for PVD... 258 Impact of Market Growth Factors... 258 TABLE 137 IMPACT OF MAJOR FACTORS ON PVD GROWTH IN THE INDUSTRIAL MARKET (%)... 259 KEY INDUSTRIAL APPLICATIONS... 259 AUTOMOTIVE... 259 AEROSPACE... 260 TABLE 138 OVERVIEW OF CURRENT AND EMERGING INDUSTRIAL PVD APPLICATIONS... 261 TYPES OF PVD SYSTEMS... 261 ADVANTAGES OF PVD IN THE INDUSTRIAL MARKET... 262 TABLE 139 ADVANTAGES OF PVD INDUSTRIAL COATINGS... 262 KEY INDUSTRIAL COATING MATERIALS... 263 TABLE 140 KEY MATERIALS DEPOSITED BY PVD FOR INDUSTRIAL APPLICATIONS... 263 INDUSTRIAL MARKET DRIVERS AND TRENDS... 264 PVD EQUIPMENT DEMAND... 264 Fluctuating Growth Trends... 265 TABLE 141 GLOBAL GROWTH TREND OF PVD FOR THE INDUSTRIAL MARKET, THROUGH 2011... 265 FORECAST ASSUMPTIONS PVD IN THE INDUSTRIAL MARKET... 266

TABLE 142 FORECAST ASSUMPTIONS PVD GROWTH IN THE INDUSTRIAL MARKET... 266 TABLE 143 PROJECTED GLOBAL GROWTH TREND OF PVD IN THE INDUSTRIAL MARKET, THROUGH 2016... 267 FORECAST VALUE OF PVD EQUIPMENT SHIPMENTS... 267 TABLE 144 FORECAST VALUE OF GLOBAL PVD SYSTEMS FOR USE IN THE INDUSTRIAL MARKET, THROUGH 2016 ($ MILLIONS)... 268 FIGURE 18 GLOBAL VALUE OF PVD MATERIALS DEPOSITED BY PVD 2010-2016 ($ MILLIONS)... 269 FORECAST VALUE OF INDUSTRIAL MATERIALS... 269 Measurement Considerations... 270 Sputtering Targets... 270 Nanomaterials... 270 TABLE 145 FORECAST GLOBAL VALUE OF MATERIALS DEPOSITED BY PVD IN THE INDUSTRIAL MARKET, THROUGH 2016 ($ MILLIONS)... 271 FIGURE 19 GLOBAL VALUE OF MATERIALS DEPOSITED BY PVD FOR THE INDUSTRIAL MARKET, 2010-2016 ($ MILLIONS)... 271 FORECAST VALUE OF PVD SERVICES... 272 TABLE 146 FORECAST VALUE OF GLOBAL PVD SERVICES IN THE INDUSTRIAL MARKET, THROUGH 2016 ($ MILLIONS)... 272