FRAUNHOFER IPMS: WE SHAPE THE LIGHT. PRODUCTS AND FIELDS OF APPLICATION DR. HARALD SCHENK 10.03.2010
AGENDA Fraunhofer- Gesellschaft Fraunhofer-IPMS in Profile Products and Fields of Application
AGENDA Fraunhofer- Gesellschaft Fraunhofer-IPMS in Profile Products and Fields of Application
JOSEPH VON FRAUNHOFER (1787 1826) Researcher»Fraunhofer Lines«in the sun spectrum Inventor New methods of lens processing Entrepreneur Head of Royal Glass Factory
FRAUNHOFER MISSION Research and Development Applied research on behalf of industry and society Applied basic research Entrepreneurship Institutes as profit center One third of the budget through industrial commissions Institutes Spin-offs Customers Industry Public authorities
FRAUNHOFER FINANCING MODEL IPMS 35% Basic Funding Public Funding IPMS 30% IPMS 35% Industrial Commissions Research Budget 2009 Fraunhofer-Gesellschaft 1,6 billion Euros
DEVELOPMENT OF THE FRAUNHOFER-GESELLSCHAFT 55 56 57 58 57 58 56 56 57 38 38 38 39 32 34 36 36 33 34 27 27 28 29 30 45 45 45 45 46 47 47 47 43 645 672 710 992 1.048 1.401 1.320 1.253 1.186 69 88 117 147 224 295 355 419 511 Number of Fraunhofer-Institutes Budget in million 76 78 80 82 84 86 88 90 92 94 96 98 00 02 04 06 08
FRAUNHOFER GROUPS Information and Communication Technology Life Sciences Microelectronics Light and Surfaces Production Materials and Components
FRAUNHOFER GROUP MICROELECTRONICS 12+2 Institutes 2.700 Employees
AGENDA Fraunhofer- Gesellschaft Fraunhofer-IPMS in Profile Products and Fields of Application
HISTORY 1992 Foundation of the Dresden part of the Fraunhofer Institute for Microelectronic Circuits and Systems (IMS). 2003 Foundation of the Fraunhofer Institute for Photonic Microsystems (IPMS). 2007 Modernization of the institute. Opening of a new clean room. 2008 Opening of COMEDD Center for Organic Materials and Electronic Devices Dresden
EXECUTIVE BOARD Managing Director MEMS/MOEMS Prof. Dr. Hubert Lakner Deputy Director Dr. Harald Schenk Director ORGANIC Prof. Dr. Karl Leo
BUDGET IN MIO EUROS 25 20 Budget in mln euros Fraunhofer Basic Funding Public Projects (EU) Public Projects (national) Industrial Projects 15 10 5 05 06 07 08 09 10 (plan)
STAFF MEMBERS 300 250 Employees Scientific Assistants Employees 200 150 100 50 05 06 07 08 09 10 (plan)
OUR BUSINESS MODELL: From R&D to Pilot-Fabrication Consulting service Feasibility tests Simulation Device and system development Complete process development Prototypes and demonstrators Characterization & Test Pilot-Fabrication Foundry Services
AGENDA Fraunhofer- Gesellschaft Fraunhofer-IPMS in Profile Applications and Competencies
INSTITUTE STRUCTURE Executive Board Prof. Dr. Hubert Lakner Prof. Dr. Karl Leo Dr. Harald Schenk Administration Marketing & Public Relations Facility Management Quality Management AD MPR GMI QM Micro Scanner Devices Spatial Light Modulators Organic Materials and Systems Sensor and Actuator Systems Lifetronics MSD SLM OMS SAS LIF Engineering ENG Fabrication FAB
MICRO SCANNER DEVICES Business Unit MSD Dr. Harald Schenk --------------------------------------------------------------- Head of Business Unit
TECHNOLOGICAL BACKGROUND Business Unit MSD 1D and 2D rotational/ translational Frequencies: 0.1 khz 35 khz Diameter: 0.5 mm 4.0 mm Deflection angle: up to +/-34 Optical scan range: 136 Flatness: better than λ/10
APPLICATIONS Business Unit MSD 1D & 2D-scanner projection displays grating spectrometer scanning microscope a) b) laser micro camera optical path length modulator
SPATIAL LIGHT MODULATORS Business Unit SLM Dr. Michael Wagner --------------------------------------------------------------- Head of Business Unit
TECHNOLOGICAL BACKGROUND Business Unit SLM 16 μm pitch 2048 x 512 pixel 2 khz frame rate row line n-1 row line n column lines m m+1 m+2 m+3
MASK WRITER: PRINCIPLE OF OPERATION Business Unit SLM Each flash from a pulsed excimer laser coincides with a fully loaded new pattern on the SLM and with the correct position on the maskblank simultaneously to print a stamp. Optical principle: Partially coherent diffractive imaging with filtering of high spatial frequencies in an aperture. High speed datapath with real-time rasterizing from CAD to grayscale bitmap in FPGA architecture. A stepper with a programmable reflective mask and 200X reduction = 248 nm
MICRONIC S SIGMA 7300/7500 Business Unit SLM Application Quick turn-around and costeffective production of 65 nm and 45 nm node reticles Interconnect layers (manhattan & X-design) 2 nd level printing of advanced PSM Status Several systems in the field 150 nm dense on mask 150 nm space on mask
ORGANIC MATERIALS AND SYSTEMS Business Unit OMS Dr. Christian May --------------------------------------------------------------- Head of Business Unit
OLED-TECHNOLOGY Business Unit OMS Flat area source Total thickness < 2mm Highly efficient Diffuse Lighting Lambert emission Non toxic Polymer (Spin-Coated) and Small-Molecule (Evaporated) Material Low weight _ + Transport layer Emitting layer Transport layer
Business Unit OMS Organic Photovoltaics OLED on CMOS Signage APPLICATIONS Lighting
LARGE AREA OLED LIGHTING Business Unit OMS LED Point source High Peak brightness High efficiency Long lifetime Loss for area distribution high 370mm x 470mm glass substrates OLED Area source Low Peak brightness High efficiency Lifetime to be improved Low loss for area distribution
OLED SIGNAGE APPLICATIONS Business Unit OMS OLED nameplate OLED steering wheel
OLED on CMOS Business Unit OMS Orange top emitting PIN-OLED on CMOS OLED Cam test chip (0.35μm CMOS) Active matrix OLED- Microdisplay Photodiode camera matrix
ORGANIC SOLAR CELLS Business Unit OMS Total thickness: < 1 μm Highly flexible High freedom in color and shape Only small amounts of org. materials are required (< 1g/m 2 ) Cost effective production due to close to room temperature processes Large area coating Production technologies similar to SM OLEDs Short energy payback time (~ 1 year (estimated))
SENSOR AND ACTUATOR SYSTEMS Business Unit SAS Dr. Michael Scholles --------------------------------------------------------------- Head of Business Unit
PERSONALIZED INFORMATION SYSTEMS Business Unit SAS OLED Microdisplays Laser Projection
SENSING AND IMAGING Business Unit SAS Laser Scanning Microscope (3D) Metrology
OPTICAL SENSORS AND SPECTROSCOPY Business Unit SAS Micro Spectrometer Hyperspectral Imaging
LIFETRONICS Business Unit LIF Prof. Dr. Wolf-Joachim Fischer --------------------------------------------------------------- Head of Business Unit
INTRACORPORAL SENSOR IMPLANTS Business Unit LIF 125 khz-rf tag Acceleration sensor Lock-In Amplifier Passive RF-tag with integrated controller and data memory Artificial hip joint with acceleration sensor and RFID data and energy transmission (relaxation of the joint) Wireless measurement of micro motions in surgical implants (monitoring of the healing process)
BODY AREA NETWORK FOR TELE HOME CARE Business Unit LIF 3-channel-ECG for 24 hours measurements Pulse oxymeter Continuous blood pressure measurements Bluetooth-data transmission
THANK YOU FOR YOUR ATTENTION! Dr. Harald Schenk info@ipms.fraunhofer.de 0049 (0) 351 8823 154