Contamination ConTrol Solutions Optimizer Bulk Photochemical Filters Hydrophobic and hydrophilic filtration of process chemicals enabling easy scale up from laboratory and small-scale R &D testing to larger volume filtration solutions Overview Optimizer bulk photochemical filters offer costeffective, scalable and convenient solutions for specialty chemical development processes by improving filtration of photoresists and other process chemicals, and preventing the release of retained particles back into the process. Depending on the filtration device, retention ratings can be as tight as 3 nm, ensuring excellent small particle retention. Additionally, minimal hold-up volume, coupled with easy changeout, reduces chemical waste and speeds up product development. Easy Scale Up to Larger UPE Membrane Filtration Devices Optimizer lab-scale filters are effective at testing the filtration performance of process chemicals on a small scale. Optimizer V-7 and C7 provide an economical alternative to larger filter formats for lab-bench testing and particle evaluation. These filters are ideal for the R&D filtration of photoresist and other specialty chemicals in development. Optimizer C7 is also designed for pilot lines and chemical sampling on a laboratory or bench-scale basis. The testing results provide a useful benchmark for scaling up to larger area filtration devices without having to change the UPE membrane type. Optimized Filtration of Process Chemicals Optimizer filters improve filtration of photoresists and other process chemicals, prevent the release of retained particles back into the process, and provide hydrophobic filtration of photoresists, thinners and solvents. Optimizer V-7 and C7 support the R&D filtration and testing of photoresists, dielectrics, anti-reflective coatings (ARC) and advanced chemicals in the laboratory. Optimizer D3 and D filters are geared to small-volume filtration of photoresists, resist dielectrics and solvents. No Prewetting Required Optimizer filters require no prewetting. No time is wasted to wet or flush the filters, and as a result, the filters are fully functional immediately after installation. Without the need for prewetting, they reduce the likelihood that microbubbles will form and avoid the problems associated with incomplete wetting and the mixing of incompatible chemicals. These point-of-use (POU) photochemical filters fully optimize the UPE membrane, ensuring maximum flow.
The following table summarizes filter attributes. Filter Attributes Filter Type Media Retention Applications Scale C7 UPE (hydrophobic) nm Filtration of photoresists Lab scale.5.1..5 1. and advanced chemicals PTFE (hydrophobic).1 UPE Special Clean (hydrophobic) UPE Special Clean (PMC) nm.5.1..5 1. nm PP. 1..5 5. 1. V-7 UPE 1 nm nm 3 nm.5.1 D3, D Thick UPE.1.5 Thin UPE 1 nm nm.5.1. D, D LE UPE 3 nm asymmetric 5 nm asymmetric 1 nm asymmetric 1 nm nm 3 nm.5.1. Filtration of photoresists, dielectrics and anti-reflective coatings (ARC) Filtration of photoresists, resist dielectrics and solvents Filtration of photoresists, thinners and solvents Lab scale Small volume POU for small to mid-volume D PR, D PR-L UPE nm 3 nm.5.1. Filtration of photoresists, thinners and solvents POU for smal to mid-volume Entegris, Inc.
Features and Benefits Features Easy scale up Optimized filtration of process chemicals No prewetting required Benefits Cost-effective, scalable and convenient alternative for testing and particle evaluation of process chemicals: Optimizer C7: Pilot lines and chemical sampling on a laboratory or bench-scale basis Optimizer V-7: R&D filtration of photoresist or specialty chemicals in the laboratory Optimizer D3 and D: Small-volume filtration of process chemicals Optimizer D, D LE, D PR, and D PR-L: Small to mid-volume POU photochemical and solvent filtration needs Testing results provide a useful benchmark for scaling up to larger area filtration devices without changing the UPE membrane type Improved filtration of photoresists and other process chemicals without releasing retained particles back into the process: Optimizer C7 and V-7: R&D filtration and testing of photoresists, dielectrics, anti-reflective coatings (ARC) and advanced chemicals Optimizer D3 and D: Filtration of photoresists, resist dielectrics and solvents Optimizer D, D LE, D PR and D PR-L: Hydrophobic filtration of photoresists, thinners and solvents Reduces the potential sources of microbubble formation Avoids problems associated with incomplete wetting and the mixing of incompatible chemicals Fully optimizes the UPE membrane and ensures maximum flow No time wasted to wet or flush the filters Fully functional filters immediately following installation Entegris, Inc. 3
Optimizer C7 Specifications Materials: Membrane UPE (hydrophobic) UPE Special Cleans type (hydrophobic) PCM UPE* (hydrophilic) PTFE (hydrophobic) PP Protego polyethylene ion exchange media Head, bowl, locking ring HDPE Head size AS5-3 Bowl size AS5-13 O-ring EPDM or perfluoroelastomer Filtration area: 1 cm (1. in ) Fitting: Inlet/ outlet / vent 1 NPT Hold-up volume:.5 ml Operating Maximum operating EPDM o-ring. MPa (. bar, psi) @ 5 C (77 F) conditions: pressure Perfluoroelastomer o-ring.1 MPa (.1 bar, 3 psi) @ 5 C (77 F) Maximum operating temperature C (1 F) * Surface-modified UPE membrane Dimensions Disk Ø5. mm (. ) Ø. mm (1.9 ) R 3. mm (1.1 ) 5. mm (. ) R 3.5 mm 7. mm (.3 ) (1. ). mm (.31 ) Housing 1 NPT. mm (.79 ) 1 NPT Ø1. mm (3.9 ) 59. mm (.3 ) Entegris, Inc.
Ordering Information* Optimizer C7 Filters Part Number C7 Media CW = UPE PG = PP Retention Rating UPE Only AX =. AZ =.5 AV =.1 AG =. UH =.5 UA = 1. PP Only =. 1 = 1. 5 =.5 5 = 5. 1H = 1. Quantity UPE and PP Only 3 = 3/pk UPE Special Clean Type Only C = /pk (Special Clean) Other Products Part Number Description Quantity CWFVC73 Hydrophobic PTFE.1 3/pk CWMXC7C PCM UPE. Special Clean /pk PRHLC7C Protego Plus Special Clean /pk Housings Part Number O-ring Quantity HDPE C7 P1 Perfluoroelastomer 1 HDPE C7 E1 EPDM 1 Replacement O-rings Part Number Material Size Quantity SD1R11Y EPDM AS5-13 5 SD1R1Y EPDM AS5-3 5 SD1R13Y Perfluoroelastomer AS5-13 1 SD1R1Y Perfluoroelastomer AS5-3 1 * This information serves as a guide. Please contact your local representative to confirm part numbers. Entegris, Inc. 5
Optimizer V-7 Specifications Materials: Membrane UPE Hold-up volume: Operating conditions: Filtration area 13. cm (. in ) Supports Housing 1.5 ml Maximum operating pressure Maximum operating temperature PP non-woven material PP. MPa (. bar, 5 psi) @ C ( F) C (1 F) Dimensions I/O 1 MNPT Female luer lock inlet Ø5. mm ±.5 mm (.13 ±. ).9 mm ±.5 mm (1.5 ±. ) 1. mm ±.5 mm (1.1 ±. ) Stepped barb outlet Ordering Information* Optimizer V-7 Filters Part Number FD5 R1 Membrane Type A = Hydrophobic UPE T = Hydrophobic PTFE** M = PCM UPE*** Retention Rating T = 1 nm X = nm Y = 3 nm Z =.5 V =.1 Quantity R1 = 1 units/pk Fittings 1 = 1 MNPT I/O F = Female luer lock inlet; 1 stepped barb outlet * This information serves as a guide. Please contact your local representative to confirm part numbers. * * Available in.5 only. * ** Available in nm only. Entegris, Inc.
Optimizer D3 and D Specifications Materials: Membrane UPE Supports, housing HDPE Filtration area: D3 3 cm (.5 in ) Operating conditions: Dimensions D3 51.3 mm (. ) D.3 mm (.1 ) 19. mm (.75 ) 19. mm (.75 ) Ordering Information* D cm (93. in ) Maximum operating pressure Maximum forward/reverse differential pressure Optimizer D3, D Filters Part Number CW S Maximum operating temperature 5. mm (. ).7 mm (.9 ) 5. mm (. ).7 mm (.9 ) Membrane Type A = Symmetric UPE U = Symmetric thick UPE.3 MPa (3. bar, 5 psid) @ 5 C (77 F). MPa (. bar, 35 psid) @ 5 C (77 F) C (1 F) Retention Rating T = 1 nm V =.1 X = nm G =. Y = 3 nm H =.5 ** Z =.5 A = 1. ** Performance Data Optimizer D3 Filters Ounces/min 1 1..5.1 7...5 5.3. 3.1 1 1 3 5 Typical Flow Rate (cc/min) 1 cp @ C ( F) Fitting Size 31 = D3 1 = D * This information serves as a guide. Please contact your local representative to confirm part numbers. ** CWU type only. Differential Pressure (bar) Differential Pressure (bar) Optimizer D Filters Ounces/min 1 3..5.1 7.. 5.3.5. 3.1 1 1 1 Typical Flow Rate (cc/min) 1 cp @ C ( F) Quantity S = units/pk Entegris, Inc. 7
Optimizer D and D LE Specifications Materials: Membrane UPE (hydrophobic) Core, housing, supports HDPE Membrane area: 1 nm cm (. ft ) Operating conditions: nm cm (.37 ft ) 3 nm 1 cm (1.7 ft ).5 μm,.1 μm,. μm 1 cm (1.9 ft ) 3 nm, 5 nm, 1 nm asymmetric 3 cm (.7 ft ) short Maximum operating pressure Maximum forward/reverse differential pressure Maximum operating temperature cm (.31 ft ) long.3 MPa (3. bar, 5 psid) @ 5 C (77 F).7 MPa (.7 bar, 39 psid) @ 5 C (77 F) C (1 F) Dimensions Long Ø9. mm (.7 ) mm (.95 ) Short Ø9. mm (.7 ) mm (.95 ) 19 mm (.5 ) 19 mm (7.5 ) 9 mm (3. ) 113 mm (.5 ) Entegris, Inc.
Performance Data Differential Pressure (kpa) Optimizer D Asymmetric UPE GPM.1..3..5 3 nm nm.5 Asym 3 nm.1. 1.5 1. 1.5..5 Typical Flow Rate (L/min) 1 cp @ C ( F) Differential Pressure (kpa) Optimizer D LE Asymmetric UPE GPM.1..3..5 5 nm Asym 1 nm Asym 1.5 1. 1.5..5 Typical Flow Rate (L/min) 1 cp @ C ( F) Ordering Information* Optimizer D, D LE Filters Part Number CW S S 3 Membrane Type A = Symmetric UPE S = Asymmetric UPE Retention Rating T = 1 nm X = nm Y = 3 nm Z =.5 V =.1 K = 3 F = 5 Generation 1 = Old = New Quantity 3 = 3/pk Pleat = Standard M = M-pleat * This information serves as a guide. Please contact your local representative to confirm part numbers. Entegris, Inc. 9
Optimizer D PR and D PR-L Specifications Materials: Membrane UPE (hydrophobic) Supports Core, housing HDPE Filtration area: D PR. μm cm (.37 ft ) Operating conditions: D PR.3 μm 19 cm (.5 ft ) D PR 1 cm (1.9 ft ) D PR-L 3 cm (3. ft ) Maximum operating pressure Maximum forward/reverse differential pressure Maximum operating temperature PP cm (.31 ft ) long.3 MPa (3. bar, 5 psid) @ 5 C (77 F).7 MPa (.7 bar, 39 psid) @ 5 C (77 F) C (1 F) Dimensions Optimizer D PR-L Filter Ø9. mm (.7 ) 1 Compression: 19 mm (7. ) 3 Compression: 19 mm (7.5 ) Optimizer D PR Filter Ø9. mm (.7 ) 19 mm (.5 ) 9 mm (3. ) 1 Compression: 113 mm (.5 ) 1 Super Type Pillar : 1 mm (. ) 1 Flowell : 1 mm (5.5 ) 1 Entegris, Inc.
Performance Data Differential Pressure (bar) D PR with 1 Super Type Pillar Fittings GPM.5.5.75..3..5.5.1..3...1 7 5 3 1 Differential Pressure (bar) D PR with 1 Compression Fittings GPM.5.5.75..5.5..3..1.1. 7 5 3 1.5 1. 1.5..5 3. Typical Flow Rate (L/min) 1 cp @ C ( F).5 1. 1.5..5 3. Typical Flow Rate (L/min) 1 cp @ C ( F) Differential Pressure (bar) D PR-L with 1 Compression Fittings GPM.5.5.75 1. 1.5 1.5 1..5 1......1. 7 5 3 1 Differential Pressure (bar) D PR-L with 3 Compression Fittings GPM.5.5.75 1. 1.5 1.5 1. 1......5.1. 7 5 3 1 1 3 5 Typical Flow Rate (L/min) 1 cp @ C ( F) 1 3 5 Typical Flow Rate (L/min) 1 cp @ C ( F) Ordering Information* Optimizer D PR Disposable Filters Part Number CWA S 1 Fitting Type: 1 I/O; 1 V/D P = Super Type Pillar S = Compression X = Flowell Retention Rating X =. μm (Super Type Pillar fittings only) Y =.3 μm (Super Type Pillar fittings only) Z =.5 V =.1 G =. Optimizer D PR-L Disposable Filters Part Number CWA LS1 Retention Rating Z =.5 V =.1 G =. Fitting Size = 1 I/O; 1 V/D 3 = 3 I/O; 1 V/D * This information serves as a guide. Not all combinations are available. Please contact your local representative to confirm part numbers. Entegris, Inc. 11
For More Information Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit www.entegris.com and select the Customer Service link for the center nearest you. Terms and Conditions of Sale All purchases are subject to Entegris Terms and Conditions of Sale. To view and print this information, visit www.entegris.com and select the Legal Notices link from the footer. Entegris, the Entegris Rings Design, Optimizer and Protego are registered trademarks of Entegris, Inc. Pillar is a registered trademark of Nippon Pillar Packaging Company, Ltd. Flowell TM is a trademark of Flowell Corporation. ENTEGRIS, INC. Corporate Headquarters 19 Concord Road Billerica, MA 11 USA Customer Service Tel. +1 95 55 11 Customer Service Fax +1 95 55 In North America 39 3 www.entegris.com 13 Entegris, Inc. All rights reserved Printed in USA 1-73ENT-513